報告人:莊潤郁 日期: 2007 年 5 月 29 日...
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報告人:莊潤郁日期: 2007 年 5 月 29 日
嵌入氣靜壓軸承之氣壓伺服平台介紹
控制組專題討論
NCKU
Department of Mechanical Engineering, National Cheng- Kung University, Taiwan
Fluid Power Control Lab.
NCKUNational Cheng- Kung University, Taiwan
Fluid Power Control Lab.
大綱一 . 緒論
二 . 系統架構
三 . 摩擦力量測
四 . 定位控制
五 . 循跡控制
氣壓缸活塞及缸壁之間的摩擦力 , 使伺服氣壓定位系統在低速時產生黏滯滑動現象 , 以至於難以達到精密之定位及循跡控制
Mechatronics 12 (2002) 813–831A study on tracking position control of pneumatic actuators
期望位置:氣壓缸位置:
時間
位置
一、緒論
NCKU
Department of Mechanical Engineering, National Cheng- Kung University, Taiwan
Fluid Power Control Lab.
NCKUNational Cheng- Kung University, Taiwan
Fluid Power Control Lab.
摩擦力對定位控制的影響 摩擦力對循跡控制的影響
NCKU
Department of Mechanical Engineering, National Cheng- Kung University, Taiwan
Fluid Power Control Lab.
NCKUNational Cheng- Kung University, Taiwan
Fluid Power Control Lab.
二、系統架構嵌入氣靜壓軸承之氣壓伺服平台三視圖
圓形平面氣靜壓軸承結構圖 : 氣靜壓軸承式平台分體圖 :
NCKU
Department of Mechanical Engineering, National Cheng- Kung University, Taiwan
Fluid Power Control Lab.
NCKUNational Cheng- Kung University, Taiwan
Fluid Power Control Lab.
• 供氣壓力 :Ps=2.5bar• 配氣槽寬度 :GW=0mm• 配氣槽深度 :HG=0mm
• 節流器數: n=3• 節流器分布半徑 :R=2mm• 軸承間隙: h=10um
• 節流孔徑: d=0.2mm• 承載能力: FL=1.9526kgf
NCKU
Department of Mechanical Engineering, National Cheng- Kung University, Taiwan
Fluid Power Control Lab.
NCKUNational Cheng- Kung University, Taiwan
Fluid Power Control Lab.
無配氣槽軸承之壓力分布
• 供氣壓力 :Ps=2.5bar• 配氣槽寬度 :GW=0.4mm• 配氣槽深度 :HG=0.04mm
• 節流器數: n=3• 節流器分布半徑 :R=2mm• 軸承間隙: h=10μm
• 節流孔徑: d=0.2mm• 承載能力: FL=3.9168kgf
NCKU
Department of Mechanical Engineering, National Cheng- Kung University, Taiwan
Fluid Power Control Lab.
NCKUNational Cheng- Kung University, Taiwan
Fluid Power Control Lab.
具配氣槽軸承之壓力分布
氣靜壓軸承式氣壓缸剖面圖 :
氣靜壓軸承式氣壓缸之活塞及端蓋配氣槽分布圖 :
內部V型溝槽共五個(中間一個兩端對稱各兩個)
NCKU
Department of Mechanical Engineering, National Cheng- Kung University, Taiwan
Fluid Power Control Lab.
NCKUNational Cheng- Kung University, Taiwan
Fluid Power Control Lab.
氣靜壓軸承式氣壓缸之結構
• 供氣壓力 :Ps=4bar• 偏心量 :e=2μm• 配氣槽寬度 :GW=0mm
• 配氣槽深度 :HG=0mm• 氣室壓力 :PA=PB=0bar• 軸承間隙: h=10μm
• 節流孔徑: d=0.2mm• 承載自重: FL=3.0697kgf
無配氣槽活塞之壓力分布
NCKU
Department of Mechanical Engineering, National Cheng- Kung University, Taiwan
Fluid Power Control Lab.
