afm systems 7 - unipr.it and modes.pdf · 2012. 2. 28. · 16 17 insight 3d afm production-based 3d...
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67
AFM
Syste
ms
Inn
ova
tio
n w
ith
In
tegr
ity
AF
M P
rob
es
-
89
AFM
Syste
ms —
Tab
le o
f C
on
ten
ts
Dim
en
sio
n F
astS
can
AFM
10
Dim
en
sio
n Ico
n A
FM
11
Dim
en
sio
n E
dg
e A
FM
12
Mu
ltiM
od
e 8
AFM
13
Inn
ova A
FM
14
Bio
Sco
pe C
ata
lyst
AFM
15
Inte
gra
ted
AFM
-Ram
an
Im
ag
ing
Syste
ms
16
InS
igh
t 3D
AFM
17
Dim
en
sio
n A
FP
18
ww
w.b
ruke
rAF
Mp
rob
es.c
om
Th
e A
FM
Perf
orm
an
ce a
nd
Tech
no
log
y L
ead
er
ruke
r ato
mic
forc
e m
icro
scopes (A
FM
s) are
used in
the fore
front of
nanoscale
researc
h a
nd d
iscove
ry in
life
scie
nce, m
ate
rials
scie
nce,
sem
iconducto
r, e
lectr
och
em
istr
y, a
nd m
any o
ther applic
ations. B
ruke
r has d
eve
loped p
roprieta
ry, applic
ation-s
pecifi
c p
roduct suites that deliv
er
unpara
llele
d a
ccura
cy a
nd resolu
tion a
t price p
oin
ts for eve
ry b
udget. B
ased o
n
decades o
f experience in
AFM
innova
tion a
nd d
esig
n o
ptim
ization, our sys
tem
s
make
the tech
nolo
gy e
asie
r and m
ore
accessib
le to a
ll A
FM
users
.
Utiliz
ing o
ver 20 im
agin
g m
odes —
inclu
din
g the revo
lutionary
tech
nolo
gy
adva
nces o
f Peak F
orc
e T
appin
g®, S
canA
sys
t® a
nd P
eakForc
e Q
NM
® —
Bru
ker’s
AFM
s, pro
bes, and a
ccessories e
nable
incre
ased p
roductivity,
help
ing y
ou
obta
in q
uantifiable
results faste
r and e
asie
r. B
ruke
r is
uniq
uely
equip
ped to o
ffer
a c
om
ple
te, hig
h-p
erf
orm
ance s
olu
tion t
ailo
red to y
our specifi
c a
pplic
ation. O
ur
unriva
led lo
cal A
pplic
ations a
nd Tech
nic
al s
pecia
lists
will
assis
t yo
u e
very
ste
p
alo
ng the w
ay, fr
om
pro
duct, p
robe a
nd a
ccessory
sele
ction thro
ugh a
pplic
ation
support
and n
ext-genera
tion tech
niq
ue d
eve
lopm
ent.
B 1992 —
Tappin
gM
od
e™
an
d A
FM
imagin
g in
liq
uid
s
1994 —
Clo
sed-lo
op
SP
M
—
First
AFM
fo
r lif
e s
cie
nce
applic
atio
ns (
Bio
Sco
pe
™)
1995 —
PhaseIm
agin
g™
and L
iftM
ode
™
1999 —
Ele
ctr
ical applic
ation m
odule
s
20
00 —
10X
faste
r im
ag
ing
20
01 —
Hig
h-t
em
pe
ratu
re p
oly
me
r
imagin
g
20
02 —
AFM
for
forc
e s
pe
ctr
osco
py
(Pic
oForc
e®)
20
03 —
Tors
ional R
eso
nan
ce
mo
de
(T
R-M
od
e™
)
20
06
— S
ing
le h
arm
on
ic im
ag
ing
20
08
— H
arm
on
iX® r
eal-tim
e m
ate
rial
pro
pe
rty m
ap
pin
g
20
09
— P
eak F
orc
e T
ap
pin
g
—
PeakForc
e Q
NM
Im
agin
g M
ode
—
Scan
Asyst
Imag
ing
Mo
de
2010
—
PeakFo
rce
TU
NA
™ q
uan
tita
tive
n
an
oscale
ele
ctr
ical
ch
ara
cte
riza
tio
n
2011
—
Wo
rld
’s f
aste
st,
hig
h-r
eso
lutio
n
AFM
(D
ime
nsio
n F
astS
can
™)
—
Hig
h-s
peed, A
FM
self-o
ptim
izin
g
imag
e m
od
e (
Scan
Asyst-
HR
)
—
IR
IS™
AF
M-R
am
an
in
teg
ratio
n
Th
e B
ruker
Inn
ovati
on
Tim
elin
e
-
10
11
Dim
en
sio
n F
astS
can
AFM
T
he B
en
chm
ark
fo
r A
FM
Sp
eed
Featu
res &
Ben
efi
ts
Extr
em
e Im
ag
ing
Sp
eed
on
An
y S
am
ple
Hig
h-R
eso
lutio
n Im
ag
ing
at H
igh
-Sp
eed
Sca
n R
ate
s
Scan
Asyst
for
Ease
o
f U
se
he D
imensio
n F
astS
can
™ A
tom
ic F
orc
e M
icro
scope (A
FM
) deliv
ers
, fo
r th
e fi
rst
tim
e, extr
em
e im
agin
g s
peed w
ithout
sacrificin
g legendary
D
imensio
n Icon
® r
esolu
tion a
nd p
erf
orm
ance. T
his
bre
akth
rough innovation
enable
s r
adic
ally
faste
r tim
e t
o p
ublis
hable
data
for
all
levels
of
AFM
expert
ise. N
ow
, w
ith t
he D
imensio
n F
astS
can s
yste
m y
ou a
chie
ve
imm
edia
te A
FM
im
ages w
ith t
he e
xpecte
d h
igh r
esolu
tion o
f a h
igh-
perf
orm
ance A
FM
, all
in o
ne s
yste
m. W
heth
er
you s
can a
t >
125H
z w
hen
surv
eyin
g a
sam
ple
to fi
nd t
he r
egio
n o
f in
tere
st,
or
at
tim
e r
ate
s o
f 1-s
econd
per
image f
ram
e in a
ir o
r fluid
, FastS
can r
edefines t
he A
FM
experience.
Dim
ensio
n F
astS
can is t
he fi
rst
AFM
to a
chie
ve t
he p
erf
ect
bala
nce o
f scan-
speed, re
solu
tion, accura
cy,
drift
, and n
ois
e, m
akin
g f
ast
scannin
g a
tom
ic
forc
e m
icro
scopy a
com
merc
ial re
alit
y. C
onta
ct
Bru
ker
to learn
how
you
can u
pgra
de y
our
Dim
ensio
n Icon t
o a
FastS
can o
r explo
re h
ow
you c
an
measure
your
sam
ple
s u
sin
g t
he B
ruker
leadin
g A
FM
tech
nolo
gy.
