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Brooks AutomationCTI-Cryogenics
On-Board Cryopumps Configuration Guide
Revision 102
On-Board CryopumpsConfiguration Guide
Brooks AutomationRevision 102
Information provided within this document is subject to change without notice, and although believed to beaccurate, Brooks Automation assumes no responsibility for any errors, omissions, or inaccuracies.
AcuLigner, AcuLine, AcuTran, AcuTrav, AeroLoader IV, AeroTrak, ARV 2000, AquaTran, Atmospheric Express,BALI 400 Indexer, BiSymmetrik, ExpressLock, FabExpress, FixLoad, FrogLeg, Gemini, Gemini Express, Gem-ini Express Tandem, Guardian Bare Reticle Stocker, Hercules, Hercules Express, InCooler, InLigner, InLineExpress, Leapfrog, Linear eXchange, MagnaTran 7, MagnaTran 70, MagnaTran 8, MagnaTran X, Marathon,Marathon Express, Marathon Express Tandem, MicroTool, MultiTran, OneFab AMHS, OpenMTS, PASIV, PF-100, PowerPak, Reliance ATR, Reliance DFR, Reliance WCR, SENTRY, TCM, Time Optimal Trajectory, Top-Cooler, TurboStocker, TurboStocker XT, Ultrasort, VacuTran, VCD, VCE, VPE, WAVE, WAVE II, Zaris, Z-Bot,Aquatrap, Conductron, Convectron, Cool Solutions, Cryodyne, Cryogem, Cryogenerator, CryoTiger, Cryo-Torr,CTI-Cryogenics, FastRegen™, GOLDLink, Granville-Phillips, GUTS, Helix, Micro-Ion, Mini-Convectron,Mini-Ion™, On-Board, Polycold, RetroEase, RetroFast, Stabil-Ion, ThinLine™, TrueBlueSM, TurboPlus, and Vac-uum AssuranceSM are trademarks of Brooks Automation Hardware.All other trademarks are properties of their respective owners.
© Brooks Automation 2005, All Rights Reserved. The information included in this manual is Brooks ProprietaryInformation and is provided for the use of Brooks customers only and cannot be used for distribution, reproduc-tion, or sale without the expressed written permission of Brooks Automation. This information may be incorpo-rated into the user’s documentation, however any changes made by the user to this information is theresponsibility of the user.
Brooks Automation15 Elizabeth DriveChelmsford, MA 01824Phone +1 (978) 262-2400Fax +1 (978) 262-2500For emergencies, contact Technical Support +1 (978) 262-2900www.brooks.com
July 12, 2006 Revision 102 8040423, Per ECO #17729; Alison Dann
This manual is available in the following formats: CD, Paper, Cleanroom.
This manual is available in the following languages: English.
This technology is subject to United States export Administration Regulations and authorized to the destinationonly; diversion contrary to U.S. law is prohibited.
Printed in the U.S.A.
On-Board Cryopumps ContentsConfiguration Guide
Brooks Automation 8040423Revision 102 i
Contents
Figures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iii
Tables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . v
System Configurations
Single On-Board or Waterpump Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
Cryo-Torr Cryopump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
Multiple Cryopump Configurations. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
Customer Site Worksheet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
Helium Flexlines
Flexline Compatibility. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2
Flexline Description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3Female Straight Coupling x Female Elbow Coupling . . . . . . . . . . . . . . . . .2-3Female Straight Coupling x Female Straight Coupling . . . . . . . . . . . . . . . .2-3
Helium Fittings
Helium Tee . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-2
Helium Cross . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-4
Helium Coupling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-5
Helium Y-Tube Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-6
Helium Elbow Assembly 90º . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-7
Contents On-Board CryopumpsConfiguration Guide
8040423 Brooks Automationii Revision 102
Helium Right Angle Adapter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-8
Cable Assemblies
On-Board Power Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-2
On-Board Panel Mount Power Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-3
Network Communication Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-4
On-Board RS-232 DB9-DB25 Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-6
9600 Remote Cable. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-7
On-Board Adapter Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-8
Installation Interface Devices
On-Board Splitter Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-2
Cryo-Torr 3-Way Power Junction Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-4
Cryo-Torr Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-5
