applications of slms for advanced optical instrumentation ... · spectral domain application -...

Frederic Zamkotsian SLM technologies and applications, EPFL, Lausanne, 27 October 2017

Frederic Zamkotsian

Laboratoire d’Astrophysique de Marseille, France

Applications of SLMs for advanced optical instrumentation in space


The Universe


�MOEMS devices designed/operating at cryo temperature + vacuum� Space instruments� Ground-based IR instruments

Future needs


�Instrumental needs using micro-opto-electro-mechanical systems (MOEMS)

�Wavefront control- Deformable mirrors

�Object selection- Programmable slits

�Spectral domain application- Programmable gratings

Phase

Intensity

Wavelength

stagestage

Instrumental needs


�Most popular MOEMS devices available�Micro-mirrors

�2048x1080 individually tiltable�13.68µm pixel pitch, �Tilt angle of 12°

� Numerous applications �Prime use displaying images �No customization possible

�Space qualification tests (ESA contract)� -40°C in 10-5 mbar vacuum�Micro-mirrors in position for > 1500s�DMD fully operational�1038 hours life test, radiations, vibrations �No show -stopper for space application

Texas Instruments DMD

Zamkotsian et al., SPIE 6884, 2008


�PTT 111 DM� 111 actuators, 37 piston-tip-tilt segments� Segment pitch 606µm (segment size 700µm)� Stroke 5 to 7 µm; Tilt angle ±4 or ±5.6 mrad � Optical coating: protected silver, gold, protected alu, dielectric

Micro Déformable Mirror 2


PTT111 integration


Improved Best Flat 293K

• Best flat

10nm RMS

79nm PtV

Zamkotsian et al.,

Micromachines , 8, 233; 2017

doi:10.3390/mi8080233


• Best flat

86nm RMS

501nm PtV

PTT111 down to 160K

Zamkotsian et al.,


doi:10.3390/mi8080233


PTT111 down to 160K

Tilt Piston


Cryo Best Flat 160K

• Best flat

12nm RMS

113nm PtV

Zamkotsian et al.,


doi:10.3390/mi8080233


MOEMS developments for cryo

�LAM-IMT Micro-mirrors(Europe)

�NASA-GSFC Micro-shutters(USA)

Selected for JWST NIRSpec


MIRA: the requirements

�LAM – EPFL micromirror array development: MIRA project

�Requirements� Mirror size of 100 x 200 µm2

� Individual addressing of the micromirrors� High contrast of at least 1000:1 � 20° mechanical tilt angle

� Uniform tilt angle over the whole array� Fill factor of more than 90% (if possible >95% in one direction� Wavelength range from visible to infrared

� Optically flat mirrors in operation < λ/20 with λ = 1 µm � Cryogenic operating temperature (<100K, 30K goal)


Landing pad

Spacer

Electrode

Suspended beam

Stopper beam

Landing beam

Frame

Mirror

MIRA: concept


MIRA: the realization

�Three SOI wafer process

�Two wafer-level bonding steps

Waldis et al., SPIE 6887, 2008

Canonica et al., JMM, 2013



2048 mirrors

(64 x 32)


MIRA: cryogenic test

� Specific cryo chamber developped, compatible with our interferometric bench

� Vacuum 10-6 mbar

� Cryogenic temperatures


300K

0 V

300K

130V

162K

130V

162K

148V

MIRA: cryogenic test


Surface quality measurement in the ON position

293 K135 V9.8 nm PtV

0 20 40 60 80

0

10

20

30-10

0

10

20

162 K148 V27.2 nm PtV

0 20 40 60 80

0

10

20

30-10

0

10

20

0 20 40 60 80

0

10

20

30-10

0

10

20

293 K135 V9.9 nm PtV

Cryogenic test: mirror surface


� Device with lines tilting only

� 200µm object projected on the 100 x 200 µm2

0 50 100 150

0

20

40

60

80

1

2

3

4

x 104

Object tailoring


0 50 100 150

0

20

40

60

80

0.5

1

1.5

2

x 104

� PSF slicing

Object tailoring


0 50 100 150

0

20

40

60

80 0

0.5

1

1.5

2

x 104

� PSF slicing

Object tailoring


� Contrast measurement integrated over the micromirror surface

� Contrast value: 1000:1

0 50 100 150

0

20

40

60

80

0.5

1

1.5

2

x 104

Object tailoring


Micro-mirrors

Interposer

Electronics

Applications: Universe and Earth Observation, Physi cs, Biology

Funding

MIRA 4 project[ MIRA + hardened electronics ] : buttable arrays i n FOV

Frederic Zamkotsian OST, LAM, 30 May 2017

MOEMS characterization platform

�Operational bench (completed 2002)� MOEMS components operational performances measurement (tilting micromirrors,

programmable diffraction gratings, …)� Modular bench: multi-sources, multi-detectors and adjustable pupil