T
bru
kerA
FM
pro
bes.c
om
/FastS
can
Ap
plicati
on
s –
See
FastS
can
Ap
plicati
on
V
ideo
s a
t
ww
w.b
ruker.co
m/f
asts
can
Dyn
am
ics S
tud
ies a
t
Nan
om
ete
r R
eso
luti
on
Mate
rials
Po
lym
er
Ch
em
istr
y
Lif
e S
cie
nces
M
easu
rem
en
ts
Dim
en
sio
n I
co
n A
FM
AFM
Perf
orm
an
ce a
nd
Pro
du
cti
vit
y R
ed
efi
ned
Featu
res &
Ben
efi
ts
Ult
ima
te P
erf
orm
an
ce
Exce
ptio
nal P
rod
uct
ivity
Sca
nA
sy
st®
fo
r
Ea
se
of
Use
PeakFo
rce Q
NM
® f
or
N
an
oscale
Mech
an
ical
M
ap
pin
g
Ap
plicati
on
s
Mate
rials
Po
lym
er
Ch
em
istr
y
Ele
ctr
ical M
ate
rials
Ch
ara
cte
riza
tio
n
Lif
e S
cie
nces
M
easu
rem
en
ts
Ele
ctr
o C
hem
istr
y A
FM
Heati
ng
an
d C
oo
lin
g
S
tud
ies
he D
imensio
n Icon
® e
sta
blis
hed n
ew
levels
of
perf
orm
ance in A
FM
, fu
nctionalit
y a
nd A
FM
accessib
ility
to n
anoscale
researc
hers
in s
cie
nce
and industr
y. T
he u
ltra
-sta
ble
Icon p
latf
orm
enable
s p
revio
usly
unach
ievable
m
easure
ments
with u
ltra
low
drift
and t
he low
est
tip/s
am
ple
forc
e c
ontr
ol
of
any c
om
merc
ially
availa
ble
open-p
latf
orm
, tip-s
cannin
g A
FM
. N
ew
AFM
re
searc
hers
can n
ow
perf
orm
exceptionally
repeata
ble
, hig
h-r
esolu
tion
experim
ents
that
pre
vio
usly
were
only
accessib
le b
y h
ighly
experienced
users
. Ic
on a
llow
s n
ew
and e
xperienced u
sers
to a
chie
ve a
rtifact-
free
images in m
inute
s inste
ad o
f hours
, enablin
g incre
ased p
roductivity.
If y
ou a
re a
usin
g a
n o
lder
model D
imensio
n® A
FM
, ple
ase c
onta
ct
Bru
ker
to
see f
or
yours
elf h
ow
Icon is a
chie
vin
g t
he h
ighest
resolu
tion im
ages p
ossib
le
in a
tip
-scannin
g s
yste
m, all
in m
inute
s inste
ad o
f hours
.
T
bru
ke
rAF
Mp
rob
es.c
om
/Ico
n
-
12
13
Mu
ltiM
od
e 8
AFM
H
igh
est
Reso
luti
on
an
d U
nm
atc
hed
Pu
blicati
on
Reco
rd
Featu
res &
Ben
efi
ts
Su
peri
or
Reso
luti
on
an
d P
erf
orm
an
ce
Vers
ati
lity
fo
r W
idest
Ran
ge o
f A
pp
licati
on
s
Pro
ven
Pro
du
cti
vit
y
an
d R
eliab
ilit
y
Sca
nA
sy
st®
fo
r
Ea
se
of
Use
Pe
akFo
rce
QN
M®
fo
r
Ma
pp
ing
Me
cha
nic
al
P
rop
ert
ies
Ap
plicati
on
s
Ma
teri
als
Scie
nce
Re
se
arc
h
Lif
e S
cie
nces
M
easu
rem
en
ts
Ele
ctro
chem
istr
y S
tud
ies
hough b
est know
n for its p
erf
orm
ance le
adin
g resolu
tion, to
day
’s
MultiM
ode
® 8
leve
rages B
ruke
r’s e
xclu
siv
e P
eak F
orc
e T
appin
g® tech
nolo
gy
to p
rovid
e n
ew
info
rmation, fa
ste
r re
sults a
nd g
reatly im
pro
ved e
ase o
f use. B
ruke
r’s e
xclu
siv
e S
canA
sys
t m
ode m
ake
s im
agin
g e
asie
r, faste
r, a
nd
more
consis
tent by d
irectly c
ontr
olli
ng the tip
-sam
ple
inte
raction forc
e a
nd
auto
matically
optim
izin
g im
agin
g p
ara
mete
rs. A
nd n
ow
ScanA
sys
t-H
R e
nable
s
up to 6
X faste
r scannin
g for eve
n g
reate
r pro
ductivity.
New
quantita
tive
mate
rial
pro
pert
y m
appin
g is
made p
ossib
le u
sin
g P
eakForc
e Q
NM
, w
hic
h a
naly
zes e
ach
tip-s
am
ple
inte
raction to e
xtr
act nanom
ech
anic
al p
ropert
ies in
clu
din
g m
odulu
s,
adhesio
n, defo
rmation, and d
issip
ation. T
his
can b
e c
om
bin
ed w
ith the n
ew
PeakForc
e T
UN
A™ m
ode to p
erf
orm
conductivity m
appin
g o
n e
ven the m
ost
delic
ate
sam
ple
s. W
ith these featu
res a
nd m
any o
thers
, th
e M
ultiM
ode 8
has
the v
ers
atilit
y to h
elp
you e
xcel i
n v
irtu
ally
any fi
eld
of re
searc
h.
Conta
ct
Bru
ker
to fi
nd o
ut
how
you c
an u
pgra
de t
o t
he M
ultiM
ode 8
at
a
fraction o
f th
e c
ost
of
a n
ew
sys
tem
.
T
bru
ke
rAF
Mp
rob
es.c
om
/Mu
ltiM
od
e8
Dim
en
sio
n E
dg
e A
FM
T
he P
erf
orm
an
ce a
nd
Valu
e A
FM
So
luti
on F
eatu
res &
Ben
efi
ts
Best
Valu
e C
lose
d-L
oo
p
A
FM
Accu
rate
, H
igh
-
Reso
luti
on
Resu
lts
So
luti
on
s f
or
All
A
pp
licati
on
s o
n A
ny
S
am
ple
Ad
van
ced
Nan
oscale
Cap
ab
ilit
ies f
or
Beg
inn
ers
an
d E
xp
ert
s
Ap
plicati
on
s
Mate
rials
Ch
ara
cteri
zatio
n
Po
lym
ers
Ch
em
istr
y
Ele
ctr
ical
Mate
rials
Ch
ara
cte
riza
tio
n
Lif
e S
cie
nces
M
easu
rem
en
ts
bru
kerA
FM
pro
bes.c
om
/Ed
ge
he D
imensio
n® E
dge
™ incorp
ora
tes B
ruker’s late
st
tech
nolo
gy a
dvances
to p
rovid
e t
he h
ighest
levels
of
perf
orm
ance, fu
nctionalit
y, a
nd
accessib
ility
in its
cla
ss. B
ased o
n t
he u
ltim
ate
Dim
ensio
n Icon
® s
canner,
the E
dge is a
larg
e-s
am
ple
pla
tform
desig
ned f
rom
top t
o b
ott
om
to d
eliv
er
the p
erf
orm
ance n
ecessary
to r
each
decis
ions o
n m
ate
rials
form
ula
tion a
nd
desig
n, or
ach
ieve p
ublic
ation-r
eady d
ata
in m
inute
s inste
ad o
f hours
. It
does
all
of
this
at
price p
oin
ts w
ell
belo
w e
xpecta
tions f
or
such
perf
orm
ance.
In a
dditio
n, in
tegra
ted v
isual fe
edback
and p
reconfigure
d s
ett
ings e
nable
expert
-level re
sults s
imply
and c
onsis
tently,
makin
g t
he m
ost
advanced
larg
e-s
am
ple
ato
mic
forc
e m
icro
scopy c
apabili
ties a
nd t
ech
niq
ues a
vaila
ble
to
every
facili
ty a
nd u
ser. If
you a
lready o
wn a
n o
lder
model D
imensio
n®
AFM
, B
ruker
would
lik
e t
o h
elp
you identify
an u
pgra
de p
ath
to a
bra
nd n
ew
D
imensio
n E
dge, so y
ou c
an c
ontinue t
o e
xperience t
he b
est
availa
ble
AFM
perf
orm
ance a
nd s
erv
ice.
T
-
14
15
Bio
Sco
pe C
ata
lyst
AFM
C
om
ple
te In
teg
rati
on
of A
FM
an
d L
igh
t M
icro
sco
py
Featu
res &
Ben
efi
ts
Un
co
mp
rom
ised
Perf
orm
an
ce f
rom
Bo
th
Tech
niq
ues
Incre
ased
Pro
du
cti
vit
y
an
d E
ase o
f U
se
Sim
ple
, E
ffecti
ve
So
luti
on
s f
or
Bio
log
ical
S
am
ple
s
Ap
plicati
on
s
Liv
e C
ell Im
ag
ing
Fo
rce a
nd
Bio
-
Mech
an
ical S
tud
ies
Hig
h-R
eso
luti
on
,
M
ole
cula
r-S
cale
Im
ag
ing
he B
ioS
cope C
ata
lyst™
has b
een d
esig
ned f
rom
top t
o b
ott
om
to m
ake
it e
asie
r th
an e
ver
to r
ealiz
e t
he f
ull
benefits
of
com
bin
ing A
FM
and li
ght
mic
roscopy.