Appendices
Appendix A: Customer Support Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2Customer Support Center Locations. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2Guaranteed Up-Time Support (GUTS®) . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2Product Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2E-mail. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2
Appendix B: Compressor Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-3
Appendix C: Rough Pump Flow Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-6
On-Board Cryopumps FiguresConfiguration Guide
Brooks Automation 8040423Revision 102 iii
Figures
Figure Title Page
1-1 Typical Single On-Board Cryopump or Waterpump Application . . . . . . .1-21-2 Typical Single Cryo-Torr Cryopump Application . . . . . . . . . . . . . . . . . . . .1-31-3 Typical Multiple On-Board Cryopump or Waterpump Application. . . . .1-41-4 Typical Multiple Cryo-Torr Cryopump Application . . . . . . . . . . . . . . . . .1-5
3-1 Examples of Helium Flexline Splitting . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-33-2 Typical Helium Cross Application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-43-3 Typical Helium Coupling Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-53-4 Typical Installation of Helium Y-Tube Assemblies . . . . . . . . . . . . . . . . . . .3-63-5 Typical Helium Elbow Assembly Installation. . . . . . . . . . . . . . . . . . . . . . . .3-73-6 Typical Helium Right Angle Adapter Installation. . . . . . . . . . . . . . . . . . . .3-8
4-1 On-Board Power Cable Diagram Example . . . . . . . . . . . . . . . . . . . . . . . . . .4-24-2 Typical On-Board Panel Mount Power Cable Installations. . . . . . . . . . . . .4-34-3 Network Communication Cable Diagram Example. . . . . . . . . . . . . . . . . . .4-44-4 On-Board Multi-Network Diagram Example . . . . . . . . . . . . . . . . . . . . . . . .4-54-5 RS-232 Cable Diagram Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-64-6 9600 Remote Cable Diagram Example. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-74-7 On-Board Adapter Cable Diagram Example . . . . . . . . . . . . . . . . . . . . . . . . .4-8
5-1 On-Board Splitter Box Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-35-2 Typical Cryo-Torr 3-Way Power Junction Box Application . . . . . . . . . . . .5-45-3 Typical Cryo-Torr Interface Application . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-5
Figures On-Board CryopumpsConfiguration Guide
8040423 Brooks Automationiv Revision 102
On-Board Cryopumps TablesConfiguration Guide
Brooks Automation 8040423Revision 102 v
Tables
Table Title Page
1-1 System Component Sales Order . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
2-1 Maximum Helium Flexline Lengths . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2
6-1 Maximum Number of Pumps per Compressor . . . . . . . . . . . . . . . . . . . . . .6-36-2 Water Cooled Compressor Input Power Specifications . . . . . . . . . . . . . . .6-46-3 Compressor Cooling Water Specifications . . . . . . . . . . . . . . . . . . . . . . . . . .6-46-4 Model 8200 Air Cooled Compressor Input Power Specifications . . . . . . .6-56-5 Rough Pump Flow Data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-6
Tables On-Board CryopumpsConfiguration Guide
8040423 Brooks Automationvi Revision 102
On-Board CryopumpsConfiguration Guide
Brooks Automation 8040423Revision 102 1-1
1 System Configurations
Overview
This section describes the single and multiple On-Board Cryopump, Waterpump,TurboPlus Vacuum Pump and Cryo-Torr Cryopump System configurations. Use thissection to determine your customer’s configuration and the components involved.Use the worksheet at the end of this section to help properly configure your cus-tomer’s sales order.
Chapter Contents
Single On-Board or Waterpump Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
Cryo-Torr Cryopump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
Multiple Cryopump Configurations. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
Customer Site Worksheet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
System Configurations On-Board CryopumpsSingle On-Board or Waterpump Configuration Configuration Guide
8040423 Brooks Automation1-2 Revision 102
Single On-Board or Waterpump Configuration
Figure 1-1: Typical Single On-Board Cryopump or Waterpump Application
POWER
HELIUM SUPPLY
On-Board
Cryopump or
HELIUM RETURN
On-Board POWER CABLE8200 Compressor
On-Board Cryopumps System ConfigurationsConfiguration Guide Cryo-Torr Cryopump
Brooks Automation 8040423Revision 102 1-3
Cryo-Torr Cryopump
A single Cryo-Torr Cryopump can be connected to a 8200 Compressor as shown inFigure 1-2.
