melservo-j4 solutionsdl.mitsubishielectric.com/dl/fa/document/catalog/servo/l03073/l0307… ·...
Post on 19-Jul-2020
18 Views
Preview:
TRANSCRIPT
SERVO AMPLIFIERS & MOTORS
•Pre/Post inspection system imaging
•Solar panel production
•FPD manufacturing
•3D LCD manufacturing
•SEMI logic inspection
Q06UDEHCPUQ172DSCPU
QY40P
QX40
(MCCB) (MC)
vol.03 Motion Alignment(X-Y-θ)
Vision System
Inspection Device
Wafer positioning
Measure the mark at the wafer's ends.
Correct the position.
Calculate the difference between the target position andthe position measured.
Inspect the material.
X, Y, θ-axis , ,1 2 3
X, Y, θ-axis , ,1 2 3
MELSERVO-J4 Solutions For your all production needs
System Example
Motion CPUPLC CPUMain base unit
Q172DSCPUQ06UDEHCPUQ35DB
:::
Servo amplifierGOT
MR-J4-B,MR-J4W2-BGOT1000 series
::
Accurate Positioning
COGNEXVision System
Direct Drive Motor Target PositionChange Function
Shorter Tact TimeIssues atproduction
sites
SystemConfiguration
Settings
Step1 Step2 Step3 Step4
ParameterSettings for
Ethernet Connection
Vision SystemConnection Settings
Motion SFCProgram Creation
S
Setup Procedure
Precise DriveOperation
Servo motorI/O module
TM-RFM,LM-H3QX40,QY40P
::
Issue1
Issue2
Issue3
GOT
Ethernet
Mitsubishi solution
Application
Control Flow
Vision System
Direct Drive Motor
Target Position Change Function
(a) COGNEX Vision System(b) Wafer
(b)
(a)
X-axisY-axisθ-axis
123
1
2
3
Offering theBest Solution
Material (Wafer) Detection
[Operation Example of Target Position Change Function]
X-axis
Y-axis
Originaltarget position
The vision system can easily read the current position, and quickly moves the material (wafer) to the target position, calculating
the correction amount.
Accurate Position Reading andQuick Location Readjustment
COGNEX Vision System
This hollow construction enables cables and wires to go through inside.
Elimination of transmission mechanical parts
The vision system measures the current position.
The system moves the wafer to thetarget position following the correctionamount calculated.
High-response, high-accuracy, and stabilized positioning are achieved by using the direct drive motor for rotary axes. This motor
is also suitable for a low-speed and high-torque operation.
Direct Connection to Drive Parts for High Response and Accuracy
Direct Drive Motor
Flexibly Responding toChanges in the Target Position
Target PositionChange Function
When performing a position
correction using the vision system
data during positioning operation,
the system can move the wafer
to a new target position directly
without starting positioning again.
Thus shorter tact time is achieved.
STEP 1 STEP 2
[Direct Drive Motor Example]
[Example of using wafer (material)]
Original target position
New target position
Quick positiondetection
Shortertact time
Smooth operation with low noise
Clean system without dust coming from worn out
Suitable for a low-speed and high-torque operation.
Target position change
Newtargetposition
Solution
1
Solution
2
Solution
3
COGNEXVision System
Setup procedure
10:Alignment
[F100]// Log on the vision system 1.MVOPEN K1
[F101]// Start the vision program 2.MVPST K2
[G100]// Check the log on completion.(D2000==K20) * !M0
[G101]// Check the job completion.(D2000==K40) * !M0
[K30:Real]1 ABS-2(Vector speed)
[F102]// Calculate the command position using the image data.D4000L=LONG(D3010F*10000.0)D4002L=LONG(D3014F*10000.0)
axis 1Movement amount D4000 μm
axis 2Movement amount D4002 μm
Vector speed 1000.00 mm/s
END
Step1
System Configuration
Settings
Set the servo amplifier.
Step4
Describe the vision system dedicated instructions, and then the positioning data from the vision system is possible to be read.
Set the parameter concerning the Ethernet communication and the vision program operation.
Step2
Parameter Settings for
Ethernet Connection
Step3
Vision System
Connection Settings
Motion SFC Program
Creation
Set the IP address of the Motion controller.
SSCNET Structure
Built-in Ethernet Port Setting Built-in Ethernet port Open Setting
Amplifier Settings
Ethernet Communication Line
Vision Program Operation
These simple instructions enable to read the data from the vision system.
Double click
Select from "MELSOFT Connection" or "MC Protocol" for protocol.
Double click
Double click
IP Address SettingDefault:192.168.3.39
MR Configurator2
Easy settings
for DD motor
Double click
Double click
Man, mach ine and env i ronmen t in pe r fec t ha rmony S o l u t i o n
HEAD OFFICE: TOKYO BUILDING, 2-7-3, MARUNOUCHI,CHIYODA-KU,TOKYO 100-8310,JAPAN
NAGOYA WORKS: 1-14, YADA-MINAMI 5,HIGASHI-KU,NAGOYA,JAPAN
New publication,effective November 2012.
Specifications are subject to change without notice.L(NA)03073-A 1211(IP)
Displays power consumption and total power consumption.
MR-J4-B
Servo motor
Personalcomputer
SSCNET III/H compatibleMotion controller
M
Driving powerenergy
Regenerativeenergy
Analysis by Motion controller
Rotary servo motor Linear servo motor Direct drive motor
SSCNET III/H command
Simple connection with a cable
Energy-conservativesystem examination
Pulse train command
Complex wiring
Calculates power consumptionin the servo amplifier.
Before After
One-touchtuning window:Command :Actual operation
Time
Settlingtime
Time
Operation is unstable. Operation is not followingthe command.
Spe
ed
Spe
ed
SettlingtimeS
peed
Time
Simple vibrationsuppression control andadjustable robust filter
The Servo Amplifiers, Servo Motors,and Optical Networks Linked in Symphonic Productivity
Servo gains including machine resonance suppression filter, advanced vibration suppression control II, and robust filter areadjusted just by turning on the one-touch tuning function. Machine performance is utilized to the fullest using the advanced vibration suppression control function.
MR-J4 series servo amplifier operates rotary servo motors, linear servo motors, and direct drive motors as standard.
Simple connections with dedicated cables reduce both wiring time and chances of wiring errors.No more complicated wiring.
Quick Setting by Just One Click
Applicable for Various Control and Driving Systems
Dramatically Reduced Wiring
Advanced One-touch Tuning
Flexibility
Reduced Wiring
Power Monitor FunctionPower Saving
Driving power and regenerative energy are calculated from the data in the servo amplifier suchas speed and current.Motor current value, power consumption, and total power consumption are monitored with MR Configurator2. In SSCNET III/H system, data are transmitted to a Motion controller, and the power consumption is analyzed and displayed.
< MR Configurator2>
One-touchtuning
Exactly matched.High-speedpositioning.
Features
top related