applied materials mirra 3400 chemical mechanical polishing ......polisher hclu 425 30 th street...

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425 30 th Street Suite 26 ~ ~ Newport Beach, CA 92663 USA ~ Office: +1 949.396.1395 Applied Materials Mirra 3400 Chemical Mechanical Polishing (CMP), 6" $VVHW ,' 38536 &RQILJXUDWLRQ 'HWDLOV Applied Materials Mirra 3400 Chemical Mechanical Polishing (CMP), 6" - DIWO (Dry-in wet-out) - Silicon Oxide, Polyimide, a-Si - 208 V, 200 A, 45 kVA, Standby 6,5 kVA 1996 Vintage 6HH 3KRWRV RQ )ROORZLQJ 3DJHV 7R RXU NQRZOHGJH WKH LQIRUPDWLRQ FRQWDLQHG LQ WKLV GDWD VKHHW LV DFFXUDWH EXW LW PD\ FRQWDLQ HUURUV DQG ZH GR QRW ZDUUDQW WKH FRPSOHWHQHVV RU DFFXUDF\ RI WKLV GDWD ,QWHUHVWHG SDUWLHV PD\ FRQWDFW %ULGJH 7URQLF *OREDO IRU DGGLWLRQDO LQIRUPDWLRQ DW RU VDOHV#EULGJHWURQLFFRP 9LVLW RXU ZHEVLWH DW ZZZEULGJHWURQLFFRP

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Page 1: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

Applied Materials Mirra 3400 Chemical Mechanical Polishing (CMP), 6"

38536

Applied Materials Mirra 3400 Chemical Mechanical Polishing (CMP), 6"- DIWO (Dry-in wet-out)- Silicon Oxide, Polyimide, a-Si- 208 V, 200 A, 45 kVA, Standby 6,5 kVA1996 Vintage

Page 2: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

Polisher Work Station

Page 3: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

Page 4: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

Polisher Robot Fabs Module

Page 5: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

Polisher

Page 6: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

Polisher Cover

Page 7: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

Polisher Spindel Head 1 and 2

Page 8: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

Polisher pl1 - Slurry Check

Page 9: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

Polisher / Head Over pl3

Page 10: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

Polisher HCLU

Page 11: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

Two heads Titan II included

Page 12: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

E-Rack

Page 13: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

E-Rack MEI Boards

Page 14: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

Polisher Intern Facility

Page 15: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395