Its
uniq
ue d
esig
n d
eliv
ers
hig
h-p
erf
orm
ance A
FM
results for
both
im
agin
g a
nd forc
e m
easure
ment
applic
ations w
hile
inte
gra
ting s
eam
lessly
w
ith s
tandard
inve
rted li
ght
mic
roscopes. B
ruke
r’s e
xclu
siv
e M
IRO
® s
oft
ware
enable
s t
rue f
unctional i
nte
gra
tion o
f th
e t
wo t
ech
niq
ues, allo
win
g A
FM
im
agin
g a
nd forc
e c
urv
es t
o b
e g
uid
ed b
y o
ptical i
mages t
o a
uto
matically
genera
te s
patially
regis
tere
d a
nd o
verlaid
optical a
nd A
FM
images.
The f
ull
functionalit
y o
f th
e B
ioS
cope C
ata
lyst
is m
ade m
ore
pro
ductive
with a
va
riety
of
ease-o
f-use featu
res. T
he N
anoS
cope
® s
oft
ware
pre
sents
a s
imple
w
ork
flow
to h
elp
guid
e u
sers
thro
ugh t
heir m
easure
ments
, and t
he C
ata
lyst
hard
ware
is d
esig
ned t
o m
ake
such
routine t
asks a
s p
robe e
xchange a
nd
laser
alig
nm
ent
sim
ple
and fast.
Bru
ker’s p
roprieta
ry S
canA
sys
t® M
ode w
ith
auto
matic im
age o
ptim
ization t
ech
nolo
gy p
rovid
es e
asie
r, faste
r, a
nd m
ore
consis
tent
imagin
g r
esults. It
s p
erf
orm
ance, pro
ductivity,
and in
tegra
ted
desig
n m
ake
the B
ioS
cope C
ata
lyst
the b
est,
easie
st
to u
se li
fe s
cie
nce A
FM
av
aila
ble
today
.
T
bru
ke
rAF
Mp
rob
es.c
om
/Ca
taly
st
Inn
ova A
FM
S
up
eri
or
Researc
h P
erf
orm
an
ce a
nd
Vers
ati
lity
Featu
res &
Ben
efi
ts
Hig
h-R
eso
luti
on
Clo
sed
-Lo
op
Syste
m
Fast,
Easy T
ip a
nd
Sam
ple
Exch
an
ge
Vers
ati
lity
an
d V
alu
e
Po
werf
ul R
esearc
h
Fle
xib
ilit
y
Ap
plicati
on
s
Mate
rials
Ch
ara
cteri
zatio
n
Nan
olith
og
rap
hy
Lif
e S
cie
nces
M
easu
rem
en
ts
Po
lym
er
Ch
em
istr
y
Devic
e C
hara
cte
riza
tio
n
bru
kerA
FM
pro
bes.c
om
/In
no
va
he Innova intr
oduces a
n u
nm
atc
hed c
om
bin
ation o
f pro
ductivity,
ease
of
use, and a
pplic
ation fl
exib
ility
for
the m
ost
dem
andin
g s
cie
ntific
researc
h, all
at
a m
odera
te c
ost.
It
off
ers
a u
niq
ue, sta
te-o
f-th
e-a
rt
clo
sed-loop s
can lin
eariza
tion s
yste
m t
hat
ensure
s a
ccura
te m
easure
ments
and n
ois
e levels
appro
ach
ing t
hose o
f open-loop o
pera
tion. In
nova d
eliv
ers
ato
mic
resolu
tion w
ith g
reat
ease a
nd s
cans u
p t
o 9
0 m
icro
ns w
ithout
the
need t
o c
hange s
canner
hard
ware
. The inte
gra
ted, hig
h-r
esolu
tion c
olo
r optics a
nd p
rogra
mm
able
, m
oto
rize
d Z
-sta
ge m
ake fi
ndin
g featu
res a
nd
changin
g t
ips o
r sam
ple
s f
ast
and e
asy.
T
-
16
17
InS
igh
t 3D
AFM
Pro
du
ctio
n-B
ase
d 3
D R
efe
ren
ce M
etr
olo
gy fo
r 45n
m a
nd
Belo
w
Featu
res &
Ben
efi
ts
Un
iqu
e, N
on
-Dest
ruct
ive,
3
D M
etr
olo
gy,
(LE
R,
LW
R,
SW
A)
Hig
h-T
hro
ug
hp
ut D
ep
th
M
etr
olo
gy fo
r Pro
du
ctio
n
an
d P
roce
ss D
evelo
pm
en
t
Fa
b-B
ase
d,
Pro
du
cti
on
-
Le
ve
l R
eli
ab
ilit
y a
nd
Au
tom
ati
on
Ap
plicati
on
s
Refe
ren
ce M
etr
olo
gy
for
CD
-SE
M a
nd
Op
tical C
D
3D
Ch
ara
cte
riza
tio
n o
f
A
dvan
ced
Lit
ho
gra
ph
y
Pro
du
ctio
n-B
ase
d D
ep
th
an
d C
D M
etr
olo
gy f
or
Etc
h P
rocesses
No
n-D
estr
ucti
ve
Measu
rem
en
t o
f
C
on
tacts
, Lin
e E
nd
an
d
Is
ola
ted
Str
uctu
res
Ap
plicati
on
s in
Sem
ico
nd
ucto
r,
P
ho
tom
ask
, Data
Sto
rag
e
an
d L
ED
in
du
str
ies
bru
ke
rAF
Mp
rob
es.c
om
/In
Sig
ht3
DA
FM
he InS
ight®
3D
AFM
pro
vid
es t
he u
npara
llele
d a
ccura
cy a
nd p
recis
ion
required f
or
non-d
estr
uctive, hig
h-r
esolu
tion 3
D m
easure
ments
of
critical
sem
iconducto
r fe
atu
res. It
enable
s a
n e
ntire
ly n
ew
appro
ach
to in-lin
e 3
D
metr
olo
gy,
deliv
ering b
oth
uniq
ue 3
D M
etr
olo
gy (LW
R, LE
R) and t
he low
est
measure
ment
uncert
ain
ty f
or
CD
, D
epth
and S
idew
all
Angle
on c
ritical
layers
, such
as S
hallo
w T
rench
Isola
tion, G
ate
and F
inFet
str
uctu
res. T
hese
featu
res a
llow
the s
yste
m t
o o
verc
om
e t
he lim
itations o
f C
D-S
EM
and
Optical C
D t
ech
nolo
gie
s, w
hic
h s
uff
er
from
bia
s v
ariation issues t
hat
negatively
im
pact
CD
measure
ments
.
T
Featu
res &
Ben
efi
ts
Easy-t
o-U
se A
FM
s f
or
Sp
ectr
osco
py i
n
M
ate
rials
an
d L
ife
S
cie
nces
Hig
hest
Perf
orm
an
ce,
M
ost
Co
mp
lete
AFM
Cap
ab
ilit
ies
TE
RS
-Read
y A
FM
-
Ram
an
Syste
m
In
teg
rati
on
Tru
e N
an
oscale
Sp
ectr
osco
py Targ
ete
d
to
Yo
ur
Ap
plicati
on
Ap
plicati
on
s
Nan
oscale
Mate
rials
Ch
ara
cte
riza
tio
n
Lif
e S
cie
nces
M
easu
rem
en
ts
Tip
-En
han
ced
Ram
an
Sp
ectr
osco
py (
TE
RS
)
Bio
mate
rials
bru
kerA
FM
pro
bes.c
om
/IR
IS
ata
lyst-
IRIS
(In
tegra
ted A
FM
-Ram
an Im
agin
g S
yste
m) and Innova-IR
IS
syste
ms e
nable
researc
hers
to e
asily
and a
fford
ably
com
bin
e c
hem
ical
or
cry
sta
llogra
phic
info
rmation f
rom
Ram
an s
pectr
oscopy,
at
hig
h s
patial
and s
pectr
al re
solu
tion, w
ith t
he m
ost
advanced n
anoscale
mech
anic
al,
ele
ctr
ical, a
nd t
herm
al A
FM
chara
cte
riza
tion. T
he IR
IS™
models
levera
ge t
he
uniq
ue c
apabili
ties o
f th
e C
ata
lyst™
and Innova
® p
latf
orm
s t
o p
rovid
e T
ER
S-
ready p
erf
orm
ance t
hat
can b
e t
ailo
red t
o s
pecifi
c a
pplic
ation r
equirem
ents
w
ithout
sacrificin
g e
ase o
f use. T
he C
ata
lyst-
IRIS
is c
om
patible
with Z
eis
s,
Leic
a, O
lym
pus, and N
ikon invert
ed o
ptical m
icro
scopes, and b
oth
syste
ms
fully
support
leadin
g R
am
an instr
um
ents
fro
m R
enis
haw
, H
OR
IBA
S
cie
ntific, and P
rinceto
n Instr
um
ents
.
