application of piezomaterials in ultrasonic motors and ...€¦ · application of piezomaterials in...
TRANSCRIPT
![Page 1: Application of piezomaterials in ultrasonic motors and ...€¦ · Application of piezomaterials in ultrasonic motors and ... • Ultrasonic levitation, ... - negligible magnetic](https://reader031.vdocuments.site/reader031/viewer/2022011801/5ae11f457f8b9afd1a8ed311/html5/thumbnails/1.jpg)
Application of piezomaterials in ultrasonic motors and
nanopositioning Valentinas Snitka
Research Center for Microsystems&NanotechnologyKaunas University of Technology,
LITHUANIA
http://www.microsys.ktu.lt
1st International Workshop on Smart Materials and Structures, Kiel, 2004
![Page 2: Application of piezomaterials in ultrasonic motors and ...€¦ · Application of piezomaterials in ultrasonic motors and ... • Ultrasonic levitation, ... - negligible magnetic](https://reader031.vdocuments.site/reader031/viewer/2022011801/5ae11f457f8b9afd1a8ed311/html5/thumbnails/2.jpg)
OUTLINE• Introduction• Travelling wave motors• Standing wave ultrasonic motors• Nanopositioning with SWUM• SAW ultrasonic motors• Ultrasonic levitation, ultrasonic bearings• Flexure nanopositioning• Multilayer piezoactuators• Future applications
![Page 3: Application of piezomaterials in ultrasonic motors and ...€¦ · Application of piezomaterials in ultrasonic motors and ... • Ultrasonic levitation, ... - negligible magnetic](https://reader031.vdocuments.site/reader031/viewer/2022011801/5ae11f457f8b9afd1a8ed311/html5/thumbnails/3.jpg)
Many different actuator technologies are used for linear motion
• Piezoactuators – decades from infancy to industry• Advantages:
smaller componenthigher resolutionhigh acting force
Problems: control, feedback
Obstacle for implementation: price/pcs, mass production, low voltage piezoceramic
![Page 4: Application of piezomaterials in ultrasonic motors and ...€¦ · Application of piezomaterials in ultrasonic motors and ... • Ultrasonic levitation, ... - negligible magnetic](https://reader031.vdocuments.site/reader031/viewer/2022011801/5ae11f457f8b9afd1a8ed311/html5/thumbnails/4.jpg)
Inchworm motors
Inchworm motor schematic. 1,2,3 – piezoceramic elements.1- clamping, 2 – extraction, 3 – clamping, 2- retraction
Principle of work : stepping motion based on piezoactuatorsextraction- retraction. Resolution – subnanometer, vacuum compatible Disadvantage –slow
![Page 5: Application of piezomaterials in ultrasonic motors and ...€¦ · Application of piezomaterials in ultrasonic motors and ... • Ultrasonic levitation, ... - negligible magnetic](https://reader031.vdocuments.site/reader031/viewer/2022011801/5ae11f457f8b9afd1a8ed311/html5/thumbnails/5.jpg)
Travelling wave motorsInvented before 1980 at “Vibrotechnika”Kaunas University, Lithuaniaand in Japan 1982
a)
b)
Elliptical motion generated at the rotor surface and teeth tips of travelling wave.a - schematic, b - design.
![Page 6: Application of piezomaterials in ultrasonic motors and ...€¦ · Application of piezomaterials in ultrasonic motors and ... • Ultrasonic levitation, ... - negligible magnetic](https://reader031.vdocuments.site/reader031/viewer/2022011801/5ae11f457f8b9afd1a8ed311/html5/thumbnails/6.jpg)
How does it work?
