a simulation tool development roadmap to support a ... · simulation is critical for several...
TRANSCRIPT
![Page 1: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/1.jpg)
A Simulation Tool Development Roadmap to Support a Scalable Silicon
Photonics Design EcosystemJAMES POND, JACKSON KLEIN, XU WANG,
JONAS FLUECKIGER AND AMY LIU
LUMERICAL SOLUTIONS, INC.
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC1
![Page 2: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/2.jpg)
OutlineIntroduction
Overview of design flows and where simulation is required
Review current status and needs Component design and optimization
Compact model library (CML) generation for PDKs
Photonic integrated circuit simulation
Roadmap
Conclusions
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC2
![Page 3: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/3.jpg)
IntroductionSilicon photonics offers many opportunities
Circuit complexity continues to increase Full design flow solutions are emerging
EDA tools + photonic simulation technologies
Silicon photonic process design kits (PDKs) are emerging
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC3
edX course | Silicon Photonics Design, Fabrication and Data Analysis
Scalable high-index contrast -> compact a variety of devices -> high functionality
Low cost & high volume CMOS manufacturing facility
Many applications optical interconnects (data centers, telecom, HPC, …) sensing (biological, chemical, …)
![Page 4: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/4.jpg)
Introduction
Fabless model and foundry Multi-project wafer (MPW) services
Wide range of reliable components available
Packaging
Prototyping
Path to mass production
SiEPIC-IME chip, including active components such as modulators
Book: Silicon Photonics Design
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC4
![Page 5: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/5.jpg)
Design FlowsMany advanced design flows are being developed
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC5
Pond et al., “A complete design flow for silicon photonics”, Photonics Europe 2014
![Page 6: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/6.jpg)
Design Flows and Simulation
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC6
Layout and Mask Generation(Pyxis, PhoeniX, …)
Verification(Calibre, PhoeniX, …)
Photonic Circuit Simulation(INTERCONNECT)
Photonic Component DesignOptoelectronic solvers,
Experimental data
Schematic Capture(INTERCONNECT, Pyxis, …)
PDKsDesign Rules
Compact modelsComponent parameters
Process dataLayout
![Page 7: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/7.jpg)
Simulation AreasComponent design and optimization Design and optimize a component for desired performance
Compact model library generation for PDKs Build compact model for component
Calibrate against experimental results
Inform with simulation results
Photonic integrated circuit simulation Build complex circuits based on known components with validated compact
models
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC7
![Page 8: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/8.jpg)
Component Design/optimizationComponent design tools are relatively mature Physics-based solvers:
Optical: solving Maxwell’s equations, e.g., FDE, FDTD, EME…
Electrical: solving drift-diffusion and Poisson’s equations
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC8
Va
![Page 9: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/9.jpg)
Component Design/optimizationThere are still key areas for improvement and ongoing development Increasing need for multi-physics solvers
E.g. opto-electronic, thermal effects, strain, …
Must keep up with new materials and technologies Graphene
Process aware optimization and design centering
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC9
![Page 10: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/10.jpg)
MultiphysicsVa
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC10
![Page 11: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/11.jpg)
Multiphysics - Thermal
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC11
Load the temperature profile into an optical solver
![Page 12: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/12.jpg)
New Materials and TechnologiesGraphene modulator
Chemical potential of the graphene layer can be tuned using a voltage source
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC12
600 nm
graphene sheet
SiO2 (n = 1.44)
Si (n = 3.47)
Al2O3 (n = 1.746)
250 nm
7 nm
λ = 1.55 μm
Desired Mode
M. Liu, X. Yin, E. Ulin-Avila, B. Geng, T. Zentgraf, L. Ju, F. Wang and X. Zhang , “A graphene-based broadband optical modulator”, Nature Letters, vol. 474, pp. 64-67, 2011.
![Page 13: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/13.jpg)
Graphene ModulatorWe can combine optical and electrical simulation results Electron-hole distribution in Si (depends on bias voltage)
Relationship between bias voltage and chemical potential
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC13
Distribution of holes, log scale
M. Liu, X. Yin, E. Ulin-Avila, B. Geng, T. Zentgraf, L. Ju, F. Wang and X. Zhang , “A graphene-based broadband optical modulator”, Nature Letters, vol. 474, pp. 64-67, 2011.