CInte
gra
ted
AFM
-Ram
an
Im
ag
ing
Syst
em
s
Seam
less In
teg
rati
on
of A
FM
an
d R
am
an
Sp
ectr
osco
py
-
18
19
Imag
ing
Mo
des
Inn
ova
tio
n w
ith
In
tegr
ity
AF
M P
rob
es
Dim
en
sio
n A
FP
C
hem
ical M
ech
an
ical P
lan
ari
zatio
n a
nd
Etc
h M
etr
olo
gy a
t 65n
m
Featu
res &
Ben
efi
ts
Faste
st
CM
P P
rofi
lin
g
T
hro
ug
hp
ut
Excep
tio
nal
Pro
du
cti
vit
y
Fab
-Based
,
P
rod
ucti
on
-Level
R
eli
ab
ilit
y a
nd
Au
tom
ati
on
Ap
plicati
on
s
CM
P P
rocess
C
hara
cte
riza
tio
n (
CU
,
W
, S
TI
Die
lectr
ic,
Po
ly)
Ind
ustr
y-L
ead
ing
Rep
eata
bil
ity f
or
CM
P
an
d E
tch
Dep
th
M
etr
olo
gy
Pro
fili
ng
an
d H
igh
-
Asp
ect-
Rati
o D
ep
th
M
easu
rem
en
ts i
n a
Sin
gle
Pla
tfo
rm
Ap
pli
cati
on
s i
n
S
em
ico
nd
ucto
r, D
ata
Sto
rag
e a
nd
LE
D
In
du
str
ies
bru
kerA
FM
pro
bes.c
om
/DA
FP
he D
imensio
n® A
FP
is t
he w
orld’s
only
fab-b
ased m
etr
olo
gy t
ool
specifi
cally
desig
ned f
or
both
CM
P p
rofilin
g a
nd e
tch d
epth
metr
olo
gy
for
curr
ent
and a
dvanced t
ech
nolo
gy n
odes. T
he s
yste
m c
om
bin
es t
he
superb
resolu
tion o
f an A
FM
with t
he long-s
can c
apabili
ty o
f an a
tom
ic
forc
e p
rofile
r to
monitor
etc
h d
epth
and d
ishin
g a
nd e
rosio
n o
n s
ubm
icro
n
featu
res w
ith u
nsurp
assed r
epeata
bili
ty. R
epla
cin
g c
ostly w
afe
r cro
ss-
sectionin
g, th
e D
imensio
n A
FP
off
ers
the h
ighest
perf
orm
ance a
vaila
ble
for
devic
e c
hara
cte
riza
tion.
T
-
20
21
Ap
plicati
on
s —
Tab
le o
f C
on
ten
ts
SP
M O
pera
tio
n
21
Co
nta
ct M
od
e A
FM
22
Tap
pin
gM
od
e A
FM
23
Peak
Fo
rce Tap
pin
g
24
Sca
nA
syst
25
Tap
pin
gM
od
e &
Ph
ase
Imag
ing
26
PeakF
orc
e Q
NM
27
LiftM
od
e
28
Mag
neti
c Fo
rce M
icro
sco
py -
MFM
29
Ele
ctro
stati
c Fo
rce M
icro
sco
py -
EFM
30
Su
rface
Po
ten
tial M
icro
sco
py -
SP
oM
31
Sca
nn
ing
Tu
nn
elin
g M
icro
sco
py -
ST
M
32
Sca
nn
ing
Ele
ctro
chem
ical
Po
ten
tial M
icro
sco
py
- SE
CP
M
33
Tors
ion
al R
eso
nan
ce
34
PeakF
orc
e T
UN
A &
Co
nd
uct
ive A
FM
35
Sca
nn
ing
Sp
read
ing
Resi
stan
ce M
icro
sco
py -
SS
RM
36
Sca
nn
ing
Cap
aci
tan
ce M
icro
sco
py -
SC
M
37
Sca
nn
ing
Th
erm
al M
icro
sco
pie
s
38
Pie
zore
spo
nse
Mic
rosc
op
y
39
Cri
tica
l Dim
ensi
on
Ato
mic
Fo
rce
Mic
rosc
op
y - C
DA
FM
40
Deep
Tre
nch
Mo
de
41
SP
M O
pera
tio
n Pro
tein
mo
lecu
les i
n
liq
uid
be
fore
an
d a
fte
r fo
rce
pu
llin
g
wit
h A
FM
.
Scannin
g P
robe M
icro
scopy (S
PM
) is
a t
ech
niq
ue t
o p
rovid
e s
patially
lo
caliz
ed t
hre
e-d
imensio
nal in
form
ation b
y r
aste
r scannin
g a
sharp
pro
be
and a
surf
ace in c
lose p
roxim
ity r
ela
tive t
o e
ach
oth
er
and m
onitoring
pro
be-s
am
ple
inte
ractions. D
ependin
g o
n t
he inte
raction, a v
ariety
of
surf
ace p
ropert
ies c
an b
e m
easure
d in a
dditio
n t
o t
opogra
phic
in
form
ation, such
as e
lectr
ical, m
agnetic, and n
anom
ech
anic
al data
.
The m
ain
SP
M s
can m
odes a
re c
onta
ct
mode, T
appin
gM
ode
™, and
Peak F
orc
e T
appin
g® m
ode, and t
hese b
uild
the f
oundation o
f all
advanced s
cannin
g t
ech
niq
ues.
Z X Y
Fe
ed
ba
ck
Lo
op
Ou
tpu
t S
ign
al
Ad
jus
ts Z
Po
sit
ion
Ra
ste
r S
ca
n
Pro
be
Sa
mp
le
Detec
tor
Signa
l
Pro
bes:
– T
ES
P p
g 6
4– M
PP
-11100-1
0 (R
TE
SP
)
p
g 6
8
– E
SP
pg
52
– S
NL-1
0 p
g 1
08
– D
NP
-10 p
g 8
4– M
LC
T p
g 8
0– M
SN
L-1
0 p
g 1
06
-
22
23
Co
nta
ct
Mo
de
AFM
Conta
ct
mode is a
prim
ary
AFM
mode. T
he p
robe is a
mic
rofa
bricate
d
cantile
ver
with a
sharp
tip
. Tip
and s
am
ple
are
in p
erp
etu
al conta
ct
during
the r
aste
r-scan. D
ete
cto
r sig
nal is
a m
easure
of
cantile
ver
deflection in
Z. In
feedback
mode, outp
ut
sig
nal usually
adju
sts
the Z
positio
n o
f th
e
scanner
to m
ain
tain
a d
eflection s
etp
oin
t. T
his
mode e
nable
s n
um
ero
us
secondary
modes, in
clu
din
g L
FM
, Forc
e M
odula
tion, S
CM
, S
SR
M,
TU
NA
, and C
AFM
.
Nati
ve C
ollag
en
fib
rils
exh
ibit
ing
th
ety
pic
al 67n
mb
an
din
g p
att
ern
.
