edge measurement sensors - azbil
Post on 28-May-2022
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The usual method is based on the change in PD linear output when the received light level drops due to blocking of the light. However, the output will also change if the received light level drops due to dirt on the lens (or greater opacity of the target object). This method requires air purging to prevent accumulation of dirt.
Reduced light level due to dirt
Conventional (Photoelectric Diode) method
Azbil’s linear image sensor method
Linear image sensor
Repeatability ±1 μm*High-accuracy measurement of the true edge position
*Repeatability is ±1 μm for PBZ-CL007V and ±5 µm for PBZ-CL030H/V.For measurement conditions, refer to the specifications on page B-007.
**Working distance (WD): the distance between the receiver and the film
Azbil’s unique FDN algorithm enables high-accuracy measurement of the true edge position at any working distance (WD).**
Less loss of accuracy due to dirt on the sensing face
The receiver uses our linear image sensor method to reduce the effects of dirt on the sensing face. Also, a light level drop detection function tells when the sensor requires maintenance.
The edge position is determined based on the brightness level of each pixel. Even when the overall received light level drops, the light received by each pixel changes uniformly, thus having no direct effect on measurement.
PBC-201VN0for 7 mm sensor head
Controller catalog listing
PBC-201VN2for 7 mm sensor head
PBC-203VN2for 30 mm sensor head
—
�
—
—
�
—
�
�
�
Measurement details
Edge position measurement (transparent and opaque objects)
Gap measurement
Shadow width measurement
Measurement and detection capabilities vary depending on the condition of the measurement target, the installation environment, and other factors. Before use, be sure to conduct sufficient checks and evaluations of the sensor’s operation in the actual situation.
What is the FDN algorithm?
Target object
Lig
ht in
tens
ity
Emitter
WD
The position where the intensity of received light is 25% of the total intensity is the true edge position.
Fresnel diffractionLight is diffracted by the edges of thin objects such as knives and films. The intensity distribution of diffracted light at the receiver depends on the working distance between the target object and the receiver.
Receiver: linear image sensor
25%
Film
Fresnel diffraction
FEATURES
MEASUREMENT PRINCIPLE
Edge Measurement SensorsEdge position sensing for film, wafers, and glass substrates
Integrated FDN algorithmEnables high accuracy and reliable edge measurement.*1
Linear image sensor system with light level drop detectionImproved countermeasures against dirt buildup on the sensing surface, previously a major problem for reliable detection
Integrated algorithm for transparent object detectionReliable measurement of transparent objects
Standard 2-channel input controllerReduces time needed for wiring, saves space, allows two-measurement computations.
RS-485 communications (PBC-201VN2 and PBC-203VN2)Enables data transmission to a PLC or touch panel.
Includes a variety of built-in functionsNoise cancellation,*2 a countermeasure for protrusions on films computation*3 for glass substrate alignmentPosition change detection*3 for glass substrate chip detection
*1. Repeatability: PBZ-CL007V ±1 µm, PBZ-CL030m ±5 µm or less*2. PBC-201VNm only *3. PBC-203VN2 only
PBZ Series
1
Sensors 1 and 2
are used to compute �.
Sensor 1
Sensor 2
Sensor 3
Wafer irregularity and notch position measurement
Film meander measurement
If the crack measurement function is needed, please consult with an Azbil salesperson or distributor.
The lineup includes models with an additional function for measuring cracks, etc.
Both chips and edge defects can be detected.
XY� measurement of glass substrates
Fluctuation when a notch is detected
Fluctuation due to irregularity
0500
1000150020002500300035004000450050005500600065007000
2000 400 600 800 1000 1200 1400 1600 1800 2000Time [ms]
Po
sitio
n [m
m]
when the set value is exceeded
Event output
The lineup includes models
Edge defect
Chip
Nick
Burr
Thickness measurement for films and sheets
Detection of burrs and nicks on film and sheets
Two sensors can be connected per controller, enabling multiple-point calculations and simultaneous sensing of the roller and sheet material for highly accurate thickness measurement.
Highly transparent glass or gallium arsenide wafers can be reliably measured with high accuracy.Linear image sensors enable measurement through a view port.
Burrs and nicks on a meandering film or sheet material can be detected by the same sensor. The sensor can be set in increments of 500 µs. For example, when using the PBC-201VN2, sheet material fed at a speed of 50 m/min can be measured at intervals of approx. 0.4 mm. The sensor can detect a size of several tens of micrometers or more.
Glass substrate X and Y measurements can be computed from edge measurements from three pairs of sensor heads, and then � can be determined by internal computation.
Measurement error caused by eccentricity and vibration of the roller can be cancelled out by using 2 pairs of sensor heads.
