sesha pfc abatement 2013 pfc... · high dre pfc dre >95% low nox emissions 750°c...
Post on 13-Feb-2019
216 Views
Preview:
TRANSCRIPT
Global Warming!
“The average mass balance of the reference mountain glaciers around the world continues to decrease…” Source: World Glacier Monitoring Service http://www.geo.unizh.ch/wgms/
GST Confidential 3
WSC Commitments
Kyoto Protocol Rejected Not
Approved Approved Approved Approved Approved Approved Not Party to
WSC Commitment √ √ √ √ √ √ √ √
PFC Reduction
Commitment
10% below
1995
Baseline by
2010
No Target
10% below
1995
Baseline by
2010
10% below
1995
Baseline by
2010
No Target No Target
10% below
1997
Baseline by
2010
10% below
1998
Baseline by
2010
The World Semiconductor Council (WSC) voluntary commitment to reduce PFC emissions 10% below baseline year levels by 2010
Semiconductor industry defines PFCs as CF4, CHF3, C2F6, C3F8, C4F8, NF3, & SF6
USA Singapore Japan European Union Malaysia China Korea Taiwan
GST Confidential 4
CALIFORNIA’S CLIMATE PLAN The facts on California’s plan to reduce greenhouse gases and move toward a clean, green economy
The Climate Change Scoping Plan is the state’s roadmap to reach the greenhouse gas reduction goals required
in the Global Warming Solutions Act of 2006, or AB 32. This plan calls for an ambitious but
achievable reduction in California’s carbon footprint – toward a clean energy future. Reducing greenhouse gas
Emissions to 1990 levels means cutting approximately 30% from business-as-usual emissions levels projected
for 2020, or about 15% from today’s levels. On a per-capita basis, that means reducing annual emissions of
14 tons of carbon dioxide for every man, woman and child in California down to about 10 tons per person
by 2020. This challenge also represents an opportunity to transform California’s economy into one that runs on clean and sustainable technologies, helping secure our energy independence and security, and ensure that all
Californians are able to enjoy their rights to clean air, clean water, and a healthy and safe environment.
Regulations - 2006
GST Confidential 5
Semiconductor PFC
GST Confidential 6
Compound Atmospheric
Lifetime (years)*
Global Warming Potential
(100 year)*
Decomposition Temperature
CF4 50,000 7,390 > 1,200°C
C2F6 10,000 12,200 1,000 ~ 1,200°C
SF6 3,300 22,800 1,000 ~ 1,200°C
c-C4F8 3,200 10,300 < 1,000°C
C3F8 2,600 8,830 < 1,000°C
NF3 740 17,200 < 900°C
CHF3 270 11,700 < 900°C
* Source: http://www.epa.gov/semiconductor-pfc/basic.html
Available PFC Abatement in 2013
GST Confidential 7
Technology Application Cost CF4 DRE
SF6 DRE
NF3 DRE
Suppliers
Plasma (pre-pump)
Etch $$$$ >90% >95% >95% Applied Materials
Plasma-Wet Etch, limited CVD $$$ >90% >95% >95% GST, YoungJin, CS, KT
Burn-Wet CVD, Etch $$$ >90% >95% >95% GST, Edwards, DAS, Centrotherm
Heat-Wet CVD $ ~0% <25% >95% GST, KT, Applied
Catalyst (Wet-Heat-Wet)
Etch, limited CVD $$ >95% >95% >95% GST, Guild, Techarmonic
Key Attributes Zero footprint High DRE * CF4 DRE >90% Low NOx emissions Requires pressure control Limited capacity – etch applications Consumable reactor
Plasma Abatement (pre-pump)
GST Confidential 8
Key Attributes High DRE CF4 DRE >90% Moderate NOx emissions Consumable electrodes 1200+°C
Plasma-Wet Abatement (post-pump)
GST Confidential 9
Cooling
Chamber
Wet