![Page 14: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/14.jpg)
OptimizationDramatic improvements can be obtained by optimization
In 2011, Yi Zhang, et al., designed a y-splitter with 0.28 ± 0.02 dB IL Used Particle Swarm Optimization (PSO) and FDTD simulation
Zhang, Y., Yang, S., Eu-Jin Lim, A., Lo, G-Q., Galland, C., Baehr-Jones, T., and Hochberg, M., “A compact and low loss Y-junction for submicron silicon waveguide,” Optics Express 21, 1310-1316 (2013).
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC14
![Page 15: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/15.jpg)
Litho simulated
LithographyComparison for a Bragg grating designed with 40 nm square corrugations
Litho + FDTD Solutions simulations match experimental Bragg bandwidth
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC15
Original
Xu Wang, et al., "Lithography Simulation for the Fabrication of Silicon Photonic Devices with Deep-Ultraviolet Lithography", IEEE GFP, 2012
![Page 16: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/16.jpg)
Process Aware Optimization
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC16
Choose design parameters
(Example PSO)
Run simulation (idealized structure)
Evaluate figure of merit (FOM)
Choose design parameters
(Example PSO)
Introduce process
information
Run simulation (manufacturable
structure)
Evaluate figure of merit (FOM)
Future
![Page 17: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/17.jpg)
Process Aware OptimizationCould extend to a variety of devices
Could extend the concept to other process information Sidewall roughness, angle, etc.
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC17
Outline shows litho simulated design
![Page 18: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/18.jpg)
Yield OptimizationUltimately we want to introduce design centering concepts Map out the device sensitivity to choose the design that can meet
specifications with the maximum possible yield
The best performing device is not necessarily the best choice
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC18
![Page 19: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/19.jpg)
CML DevelopmentCompact model libraries (CML) must be Calibrated to measurements
Packaged for distribution
Good progress has been made Recent announcement of IME CML
Remaining issues Ongoing migration to design intent based parameters
CML infrastructure Ongoing integration within the larger design flows, 3rd party tools and PDKs
Version control
Knowledge of statistical variations of components due to manufacturing imperfections
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC19
![Page 20: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/20.jpg)
IME CMLWaveguides
Other Passives
Actives
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC20
![Page 21: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/21.jpg)
CML GenerationIME Mach-Zehnder Modulator
simulation
vs.
experiments
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC21
![Page 22: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/22.jpg)
Example Circuit Using the CML
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC22
![Page 23: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/23.jpg)
Circuit and System SimulationGeneral Photonic circuit simulation challenges Complex nature of optical signals
Both electrical and optical signals are required
No standardized behavioral models exist
Frequency and time domain simulation are necessary
Additional challenges and needs Improved statistical analysis for correlated and uncorrelated variations
Thermal variations across the chip
Co-simulation with electronic circuit/system simulation
Need for advanced compact models such as lasers
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC23
![Page 24: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/24.jpg)
Statistical Analysis of YieldWaveguide width:500 (nm) 10 (nm)Waveguide height:220 (nm) 10 (nm)
Coupling coefficientsEffective indexGroup index
vs.Waveguide widthWaveguide height
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC24
Free spectral range: 37.5 0.5 (nm)4.65 0.07 (THz)Bandwidth:0.47 0.05 (nm)57 6.7 (GHz)
![Page 25: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/25.jpg)
Example: Create ring resonator compact model by running a series of component level
simulations with different variations of thickness and width
Simulate statistical variations in group index and resonant wavelength with INTERCONNECT
Statistical Analysis
Chrostowski, L., Wang, X., Flueckiger, J., Wu, Y., Torres, M.A.G., Wang, Y., and Talebi Fard, S., “Impact of Fabrication Non-Uniformity on Chip-Scale Silicon Photonic Integrated Circuits,” Optical Fiber Conference (2014).