![Page 7: Application of piezomaterials in ultrasonic motors and ...€¦ · Application of piezomaterials in ultrasonic motors and ... • Ultrasonic levitation, ... - negligible magnetic](https://reader031.vdocuments.site/reader031/viewer/2022011801/5ae11f457f8b9afd1a8ed311/html5/thumbnails/7.jpg)
Travelling wave motors
Principle of cylindrical mode motor:4 segments of piezoceramics exiting with phase shift
![Page 8: Application of piezomaterials in ultrasonic motors and ...€¦ · Application of piezomaterials in ultrasonic motors and ... • Ultrasonic levitation, ... - negligible magnetic](https://reader031.vdocuments.site/reader031/viewer/2022011801/5ae11f457f8b9afd1a8ed311/html5/thumbnails/8.jpg)
Transportable object: slider, microparticles
Surface Acoustic Wave MotorsInvented in “Vibrotechnika” Kaunas University, Lithuania,Snitka (SU patent 1985)Tomikawa, Japan, 1991
SAW amplitude-10 nm
![Page 9: Application of piezomaterials in ultrasonic motors and ...€¦ · Application of piezomaterials in ultrasonic motors and ... • Ultrasonic levitation, ... - negligible magnetic](https://reader031.vdocuments.site/reader031/viewer/2022011801/5ae11f457f8b9afd1a8ed311/html5/thumbnails/9.jpg)
Surface Acoustic Wave Motors
Nanometers resolution, 0.6 m/s speed
Piezoelectric filmon substrate
![Page 10: Application of piezomaterials in ultrasonic motors and ...€¦ · Application of piezomaterials in ultrasonic motors and ... • Ultrasonic levitation, ... - negligible magnetic](https://reader031.vdocuments.site/reader031/viewer/2022011801/5ae11f457f8b9afd1a8ed311/html5/thumbnails/10.jpg)
Near Field Acoustic Levitation
Driving force – throughsqueezed gas film
Schematic
Configuration set-up
Configuration of transportation system
![Page 11: Application of piezomaterials in ultrasonic motors and ...€¦ · Application of piezomaterials in ultrasonic motors and ... • Ultrasonic levitation, ... - negligible magnetic](https://reader031.vdocuments.site/reader031/viewer/2022011801/5ae11f457f8b9afd1a8ed311/html5/thumbnails/11.jpg)
![Page 12: Application of piezomaterials in ultrasonic motors and ...€¦ · Application of piezomaterials in ultrasonic motors and ... • Ultrasonic levitation, ... - negligible magnetic](https://reader031.vdocuments.site/reader031/viewer/2022011801/5ae11f457f8b9afd1a8ed311/html5/thumbnails/12.jpg)
![Page 13: Application of piezomaterials in ultrasonic motors and ...€¦ · Application of piezomaterials in ultrasonic motors and ... • Ultrasonic levitation, ... - negligible magnetic](https://reader031.vdocuments.site/reader031/viewer/2022011801/5ae11f457f8b9afd1a8ed311/html5/thumbnails/13.jpg)
Standing wave ultrasonic motors
Bimodal vibration plate
Micro-push motors with rectangular plate
Micro-push motor with annular plate
Invented in Vibrotechnika Institute, KTU, Lithuania0 1973
![Page 14: Application of piezomaterials in ultrasonic motors and ...€¦ · Application of piezomaterials in ultrasonic motors and ... • Ultrasonic levitation, ... - negligible magnetic](https://reader031.vdocuments.site/reader031/viewer/2022011801/5ae11f457f8b9afd1a8ed311/html5/thumbnails/14.jpg)
1-Input driving pulse, Nano-steps displacement2-Output micro-step response Resolution - 10 nm
Linear nanopositioning
Start-stop reversible motion
Vmax = 90 mm/sec during 0.7 sec
![Page 15: Application of piezomaterials in ultrasonic motors and ...€¦ · Application of piezomaterials in ultrasonic motors and ... • Ultrasonic levitation, ... - negligible magnetic](https://reader031.vdocuments.site/reader031/viewer/2022011801/5ae11f457f8b9afd1a8ed311/html5/thumbnails/15.jpg)
![Page 16: Application of piezomaterials in ultrasonic motors and ...€¦ · Application of piezomaterials in ultrasonic motors and ... • Ultrasonic levitation, ... - negligible magnetic](https://reader031.vdocuments.site/reader031/viewer/2022011801/5ae11f457f8b9afd1a8ed311/html5/thumbnails/16.jpg)