NCKUNational Cheng- Kung University, Taiwan
Fluid Power Control Lab.
• 供氣壓力 :Ps=4bar• 偏心量 :e=2μm• 配氣槽寬度 :GW=0.5mm
• 配氣槽深度 :HG=0.2mm• 氣室壓力 :PA=PB=0bar• 軸承間隙: h=10μm
• 節流孔徑: d=0.2mm• 承載自重: FL=1.1864kgf
具配氣槽活塞之壓力分布
NCKU
Department of Mechanical Engineering, National Cheng- Kung University, Taiwan
Fluid Power Control Lab.
NCKUNational Cheng- Kung University, Taiwan
Fluid Power Control Lab.
NCKU
Department of Mechanical Engineering, National Cheng- Kung University, Taiwan
Fluid Power Control Lab.
NCKUNational Cheng- Kung University, Taiwan
Fluid Power Control Lab.
系統架構示意圖
微電腦
氣壓伺服閥
氣壓源過濾器
解碼卡
光學尺
調壓閥
調壓閥
氣靜壓氣浮平台
嵌入氣靜壓軸承之氣壓缸
介面卡DA/AD
調壓閥
NCKU
Department of Mechanical Engineering, National Cheng- Kung University, Taiwan
Fluid Power Control Lab.
NCKUNational Cheng- Kung University, Taiwan
Fluid Power Control Lab.
介面卡DA/AD
解碼卡
微電腦
精密供壓源
精密供壓源
放大器
氣壓伺服閥
氣靜壓氣浮平台
荷重計
光學尺
外力源氣壓缸
滑軌
液壓穩速器
三、摩擦力量測摩擦力量測平台系統架構圖
氣壓缸摩擦力與運動速度之關係圖 系統摩擦力與運動速度之關係圖
0
1
2
3
4
5
6
7
1 2 3 4 5 6
速度(mm/s)摩擦力(N)
0
0.5
1
1.5
2
2.5
3
1 2 3 4 5 6
速度(mm/s)
摩擦力(N)
NCKU
Department of Mechanical Engineering, National Cheng- Kung University, Taiwan
Fluid Power Control Lab.
NCKUNational Cheng- Kung University, Taiwan
Fluid Power Control Lab.
摩擦力量測結果
四、定位控制雙模自調式模糊控制方塊圖
NCKU
Department of Mechanical Engineering, National Cheng- Kung University, Taiwan
Fluid Power Control Lab.
NCKUNational Cheng- Kung University, Taiwan
Fluid Power Control Lab.
Dead-zone compensatorr(k)
+
ue(k)
MU
MU
e
u
y(k)
MEe
Ge
Gv
FuzzyInference
Engine
Fuzzy Rule Base 1
Self-tuning Fuzzy Controller
uf (k)
Plant
ka
kb
ud
+
Guα
MEe
Fuzzy Rule Base 2
Gain rule determi-nation
Gain Tuning Mechanism
Fuzzification Defuzzification
Fuzzification Defuzzification
de(k)
(k)
M
m
Servo valve
u(k)t
+
+ut
e(k)
ba
uc
e
uc (k)
a'b'
u(k)d
0 1 2 3 4 5 6 7 8 9 10
5
10
15
20
25
30
時間(s)
位置(mm)
0 1 2 3 4 5 6 7 8 9 10-0.1
0
0.1
0 1 2 3 4 5 6 7 8 9 10-0.1
0
0.1
0 1 2 3 4 5 6 7 8 9 10-0.1
0
0.1
0 1 2 3 4 5 6 7 8 9 10-0.1
0
0.1
0 1 2 3 4 5 6 7 8 9 10-0.1
0
0.1
時間(s)
誤差(um)
Ess = 0.02um
Ess = -0.04um
Ess = 0.02um
Ess = -0.02um
Ess = 0.04um
NCKU
Department of Mechanical Engineering, National Cheng- Kung University, Taiwan
Fluid Power Control Lab.
NCKUNational Cheng- Kung University, Taiwan
Fluid Power Control Lab.