Figure 1-2: Typical Single Cryo-Torr Cryopump Application
POWER
HELIUM SUPPLY
Cryo-Torr Cryopump
Cryo-Torr POWER CABLE8200 Compressor
HELIUM RETURN
System Configurations On-Board CryopumpsMultiple Cryopump Configurations Configuration Guide
8040423 Brooks Automation1-4 Revision 102
Multiple Cryopump Configurations
The On-Board Splitter Box permits the connection of up to three On-Board Cry-opumps or Waterpumps to one 9600 Compressor as shown in <pdf_link>Figure 1-3.The Network Terminal provides control of up to 20 pumps from a single point andprovides an On-Board System interface to the customer host computer.
Figure 1-3: Typical Multiple On-Board Cryopump or Waterpump Application
The Cryo-Torr Interface permits the connection of up to three Cryo-Torr Cryopumpsto one 9600 Compressor as shown in Figure 1-4.
SUPPLYRETURN
WATER POWER
On-Board Cryopump Power Cables
To Customer Host Computer RS-232 Cable
Network Cable Network Cable
Net
wor
k C
able
9600 Compressor
Install Terminator
Network Terminal
On-Board Cryopump
or Waterpump
On-Board Cryopump
or Waterpump
On-Board Cryopump
or Waterpump
On-Board SplitterBox
On-Board Cryopumps System ConfigurationsConfiguration Guide Multiple Cryopump Configurations
Brooks Automation 8040423Revision 102 1-5
Figure 1-4: Typical Multiple Cryo-Torr Cryopump Application
POWER
Cryo-Torr Cryopump
Cryo-Torr Cryopump
Cryo-Torr Cryopump
User Remote(From Vacuum System)
NOTE: This configuration allows the regeneration of Cryo-Torr Cryopumpsindividually or simultaneously without turning off the compressor.
Cryopump Electrical Input
9600 Remote Cable
System Configurations On-Board CryopumpsCustomer Site Worksheet Configuration Guide
8040423 Brooks Automation1-6 Revision 102
Cu
stom
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ite
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ksh
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ame:
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ompo
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iagr
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On-Board CryopumpsConfiguration Guide
Brooks Automation 8040423Revision 102 2-1
2 Helium Flexlines
Overview
This section describes the helium Flexline ordering information.
Chapter Contents
Flexline Compatibility. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2
Flexline Description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3
Helium Flexlines On-Board CryopumpsFlexline Compatibility Configuration Guide
8040423 Brooks Automation2-2 Revision 102
Flexline Compatibility
Table 2-1 provides maximum flexline lengths and diameters for various Cryopumpand Compressor configurations.
NOTE: Be sure to follow the guidelines in Table 2-1 to avoid system performance issues.
NOTE: Table 2-1 can only be used for compressor applications that do not use a heliummanifold. This table must not be used when compressors are connected to a heliummanifold. Contact CTI-CRYOGENICS engineering for proper flexline configura-tion
Table 2-1: Maximum Helium Flexline Lengths
System Configuration 1/2 inch ID Flexline Length
3/4 inch ID Flexline Length
Single: On-Board 4, On-Board 8, On-Board 250, Cryo-Torr 8 or Cryo-Torr 250 Cry-opump or On-Board Waterpump (350 refrigerator) connected to a 8200, 8510, 9600 or 9700 Compressor.
250 feet maximum
500 feet maximum
Multiple: On-Board 4, On-Board 8, On-Board 250, Cryo-Torr 8, Cryo-Torr 250 or On-Board Waterpump (350 & 1050 refrig-erator) connected to a 8510, 9600 or 9700 Compressor.
40 feet maximum
300 feet maximum
Single: On-Board 10, On-Board 400, Cryo-Torr 10, Cryo-Torr 400 On-Board Water-pump (1050 refrigerator) connected to a 8510, 9600 or 9700 Compressor.
60 feet maximum 400 feet maximum
On-Board Cryopumps Helium FlexlinesConfiguration Guide Flexline Description
Brooks Automation 8040423Revision 102 2-3
Flexline Description
The information on the following pages provide a description of the most commonlyused helium Flexlines.
Female Straight Coupling x Female Elbow Coupling
Female Straight Coupling x Female Straight Coupling
Part Number Diameter (ID) Overall Length
8043074GXXX 1/2 inchOrder from 1 to 80 feet
8043081GXXX 3/4 inch
NOTE: Lengths are available in 1 foot increments up to a maximumof 80 feet. Measurements are expressed in inches.
