mechanical material2
Post on 15-Jan-2016
233 Views
Preview:
DESCRIPTION
TRANSCRIPT
Mechanical Material
SILICON?
Stiff => Thinning is required for appreciable strain
Micromachining of
SILICON?
MICROMACHINING of SILICON => (a) BULK (substrate)(b) SURFACE (films)
Additive Processes: Chemical and Physical Deposition(Thin Layers only) (Single/Poly)
Removal Processes:Chemical and Physical Etching(Wet/Dry/Plasma/Inert/Reactive)
(Bulk/Film) (Anisotropic/Isotropic)
BULK MICROMACHINING(Etchants: Isotropic/Anisotropic)
BULK MICROMACHINED(Silicon Capillary for Insulin Infuser)
BULK MICROMACHINED(Silicon Capillary for Insulin Infuser)
BULK MICROMACHINED(Silicon Capillary for Insulin Infuser)
BULK MICROMACHINED(Silicon Mask for Cylindrical Micromotion Sensor)
BULK MICROMACHINED(Series Connected Photovoltaic Converter Battery)
BULK MICROMACHINED(Series Connected Photovoltaic Converter Battery)
BULK MICROMACHINED(Series Connected Photovoltaic Converter Battery)
top related