div class=ts-pagebuttonPage 1button div class=ts-image amp-img class=ts-thumb alt=Page 1: SMM pressure sensor00717300advantages of the system are the casy assembly the high resistance against electromagnetic interference the protection by a silicon nitride layer and src=https:reader034vdocumentssitereader034viewer20220422055ea6d7e3f771a9719968c3c5html5thumbnails1jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 2button div class=ts-image amp-img class=ts-thumb alt=Page 2: SMM pressure sensor00717300advantages of the system are the casy assembly the high resistance against electromagnetic interference the protection by a silicon nitride layer and src=https:reader034vdocumentssitereader034viewer20220422055ea6d7e3f771a9719968c3c5html5thumbnails2jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 3button div class=ts-image amp-img class=ts-thumb alt=Page 3: SMM pressure sensor00717300advantages of the system are the casy assembly the high resistance against electromagnetic interference the protection by a silicon nitride layer and src=https:reader034vdocumentssitereader034viewer20220422055ea6d7e3f771a9719968c3c5html5thumbnails3jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 4button div class=ts-image amp-img class=ts-thumb alt=Page 4: SMM pressure sensor00717300advantages of the system are the casy assembly the high resistance against electromagnetic interference the protection by a silicon nitride layer and src=https:reader034vdocumentssitereader034viewer20220422055ea6d7e3f771a9719968c3c5html5thumbnails4jpg width=142 height=106 layout=responsive amp-img divdiv