Example: Standard stocked lengths are: G120 = 10 ft.G240 = 20 ft.
Part Number Diameter (ID) Overall Length
8043075GXXX 1/2 inchOrder from 1 to 80 feet
8043085GXXX 3/4 inch
NOTE: Lengths are available in 1 foot increments up to a maximumof 80 feet. Measurements are expressed in inches.
Example: Standard stocked lengths are: G120 = 10 ft.G240 = 20 ft.
OV
ER
ALL
LE
NG
TH
OV
ER
ALL
LE
NG
TH
OV
ER
ALL
LE
NG
TH
Helium Flexlines On-Board CryopumpsFlexline Description Configuration Guide
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This Page Intentionally Left Blank
On-Board CryopumpsConfiguration Guide
Brooks Automation 8040423Revision 102 3-1
3 Helium Fittings
Overview
This section describes the most commonly used helium flexline fittings; tees, crosses,elbows, Y-tubes, and couplings.
Chapter Contents
Helium Tee . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-2
Helium Cross . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-4
Helium Coupling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-5
Helium Y-Tube Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-6
Helium Elbow Assembly 90º . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-7
Helium Right Angle Adapter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-8
Helium Fittings On-Board CryopumpsHelium Tee Configuration Guide
8040423 Brooks Automation3-2 Revision 102
Helium Tee
A helium tee is used to interconnect supply and return flexlines between compressorsand On-Board or Cryo-Torr Cryopumps.
Part Number A B CD
(inches)
3918059G001 Male Female Male 4 1/8
3918059G003 Male Male Male 3 3/4
3918059G009 Male Female Male 3 1/4
NOTE: Helium tee P/N 3918059G001 is used forsplitting helium flexlines at the compressor.Helium tee P/N 3918059G003 is used forsplitting helium flexlines in-line. Refer toFigure 3-1 for examples of splitting heliumflexlines with a helium tee.
NOTE: These helium tees connect to both 1/2 inchand 3/4 inch helium flexlines.
P/N 3918059G001
A
D
B
C
P/N 3918059G003
A
D
B
C
P/N 3918059G009
A
D
B
C
On-Board Cryopumps Helium FittingsConfiguration Guide Helium Tee
Brooks Automation 8040423Revision 102 3-3
Figure 3-1: Examples of Helium Flexline Splitting
NOTE: To provide equal distribution of helium, try to use approximately equal lengthhelium flexlines.
Tee P/N 3918059G001
Tee P/N 3918059G003
Splitting Helium Flexlines At The Compressor
In-Line Splitting of Helium Flexlines
Helium Fittings On-Board CryopumpsHelium Cross Configuration Guide
8040423 Brooks Automation3-4 Revision 102
Helium Cross
A helium Cross is used to interconnect supply and return flexlines between compres-sors and On-Board Cryopumps.
Figure 3-2: Typical Helium Cross Application
NOTE: To provide equal distribution of helium, try to use approximately equal lengthhelium flexlines.
Part Number A B C D
8096080G001 Male Male Male Female
8096080G002 Male Male Male Male
NOTE: This helium cross connects to both 1/2 inchand 3/4 inch helium flexlines.
A
B
C
D
8096080G002
Helium Cross
On-Board Cryopumps Helium FittingsConfiguration Guide Helium Coupling
Brooks Automation 8040423Revision 102 3-5
Helium Coupling
A helium coupling is used to interconnect helium flexlines so a longer flexline can becreated, or a flexline can be secured to a metal panel.
Figure 3-3: Typical Helium Coupling Applications
Part Number A B C
8031135 Male Male 3.06
NOTE: For bulkhead installations, amounting hole of 1.06 inches isrequired to install the heliumcoupling.
A
BNOTE: Measurements are in inches.
Coupling Application
Bulkhead Application
Metal Panel (Bulkhead)
Helium Fittings On-Board CryopumpsHelium Y-Tube Assembly Configuration Guide
8040423 Brooks Automation3-6 Revision 102
Helium Y-Tube Assembly
A helium Y-Tube Assembly is used to interconnect supply and return flexlinesbetween compressors and On-Board and Cryo-Torr Cryopumps.
NOTE: A helium Y-Tube P/N 8039814G001, and 8039805G001 and 8039805G002 areused for splitting helium flexlines in-line.
