and optical competence axiotron 2 high...

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Axiotron 2Technical Data

Axiotron 2Inspection Microscope

M i c r o e l e c t r o n i c S y s t e m s f r o m C a r l Z e i s s

High Performance ...

The demands on microscopy in the semiconductor

industry are great. Operators need tools that are not

only reliable, easy to handle and ergonomically

designed, but which also offer diversity of

configuration and outstanding performance. The

Zeiss Axiotron 2 gives you all of this, and much more.

Reliability, comfort and reduced

contamination

The base of Axiotron 2 is a sturdy metal stand with

high quality mechanical components for focus, stage

movement and turrets for objectives and contrasting

methods. The microscope is designed for fatigue free

operation. It is possible to adapt the height of the

binocular phototube to the requirements of different

operators. The inclination of the tube can be varied

between 5° and 30°. The handling of the Axiotron 2

is facilitated by easy access to important functions

using keys on a panel. This keyboard can be positioned

as required on the desk.

If the optional autofocus device is added, a fully

automatic, heavy duty inspection microscope results.

Than the electronic system sets the magnifications

and inspection methods automatically , as well as

the programmed focusing of each. The laser diode

autofocus instantly compensates for any irregularities,

even if the distance from the objective is extremely

short and during rapid stage movements. Not only

do you benefit from more operating convenience,

but you get the best protection for your costly wafers

as well.

... and Optical Competence

The Axiotron 2 offers brilliant images at your fingertips.

Using the control panel, you can conveniently choose

one of five objectives. With their optimum contrast

and maximum resolution, the Zeiss Epiplan Neofluar

series are the truly first class. These outstanding

objectives can be combined with long-working-

distance Epiplan objectives or the unsurpassed top

of the line Epi-Planapochromats. All objectives use the

ICS principle (Infinity Color-corrected System). i

The 10x wide angle eyepieces, with a field of view

of up to 25 mm, are your guarantee of maximum

resolution. An Optovar intermediate tube 1x -1.25x-

1.6x-2x allows the further magnification of small

details.

The objectives are not only available for bright field

observation. Darkfield (to check for example impurities)

and differential interference contrast (for checking

surfaces and layers) are standard for the usual objective

types including long distance versions.

The excellent ICS objectivesfrom Carl Zeiss

Ease of use and reliabilityfor semiconductor microscopy

Your local support center:Worldwide headquarters:

Carl ZeissMicroelectronic Systems GmbHD-07740 JenaPhone: +49-(0)3641/64-2563Telefax: +49-(0)3641/64-2938E-mail: [email protected]

www.zeiss.de/semiconductor

For further details, please contact:

We reserve the right of product and design changes and improvements. 41-009 e/03.02

Brightfield image Image in differential interference contrast (DIC)

The ergonomical binocularphototube 25 with inclinableeyepieces

Recommended Application Working DistanceObjectives in mm

Epiplan-Neofluar

1.25x/0.035 H 3.92.5x/0.075 H, HD 8.6, 3.05x/0.15 H, HD, HD DIC 13.7, 5.5, 5.510x/0.30 H, HD, HD DIC 5.7, 3.5, 3.520x/0.50 H, HD, HD DIC 2.1, 1.7, 1.750x/0.80 H, HD, HD DIC 0.54, 0.57, 0.57100x/0.90 H, HD, HD DIC 0.32, 0.27, 0.27

Epiplan-Apochromat

50x/0.90 HD DIC 0.47100x/0.95 HD DIC 0.25

120x/0.95 AF H DIC 0.23150x/0.95 H DIC 0.25150x/1.25 W H 0.30

Epiplan LD

10x/0.25 H DIC, HD DIC 12.6, 12.520x/0.40 H, HD DIC 9.8, 8.050x/0.50 H, HD DIC 6.9, 6.5100x/0.75 HD DIC 3.0

Objective "Epi-Ultrafluar"

120x/0.95 AF for 365 nm (UV)(only for Axiotron 2 CSM uv-vis)

Real Time Confocal UV

Upgrading the Axiotron 2 with the CSM vis-uv tube

allows observation in the real time confocal mode

with visual or ultraviolet light (365 nm). A special

feature of this system is extreme extension of the

depth of focus (EDOF) by combination with an optical

element called chromat C. Observation with UV-

illumination (I-line) by using our excellent Epi-Ultrafluar

UV objectives is possible not only in bright field, but

also in the confocal mode.

H = BrightfieldHD = Brightfield and DarkfieldDIC = Differential Interference Contrast (DIC)

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contamination

as well.

details.

Epiplan-Neofluar

Epiplan-Apochromat

50x/0.90 HD DIC 0.47100x/0.95 HD DIC 0.25

Epiplan LD

IlluminatorHg 100 forfluorescenceobservation

PreprogrammedFunctions

The Axiotron 2 is a high performance microscope that

is simple to use because it has been programmed for

optimum image quality and easy switching between

inspection methods. The Axiotron’s built-in intelligence

coordinates all image related functions — lamp

brightness, aperture diaphragm, analyzer, different

reflectors for various contrasting techniques

(brightfield, darkfield, DIC and fluorescence), as well

as an optional laser autofocus. It is based on an

internal standardized CAN bus system which

guarantees that all microscope parameters are

automatically optimized as soon as you select an

application method on the control panel. The same

applies, of course, if you change the magnification.

Handling, inspection and review

The control of the microscope can also be performed

by an external computer system and RS 232

connection. This mode is used when the Axiotron 2

is combined with a wafer loader or if it is integrated

into complex inspection/review systems such as our

Axiospect or Axiosprint. These systems combine the

functionality of the Axiotron 2 with wafer handling

and precise positioning. Axiotron 2 as theinspection tool of theAxiosprint system

VariableConfigurations

Different applications of the Axiotron 2 require the

appropriate illumination. In addition to the normal

halogen illumination, xenon lamps, mercury lamps

and mixed-gas illumination are available. Two

illumination sources can be attached at one time with

manual or motorized switching mirrors.

The specimen movement can be performed either by

manual stages with rotating wafer holders (4“-8“)

or motorized scanning stages with vacuum chucks

for 6“ and 8“ wafers. Computer control of the

Axiotron 2 allows positioning with very high accuracy.

If reticles are to be observed in transmitted light a

special stage version includes 5”, 6” and 7” mask

holders.

Image evaluation

For attachment of different video cameras the

appropriate special c-mount adapters are available.

The electronic images can be printed out for

documentation or stored in a computer.

A special Axiospeed spectroscopic measurement

system can be attached, to allow the analysis of

surface and layer reflectance and in particular the

thickness measurement of thin films in the range 10 nm

up to 50µm.

CCD video cameraconnected to Axiotron 2

Halogenillumination

Attachment ofAxiospeed diodearray spectrometer

Special lightguide for theattachmentof illuminationunit XBO 180 Wremote byAxiotron 2

holders.

Image evaluation

up to 50µm.

Halogenillumination

holders.

Image evaluation

up to 50µm.

Halogenillumination

holders.

Image evaluation

up to 50µm.

Halogenillumination

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contamination

as well.

details.

Epiplan-Neofluar

Epiplan-Apochromat

50x/0.90 HD DIC 0.47100x/0.95 HD DIC 0.25

Epiplan LD

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contamination

as well.

details.

Epiplan-Neofluar

Epiplan-Apochromat

50x/0.90 HD DIC 0.47100x/0.95 HD DIC 0.25

Epiplan LD

and optical competence axiotron 2 high...

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