![Page 17: Application of piezomaterials in ultrasonic motors and ...€¦ · Application of piezomaterials in ultrasonic motors and ... • Ultrasonic levitation, ... - negligible magnetic](https://reader031.vdocuments.site/reader031/viewer/2022011801/5ae11f457f8b9afd1a8ed311/html5/thumbnails/17.jpg)
![Page 18: Application of piezomaterials in ultrasonic motors and ...€¦ · Application of piezomaterials in ultrasonic motors and ... • Ultrasonic levitation, ... - negligible magnetic](https://reader031.vdocuments.site/reader031/viewer/2022011801/5ae11f457f8b9afd1a8ed311/html5/thumbnails/18.jpg)
![Page 19: Application of piezomaterials in ultrasonic motors and ...€¦ · Application of piezomaterials in ultrasonic motors and ... • Ultrasonic levitation, ... - negligible magnetic](https://reader031.vdocuments.site/reader031/viewer/2022011801/5ae11f457f8b9afd1a8ed311/html5/thumbnails/19.jpg)
Flexure X-Y nanopositioning stages
Ferroelectrics multi-layer stack
- Subnanometer resolution- Nanometer ‘accuracy
![Page 20: Application of piezomaterials in ultrasonic motors and ...€¦ · Application of piezomaterials in ultrasonic motors and ... • Ultrasonic levitation, ... - negligible magnetic](https://reader031.vdocuments.site/reader031/viewer/2022011801/5ae11f457f8b9afd1a8ed311/html5/thumbnails/20.jpg)
X-Y stage for Bio-AFM
![Page 21: Application of piezomaterials in ultrasonic motors and ...€¦ · Application of piezomaterials in ultrasonic motors and ... • Ultrasonic levitation, ... - negligible magnetic](https://reader031.vdocuments.site/reader031/viewer/2022011801/5ae11f457f8b9afd1a8ed311/html5/thumbnails/21.jpg)
Near Field Scanning Optical Microscope
![Page 22: Application of piezomaterials in ultrasonic motors and ...€¦ · Application of piezomaterials in ultrasonic motors and ... • Ultrasonic levitation, ... - negligible magnetic](https://reader031.vdocuments.site/reader031/viewer/2022011801/5ae11f457f8b9afd1a8ed311/html5/thumbnails/22.jpg)
Ultrasonic and piezomotor are the next generation motors especially in small size applications
Main advantages:
- high torque-weight ratio- silent operation- direct drive- self-breaking- low-inertia- maximum efficiency at high torque- negligible magnetic field
Future applications:
- automobile industry- robotics- microelectronics- MEMS technology- space missions- magnetic resonance imaging- nanopositioning- consumer goods.
![Page 23: Application of piezomaterials in ultrasonic motors and ...€¦ · Application of piezomaterials in ultrasonic motors and ... • Ultrasonic levitation, ... - negligible magnetic](https://reader031.vdocuments.site/reader031/viewer/2022011801/5ae11f457f8b9afd1a8ed311/html5/thumbnails/23.jpg)
Externalelectrodes
Internalelectrodes
Piezoceramic
Co-fired multilayer technology
Multilayer-based components enable a wide range of shapes to be produced
Provide the flexibility needed to design high-precision components
Low control voltage
![Page 24: Application of piezomaterials in ultrasonic motors and ...€¦ · Application of piezomaterials in ultrasonic motors and ... • Ultrasonic levitation, ... - negligible magnetic](https://reader031.vdocuments.site/reader031/viewer/2022011801/5ae11f457f8b9afd1a8ed311/html5/thumbnails/24.jpg)
Conclusions
Mass-production, simple and flexible manufacturing of new generation ferroelectrics film is a key for many Micro-Nano technology and products developments
![Page 25: Application of piezomaterials in ultrasonic motors and ...€¦ · Application of piezomaterials in ultrasonic motors and ... • Ultrasonic levitation, ... - negligible magnetic](https://reader031.vdocuments.site/reader031/viewer/2022011801/5ae11f457f8b9afd1a8ed311/html5/thumbnails/25.jpg)
THANK YOU !
![Page 26: Application of piezomaterials in ultrasonic motors and ...€¦ · Application of piezomaterials in ultrasonic motors and ... • Ultrasonic levitation, ... - negligible magnetic](https://reader031.vdocuments.site/reader031/viewer/2022011801/5ae11f457f8b9afd1a8ed311/html5/thumbnails/26.jpg)