Figure 3-4: Typical Installation of Helium Y-Tube Assemblies
Part Number A B CD
(inches)
8039805G001 Male Male Male 2.97
8039805G002 Female Male Male 3.23
A B
C
D
8039814G001
D
8039805G001/G002
8039805G002 Shown
On-Board Cryopumps Helium FittingsConfiguration Guide Helium Elbow Assembly 90º
Brooks Automation 8040423Revision 102 3-7
Helium Elbow Assembly 90º
A helium elbow assembly is used to interconnect supply and return flexlines betweencompressors and On-Board and Cryo-Torr Cryopumps.
Figure 3-5: Typical Helium Elbow Assembly Installation
Part Number A B CD
(inches)
8039913G001 Female Male 4.00 4.25
A
B
D
E
Helium Fittings On-Board CryopumpsHelium Right Angle Adapter Configuration Guide
8040423 Brooks Automation3-8 Revision 102
Helium Right Angle Adapter
A helium right angle adapter is used to interconnect supply and return flexlinesbetween compressors and On-Board and Cryo-Torr Cryopumps.
Figure 3-6: Typical Helium Right Angle Adapter Installation
Part Number A B CD
(inches)
8039717G001 Female Male 2.26 2.77
A
B
C
D
On-Board CryopumpsConfiguration Guide
Brooks Automation 8040423Revision 102 4-1
4 Cable Assemblies
Overview
Cable Assemblies are used to provide power to On-Board Modules, provide networkcommunication, data communication between customer host computers and NetLinkchassis, and remote power control between compressors and customer vacuum sys-tems. Each of these cable assemblies are discussed within the section.
Chapter Contents
On-Board Power Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-2
On-Board Panel Mount Power Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-3
Network Communication Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-4
On-Board RS-232 DB9-DB25 Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-6
9600 Remote Cable. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-7
On-Board Adapter Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-8
Cable Assemblies On-Board CryopumpsOn-Board Power Cables Configuration Guide
8040423 Brooks Automation4-2 Revision 102
On-Board Power Cables
On-Board Power Cables connect between the POWER connector on a compressor, fre-quency converter, or three phase motor controller.e
Figure 4-1: On-Board Power Cable Diagram Example
Part Number Overall Length
8112463GXXX Order from 1 to 99 feet
NOTE: Lengths are available in 1 foot increments up to a max-imum of 99 feet.
Example G100 = 10 feet.
8115348GXXX Order from 100 to 200 feet
NOTE: Lengths are available in 1 foot increments from 100 feet to a maximum of 200 feet.
NOTE: All On-Board Cryopump Power Cables in this diagram are part number 8112463GXXX.
POWER
On-Board Cryopump Power Cables
9600 CompressorOn-BoardCryopump
orWaterpump
On-BoardCryopump
orWaterpump
On-BoardCryopump
orWaterpump
On-Board SplitterBox
On-Board Cryopumps Cable AssembliesConfiguration Guide On-Board Panel Mount Power Cable
Brooks Automation 8040423Revision 102 4-3
On-Board Panel Mount Power Cable
The On-Board panel mount power cable is used to interconnect cryopumps and com-pressors through a wall or other partition within a customer’s tool.
Figure 4-2: Typical On-Board Panel Mount Power Cable Installations
Part Number Overall Length
8112464GXXX Order from 1 to 99 feet
8132060GXXX Order from 1 to 99 feet
NOTE: Lengths are available in 1 foot increments up to a maximum of 99 feet.
Example G100 = 10 feet.
Panel
A A
B B
8132060GXXX 8112463GXXX
8112463GXXX 8112464GXXX
NOTE: The overall length of an On-Board Power Cable cannot exceed 100 feet.
Cable Assemblies On-Board CryopumpsNetwork Communication Cable Configuration Guide
8040423 Brooks Automation4-4 Revision 102
Network Communication Cable
Network Communication Cables are used to provide network communicationbetween On-Board Cryopumps or Waterpumps and Network Terminals.
Figure 4-3: Network Communication Cable Diagram Example
Part Number Overall Length
8115161GXXX Order from 1 to 999 feet
NOTE: NOTE: Lengths are available in one foot increments up to a maximum of 999 feet.
Example: Standard stocked lengths are: G010 = 10 ft. G020 = 20 ft.