�Interferometric bench (completed 2004)� Surface quality, deformation static and dynamical measurement� Small and large FOV with sub-nanometer resolution (z-direction)

�Cryogenic bench (completed 2013)� Performances measurement under vacuum and at cryo. temp. (30K - ambient)


MOEMS characterization platform

Tests on multiple devices : TI, EPFL, NASA, LAAS, MEMSCAP, OKO, ALPAO, BMC, CSEM ...in cryo: MIRA project (with EPFL), TI-DMD for EUCLID, PTT111 from Iris-AO


�Instrument developments using MOEMS: the BATMAN family

�Multi-Object Spectrograph- BATMAN- ROBIN- BATMAN flies

�Programmable wide field spectrograph- Flight model design- Full scale breadboard

UniverseObservation

EarthObservation

Instrument developments


The Universe


EUCLID-NIS: the DMD option


Hub

ble

ultr

a de

ep fi

eld

(HU

DF

),

NA

SA

, 3/

9/20

04

Reflective surface

Telescope(ground or space)

Spectrometer

CCD Camera

Measured spectraTelescope’s field of view�� Thousands of galaxies

Overlapping Spectra

Multi-Object Spectroscopy (MOS)


2D Micromirror array in the telescope focal plane

Telescope(ground or space)

CCD Camera

Spectrometer

Measured spectraTelescope’s field of view�� Thousands of galaxies

Hub

ble

ultr

a de

ep fi

eld

(HU

DF

),

NA

SA

, 3/

9/20

04

Multi-Object Spectroscopy (MOS)


�Universe Observation: Multi-Object Spectrograph + Imager

MOEMS-based Spectro-Imager

Measured spectra

Field of view

TNG Micro-mirror array in the

telescope focal plane

CCD camera

Spectrograph arm

Imaging arm


BATMAN

Spectro-Imager on Galileo telescope (3,6m )



BATMAN


BATMAN

On-sky by end 2018


ROBIN


Imagery

Pixels Camera

Pix

els

Cam

era

750 800 850

1440

1460

1480

1500

1520

1540

1560

1580

1600

1620

Pixels Camera

Pix

els

Cam

era

900 950 1000

1020

1040

1060

1080

1100

1120

1140

1160

1180

Pixels Camera

Pix

els

Cam

era

2000 2050 2100

2660

2680

2700

2720

2740

2760

2780

2800

2820

Pixels Camera

Pix

els

Ca

mer

a

1200 1250 1300

1100

1120

1140

1160

1180

1200

1220

1240

1260

1280

Pixels Camera

Pix

els

Cam

era

850 900 950

1520

1540

1560

1580

1600

1620

1640

1660

1680

Pixels Camera

Pix

els

Ca

me

ra

1000 1050 1100

1340

1360

1380

1400

1420

1440

1460

1480

1500

z00 pattern2 z09 pattern2 z20 pattern1

z25 pattern1 z40 pattern1 z49 pattern2


Slits

Pixels Camera

Pix

els

Cam

era

850 900 950

1420

1440

1460

1480

1500

1520

1540

1560

1580

Pixels Camera

Pix

els

Ca

me

ra

1420 1440 1460 1480 1500 1520 1540

1400

1420

1440

1460

1480

1500

1520

1540

1560

1580

Pixels Camera

Pix

els

Cam

era

1050 1100 1150

1400

1420

1440

1460

1480

1500

1520

1540

1560

1580

Pixels Camera

Pix

els

Ca

me

ra

850 900 950

1420

1440

1460

1480

1500

1520

1540

1560

1580

Pixels Camera

Pix

els

Cam

era

1420 1440 1460 1480 1500 1520 1540

1420

1440

1460

1480

1500

1520

1540

1560

1580

Pixels Camera

Pix

els

Cam

era

1050 1100 1150

1420

1440

1460

1480

1500

1520

1540

1560

1580


Pixels Camera

Pix

els

Cam

era

100 200 300 400 500 600 700

50

100

150

200

250

300

350

400

450

500

550

Pixels Camera

Pix

els

Ca

me

ra

330 340 350 360 370 380

280

285

290

295

300

305

310

315

Spectra

Slit: 1 µM (13.68 µm)Spectrum on 1.5 detector pixel (8,3µm) in 450-650nm wavelength range