Raste
r S
can
Z X Y
Feed
back L
oo
p M
ain
tain
s C
on
sta
nt
Can
tile
ver
Defl
ecti
on
Feed
back
Lo
op
Ou
tpu
tS
ign
al
Ad
justs
Z P
osit
ion
Pro
bes:
– E
SP
pg
52
– M
PP
-31100-1
0 p
g 5
6
– S
NL-1
0 p
g 1
08
– D
NP
-10 p
g 8
4
– M
LC
T p
g 8
0
– M
SN
L-1
0 p
g 1
06
Tap
pin
gM
od
e
AFM
To
po
gra
ph
y o
f a
nti
mo
ny
d
en
dri
tes o
n g
rap
hit
e.
Tappin
gM
ode
™ is a
prim
ary
AFM
mode. T
he p
robe is a
mic
rofa
bricate
d
cantile
ver
with a
sharp
tip
. A
drive s
ignal, a
pplie
d t
o t
he “
tappin
g p
iezo
,”
mech
anic
ally
oscill
ate
s t
he p
robe a
t or
near
its r
esonance f
requency
(usually
the f
undam
enta
l re
sonance). D
ete
cto
r sig
nal is
cantile
ver
oscill
ation
am
plit
ude, or
phase (re
lative t
o d
rive s
ignal). In
feedback
mode, outp
ut
sig
nal
usually
adju
sts
the Z
positio
n o
f th
e s
canner
to m
ain
tain
an (rm
s) am
plit
ude
setp
oin
t. T
appin
gM
ode e
nable
s n
um
ero
us s
econdary
modes, in
clu
din
g
PhaseIm
agin
g™
, E
FM
, M
FM
, and S
urf
ace P
ote
ntial im
agin
g.
Z X Y
Detec
tor
Signa
l
Drive
Signal
Feed
back L
oo
pO
utp
ut
Sig
nal
Ad
justs
Z P
osit
ion
Feed
back L
oo
p M
ain
tain
sC
on
sta
nt
Can
tile
ver
Am
plitu
de
Raste
r S
can
Pro
bes F
LU
ID:
– S
NL-1
0 p
g 1
08
– D
NP
-10 p
g 8
4
– M
LC
T p
g 8
0
– M
SN
L-1
0 p
g 1
06
Pro
bes A
IR:
– M
PP
-11100-1
0 (
RT
ES
P)
pg
68
– T
ES
P p
g 6
4
– O
TE
SP
A p
g 7
0
– F
ES
P p
g 5
8
-
24
25
Pe
ak F
orc
e T
ap
pin
g
Peak F
orc
e T
appin
g® is
Bru
ker’s e
xclu
siv
e c
ore
tech
nolo
gy that enable
s
many o
f our m
ost re
cent A
FM
innova
tions, in
clu
din
g S
canA
sys
t®,
PeakForc
e Q
NM
®, PeakForc
e T
UN
A™ a
nd S
canA
sys
t-H
R. Lik
e
Tappin
gM
ode
™, Peak F
orc
e T
appin
g is
an A
C im
agin
g tech
niq
ue, i.e
., the
cantile
ver is
oscill
ate
d, and there
fore
very
gentle o
n e
ven d
elic
ate
sam
ple
s.
What m
ake
s P
eak F
orc
e T
appin
g tech
nolo
gy u
niq
ue is
that th
e p
robe is
oscill
ate
d w
ell
belo
w it
s resonance fre
quency.
By d
oin
g s
o, eve
ry in
tera
ction
betw
een the tip
and s
am
ple
can b
e m
easure
d, genera
ting a
continuous
series o
f fo
rce-d
ista
nce c
urv
es. R
ath
er th
an the feedback
loop c
ontr
olli
ng
the c
antile
ver am
plit
ude (i.e
., li
ke T
appin
gM
ode), it
is the p
eak forc
e o
f each
tip
-sam
ple
inte
raction that is
held
consta
nt. T
his
allo
ws P
eak F
orc
e
Tappin
g to o
pera
te a
t m
uch
low
er fo
rces a
nd m
ake
s it
s o
pera
tion in
here
ntly
more
sta
ble
in b
oth
air a
nd li
quid
. It a
lso m
ake
s it
possib
le to m
easure
nanom
ech
anic
al a
nd n
anoele
ctr
ical p
ropert
ies d
uring e
ach
inte
raction.
A
Time
E
B
C
Dapproach
withdraw
AB
CE
D
Pro
bes:
– S
can
Asyst-
Air
pg
88
– S
can
Asyst-
Flu
id p
g 8
8
– S
can
Asyst-
Flu
id+
pg
88
Scan
Asyst
Po
lym
er
bru
sh
sa
mp
le
ima
ge
d o
n a
Mu
ltiM
od
e® 8
u
sin
g S
ca
nA
sy
st.
S
am
ple
co
urt
esy
o
f S
. S
he
iko
,
Un
ive
rsit
y o
f
No
rth
Ca
roli
na
,
Ch
ap
el
Hil
l.
ScanA
sys
t® is
an e
xclu
siv
e im
agin
g m
ode b
ased o
n P
eak F
orc
e T
appin
g®
tech
nolo
gy t
hat
auto
matically
optim
izes im
agin
g p
ara
mete
rs in
clu
din
g
setp
oin
t, feedback
gain
s, and s
can r
ate
. This
make
s it
faste
r and e
asie
r to
obta
in c
onsis
tent
hig
h-q
ualit
y r
esults. B
ecause t
he t
ip-s
am
ple
inte
raction forc
e
is d
irectly c
ontr
olle
d, S
canA
sys
t is
very
gentle o
n s
am
ple
s in
both
air a
nd
liquid
. Faste
r im
agin
g is
now
possib
le u
sin
g S
canA
sys
t w
ith t
he D
imensio
n
FastS
can
™ A
FM
or
usin
g S
canA
sys
t-H
R o
n t
he M
ultiM
ode
® 8
AFM
.
A
Tim
e
PeakF
orc
e T
ap
pin
g
Au
toO
pti
miz
ati
on
of:
Set
Po
int
Gain
Scan
Rate
Z -
Lim
it
E
B+
=
C
Dap
pro
ach
wit
hd
raw
Pro
bes:
– S
can
Asyst-
Air
pg
88
– S
can
Asyst-
Flu
id p
g 8
8
– S
can
Asyst-
Flu
id+
pg
88
– S
can
Asyst-
Air
-HR
pg
88
-
26
27
Tap
pin
gM
od
e
& P
haseIm
ag
ing
Tap
pin
gM
od
e p
hase i
mag
e
cle
arl
y s
ho
ws m
icro
ph
ase
sep
ara
tio
n i
n S
BS
tr
i-b
lock
co
po
lym
er.
Tappin
gM
ode
™ A
FM
is a
n A
C t
ech
niq
ue in w
hic
h t
he c
antile
ver
is
opera
ted a
t or
near
its r
esonance f
requency.
Forc
es b
etw
een t
ip a
nd
sam
ple
cause a
change o
f th
e initia
l re
sonance b
ehavio
r. T
ypic
ally
a
reduction in t
he f
ree a
ir a
mplit
ude is m
ain
tain
ed t
o t
rack
the s
am
ple
to
pogra
phy.
By s
imultaneously
monitoring t
he p
hase s
hift
betw
een d
rive
sig
nal to
the c
antile
ver
and its
response, a s
o-c
alle
d p
hase im
age c
an b
e
genera
ted t
hat
pro
vid
es v
ery
hig
h s
patial in
form
ation b
ased o
n v
arious
mate
rial pro
pert
ies.
2
1
Drive
Signal
Detector
Signal
Drive
Signal
Detector
Signal
PeakFo
rce Q
NM
Mo
du
lus i
ma
ge
of
a m
ult
i-co
mp
on
en
t p
oly
me
r b
len
d. T
hre
e
co
mp
on
en
ts a
re
cle
arl
y i
de
nti
fie
d
by
th
eir
mo
du
lus.
