about company - adnanotek · 2019. 11. 23. · oxidation chamber -ray glass cover on each viewports...
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MOLECULAR BEAM EPITAXY
www.AdNaNo-tek.com
MBE-10
UHV Deposition System
FFBEAR software is a multifunctional software to control
the whole MBE system.
FFB provide highly automatic deposition process with dep-
osition wizard, which can let you easily set your ex-
periment recipe step by step.
FFBEAR can control EUROTHERMO2408 to con-
trol, tune and save multi PID parameters for laser/
filament heater for the best accuracy of different
substrate temperature requirements.
FBBEAR’s Deposition wizard make it hassle free to set,
customize and save your experimental recipe, and fully au-
tomatize the deposition processes. This also allows easy
repetition of the deposition process with same experi-
mental parameters. In addition, it also allow data logging
in order to review past deposition parameters. FBBear also
allows data processing and analysis.
FFBEAR can monitor RHEED gun pattern in-situ from
high resolution CCD and run RHEED data analyses.
U N I V E R S A L C O AT I N G C O N T R O L S o f t w a r e F F B
Contact us
TEL: 886-2-22982594
FAX: 886-2-22984812
CHINA MOBILE:+8618362958206
EMAIL: [email protected]
Website: http://www.adnano-tek.com/
3422 Old Capitol Trail,
Wilmington,
DE 19808, USA
Established in USA since 2007, AdNaNoTek Corporation is the rising leader in ultrahigh
vacuum (UHV) technologies and solutions provider. We specialize in the design and manufac-
ture of state-of-the-art and fully customizable UHV systems that fits any research and indus-
trial need.
Our unique UHV deposition systems are guaranteed to deposit extremely high quality pro-
cessed thin films in terms of uniformity and purity of surface and interface. And With our vast
experience in UHV deposition technology; and consistent interaction with our customers: We
are sure that we will continue to improve and optimize our products and services; comply to
our customer's need; and be the leading UHV deposition systems provider in academic, re-
search and manufacturing institutions around the globe.
We excel in manufacturing of fully
customizable UHV systems, such as:
Pulsed Laser Deposition System (PLD)
Molecular Beam Epitaxy System (MBE)
Magnetron Sputtering
E-Beam Evaporator
Ion Beam Deposition System (IBD)
Integrated UHV Systems
Laser Heating System
ABOUT COMPANY
M B E - 1 0 S P E C I F I C AT I O N
www.AdNaNo-tek.com
SYSTEM
INTRODUCTION
M O L E C U L A R B E A M E P I TA X Y ( M B E )
● Clean substrate surfaces, and oxide-free layer
● In-situ coating monitoring by RHEED system
● In-situ deposition of metal seeds, semiconductor materials, and dopants
● Precisely controllable thermal evaporation
● Layer by layer (epitaxial) deposition
● In-situ coating monitoring by RHEED system
● Ultrasharp XRD profile for deposited thin-films
F E AT U R E O F M B E
Molecular Beam Epitaxy (MBE) is an ultrahigh vacuum (UHV) deposition technique
used for producing high quality epitaxial (layer-by-layer) thin film with precise con-
trol on thickness, composition and morphology. Despite the conceptual simplicity, a
great technological effort is required to produce a system that yield desired thin-layer
film qualities. The chamber design, careful control of vacuum environment, the qual-
ity of the source materials, etc. allow MBE technique to produce much higher thin
layer quality compared to non-UHV-based techniques.
● 18-inch cylindrical chamber made of SUS316L with mirror polish
● UHV pressure: 5x10E-11 torr
● 4-axis manipulator with laser heating system
● Heating temperature up to 1000°C with ± 1°C (or higher upon request)
● 2 inch substrate
● 2-10 effusion cells
● Beam flux monitor
● Fully covered Cryopanel
● 1700l/s cryo pump
● Full range vacuum gauge
● Standard load-lock with full range vacuum gauge and Hipace300 Turbo
Pump
● 23" touchscreen computer with full system control software
● Standard RHEED System
● Large space and additional ports for versatile expansion upgrades
R H E E D 1 0 0 0 ° C 4 - A X I S M A N I P U L AT O R C R Y O P U M P S U S 3 1 6 L C H A M B E R
L I Q U I D N I T R O G E N C R Y O PA N E L
O P T I O N A L U N I T S
Due to the chamber design and available multiports, MBE-10 can be easily extended with
many different kind of equipment.
● Single/dual mask system with z-motion and control software
● Pre-annealing heating system in Load Lock
● Preparation chamber
● Oxidation chamber
● Lead x-ray glass cover on each viewports
● Additional turbo molecular pump/ion pump system
● Residue gas analyzer
● E-beam evaporator source
● O2/N2 plasma source
● Beam flux monitor
● Thickness monitor
Any specific parts that you need in your experiment can also be integrated to MBE-10.
AdNaNotek’s liquid nitrogen cryopanel can provide ex-
tremely large pumping speed by condensing gases, partic-
ularly water and heavy hydrocarbons, unto the surface of
the cryopanel. Furthermore, it can thermally isolate each
effusion cells, and maintain the heat localized in each one
of them.
The fully covered cryopanel provide very large capacity
for liquid nitrogen (more than 20000 mL).
C E L L S , S H I E L D I N G , C R Y O PA N E L
L O A D L O C K