Experimental Simulated
5nm rmswaveguide width variation,1nm rms Si thickness variation
Resonant wavelength (mm) Resonant wavelength (mm)
Gro
up
ind
ex
Gro
up
ind
ex
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC25
![Page 26: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/26.jpg)
IME ComponentsExcellent waveguide loss uniformity
Clearly there is a correlation based on relative waveguide position We must account for this in the yield analysis
Andy Eu-Jin Lim, et al., “Review of Silicon Photonics Foundry Efforts”, JSTQE vol.
20, no. 4, 2014.
Strip waveguide: ~2 dB/cm Rib waveguide: ~0.8 dB/cm
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC26
![Page 27: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/27.jpg)
Electrical Co-simulationSystem level time domain simulation using waveform exchange What is required beyond this and how will it be done?
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC27
![Page 28: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/28.jpg)
Advanced Compact Models
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC28
UCSB Intel AurrionSkorpios
Kotura
CEA-LETI
J. C. Hulme, J. K. Doylend, J. E. Bowers,
“Widely tunable Vernier ring laser on hybrid
Silicon”, Optics Express, Vol. 21, No. 17,
19722, 2013
![Page 29: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/29.jpg)
Advanced Compact Models
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC29
Traveling wave gain/laser model
J. C. Hulme, J. K. Doylend, J. E. Bowers, “Widely tunable Vernier ring laser on hybrid Silicon”, Optics Express, Vol. 21, No. 17, 19722, 2013
![Page 30: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/30.jpg)
Advanced Compact Models
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC30
Traveling wave laser
![Page 31: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/31.jpg)
Hybrid Laser Integration into PIC
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC31
Hierarchical design for complex models
![Page 32: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/32.jpg)
RoadmapComponent design and optimization
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC32
Area Current 0-12 months 1-3 years
Multi-physics Electro-optical Thermal/electro-thermal Ongoing
New materials and technologies
Graphene Improved electrical and thermal graphene models
Depends on what you throw at us!
Design for manufacturing FDTD based optical/lithographyeffects
Optimization includingphoto-lithography simulation
Design centering
![Page 33: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/33.jpg)
RoadmapCompact model library generation for PDKs
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC33
Area Current 0-12 months 1-3 years
Migration to design intent parameters
Good progress Ongoing Ongoing
CML infrastructure CML publishing and IP protection capabilities
Version control, CML validation and improvedinteroperability with 3rd
party tools
More validated CMLs IME … …
![Page 34: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/34.jpg)
RoadmapPhotonic integrated circuit simulation
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC34
Area Current 0-12 months 1-3 years
Thermal effects Limited Component temperature …
Advanced statistical analysis
Yield calculations based on randomized parameters within chosen statistical distributions
Layout dependent effects Full statistical analysis based on process-specific, correlated and uncorrelated variations, all stored within CML
Electrical co-simulation Waveform exchange To be determined Possibly several methods, depending on system
Advanced compactmodels
Dynamic ring modulator, travelling wave modulator, traveling wave laser model
Enhanced laser model As required
![Page 35: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/35.jpg)
ConclusionsDesign flows have made tremendous advances in recent years
Simulation is critical for several aspects of PIC design Component design and optimization
CML generation for PDKs
Photonic integrated circuit (and system) simulation
We have a simulation tool development roadmap to support a scalable silicon photonics design ecosystem
We gratefully acknowledge the contributions of our software vendor partners, foundry partners, and customers in helping us to formulate this vision
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC35
![Page 36: A Simulation Tool Development Roadmap to Support a ... · Simulation is critical for several aspects of PIC design Component design and optimization CML generation for PDKs Photonic](https://reader035.vdocuments.site/reader035/viewer/2022071411/6107452ebb92ad58f8103ca6/html5/thumbnails/36.jpg)
Questions? [email protected]
Sales Inquiries: [email protected]
Contact your local Lumerical representative
Start your free 30 day trial today www.lumerical.com
Contact Us
Connect with Lumerical
www.lumerical.com
PROPRIETARY AND CONFIDENTIAL© LUMERICAL SOLUTIONS INC36