Tip
-sa
mp
le S
ep
ara
tio
n
DM
T f
it f
or
mo
du
lus
De
form
ati
on
Dis
sip
ati
on
AdhesionPeak Force
Att
rac
tiv
eF
orc
es
Pe
ak
Fo
rce
&D
efo
rma
tio
n
Mo
du
lus
Ad
he
sio
nB
as
eli
ne
Ba
se
lin
e
Dis
sip
ati
on
Pro
bes:
– M
PP
-11120-1
0 (
RT
ES
PA
) p
g 6
8
– M
PP
-12120-1
0 p
g 6
8
– M
PP
-13120-1
0 p
g 6
8
– P
DN
ISP
-HS
pg
124
– S
can
Asyst-
Air
pg
88
Pro
bes:
– M
PP
-11100-1
0 (
RT
ES
P)
pg
68
– T
ES
P p
g 6
4
– O
TE
SP
A p
g 7
0
– F
ES
P p
g 5
8
PeakForc
e Q
NM
® is a
noth
er
exclu
siv
e im
agin
g m
ode b
ased o
n P
eak F
orc
e
Tappin
g® t
ech
nolo
gy.
Here
each
tip
-sam
ple
inte
raction is a
naly
zed t
o e
xtr
act
quantita
tive n
anom
ech
anic
al pro
pert
ies inclu
din
g e
lastic m
odulu
s, adhesio
n,
defo
rmation, and d
issip
ation. T
his
allo
ws e
ach
of
these p
ropert
ies t
o b
e
mapped q
uantita
tively
and a
t hig
h r
esolu
tion w
hile
still
colle
cting s
tandard
to
pogra
phy im
ages a
t norm
al im
agin
g r
ate
s. U
nlik
e s
om
e c
om
peting
tech
nolo
gie
s b
ased o
n o
ld c
onta
ct
mode t
ech
nolo
gy,
PeakForc
e Q
NM
work
s
well
on a
wid
e r
ange o
f sam
ple
types f
rom
soft
delic
ate
mate
rials
with
modulu
s <
1M
Pa a
ll th
e w
ay u
p t
o m
ate
rials
with m
odulu
s >
50G
Pa.
-
28
29
Lif
tMo
de
LiftM
ode
™ is n
ot
an im
agin
g m
ode, as it
by its
elf d
oes n
ot
measure
a
new
quantity
to r
eveal new
info
rmation, but
rath
er
a t
ech
niq
ue
that
enable
s o
ther
modes s
uch
as M
FM
, E
FM
, and S
CM
. In
LiftM
ode
the s
am
ple
is s
canned fi
rst
in a
regula
r to
pogra
phic
mode:
Conta
ct,
Tappin
gM
ode
™ o
r Peak F
orc
e T
appin
g®. T
he f
ollo
win
g lin
e,
the “
lift
line,”
tra
ces t
he p
revio
usly
acquired t
opogra
phy b
ack
and a
dds
a Z
-off
set.
As t
he feedback
laser
is n
ot
necessarily
needed d
uring t
he
lift
line, experim
ents
that
would
be influenced b
y laser
light
can b
e
enable
d (D
ark
Lift)
.
MFM
an
d E
FM
sam
ple
s.
Lif
t H
eig
ht
Lif
tMo
de
Sc
an
Ta
pp
ing
Mo
de
He
igh
t D
ata
Pro
bes:
– M
ES
P p
g 9
8
– S
CM
-PIT
pg
112
– S
CM
-PIC
pg
112
Mag
neti
c F
orc
e
Mic
rosco
py -
MFM
Magnetic F
orc
e M
icro
scopy (M
FM
) uses a
com
bin
ation o
f Ta
ppin
gM
ode
™,
LiftM
ode
™ a
nd a
pro
perly p
repare
d t
ip t
o g
ath
er
info
rmation a
bout
the m
agnetic fi
eld
above a
sam
ple
. E
ach
lin
e o
f th
e s
am
ple
is fi
rst
scanned in T
appin
gM
ode o
pera
tion t
o o
bta
in t
he s
am
ple
topogra
phy.
The t
opogra
phic
info
rmation is s
tore
d a
nd r
etr
aced w
ith a
user-
sele
cta
ble
heig
ht
off
set
in L
iftM
ode, during w
hic
h t
he m
agnetic d
ata
are
colle
cte
d. T
ypic
al lif
t heig
hts
in M
FM
range f
rom
20-1
00 n
m.
Ma
gn
eti
c d
om
ain
s
in a
ste
el
sa
mp
le.
Lif
tMo
de
Scan
Heig
ht
Data
= P
hase S
hif
t
Lif
t H
eig
ht
Mag
neti
c
Pro
be
Mag
neti
c F
orc
es
Cau
se P
hase S
hif
t
over
Dif
fere
nt
Do
main
s d
uri
ng
the L
iftM
od
e S
can
Pro
bes:
– M
ES
P p
g 9
8
– M
ES
P-H
M p
g 9
8
– M
ES
P-L
M p
g 9
8
– M
ES
P-R
C p
g 1
00
-
30
31
Ele
ctr
osta
tic F
orc
e
Mic
rosco
py -
EFM
Carb
on
bla
ck a
gg
reg
ate
s
in a
ru
bb
er
matr
ix
vis
ualize
d b
y u
tili
zin
g
their
ele
ctr
ic p
rop
ert
ies.
Ele
ctr
osta
tic F
orc
e M
icro
scopy (E
FM
) uses a
com
bin
ation o
f
Tappin
gM
ode
™, LiftM
ode
™ a
nd a
conductive t
ip t
o g
ath
er
info
rmation
about
the e
lectr
ic fi
eld
above a
sam
ple
. E
ach
lin
e o
f th
e s
am
ple
is fi
rst
scanned in T
appin
gM
ode o
pera
tion t
o o
bta
in t
he s
am
ple
topogra
phy.
The t
opogra
phic
info
rmation is s
tore
d a
nd r
etr
aced w
ith a
user-
sele
cta
ble
heig
ht
off
set
in L
iftM
ode, during w
hic
h t
he e
lectr
ical data
is
colle
cte
d. T
ypic
al lif
t heig
hts
in E
FM
range f
rom
20-8
0 n
m.
Lif
tMo
de
Sc
an
He
igh
t D
ata
=
P
ha
se
Sh
ift
Lif
t H
eig
ht
Co
nd
uc
tiv
e
Pro
be
Ele
ctr
ic F
orc
es
Ca
us
e P
ha
se
Sh
ift
ov
er
Dif
fere
nt
Do
ma
ins
du
rin
g
the
Lif
tMo
de
Sc
an
Sin
gle
Pa
ss
(D
ua
l F
req
ue
nc
y)
is a
lso
av
ail
ab
le
Pro
bes:
– S
CM
-PIT
pg
112
– M
ES
P p
g 9
8
– M
ES
P-R
C p
g 1
00
– O
SC
M-P
T p
g 1
12
Su
rface P
ote
nti
al
Mic
rosco
py -
SP
oM
Surf
ace P
ote
ntial M
icro
scopy (S
PoM
) is
based o
n t
he m
acro
scopic
K
elv
in m
eth
od. S
PoM
is a
ble
to m
easure
surf
ace t
opogra
phy a
nd s
urf
ace
pote
ntial (V
DC) in
form
ation s
imultaneously
. Topogra
phy is a
cquired u
sin
g
Tappin
gM
ode
™ o
pera
tion b
ut
with a
conductive t
ip. T
he e
lectr
ical in
form
ation
is e
xtr
acte
d b
y a
pply
ing A
C a
nd D
C v
oltages t
o t
he t
ip. T
he t
ota
l voltage
acting o
n t
he t
ip is: V
= V
DC +
VA
C s
in (
t). A
dedic
ate
d feedback
loop
adju
sts
the D
C v
oltage t
o t
he t
ip t
o z
ero
the c
onta
ct
pote
ntial diffe
rence
betw
een t
he t
ip a
nd s
urf
ace a
t each
pix
el, m
akin
g D
C a
measure
of
the
surf
ace p
ote
ntial. S
PoM
can b
e c
arr
ied o
ut
usin
g L
iftM
ode
™ o
r in
a d
ual-
frequency o
ne-p
ass f
ashio
n.
