nanoscale optical metrology and characterization
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NANOSCALE OPTICAL METROLOGY ANDCHARACTERIZATION
The Institute of Optics, University of Rochester, Rochester, NY, 14627.
Lukas Novotny
OUTLINE
2. NANOSCALE METROLOGY
- general thoughts - requirements for nanoscience/technology
1. BACKGROUND (NANO-OPTICS)
3. EXAMPLES
- nanoscale subsurface spectroscopy and imaging
Concentrate on R and not D ! -> D builds on R
Basic Sciences Optics Technical Sciences
NanotechnologyNanoscience
. . . . . .
NANO-OPTICS . . . . . .
Nano-Optics is the study of optical phenomena and techniques near or beyond the diffraction limit.
THINGS ARE GETTING SMALLER . . .
WHAT ARE THE OPPORTUNITIES FOROPTICS ?
nano-optics
WHY NANO – OPTICS ?
F
nanoscale manipulation
V(S/N)
nanoscale probing
h x
nanoscale spectroscopy
CHEMICAL VS. SPATIAL INFORMATION
NSOM
Spatial Resolution
Ch
em
ical
Info
rma
tio
n
1 nm 1 m 1mm
low
ato
mic
mo
lecu
lar
NMR- IR
-Raman
SPM
ElectronMicroscopy
Ion microscopy
X-Rays
DielectricAnalysis
S. Stranick, NIST
proteins quantum states
TWO IMPORTANT LENGTH-SCALES
“New Truths become evident when new tools become available”
(Rosalyn Yalow)
New instrumentation catalyzes new discoveries
STRUCTURE OF DNA
Bragg diffraction, 1912 X-ray diffraction of DNA Structure of DNA,1953
CELL STRUCTURE / FUNCTION
Leeuwenhoek, 1680
“The rapid advances of nanoscience and nanotechnology are due in large part to our newly acquired ability to measure and manipulate individual structureson the nanoscale.” (Nanoscience & Nanotechnology Initiative)
STM AFM
NSOM
Single Molecule
Spectroscopy
OpticalTweezers
1982
1986
1986
1994
2001
NNI
1996
NF
P36
NATIONAL NANOTECHNOLOGY INITIATIVE
NANOMATERIALS
TEM, 1931 (Knoll & Ruska)
Carbon nanotubes, 1991 (Iijima)
NANOSCIENCE / NANOTECHNOLOGY
STM, 1982 atomic manipulation, 1993
NANOBIOTECHNOLOGY
AFM, 1986
Membrane proteins, 1994
Cantilever array sensors, 1998
ADVANCES ININSTRUMENTATION
(microscopy, spectroscopy, .. )
ADVANCES INSCIENCE
(new principles, .. )
ADVANCES INTECHNOLOGY
(fabrication, materials, .. )
INSTRUMENTATION – RESEARCH – TECHNOLOGYCYCLE
WHAT’S FIRST (egg or hen) ? INSTRUMENTATION (need input to think)
Challenge #1:Demand in nanoscale subsurface imaging and characterization
Many future nanoscale devices and components need to be protected from interactions with the environment !
Current high-resolution techniques are surface specific (STM, AFM, EM, .. )
NANOSCALE INSTRUMENTATION & METROLOGY
NNI GRAND CHALLENGE #4 :
Si capping layer
Challenge #2:Demand in minimally invasive nanoscale instrumentation
Wer misst, misst MIST !
Measurement artifacts !
(any measurement is a perturbation to the system to be measured)
NANOSCALE INSTRUMENTATION & METROLOGY
NNI GRAND CHALLENGE #4 :
Molecule + Electrode problem (-> Duncan Stewart)
NANOSCALE INSTRUMENTATION & METROLOGY
NNI GRAND CHALLENGE #4 :
Challenge #3:Demand in chemically specific nanoscale instrumentation
What are we measuring ?
(interpretation of measurements often relies on prior information)
Microscopy & Spectroscopy
spatial resolution chemical specificity
Materials have transparent spectral windows -> subsurface imaging
Light-matter interaction is chemically specific -> spectroscopy
Resolution -> challenged by diffraction
No mechanical contact -> non-invasive
LIGHT
THE DIFFRACTION CHALLENGE
D.W. Pohl et al., Appl.Phys.Lett. 44, 651 (1984)
E.H. Synge, Phil.Mag. 6, 356 (1928)E. Abbe, Arch. Mikrosk. Anat. 9, 413 (1873)
Increasing numerical aperture
Example #1: 4Pi Confocal Fluorescence Microscopy
S. Hell, MPI Goettingen
conventional subsurface imaging
Example #2: Numerical Aperture Increasing Lens (NAIL)
S. Unlu & B. Goldberg, Boston University
with NAIL
10 m
conventional subsurface imaging
Thermal Imaging with NAIL
S. Unlu & B. Goldberg, Boston University
with NAIL
mirrorSi
Example #3: Spectral Self-Interference Microscopy
B. Goldberg, Boston University
SiO2
wavenumber 1/ (cm-1)
17000 18000 19000 20000
(nm
)
position on sample (mm)
0
2
4
6
8
10
0.0 2.0 4.0 6.0 8.0 10.0
top
bottom
Lipid Bilayer
Example #3: Near-field Optical Spectroscopy
Ultramicroscopy 71, 21, (1998).
