schott glass substrates for microfluidic applications
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SCHOTTSCHOTT Glass Glass Substrates for Substrates for MicrofluidicMicrofluidic Systems Systems
Alistair Rees
MF-2.4 Second European Microfluidics Consortium Meeting,
Salzburg, 10 December 2010
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1. Overview of SCHOTT
3. Glass Types & Formats used for Microfluidics
4. Production of Flat Glass
Agenda
2. Why use Glass for Microfluidics?
5. Photostructurable Glass Ceramic
6. Summary
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Legal Structure
SCHOTT AG Mainz
Carl Zeiss AGOberkochen
Subsidiaries Subsidiaries
100 % 100 %
SCHOTT Group Carl Zeiss Group
Carl-Zeiss-StiftungHeidenheim an der Brenz und Jena
Foundation acting as shareholder
SCHOTT AG is not listed on the Stock Market The Carl-Zeiss-Stiftung (Foundation) is sole shareholder of SCHOTT AG
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Key Figures
capital expenditures in property, plant and equipment 216 million euros
global sales, 73% generated outside of Germany2.26 billion euros
employees, 6,500 of whom are in Germany17,400
production plants and sales offices in 43 countries
Fiscal Year 2008/2009
earnings before interest and taxes (EBIT) -22 million euros
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SCHOTT Business Units
Solar
Home Tech
Flat Glass
Pharmaceutical Systems
Electronic Packaging
Advanced Materials
Lighting and Imaging
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Why Use Glass for Microfluidics?
• Chemically Inert / Bio-compatibility / Hydrophilic / Non-porous
• High Stability / Corrosion Resistant
• Excellent Optical Transmittance / Low auto fluorescence
• High Mechanical Hardness / Good Breaking Strength
• Excellent Electrical Isolation
• Good Thermal Properties / Low Expansion
• Easily Bonded to Other Materials
• Variety of Forms / Formats
• Suitable for Rapid Prototyping
• Can be Inexpensive
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Glass Formats / Types used for Microfluidics
Flat glassThin Glass Sheets
Glass Wafers
Photostructurable Glass Ceramic
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Microfluidic Foundries
Flat Glass Formats for Microfluidics
Processed WafersFlat Glass Sheets
MicroFluidic Device Manufacturer
D263 T, Borofloat 33 and B270 wafers for manufacture of microfluidic components
D263 M “Optical” covers for polymer microfluidics
9 99
SCHOTT Sites Producing Glass for Microfluidics
Grünenplan
Jena
Mainz
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Microfloat
Down-Draw Up-Draw
Melting Technologies for SCHOTT Flat Glasses
Microfloat
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The Down-Draw Process - Key Characteristics
• Seven glass types are produced by the down-draw process:
D
D
D
D
v
• Fire-polished surface with surface roughness < 1nm
• Wide thickness range, down to 30 µm
• High flexibility regarding throughput and width
bMEMpax
Melting Technologies for SCHOTT Flat Glasses
D
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D
D
• Two glass types are made by the up-draw process:
The Up-Draw Process - Key Characteristics
• Excellent surface quality
• Wide thickness range from 0.8 – 10 mm
• High flexibility regarding throughput and width
Melting Technologies for SCHOTT Flat Glasses
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Overview of the Microfloat process
Cutting/Inspection
AnnealingFloatingMelting tank
Glass
Tin bathTin bath
GlassGlass
Lip stoneLip stone
80 °C730 °C1240 °C1650-1700°C
Melting Technologies for SCHOTT Flat Glasses
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Details of the Microfloat Process
Lip Stone
Heating Element
Glass
Lift Out Roller
Reducing Atmosphere
Melting Technologies for SCHOTT Flat Glasses
Molten Tin Bath
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• One glass type is made by the float process:
• High throughput
• Low cost
• Excellent largescale flatness possible
• Fire-polished surface with surface roughness < 1nm
The Float Process - Key Characteristics
Melting Technologies for SCHOTT Flat Glasses
D
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Overview Thickness of SCHOTT Flat Glasses
0,7 mm0,4 mm
0,1 mm0,2 mm
0,3 mm0,5 mm
0,6 mm0,8 mm
0,9 mm1,0 mm
1,1 mm1,2 mm
1,3 mm0,05 mm
10 mm
Thickness Range
………………3 mm
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Flat or Notch C-or facet shape Seaming
Edge Treatment Clean Room Production Inspection and measurement
under clean room conditions
Clean Room Packaging
Ultrasonic washing Megasonic washing
Washing Process
Lapping Polishing Coating
Surface Refinement
Thermal Chemical
Toughening
Processing Processing CapabilitiesCapabilities
optional
Cutting
Laser or Diamond Cutting
Silanes Optical Metallic
Coatings
Main Competencies in Glass Processing
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Foturan Photostructurable Glass Ceramic
• Foturan is a photostructurable “glass ceramic” from SCHOTT
• Glass properties: Transparency, hardness, chemical, and thermal resistance
• Very fine structures (> 25 µm) with tight tolerances
• High aspect ratios ((> 30:1 hole depth / hole width)
• Low microroughness <1 µm
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Foturan Photostructurable Glass Ceramic
1. Mask / UV Exposure 2. Heating / Crystallisation 3. Chemical Etching
500 – 600 °C HF
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Summary
• Glass is an attractive material for microfluidic devices due to a number of special properties
• SCHOTT can offer a wide range of glass suitable for microfuidic applications
• But at the end of the day customers will decide on suitability based on specific project requirements
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Thank you !
End
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