單步階定位控制響應圖
NCKU
Department of Mechanical Engineering, National Cheng- Kung University, Taiwan
Fluid Power Control Lab.
NCKUNational Cheng- Kung University, Taiwan
Fluid Power Control Lab.
循跡控制方塊圖
五、循跡控制
r(k) e(k) y(k)
Ge
Gv
FuzzyInference
Engine
Fuzzy Rule Base
uf (k)Plant
uMid
+
uGu
Fuzzification Defuzzification
ds(k)
(k)
(k)α
dtd
s(k)
+
+
++
dtd
de(k)
dtd
Kv
Ke
Z-1
dui(k)Ku+
Switchlogic
e
uvuv
Fuzzy sliding controller
PI-like Fuzzy controller
Fuzzy
Inference
Engine
Fuzzy Rule Base
Fuzzification Defuzzification
ui(k)
NCKU
Department of Mechanical Engineering, National Cheng- Kung University, Taiwan
Fluid Power Control Lab.
NCKUNational Cheng- Kung University, Taiwan
Fluid Power Control Lab.
模糊滑動控制器
由於平台的低摩擦特性,加上氣體的可壓縮性,造成循跡容易發生抖動的現象,所以我們使用模糊滑動控制器,再有考慮加速度誤差的情形下可有效的降低振動現象。我們取滑動平面方程式: 。目標是滑動平面方程式為 0 ,即 ,求解 ODE可得 , 即位置輸出會以 之速度收斂到目標值,但由於循跡時目標值隨時間改變,以致無法即時使誤差收斂到 0 。
ZE PBNB NS PS
0-1 1
S(k)
ZE PBNB NS PS
0-1 1
dS(k)
ZE PBNB NS PS
0-1 1
u (k)
NM PM
f
NB NS ZE PBPS
NB
NS
ZE
PS
PB
NB
NBNB
ZE
ZE
ZE
ZE
ZE
PB PB
PB
PS
PS
PS
PS
NS
NS
NS
NS
NM
PM
suds
NM
NM
PM
PM
S e e 0e e
1 * te C e te
NCKU
Department of Mechanical Engineering, National Cheng- Kung University, Taiwan
Fluid Power Control Lab.
NCKUNational Cheng- Kung University, Taiwan
Fluid Power Control Lab.
edude
ZE PN
N N
N
N
ZE
P
ZE
ZE
ZE
P
P P
e (k)
ZE PN
0-0.2 1-1 0.2
PI 型模糊控制器
相較於 PD 型模糊控制器 ,PI 型模糊控制器有較慢的響應速度,且能有效的消除偏移的誤差。
de (k)
ZE PN
0-0.2 1-1 0.2
du (k)
ZE PN
0-0.2 1-1 0.2
NCKU
Department of Mechanical Engineering, National Cheng- Kung University, Taiwan
Fluid Power Control Lab.
NCKUNational Cheng- Kung University, Taiwan
Fluid Power Control Lab.
弦波端點補償
弦波的端點處速度變化量大 , 速度由高變低然後轉向再由低速變高速的過程中,低速時的摩擦力較大,容易使控制命令在低速時,造成較大的誤差,故我們在平台速度小於 時加入誤差補償 :
e
uv
min v deu k e when y V
其中
為加入端點補償的速度邊界
minV
NCKU
Department of Mechanical Engineering, National Cheng- Kung University, Taiwan
Fluid Power Control Lab.
NCKUNational Cheng- Kung University, Taiwan
Fluid Power Control Lab.
0 2 4 6 8 10
-1
0
1
0 2 4 6 8 10-0.2
0
0.2
位置
(mm
)誤差
(mm
)
時間(sec)
1 3 5 7 9
1 3 5 7 9
循跡結果圖0.2Hz/1mm sin wave
正弦波位置循跡實驗結果
利用所設計之控制器做正弦波循跡控制,在振幅 1mm頻率 0.2HZ下可有效控制
最大誤差 18um週期平均誤差 4.3um
Thanks for Your Attention!
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