N
o No
ULTRASHARP PROBES
Standard Optical Microscopy: Near-Field Raman Microscopy: Vibrational Spectrum:
Carbon Nanotubes
topography Raman scattering line-scan
PRL 90, 95503 (2003)
Carbon Nanotubes
Electrical Measurements: Materials Performance - electronic response mapping (µW, rf and dc). - tunneling and resonance spectroscopies
Vis/IR illumination: Chemical Properties - local field enhanced IR absorption/Raman scattering. - probes local chemical functionality/structure.
Sample
Localized Field
electrical
Vis/IR
Chemical Properties
MULTITASKING / MULTISPECTRALNANOSCALE IMAGING
S. Stranick, NIST
SUMMARY
Challenges for nanoscale metrology:
- subsurface imaging and characterization- minimally invasive (perturbative)- chemically specific (spectroscopy)- DISCUSS IN TERMS OF GRAND CHALLENGE APPLICATIONS
New Instrumentation Catalyzes New Discoveries
What we develop within NNI might become important after NNI !
Thanks: NSF, DOE, DARPA, AFOSR
NANOSCALE INSTRUMENTATION & METROLOGY
NNI GRAND CHALLENGE #4 :
Challenge #4:Instrument development requires time (> 3 years grant)
Scanning Electron microscopy 1935 .. 1965 to get 10nm resolution !
Optical microscopy 1650 .. 1994 to image a single molecule !
NEIL’S EXPERIMENT
NANOSCALE INSTRUMENTATION & METROLOGY
NNI GRAND CHALLENGE #4 :
Statement #5:Funding for combined “development + application” projects
NANOPHOTONIC STRUCTURES IN NATURE
Magnetotactic Bacteria Lepidopteran Eye
Opal
Parides Sesostris
Photosynthetic Membranes
Morpho Rhetonor
ARTIFICIAL NANOPHOTONIC STRUCTURES
Particle PlasmonsNanocomposite Materials Plasmon-Biosensors
Laser Cavities
MicroresonatorsPhotonic Crystals
Light ConfinementSemiconductor Nanostructures Surface Plasmon Waveguides
Quantum Confinement
Quantum Dots
Univ. of Rochester, Boston Univ., Penn State, NIST, Rice Univ., Univ. of Illinois U-C
NEW INSTRUMENTATION FOR NANOSCALESUBSURFACE SPECTROSCOPY AND TOMOGRAPHY
Objectives: Develop measurement platform for
nanoscale subsurface spectroscopy and tomography.
Combine different spectroscopic techniques (microwave, Raman, fluorescence, IR).
Approaches:• Explore new ideas based on:
- near-field optical microscopy (field enhancement)
- microwave STM (single spin detection)
- solid immersion lens microscopy (depth resolution)
- near-field tomography (3D reconstruction)
- fluorescence self-interference (nanoscale localization)
Achievements: Raman imaging with 13 nm spatial
resolution. Localization and multi-band spectroscopy
of molecules with 0.3 nm accuracy. Microwave STM of dopants in
semiconductors, molecules, and nanostructures.
Near-field inversion algorithms for nanoscale tomography.
OBJECTIVE OF PROGRAM
Develop techniques for non-destructive, chemically specific, three-dimensional nanoscale characterization of subsurface structures.
Objective:chemicalanalysis
localization oftagged molecules
long-rangesubsurface imaging
3D objectreconstruction
Nanoscale Subsurface Spectroscopy and Tomography
Approach:near-field opticalpower extinction
tomography solid immersionlens microscopy
numerical apertureincreasing lensspectral
self-interferencefluorescence
near-field Ramanscattering and IR
absorption
microwave STM and single spin
spectroscopy
Results:(1) proof of concepts
(2) fundamental understanding of physical phenomena involved(3) combination of methods and development of single measurement platform
ATOMIC STRUCTURE
Balmer, 1885Hydrogen lamp Bohr-Sommerfeld atom model …
Adaptive OpticsSingle Molecule Detection Near-field Optics
photoreceptors in retina
Optical Tweezers
enzymatic dynamics function of motor proteins photosynthetic membranes
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