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Digital Microelectronic Circuits The VLSI Systems Center - BGU Lecture 2+: The Manufacturing Process 1

Digital Microelectronic

Circuits

(361-1-3021 )

Manufacturing Integrated Circuits

Presented by: Mr. Adam Teman

Appendix to

Lecture 2:

Digital Microelectronic Circuits The VLSI Systems Center - BGU Lecture 2+: The Manufacturing Process

Motivation

2

1~3 Years…

Digital Microelectronic Circuits The VLSI Systems Center - BGU Lecture 2+: The Manufacturing Process

Solution

3

Digital Microelectronic Circuits The VLSI Systems Center - BGU Lecture 2+: The Manufacturing Process

The Printing Process

4

Digital Microelectronic Circuits The VLSI Systems Center - BGU Lecture 2+: The Manufacturing Process

The Photolithographic Process

5

Digital Microelectronic Circuits The VLSI Systems Center - BGU Lecture 2+: The Manufacturing Process

Transistor Layout

6

Digital Microelectronic Circuits The VLSI Systems Center - BGU Lecture 2+: The Manufacturing Process

CMOS Process/Transistors

7

Digital Microelectronic Circuits The VLSI Systems Center - BGU Lecture 2+: The Manufacturing Process

Basic Process Flow

8

Lightly Doped Wafer

Grow Field Oxide

Define Wells

Grow Gate Oxide

Deposit Poly Gate

Etch Gates

Implant Source/Drain

Deposit Isolation

Oxide and Contacts

Deposit Metal 1

Deposit Isolation

Oxide and Via 1

Deposit Metal 2

Digital Microelectronic Circuits The VLSI Systems Center - BGU Lecture 2+: The Manufacturing Process

Photos

9