Chamber
Circulation
Tank
Waste Gas
Inlet
Gas Exhaust
Reactor
Torch
Tungsten
Cathode
O2 Free
Copper
Anode
Burn-Wet Abatement
GST Confidential 10
Key Attributes: Powder tolerant Low NOx emissions High DRE LE – NF3 DRE >95% HE – C2F6 DRE >95% 800~1200+°C
Stage 1 NOx Control
Fuel rich combustion NOx suppression ₋ Low NOx (<10 ppm) ₋ High CO (>1000 ppm)
Stage 2 CO Control
2nd stage combustion CO conversion ₋ Low NOx (<10 ppm) ₋ Low CO (<10 ppm)
Key Attributes Powder tolerant CDA / steam as reagent NF3 DRE >95% Low NOx emissions 850°C
Heat-Wet Abatement
GST Confidential 11
SiC Heater
5.5kW × 6
INCONEL600
Heater Housing
Key Attributes High DRE PFC DRE >95% Low NOx emissions 750°C
Wet-Catalyst-Wet Abatement
GST Confidential 12
Temperature, oC
200 300 400 500 600 700 800
Con
vers
ion,
%
0
20
40
60
80
100
NF3
CHF3
SF6
CF4
C2F
6
C3F
8
c-C4F
8
[PFC] = 1,000 ppm
[H2O] = 3.5 %
Pre-scrubber
Thermal
Module Catalyst
Module
Heat
Exchanger
Post-
scrubber
Exhaust
Fan
1. CVD Chamber Clean Effluent
C2F6 & NF3
2. Etch Process Effluent
CF4, SF6, CHF3, C3F8 & C4F8
3. Other GHG Effluents
N2O
Typical Priority - PFC Reduction Target
GST Confidential 13
1. NF3 & F2 – RPS
Burn-Wet Heat-Wet Plasma-Wet
2. C2F6 - Chamber Plasma
Burn-Wet Plasma-Wet Wet-Catalyst-Wet
CVD Options
GST Confidential 14
Considerations for CVD Clean PFCs
GST Confidential 15
Chamber A
Abate flammable gases at a minimum
House Exhaust
Chamber B
Process Step
Process Gas
Deposition SiH4 / TEOS
Clean C2F6 / NF3
POU Abatement
Considerations for CVD Clean PFCs
GST Confidential 16
RPS
Chamber
NF3 – 1 slm
95~99% Breakdown Efficiency
NF3 – 10~50 sccm
F2 – ~1.5 slm
NF3 – 10~50 sccm
F2 – 0 ~ 1.5 slm
$$$
$$ Abatement
Chamber 50~60% Breakdown Efficiency
C2F6 – 1 slm
C2F6 – 400~500 sccm
F2 – 0 ~ 1.5 slm
Abatement $$
CF4, SF6, CHF3, C3F8 & C4F8
Burn-Wet Plasma-Wet Plasma (pre-pump) Wet-Catalyst-Wet
Etch Process Options
GST Confidential 17
$55M in 2012 Abatement Revenue
287 direct employees
>3,500 installed base
Global Standard Technology Co., Ltd.
GST Confidential 18
Jincheon Manufacturing Plant - 50,000 ft2 Head Quarters, Dongtan Industrial Complex
>5 concurrent development projects
Engineering Capacity
GST Confidential 19
Head Quarters
Scrubber R&D Lab
>100 scrubbers per month
Scalable to 300 units in 2 months
Manufacturing Capacity
GST Confidential 20
Manufacturing Plant
Scrubber Assembly Line Final Test and Evaluation Unit Area
PUMP & ABATEMENT
EXCELLION
PLASMA-WET
Durian
DRY
SDS-500
HIGH CAPACITY BURN-WET
GALLANT
HEAT-WET
ISIS-I,II,III,IV
GST Abatement Product Line
GST Confidential 21
BURN-WET
DRAGON / DRAGON DUO
WET & WET-EP
SWS-500 / AQUA EP
FACILITY LEVEL PFC ABATEMENT (CATALYST & RTO)
PROJECT RCO and PFC Zone Scrubber
GST Principle Locations
GST Confidential 22
GST AMERICA Scrubber Service
TEL: +1-512-289-6249 AUSTIN
AUSTIN WUXI
GST CHINA Scrubber & Chiller Service
TEL: +86-159-5157-7530 WUXI
GST HQ/R&D TEL: +82-31-371-2200
HWASEONG
MANUFACTURING PLANT
TEL: +82-43-531-2000 JINCHEON
Regional Support
North America
BAZM Solutions Brian Kingston +1 408 887 6132 sales@bazmsolutions.com
Dynaxa LLC Stephen Griffing +1 203 470 8323 Steve.griffing@dynaxallc.com
GST America Jason Smith +1 916 969 9829 Jason_smith@gst-in.com
Head Quarters
GST – Sales & Marketing Jay Jung +1 408 338 7263 jay_jung@gst-in.com
top related