analytical resolution vs. detection - eag laboratories€¦ · ensure quality and safety,...

Dynamic SIMS TOF-SIMS TXRF STEM/ EELS STEM/ EDS Chemical bonding/ molecular information Elemental information Imaging information Thickness and density information only (no composition information) Physical properties Copyright ©2016 EAG, Inc. M-006916 Auger SEM/ EDS LA-ICPMS Raman XPS/ ESCA FTIR XRF RBS XRD XRR GDMS ICP techniques IGA IC TGA/DTA/DSC NMR GPC RTX SEM TEM/STEM FIB AFM EBIC OP Imaging Techniques Physical limit for 0.3nm Sampling Depth Physical limit for 3nm Sampling Depth Physical limit for 30nm Sampling Depth Bulk Techniques Analytical Spot Size Detection Range Atoms/cm 3 5E22 1E22 1E21 1E20 1E19 1E18 1E17 1E16 1E15 1E14 1E13 1E12 100 at% 10 at% 1 at% 0.1 at% 100 ppm 10 ppm 1 ppm 100 ppb 10 ppb 1 ppb 100 ppt 10 ppt 0.1 nm 1 nm 10 nm 100 nm 1 μm 10 μm 100 μm 1 mm 1 cm EAG Laboratories is a global scientiﬁc services company serving clients across a vast array of technology-related industries. Through multi-disciplinary expertise in the materials, engineering and life sciences, EAG helps companies innovate and improve products, ensure quality and safety, strengthen supply chains, protect intellectual property and comply with evolving global regulations. EAG.COM Analytical Resolution vs. Detection Limit GC-MS, LC-MS

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Page 1: Analytical Resolution vs. Detection - EAG Laboratories€¦ · ensure quality and safety, strengthen supply chains, protect intellectual property and comply with evolving global regulations

Dynamic SIMS

TOF-SIMS

TXRF

STEM/EELS

STEM/EDS

Chemical bonding/molecular information

Elemental information

Imaging information

Thickness and density information only(no composition information)

Physical properties

Auger SEM/EDS

LA-ICPMS

Raman XPS/ESCA

FTIRXRF RBS

XRD

XRR

ICP

chn

iqu

IGA

ICT

/DTA

/DS

RTXSEM

TEM/STEM

FIB

AFM

EBIC

Imaging Techniques

Physical limit for 0.3nm Sampling Depth

Physical limit for 3nm Sampling Depth

Physical limit for 30nm Sampling Depth

BulkTechniques

Analytical Spot Size

Det

ectio

n R

ange

Atom

s/cm

5E22

1E22

1E21

1E20

1E19

1E18

1E17

1E16

1E15

1E14

1E13

1E12

100 at%

10 at%

1 at%

0.1 at%

100 ppm

10 ppm

1 ppm

100 ppb

10 ppb

1 ppb

100 ppt

10 ppt

0.1 nm 1 nm 10 nm 100 nm 1 µm 10 µm 100 µm 1 mm 1 cm

EAG Laboratories is a global scientific services company serving clients across a vast array of technology-related industries. Through multi-disciplinary expertise in the materials, engineering and life sciences, EAG helps companies innovate and improve products, ensure quality and safety, strengthen supply chains, protect intellectual property and comply with evolving global regulations.

EAG.COM

Analytical Resolutionvs. DetectionLimit

-MS

, LC

-MS