Network Terminal
Network Communication Cable
Terminator Plug
NOTE: A terminator plug must be installed in the last On-Board Module net-work connector as shown to ensure proper data communication throughout the network.
RS-232
On-BoardCryopumps
or Waterpumps
P/N 8112545G001
RS-232
On-Board Cryopumps Cable AssembliesConfiguration Guide Network Communication Cable
Brooks Automation 8040423Revision 102 4-5
Figure 4-4: On-Board Multi-Network Diagram Example
<< <<
<< <<
<< <<
Customer Host Computer
Network Terminal P/N 8113181GXXX connected to On-Board Cryopumps.
RS-232
<< <<
<< <<
<< <<
Network Cable
ON-BOARD®
Network TerminalON-BOARD®
Network Terminal
Terminator
TOOL #2TOOL #1
Network Terminal P/N 8113181GXXX connected to On-Board Cryopumps.
Cable Assemblies On-Board CryopumpsOn-Board RS-232 DB9-DB25 Cable Configuration Guide
8040423 Brooks Automation4-6 Revision 102
On-Board RS-232 DB9-DB25 Cable
The On-Board RS-232 DB9-DB25 Cable provides data communication between theserial port (9 or 25 pin) on the customer’s Personal Computer and a CTI-Cryogenicsproduct.
Figure 4-5: RS-232 Cable Diagram Examples
Part Number PC Connector
8115174GXXX 25 pin
8039664GXXX 9 pin
NOTE: For 8115174GXXX, Lengths are available in one foot increments up to a maximum of 40 feet.
Example: G010 = 1 ft.
NOTE: For 8039664GXXX, Lengths are available in one foot increments up to a maximum of 99 feet.
Example: Standard stocked lengths are:G010 = 10 ft. G020 = 20 ft.
8115174GXXX
DB-9
DB-25
8039664GXXX
To the PC
To the On-Board Product
DB-9
DB-9
Customer Host Computer NetLink
P/N 8115096G001 connected to Network Terminals
RS-232
Customer Host Computer
Network TerminalP/N 8113181GXXX
RS-232ON-BOARD®
Network Terminal
On-Board Cryopumps Cable AssembliesConfiguration Guide 9600 Remote Cable
Brooks Automation 8040423Revision 102 4-7
9600 Remote Cable
The 9600 Remote cable connects to the remote connector on the 9600 Compressor andthe Cryo-Torr Interface as shown in Figure 4-6. The cable provides the signal to turnthe compressor ON or OFF when the customer’s vacuum system sends the appropri-ate signal.
Figure 4-6: 9600 Remote Cable Diagram Example
Part Number Overall Length
8135193GXXX9600 LV
Order from 1 to 99 feet
8135243GXXX9600 HV
Order from 1 to 99 feet
NOTE: Lengths are available in one foot increments up to a maximum of 99 feet.
Example: Standard stocked lengths are:G100 = 10 ft. G200 = 20 ft.
8135193GXXX 8135243GXXX
2 Pin 2 Pin
2 Pin 19 Pin
9600 LV 9600 HV
Connector Connector
ConnectorConnector
Cryo-TorrInterface
POWER
Cryopump Electrical Input
User Remote(from vacuum system)
9600 Remote Cable
Cryo-Torr Cryo-TorrCryo-Torr
Cable Assemblies On-Board CryopumpsOn-Board Adapter Cable Configuration Guide
8040423 Brooks Automation4-8 Revision 102
On-Board Adapter Cable
The On-Board Adapter cable provides power to a Cryo-Torr Cryopump from anOn-Board CTI-Cryogenics compressor or other On-Board device.
Figure 4-7: On-Board Adapter Cable Diagram Example
Part Number Overall Length
8112212GXXX Order from 10 to 150 feet
NOTE: Lengths are available in ten foot increments up to a maximum of 150 feet.
Example: Standard stocked lengths are:G001 = 10 ft. G002 = 20 ft.
10 Pin
3 Pin
Connector
Connector
POWER
Cryo-Torr
On-Board CryopumpsConfiguration Guide
Brooks Automation 8040423Revision 102 5-1
5 Installation Interface Devices
Overview
Section 5 provides information on three installation interface devices; the On-BoardSplitter Box, Cryo-Torr 3-Way Power Junction Box, and the Cryo-Torr Interface.These devices allow multiple respective cryopumps to be connected to a compressoras shown in Figures 5-1, 5-2, and 5-3.