Co
mp
osit
e i
ma
ge
of
He
igh
t a
nd
Su
rfa
ce
po
ten
tia
l
of
a l
ase
r d
iod
e
(8 μ
m s
ca
n).
Lif
tMo
de
Scan
Heig
ht
Data
Lif
t H
eig
ht
2V
Po
ten
tial D
ata
0V
-1V
Co
nd
ucti
ve
Pro
be
Sin
gle
Pass (
Du
al F
req
uen
cy)
Cap
acit
y is a
lso
availab
le
Pro
bes:
– S
CM
-PIT
pg
112
– M
ES
P p
g 9
8
– M
ES
P-R
C p
g 1
00
– O
SC
M-P
T p
g 1
12
-
32
33
Scan
nin
g T
un
nelin
g
Mic
rosco
py -
ST
M
STM
is a
prim
ary
AFM
mode. T
he p
robe is a
meta
l needle
. D
ete
cto
r sig
nal is
the t
unnelin
g c
urr
ent
betw
een t
he t
ip a
nd s
am
ple
when a
n
ele
ctr
ical bia
s, V
, is
applie
d. In
feedback
mode, outp
ut
sig
nal usually
adju
sts
the Z
positio
n o
f th
e s
canner
to m
ain
tain
a t
unnelin
g c
urr
ent
setp
oin
t. S
TM
is t
he h
ighest
resolu
tion A
FM
mode.
Z
X Y
DC Bias
Tu
nn
elin
gC
urr
en
t A
mp
lifi
er
Feed
back L
oo
p M
ain
tain
sC
on
sta
nt
Tu
nn
elin
g C
urr
en
t
Feed
back L
oo
pO
utp
ut
Sig
nal
Ad
justs
Z P
osit
ion
XY
Raste
r S
can
Pro
bes:
– T
T10 p
g 1
29
– P
T10 p
g 1
28
– S
TM
pg
129
– C
LS
T-P
TB
O p
g 1
28
– D
PT
10 p
g 1
28
– D
TT
10 p
g 1
28
– P
T-E
CM
10 p
g 1
28
– T
T-E
CM
10 p
g 1
29
Scan
nin
g E
lectr
och
em
ical
Po
ten
tial
Mic
rosco
py -
SE
CP
M
The p
robe in S
EC
PM
is a
sharp
meta
l needle
. D
ete
cto
r sig
nal is
ele
ctr
ic p
ote
ntial diffe
rence b
etw
een t
ip a
nd s
am
ple
(or
betw
een t
ip
and a
refe
rence e
lectr
ode) in
an ionic
or
pola
r liq
uid
, w
here
an e
lectr
ic
double
-layer
exis
ts a
t th
e liq
uid
/sam
ple
inte
rface. S
EC
PM
maps
the e
lectr
ic p
ote
ntial pro
file
acro
ss t
he d
epth
of
the d
ouble
-layer
(v
ers
us Z
, th
e t
ip-s
am
ple
dis
tance) at
tip X
Y location. In
feedback
mode,
the o
utp
ut
sig
nal usually
adju
sts
the Z
positio
n o
f th
e s
canner.
Sn
60
Ph
40
all
oy
in
gly
ce
rol.
Refe
ren
ce E
lectr
od
e
Wo
rkin
g E
lectr
od
e=
Sam
ple
Co
un
ter
Ele
ctr
od
e
Po
ten
tio
sta
t
Po
ten
tio
mete
r
Pro
bes:
– P
T-E
CM
10 p
g 1
28
In-s
itu
ato
m r
eso
luti
on
ele
ctr
och
em
ical S
TM
im
ag
e o
f C
u
un
derp
ote
nti
al
dep
osit
ion
on
Au
(111
).
-
34
35
Tors
ion
al
Re
so
nan
ce
During T
ors
ional R
esonance m
ode (TR
-Mode
™), t
he t
ip is a
ctu
ate
d p
ara
llel
rath
er
then v
ert
ical w
ith r
espect
to t
he s
urf
ace. Forc
es b
etw
een t
ip a
nd
sam
ple
cause a
change in r
esonance b
ehavio
r th
at
can b
e u
sed t
o t
rack
th
e s
urf
ace a
t a c
onsta
nt
dis
tance. T
R-M
ode h
as t
he a
dvanta
ge t
hat
the
tip r
em
ain
s a
t a c
onsta
nt
dis
tance t
o t
he s
urf
ace a
t all
tim
es. T
his
can b
e
advanta
geous in m
odes lik
e T
R-T
UN
A™
or
nearfi
eld
-optical experim
ents
.
Ste
ps o
n H
OP
G
as s
een
by t
he t
ip
op
era
tin
g i
n
TR
-Mo
de.
Z X Y
La
tera
l T
ip D
ith
er
Fe
ed
ba
ck
Lo
op
Ou
tpu
t S
ign
al
Ad
jus
ts Z
Po
sit
ion
Fe
ed
ba
ck
Lo
op
Ma
inta
ins
Co
ns
tan
t L
ate
ral
De
fle
cti
on
Dri
ve S
ign
al
Ra
ste
r S
ca
n
Detec
tor
Signa
l
Pro
bes:
– M
PP
-21100-1
0 p
g 6
2
– F
ES
P p
g 5
8
PeakFo
rce T
UN
A &
Co
nd
ucti
ve A
FM
Co
nd
ucti
ve
AF
M P
rob
e
Co
nta
ct
Mo
de
Si
np
VDC
(Su
b p
A -
100 µ
A)
TU
NA
Data
Cu
rren
t A
mp
lifi
er
To
po
gra
ph
y
Co
nd
ucti
ve
Po
lym
er
(rig
ht)
, P
oly
-an
ali
ne
on
In
diu
m T
in O
xid
e (
left
).
Pro
bes:
– S
CM
-PIC
pg
112
– S
CM
-PIT
pg
112
– D
DE
SP
-FM
pg
110
– P
FT
UN
A p
g 1
12
Tunnelin
g A
FM
(TU
NA
) and C
onductive A
FM
tra
ditio
nally
opera
te in c
onta
ct
mode u
sin
g a
conductive p
robe. T
he im
agin
g s
ignal is
the e
lectr
ic c
urr
ent
betw
een t
ip a
nd s
am
ple
for
an a
pplie
d D
C b
ias. In
the feedback
mode, th
e
DC
bia
s is d
ynam
ically
adju
ste
d t
o m
ain
tain
a c
onsta
nt
tip-s
am
ple
curr
ent.
The o
pera
tional curr
ent
ranges is f
rom
fA
(TU
NA
) to
μA
(C
AFM
). M
ore
re
cently,
CA
FM
and T
UN
A h
ave b
een u
tiliz
ed w
ith P
eak F
orc
e T
appin
g® into
a n
ew
mode, PeakForc
e T
UN
A™
, w
hic
h e
nable
s t
hese m
easure
ments
to
be t
aken m
ore
relia
bly
and o
n a
much
wid
er
range o
f sam
ple
s, as w
ell
as
allo
win
g f
or
the d
irect
corr
ela
tion o
f ele
ctr
ical data
with n
anom
ech
anic
al
info
rmation f
rom
PeakForc
e Q
NM
® m
easure
ments
.
-
36
37
Scan
nin
g S
pre
ad
ing
Resis
tan
ce
Mic
rosco
py -
SS
RM
SS
RM
uses c
onta
ct
mode A
FM
and a
conductive p
robe. S
ensor
Sig
nal
is t
he e
lectr
ic c
urr
ent
betw
een t
he t
ip a
nd s
am
ple
for
an a
pplie
d D
C b
ias,
VD
C. S
SR
M m
easure
s t
he c
urr
ent
by r
efe
rencin
g it
to a
n inte
rnal re
sis
tor,
usin
g a
logarith
mic
am
plifi
er, t
o y
ield
local re
sis
tance v
alu
e. S
SR
M m
aps
the v
ariation in m
ajo
rity
carr
ier
concentr
ation in d
oped s
em
iconducto
rs.
Tra
nsis
tor
cro
ss s
ecti
on
.
