silvaco - ucourse · silvaco’s tcad 6. ucourse mmkhatami@aut.ac.ir, mm.khatami@modares.ac.ir...

Mohammad Mahdi Khatami

2016

SilvacoAn Overview

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TCAD Based Simulation

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TCAD Based Simulation

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• Simulating fabrication process and device analysis of Electronic devices.

• Various optoelectronics devices: BJT, MOSFET, HBT, HEMT, Solar cell, LED, Laser,… .

• Saves money and time.

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Process simulation

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Device simulation

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Silvaco’s TCAD

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Athena

• Physically-based 2D processing simulator.

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Ath

en

aIon implantation

Diffusion

Deposition

Etch

Oxidation

Stress

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Atlas

• Physically-based 2D and 3D device simulator.

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Atla

s a

na

lysi

s

Electrical

DC

AC

Time TransientOptical

Thermal

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Silvaco Syntax

• Both Atlas and Athena should be run through Deckbuild.

• Each Atlas run should start with:

go atlas

and Athena is run with:

go athena

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Silvaco Syntax

• Each statement consists of a keyword and a set of parameters:

<STATEMENT> <PARAMETER>=<VALUE>

• Example:

DOPING UNIFORM N.TYPE CONCENTRATION=1.0e16 REGION=1OUTFILE=my.dop

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Silvaco Syntax

• Enough to use few letters of a parameter name (should bedistinguishable from any other parameters):

CONCENTRATION can be shortened to CONC.

REGION can’t be shortened to R, since there’s a parametercalled RATIO.

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Parameters

• Four different types for the <VALUE> parameter: Real, Integer,Character, and Logical.

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Parameters type

Real

concentration x.comp

Integer

number

Character

name material

Logical

n.type

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Silvaco Syntax

• Silvaco is not case sensitive!

• The \ character at the end of a line indicates continuation.

• Comments are indicated by the COMMENT statement or anumber sign (#)

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Useful Reference Sources

1. G. Armstrong and C. Maiti, TCAD for Si, SiGe and GaAsintegrated circuits. The Institution of Engineering andTechnology, 2007.

2. Atlas User’s Manual. Silvaco, 2016.

3. Athena User’s Manual. Silvaco, 2014.

4. Deckduild User’s Manual. Silvaco, 2016.

5. Tonyplot User’s Manual. Silvaco, 2014.

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More about Silvaco TCAD

• http://ucourse.ir/open-courses/silvaco/