By computing the input from 2 pairs of sensors, meander and film width can be measured at the same time.
Using simple arithmetic, the thickness of the sheet, t, can be calculated from the values measured by Sensor 1 and Sensor 2.
If vibration occurs, X and Y behave the same way. The effects can be reduced by calculating the offset.
Sensor 1
Sensor 1 X
Measurement pointsSensor 2
Sensor 2 Y
Sensor 1: Measures the roller’s surface...XSensor 2: Measures the sheet’s surface...Y
Sheet material
Roller
Thickness of the sheett=X-Y
Calculating the thickness from the measured values
Whether measurement or detection is possible depends upon target object conditions, installation environment, and other factors. Before use, carefully check sensor operation in the actual situation.
APPLICATION EXAMPLES
Detection of chips and cracks in glass substratesPosition change detection can be used to detect chipped glass edges during transfer.
1 2
SENSOR HEADS
*1 Working distance: the distance between the target and the receiver Accuracy specifications are measured at an ambient temperature of 23±2 °C under the conditions described below. *2 Average of 32 trials, with emitter and receiver 20 mm apart, WD = 10 mm, and the object at the center (3.5 mm) of the measurement beam*3 With emitter and receiver 20 mm apart and WD = 10 mm, the object is moved ±0.5 mm from the center of the measurement beam.*4 Average of 32 trials, with emitter and receiver 100 mm apart, WD = 50 mm, and the object at the center (15 mm) of the measurement beam*5 With emitter and receiver 100 mm apart and WD = 50 mm, the object is moved ±0.5 mm from the center of the measurement beam.
Compatiblecontrollers
Detection type
Sensing distance
WD*1
Sensing width
Light source
Standard target
Repeatability
Moving accuracy
Temperature characteristics of sensor
Indicator lamp
Operating temperature
Storage temperature
Operating humidity
Vibration resistance
Protective structure
Connection type
Material
Mass
PBC-201VN0PBC-201VN2
PBZ-CL007V PBZ-CL030H PBZ-CL030V
Opaque knife edge
±1 µm or less*2
±20 µm or less*3
Operation indicator: green LED
Connector cable 2.4 m(can be extended to 5 m)
Case: PPS. Window: glass
Emitter and receiver: 100 g or less each
(including connector cable)
10 to 300 mm
10 to 290 mm
7 mm
10 to 500 mm
10 to 490 mm
30 mm
±5 µm or less*4
±50 µm or less*5
20 cm connector cable (can be extended to 20 m)
Case: aluminum. Window: glass
Emitter: 300 g or less (including connector cable)Receiver: 270 g or less (including connector cable)
PBC-203VN2
� PBZ-CL007V (Sensor heads) � PBZ-CBL02R (Extension cable for PBZ-CL007V)
Operatingindicator(Green LED)
Emitter
3.2 dia. hole (3)
8
8
2013.2
5.8
8
10 18
20
Serial No.
3.2 dia. hole (3)
13.2
Code
Connector
Emitting window
(3) Laseremitting range
4 4
(9)
La
ser
emitt
ing
rang
e
(9)
Las
erem
ittin
g ra
nge
×××× ××××
Receiver
5.8
508.
824
00
Serial No.
Code
Connector
Receiving window
(3) Laseremitting range
8
0100
+
8.8
5028.3
10.3
240
0010
0+
Controller side Sensor head side
Heat-shrinkable tube
Heat-shrinkable
tube50100
Dia
. 7.4
2000
Catalog listing
Shape
−
3.4 3.428
.310
.3
Thru-scan
0 to 50°C
-20 to 70 °C (without freezing)
30 to 85 % RH (without condensation)
9.8 m/s2 (10 to 55 Hz), 2 h each in X, Y and Z directions
IP40 (IEC standard)
Red semiconductor laser (light emission peak 670 nm), JIS Class 1
10 to 300 mm PBZ-CL007V
Detection method and shape
Sensor heads
Sensor heads
Controllers
Controllers
Sensingdistance
7 mm
Sensingwidth
±1 µm
10 to 500 mm
PBZ-CL030H
PBZ-CL030V
30 mm ±5 µm
Repeatability Cataloglisting
0.1%F.S./°C
Compatible sensor
Output update cycle
Analog output
Digital output
Digital input
Communications
Supply power