Zamkotsian et al.,

SPIE 9147, 2014


Wide field programmable spectrograph

PE

Réseau 1dispersion chormatique

Réseau 2recombinaison chormatique

Optique de focalisation

Optique de collimation

Telescope Afocal

MOEMS

Fente

PS

Monodétecteur

Traitement du signal

PE

Grating 1

Grating 2

Focusing optics

Collimating optics

Afocal telescope

MOEMS

1D field

PS

1D field

FOV

Spectral dispersion

DMD



� Optical and opto-mechanical design

Demonstrator

MR-A

MR-B

Plan focal

Fente entrée

MEMS=DMD

M2-A réseau

M2-B réseau

M1-B

M3-B

M3-A

M1-A


Demonstrator


OLED DMD

spatialdirection

spectraldirection

� Images at DMD surface, spatial / spectral behaviour� OLED: white slit at 45°� DMD: order 1, order 0, order -1

Demonstrator: in the DMD plane


� End-to-end measurement� Input: OLED scanning slit, width 1 pixel� DMD: 0-order removed� Output: recombined slit

Input

OLED pixels

OLE

D p

ixel

s

600 700 800 900 1000

600

650

700

750

800

850

900

950

Demonstrator


Output

Pixels Camera

Pix

els

Cam

era

100 200 300 400 500 600 700

100

200

300

400

500

DMD micromirrors

DM

D m

icro

mirr

ors

500 1000 1500 2000

200

400

600

800

1000

� End-to-end measurement� Input: OLED scanning slit, width 1 pixel� DMD: 0-order removed� Output: recombined slit

Demonstrator


Pixels Camera

Pix

els

Cam

era

100 200 300 400 500 600 700

100

200

300

400

500

DMD micromirrors

DM

D m

icro

mirr

ors

500 1000 1500 2000

200

400

600

800

1000

Output

� End-to-end measurement� Input: OLED scanning slit, width 1 pixel� DMD: 0-order + object removed� Output: recombined slit

Demonstrator


Pixels Camera

Pix

els

Cam

era

100 200 300 400 500 600 700

100

200

300

400

500

DMD micromirrors

DM

D m

icro

mirr

ors

500 1000 1500 2000

200

400

600

800

1000

Output

� End-to-end measurement� Input: OLED scanning slit, width 1 pixel� DMD: 0-order + object + blue removed� Output: recombined slit

Demonstrator


Laboratoire d’Astrophysique de Marseille, FranceArnaud Liotard,Patrick Lanzoni Harald RamarijaonaEmmanuel GrassiRudy BaretteChristophe FabronWilliam Bon

EPFL, SwitzerlandSeverin WaldisMichael CanonicaWilfried Noell

CSEM, SwitzerlandSebastien Lani

Thales Alenia Space, FranceThierry ViardArnaud Liotard

CNES, FranceVincent CostesPhilippe-Jean Hebert

BATMAN team, France-ItalyManuele Moschetti, Paolo Spano, Marco Riva, Emilio Molinari, Rosario Cosentino, Adriano Ghedina, L. Nicastro, M. Gonzalez, P. Di Marcantonio, I. Cor etti, R. Cirami, Filippo Zerbi, Luca Valenziano


� Large micro-mirror array with large tilt angle, excellent surface quality, high contrast and operation at cryo temperature are requested for spectro-imagery applications in space

� MIRA project is under way for the realization of large arrays dedicated to spectroscopy (next step: integration with hardened electronics)

� Spectro-imager for Universe Observation� Programmable spectrograph for Earth Observation

SLM for space

[email protected]

applications of slms for advanced optical instrumentation ... · spectral domain application -...

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