Chapter Contents
Installation Interface Devices On-Board CryopumpsOn-Board Splitter Box Configuration Guide
8040423 Brooks Automation5-2 Revision 102
On-Board Splitter Box
NOTE: The 8135240G002 On-Board Splitter Box mounts to the rear of the compressor asshown in Figure 5-1. This configuration allows a customer with an 8510 Compres-sor to upgrade to a 9600 Compressor.
Part Number
8135240G001
8135240G002
8135240G0018135240G002
On-Board Cryopumps Installation Interface DevicesConfiguration Guide On-Board Splitter Box
Brooks Automation 8040423Revision 102 5-3
Figure 5-1: On-Board Splitter Box Applications
NOTE: All On-Board Cryopump Power Cables inthis diagram are P/N 8112463GXXX
POWER
9600 CompressorOn-Board Cryopump
or Waterpump
On-Board Cryopump
or Waterpump
On-Board Cryopump
or Waterpump
On-Board Splitter Box P/N 8135240G001
POWER
On-Board Power Cables
On-Board Splitter Box P/N 8135240G002
Installation Interface Devices On-Board CryopumpsCryo-Torr 3-Way Power Junction Box Configuration Guide
8040423 Brooks Automation5-4 Revision 102
Cryo-Torr 3-Way Power Junction Box
Figure 5-2: Typical Cryo-Torr 3-Way Power Junction Box Application
Part Number
8112444G002
POWER
Cryo-Torr Cryopump
Cryo-Torr Cryopump
Cryo-Torr Cryopump
NOTE: Power Cables from the junction box to the Cryopumps are P/N 8112212GXXX.
8112463GXXX
NOTE: This is not the preferred installation because the compressor must be turned OFF in orderto regenerate the Cryo-Torr Cryopumps.
On-Board Cryopumps Installation Interface DevicesConfiguration Guide Cryo-Torr Interface
Brooks Automation 8040423Revision 102 5-5
Cryo-Torr Interface
Figure 5-3: Typical Cryo-Torr Interface Application
Part Number
8135903G001
8.00(230mm)
3.38
4.93
6.88 (175mm)
4.74 (120mm)
9.01 MAX (229mm)
POWER
Cryopump Electrical Input
User Remote(from vacuum system)
9600 Remote Cable
Cryo-Torr Cryopump
Cryo-Torr Cryopump
Cryo-Torr Cryopump
Installation Interface Devices On-Board CryopumpsCryo-Torr Interface Configuration Guide
8040423 Brooks Automation5-6 Revision 102
On-Board CryopumpsConfiguration Guide
Brooks Automation 8040423Revision 102 6-1
6 Appendices
Overview
The following appendices are included to provide the user with a single location forspecific information related to the Brooks Automation Product.
Contents
Appendix A: Customer Support Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2
Appendix B: Compressor Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-3
Appendix C: Rough Pump Flow Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-6
Appendices On-Board CryopumpsAppendix A: Customer Support Information Configuration Guide
8040423 Brooks Automation6-2 Revision 102
Appendix A: Customer Support Information
Customer Support Center Locations
To locate a Customer Support Center near you, please visit our websitewww.brooks.com on the world wide web and select CONTACT on the home page.
Guaranteed Up-Time Support (GUTS®)
For 24-hour, 7-day per week Guaranteed Up-Time Support (GUTS) dial:
1 800-367-4887 - Inside the United States of America
+1 508-337-5599 - Outside the United States of America
Product Information
Please have the following information available when calling so that we may assistyou:
• Product Part Number
• Product Serial Number
• Product Application
• Specific Problem Area
• Hours of Operation
• Equipment Type
• Vacuum System Brand/Model/Date of Manufacture
For your convenience, you may also e-mail us at:
On-Board Cryopumps AppendicesConfiguration Guide Appendix B: Compressor Specifications
Brooks Automation 8040423Revision 102 6-3
Appendix B: Compressor Specifications
Table 6-1: Maximum Number of Pumps per Compressor
# of Pumps Pump Configuration Compressor
One On-Board 4, On-Board 8, Cryo-Torr 8 Cryopump, On-Board Waterpump/TurboPlus Vacuum Pump (350 refrigerator)
8200
One On-Board Waterpump (1050 refrigerator) 8200 (3 phase only)
One On-Board 10, On-Board 400, Cryo-Torr 10, Cryo-Torr 400 Cryopump
8510
One On-Board 10, On-Board 400, Cryo-Torr 10, Cryo-Torr 400 Cryopumps
9600
One* On-Board 400, Cryo-Torr 400 9700
Two On-Board 250, Cryo-Torr 250 Cryopumps 9600
Two On-Board Waterpumps , TurboPlus Vacuum Pumps (350 refrigerator)
8200 (3 phase only)
Two On-Board 4, On-Board 8, On-Board 250, Cryo-Torr 8, Cryo-Torr 250 Cryoumps, On-Board Waterpumps (1050 refrigerator)
8510
Two On-Board 10, Cryo-Torr 10, or one On-Board 10 and one On-Board 8 Cryopump.
