vts 軟板薄膜濺鍍輪設備
Post on 25-Jan-2016
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VTS
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VTSs .
, , .
VTSs / Polyimide Film, Mylar, foil . , , , , .
VTS
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AWC-550 AWC-550, , .
--, , , , / 4DC 3 (PET, PI, etc.) . 380mm
up to 550 mm 25 to 200
0.1 to 5 M/min
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VTS /
, , ,
- I.e.100%
(0.1-5mTorr)
Current Density Distribution Profile
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DC Power vs Deposition RatePosition vs Deposition Profile/min VTS /
, , ,
(0.8- 5mTorr)
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VTS FCCL
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VTS FCCL polyimide polyimide ATEC Polyimide
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VTS FCCL polyimide Low Current DensityHigh Current DensityATEC Polyimide
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VTS FCCL PMDAODA ., PMDA-ODA polyimideO 1s, N 1s, and C 1sXPS (eV) (eV) , PMDA-ODA polyimideO 1s, N 1s, and C 1sXPS polyimide XPS
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VTS FCCL polyimide SAM By Gas A + C By Gas ABy Gas CRaw Film
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VTS FCCL Polyimide
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VTS FCCL & (150, 168h)
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By Gas A + CBy Gas C : : 3 : MD CPI : 38 : 9 : (90) : 50 / min Mean : 0.80 kgf/cm Mean : 0. 78 kgf/cmHCL KOH Mean : 0.79 kgf/cm VTS FCCL
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By Gas ABy Gas A + CBy Gas C VTS / :
VTS :
VTS DC :
Pl : : : 0.32 kgf/
: 0.78 kgf/
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