Power consumption
Operating temperature
Storage temperature
Operating humidity
Vibration resistance
Protection circuit
Material
Mass
PBC-201VN0PBC-201VN2
PBZ-CL007V
1 µm
0 to 7 mm or -3.5 to +3.5 mm
can be selected
500 µs
1 µm
0 to 30 mm or -15 to +15 mm can be selected
10 ms
6 W or less 12 W or less
PBZ-CL030HPBZ-CL030V
Catalog listing
Shape
0 to 45 °C (0 to 35 °C if gang-mounted)
-20 to 70 °C (without freezing)
30 to 85 % RH (without condensation)
2 m/s2 (10 to 55 Hz), 2 h each in X, Y and Z directions
Power reverse connection protection
Case: polycarbonate (PC)
Approx. 350 g
Voltage outputs (2), 1–5 VDC or -5 to +5 VDC
Transistor outputs (4), 21.6–26.4 VDC, 50 mA max.Outputs for judgment, hold, dirt (maintenance)
Off-delay (can be set from 0–70 ms in 10 ms increments)(PBC-201VN2 and PBC-203VN2)
Non-voltage or open collector inputs (2)PBC-201VN0: start input
PBC-201VN2: start input, bottom hold, laser ON/OFF, or center adjustment (selectable)PBC-203VN2: laser ON/OFF (terminal No. 4),
center adjustment (terminal No. 5)
RS-485 (9600/19200/38400/115.2 kbps)
DC21.6 to 26.4V
PBC-203VN2
Min. display unit
Displayrange
PBZ-CL007V PBC-201VN0
PBZ-CL007V PBC-201VN2
PBZ-CL030HPBZ-CL030V PBC-203VN2
Shape Compatible sensor head
24 VDC power, 2-channel connection for sensor head
I/O: 2 A.O., 4 D.O., 2 D.I.
24 VDC power, 2-channel connection for sensor head
I/O: 2 A.O., 4 D.O., 2 D.I.RS-485 communications
Specifications Cataloglisting
Reading
CATALOG LISTINGS
SPECIFICATIONS
(Unit: mm)
3
� PBC-2��VN�
1 10
2 11
3 12
4 13
5 14
6 15
7 16
8 17
9 18
19
PV
SP
OUT
EV1 EV2 OT AT
DISP
OK/READY
SP/EV
PARA ENTLOADER
96
91.5
x 4
4.5
48 100M3.5 terminal screws Preleaded connector cable: approx. 270 mm
Preleaded connector cable: approx. 220 mm
� PBZ-CL030V (Sensor head)
� PBZ-CL030H (Sensor head)
� PBZ-CBL��S-E (Extension code for PBZ-CL030� emitter) � PBZ-CBL��S-R (Extension code for PBZ-CL030� receiver)
* The digits represented by �� are for code length (3 m = 03, 5 m = 05, 7 m = 07, 10 m = 10, and 20 m = 20). Example: a model with a 3 m cable would be written PBZ-CBL03S-�
Emitter Receiver
Terminal arrangement
Emitter Receiver
Controller side Sensor head side Controller side Sensor head side
Heat-shrinkable tube
Heat-shrinkable tube
508
Dia
. 7.4
2020
50 20
L
Heat-shrinkable tube
Heat-shrinkable tube
50
L
208
Dia
. 6
2020
50
Effective beam width
150
8
24
Effe
ctiv
e be
am w
idth
34
Beam axiscenter
15
110 303
5
5010
70
5.5 dia. hole (3)
Effe
ctiv
e re
ceiv
ed li
ght w
idth34
Beam axis center
15
110 30
35
5010
70
5.5 dia. hole (3)
Preleaded connector cable: approx. 200 mm
Effectivereceived light width
150
0.6
24
Eff
ect
ive
bea
m w
idth
150
8
24
Eff
ect
ive
bea
m w
idth
34
12.8110 30
35
5010
70
5.5 dia. hole (3)
12.8
Eff
ect
ive
rece
ive
dlig
ht w
idth
34
110 30
35
5010
70
5.5 dia. hole (3)
Eff
ect
ive
rece
ive
dlig
ht w
idth
150
0.6
24
Beam axis center
Preleaded connector cable: approx. 200 mm
Preleaded connector cable: approx. 200 mm
Preleaded connector cable: approx. 200 mm
For PBC-201VN0, CH1 or CH2 start input can be selected. For PBC-201VN2, in addition, bottom hold, laser ON/OFF or center adjustment can be selected. Terminal Nos. 4 and 5 are dedicated for laser ON/OFF and center adjustment respectively, for both channel 1 and channel 2 of the PBC-203VN2.
Terminal No. Signal Terminal No. Signal123456789
Power, 24 VdcPower, 0V
FGDigital inputDigital input
Digital output 1Digital output 2Digital output 3Digital output 4
CH1 connector cableCH2 connector cable
RS-485 SDARS-485 SDBRS-485 RDARS-485 RDBRS-485 SG
CH1 analog outputCH2 analog output
Analog GND
10111213141516171819
CONTROLLER (Unit: mm)
3 4
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