div class=ts-pagebuttonPage 1button div class=ts-image amp-img class=ts-thumb alt=Page 1: A 3-Axis Force Balanced Accelerometer Using a Single Proof · A 3-Axis Force Balanced Accelerometer Using a Single Proof-Mass Mark A Lemkin Bernhard E Boser David Auslander src=https:reader034vdocumentssitereader034viewer20220420165e7477c12bf99b0a2431a7f7html5thumbnails1jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 2button div class=ts-image amp-img class=ts-thumb alt=Page 2: A 3-Axis Force Balanced Accelerometer Using a Single Proof · A 3-Axis Force Balanced Accelerometer Using a Single Proof-Mass Mark A Lemkin Bernhard E Boser David Auslander src=https:reader034vdocumentssitereader034viewer20220420165e7477c12bf99b0a2431a7f7html5thumbnails2jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 3button div class=ts-image amp-img class=ts-thumb alt=Page 3: A 3-Axis Force Balanced Accelerometer Using a Single Proof · A 3-Axis Force Balanced Accelerometer Using a Single Proof-Mass Mark A Lemkin Bernhard E Boser David Auslander src=https:reader034vdocumentssitereader034viewer20220420165e7477c12bf99b0a2431a7f7html5thumbnails3jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 4button div class=ts-image amp-img class=ts-thumb alt=Page 4: A 3-Axis Force Balanced Accelerometer Using a Single Proof · A 3-Axis Force Balanced Accelerometer Using a Single Proof-Mass Mark A Lemkin Bernhard E Boser David Auslander src=https:reader034vdocumentssitereader034viewer20220420165e7477c12bf99b0a2431a7f7html5thumbnails4jpg width=142 height=106 layout=responsive amp-img divdiv