Co
nd
ucti
ve
AF
M P
rob
e
Co
nta
ct
Mo
de
(SS
RM
Data
)
(10 p
A -
100 µ
A)
Lo
gari
thm
ic A
mp
lifi
er
log
(I)
Si
np
Spre
adin
g R
esis
tance
R =
4 x
rad
ius
VD
C
ρ
Resis
tan
ce
Pro
bes:
– D
DE
SP
pg
110
Scan
nin
g C
ap
acit
an
ce
Mic
rosco
py -
SC
M
To
po
gra
ph
y (
left
),
SC
M (
rig
ht)
la
se
r
dio
de c
ross s
ecti
on
.
SC
M u
ses c
onta
ct
mode A
FM
and a
conductive p
robe a
nd a
pplie
s t
o
sem
iconducto
r sam
ple
s w
ith a
n A
C b
ias (am
plit
ude D
V, ~
90 k
Hz)
with a
DC
off
set.
The c
apacitance o
f th
e m
eta
l-oxid
e-s
em
iconducto
r (M
OS
) capacitor
at
tip-s
am
ple
conta
ct
is a
function o
f m
ajo
rity
carr
ier
concentr
ation in t
he
sam
ple
. S
CM
uses a
n u
ltra
-hig
h-f
requency (1 G
Hz)
dete
cto
r to
measure
tip-s
am
ple
capacitance v
ariation, D
C, at
the b
ias f
requency.
Sensor
sig
nal
is D
C/D
V. In feedback
mode, outp
ut
sig
nal is
DV,
adju
ste
d t
o m
ain
tain
a
DC
/DV
Setp
oin
t. S
CM
maps r
ela
tive c
hanges o
f m
ajo
rity
carr
ier
concentr
ation in s
em
iconducto
rs.
Co
nd
uc
tiv
eA
FM
Pro
be
Co
nta
ct
Mo
de
Si
np
VAC
SC
M D
ata
Ca
pa
cit
an
ce
Se
ns
or
SC
M S
en
so
r
To
po
gra
ph
y
n
n
n
p
p
Pro
bes:
– S
CM
-PIC
pg
112
– S
CM
-PIT
pg
112
– M
ES
P-R
C p
g 1
00
– O
SC
M-P
T p
g 1
12
-
38
39
Scan
nin
g T
herm
al
Mic
rosco
pie
s
To
po
gra
ph
y a
nd
th
erm
al m
ap
of
a
data
sto
rag
e
sam
ple
.
In S
cannin
g T
herm
al M
icro
scopy (S
ThM
) a h
eate
d t
ip is s
canned a
cro
ss a
sam
ple
. C
hanges in t
he t
ip’s
resis
tivity r
eveal either
therm
al conductivity
or
therm
al gra
die
nts
on t
he s
am
ple
.
In N
anoscale
Therm
al A
naly
sis
(N
anoTA
), a
tip
is h
eate
d in s
uch
a
way t
hat
it induces a
phase t
ransitio
n in t
he s
am
ple
. That
transitio
n is
monitore
d u
sin
g t
he c
antile
ver
deflection a
nd is m
ate
rial specifi
c.
Tem
pera
ture
Measu
rem
en
t
Vert
ical D
efl
ecti
on
Mo
nit
ore
d a
s T
ip H
eate
d
Heate
rC
on
tro
l
T∆
Th
erm
al
Pro
pert
y M
ap
To
po
gra
ph
ical
Map
To
po
gra
ph
ical M
easu
rem
en
t
Pro
bes:
– V
ITA
-Nan
oT
A P
rob
es p
g 1
31
– V
ITA
-ST
hM
Pro
bes p
g 1
30
Pie
zo
resp
on
se
Mic
rosco
py
Pie
zore
sponse (P
iezo
forc
e) M
icro
scopy (P
FM
) is
a t
ech
niq
ue b
ased o
n
conta
ct
mode t
hat
maps o
ut
the invers
e p
iezo
ele
ctr
ic e
ffect
on a
sam
ple
. The s
am
ple
is e
lectr
ically
stim
ula
ted a
nd t
he t
opogra
phic
response o
f th
e s
am
ple
is m
onitore
d u
sin
g lock
-in t
ech
niq
ues. A
mplit
ude a
nd p
hase
info
rmation r
eveal in
form
ation a
bout
the s
trength
and d
irection o
f th
e
pola
riza
tion o
n t
he s
am
ple
.
Sm
all
de
fect
on
th
e
po
lin
g b
ou
nd
ary
of
a
Lit
hiu
m n
iob
ate
film
v
isib
le i
n t
he
am
pli
tud
e
sig
na
l o
f a
PF
M
ex
pe
rim
en
t.P
rob
es:
– M
ES
P-R
C p
g 1
00
– S
CM
-PIT
pg
112
– M
ES
P p
g 9
8
– D
DE
SP
-FM
pg
110
-
40
41
Cri
tical D
imen
sio
n A
tom
ic F
orc
e
Mic
rosco
py -
CD
AFM M
ult
iple
sem
ico
nd
ucto
r tr
en
ches.
Critical D
imensio
n A
tom
ic F
orc
e M
icro
scopy (C
DA
FM
) is
a n
on-
destr
uctive, hig
h-r
esolu
tion t
ech
niq
ue t
hat
enable
s a
ccura
te
measure
ment
of
thre
e-d
imensio
nal (3
D) fe
atu
res. C
D-A
FM
is a
ccura
te
as it
pro
vid
es h
ighly
lin
ear
measure
ment
over
a r
ange o
f lin
e-w
idth
s a
nd
is u
naff
ecte
d b
y featu
re t
ype, density o
r m
ate
rial ty
pe. A
dditio
nally
, th
e
tech
niq
ue is a
ble
to m
easure
underc
ut
featu
res a
nd c
an b
e c
alib
rate
d
usin
g N
IST t
raceable
calib
ration s
tandard
s t
o e
nsure
accura
cy o
f m
easure
ments
. C
DA
FM
capabili
ties h
ave e
nable
d its
use a
s a
refe
rence
metr
olo
gy t
ool.
Fla
re o
f T
ip E
na
ble
sM
ea
su
rem
en
tso
f U
nd
erc
ut
Fe
atu
res
Bo
tto
m C
D
Sid
ew
all
Pro
file
Sid
ew
all
An
gle
s
Mid
dle
CD
To
p C
D
De
pth
Lin
e W
idth
Ro
ug
hn
es
sL
WR
& L
ER
Pro
bes:
– 3
D M
etr
olo
gy P
rob
es p
g 1
14
Deep
Tre
nch
Mo
de
Deep T
rench
(D
T) M
ode is a
n A
FM
mode d
evelo
ped s
pecifi
cally
for
the
repeata
ble
measure
ment
of
deep s
em
iconducto
r tr
ench
str
uctu
res f
or
90 n
m a
nd b
elo
w. It
is a
n a
daptive s
can m
eth
od in w
hic
h d
ata
is
only
colle
cte
d w
hen u
ser-
specifi
ed s
yste
m s
tate
conditio
ns a
re m
et.
This
means t
hat
the t
ip is “
allo
wed” t
o m
ove o
nly
in c
ert
ain
serv
o s
tate
s.
DT M
ode “
ste
ps” t
he t
ip a
long t
he s
am
ple
surf
ace c
olle
cting d
ata
poin
ts
only
when “
good” s
can c
rite
ria a
re m
et.
This
perm
its featu
re-d
ependent
scan o
ptim
ization in w
hic
h t
he c
oncentr
ation o
f data
poin
ts is h
ighest
on t
he featu
res o
f in
tere
st
and low
els
ew
here
, re
sultin
g in im
pro
ved
measure
ment
pre
cis
ion.
Iso
late
d
se
mic
on
du
cto
r
via
.
Hig
h S
ca
nR
ate
Slo
we
r S
ca
n
Hig
he
r R
es
olu
tio
no
n H
ori
zo
nta
l S
urf
ac
es
Pro
bes:
– F
IB P
rob
es p
g 1
20
– D
ep
th M
etr
olo
gy P
rob
es p
g 1
16
– C
NT
Pro
bes p
g 1
22
– T
ES
P-H
AR
pg
118