9700
Three On-Board Waterpumps or TurboPlus Vacuum Pumps (350 refrigerator)
8510
Three On-Board 4, On-Board 8, Cryo-Torr 8 Cryopumps, On-Board Waterpump (350 or 1050 refrigerator)
9600
Three On-Board In-Situ 1050 Waterpumps or one On-Board 10 and two On-Board 4 Cryopumps (350 refrigerator)
9700
Six On-Board LowProfile Waterpumps, One On-Board InSitu Waterpumps, or TurboPlus Vacuum Pumps (350 refrigerator)
9700
NOTE: All multi-pump configurations require selection of appropriate interconnectiondevices.
* For Implanter Applications Only.
Appendices On-Board CryopumpsAppendix B: Compressor Specifications Configuration Guide
8040423 Brooks Automation6-4 Revision 102
Table 6-2: Water Cooled Compressor Input Power Specifications
P/N CompressorModel
Voltage(VAC)
Frequency(Hz) Phase Power
(KW)
Customer Circuit Breaker (amps)
8032550G001 8200 180-250 50/60 3 2.0 15
8032550G002 8200 180-250 50/60 1 2.0 15
8031315 8510 198-250 190-230
60 50 3 5.75 30
8031400G002 8510 395-506 342-457
6050 3 5.75 20
8135900G001 9600 180-253 50/60 3 5.5 30
8135901G001 9600 342-506 342-457 60/50 3 5.5 30
8135910G001 9700 200-230 200-230
6050 3 5.5 30
Table 6-3: Compressor Cooling Water Specifications
P/N Compressor Model
Temperature Max/Min ºF
Flow Rate GPM @ 70º F
Pressure Drop PSID
8032550G001 8200 100/40 0.5 2.5
8032550G002 8200 100/40 0.5 2.5
8031315 8510 100/40 2.5 14
8031400G002 8510 100/40 2.5 14
8135900G001 9600 90/50 (inlet) 2.75 6.5
8135910G001 9700 90/50 (Inlet) 3.0 See 9700 Manual
NOTE: Flowing cooling water colder than 50º F through a non-running compressorcan cause start-up problems.
On-Board Cryopumps AppendicesConfiguration Guide Appendix B: Compressor Specifications
Brooks Automation 8040423Revision 102 6-5
Table 6-4: Model 8200 Air Cooled Compressor Input Power Specifications
P/N Voltage (VAC)
Frequency (Hz) Phase Power
(KW)
Customer Circuit Breaker (amps)
Room Temp. Max/
Min ºF
8032549G001 180-250 50/60 3 2.0 15 100/50
8032549G002 180-250 50/60 1 2.0 15 100/50
Appendices On-Board CryopumpsAppendix C: Rough Pump Flow Specifications Configuration Guide
8040423 Brooks Automation6-6 Revision 102
Appendix C: Rough Pump Flow Specifications
Table B-1 provides the minimum rough pump cubic feet per minute (cfm) ratingrequired for performing FastRegen cycles on On-Board Cryopumps.
NOTE: If the vacuum conductance is unknown, select the next largest rough pumpingspeed. Regeneration cycle (Fast and Full) time is minimized with a larger roughpump.
Table 6-5: Rough Pump Flow Data
On-Board Cryopump
Minimum Rough Pump Flow (cfm)
On-Board 4 10
On-Board 8, 8F 10
On-Board 250 17 - 20
On-Board 10, 10F 17 - 20
On-Board 400 35 - 50