517-19, Samcheonbyeongma-ro, Paltan-myeon, Hwaseong-si, Gyeonggi-do, 445-911 KoreaTEL. +82-31-366-3390FAX. +82-31-366-3394

A New Paradigm for Engineering

Clean & Clear Innovation System

(주) 싸이노스

Clean & Plasma Coating 분야

선두업체로써, Total Solution제공을 통해

무결점 명품을 만들어 갑니다.

3A New Paradigm for Engineering2

안녕하십니까.

CINOS는 2002년 창사이래 끊임없는 연구활동과 도전정신으로 Cleaning기술혁신에 노력하였으며 고도화된 반도체부품 정밀세정 및 재생

기술을 바탕으로 국내 Major 반도체 제조회사 및 설비업체에 세정 & 코팅 서비스를 제공하고 있습니다. 품질을 최우선으로 하는 품질 경영

방침과 같이 당사는 최고의 품질을 최단납기로 고객에 공급할 수 있도록 최선을 다하고 있습니다.

2007년 완공된 신공장은 최신설비 도입 및 작업동선의 과학적 설계, 반도체 공정간 오염으로 인한 반도체 수율 저하의 원인을 최소화 하기

위해 설계된 곳으로 고객에 대한 최고품질의 서비스를 제공할 수 있을 것으로 자부합니다. 또한 2012년도 경기도일자리 우수기업, 유망중

소기업으로 선정 국내 청년 실업 해소와 중소기업의 균형 발전에 적극 노력하여 지역사회 발전에도 이바지 하고 있습니다.

앞으로도 고객과 함께하는 (주)싸이노스가 되기위해 최선을 다하겠습니다.

지속적인 관심과 격려를 부탁드립니다.

CINOS, Founded in 2002 and headquartered in Hwa-Sung City, South Korea, partners with world leading semiconductor

companies and precision manufacturers. We specialize in precision cleaning and coating for Semiconductor parts. Our state

of art facilities provide critical cleaning, high purity surface preparation, quartz fabrication and plasma coating. we are trying

to focus on service excellence and fast turnaround time to ensure that our customers meet their deadlines and help our

customers achieve success and reduce costs and extend parts life and maintenance cycles.

We sincerely hope your business is doing well and I look forward to working with you in the near future.

주요고객 Major Customer

연혁 Milestone

2013 10 발안 제 3공장 완공 (예정) 3rd Facility Construction at Ba-Ran (Expected)

08 중국 시안 공장 완공 (예정) China Branch Facility Construction (Expected)

05 TEL 社 Cleaning Qualified Vendor 등록 Resistered as Cleaning Qualified Vendor for TEL

04 High Density Y203 Coated Ceramic Window Precision Cleaning 개발 Development of High Density Y203 Coated Ceramic Window Precision Cleaning

03 중국 시안 공장 착공 Initiated Contruction of Facilities at Xian China

일본 도시바 社 세정부분 NDA 체결 NDA Contract with TOSHIBA Japan

ASM 社 Cleaning Qualified Vendor 등록 Resistered as Cleaning Qualified Vendor for ASM

02 CVD Sic Ring Perfect Precison Cleaning 개발 Development of CVD Sic Ring Perfect Precison Cleaning

2012 12 경기도 유망중소기업 선정 Awarded Excellent prospects Company in Gyeonggi area

09 경기도 일자리 우수기업 선정 Awarded Excellence Recruitment Company in Gyenggi Area

07 삼성전자 중국 시안 공장 세정 코팅 부문 유치 확정 Qualified as Sole Vendor for Samsung at Xian China

04 METAL 공정 ARC Spray 공정 신기술 개발 (Hemi-Coating) Developed New Arc Spray Coating (Hemi-Coating)

03 New Coating 개발 (SY_YAG) 및 양산 적용 Developed New Coating (SY_YAG) and Started to Apply for SY_YAG

2011 10 Cleaning & Coating SCM Model of Samsung Cleaning & Coating SCM Model of Samsung

SEC 全 부서 Shower head Cleaning 전문 업체 선정 Qualified as Professional Shower Head Cleaning Company by SEC

2010 06 한양대학교 산학 연구 체결 R&D Contracted with Hanyang University

03 SEMES 社 Coating Qual_양산 진행 Contracted with SEMES Eng. for Part Cleaning & Coating

참앤씨 社 설비_세정 / 코팅 양산 진행 Contracted with Cham Eng. for Part Cleaning & Coating

Atto 社 설비_세정 부분 양산 진행 Contracted with Atto for Part Cleaning & Coating

IPS 社 설비_세정 / 코팅 양산 진행 Contracted with IPS for Part Cleaning & Coating

2009 06 LAM ESC 4xx Series Precision Cleaning 기술 개발 Developed new Technology for LAM ESC 4xx Series Cleaning

02 삼성 LED 사업부 신규 세정 양산 적용 Qualified Samsung LED parts Cleaning

15-L NEW Y2O3 Coating 개발 및 양산 Developed & Produced for 15L New Y2O3 Coating

2008 08 LAM 社 를 통한 하이닉스 세정 Qual Hynix Cleaning qualification for LAM

07 삼성 NRD 연구소 CU 공정 Cleaning 기술개발 Developed Clenaing Technology (CU process) for Samsung NRD LAB

06 LAM 社 ESC Series Cleaning 기술 제휴 Technology Partnership with LAM Research (ESC Series Cleaning)

01 Plasma Spray Coating Qual Qualified Plasma Spray Coating

2007 12 ㈜싸이노스엔지니어링에서 ㈜싸이노스로 상호변경 Changed CI From CINO ENG. To CINOS

08 ISO 14001 인증 Certified ISO 14001

04 6시그마 활동(BB:2/GB:10)인증 Certified 6 Sigma Activity (BB:2/GB:10)

2006 07 유망 중소기업 선정 Awarded Excellent prospects Company in Gyeonggi area

기술혁신형 중소기업 (INNO-BIZ) 인정 Cetified as INNO-BIZ by SMB Administration

2005 03 ERP 전산화 SYSTEM 도입 (시행 : 05년 4월~) Set up the ERP System

2004 10 300MM 제품 양산 세정 적용 Lauched Mass Production of 300MM 12,13L Cleaning Parts

06 300MM 12,13L 세정 제품 QUAL Qualified 300MM 12,13L Cleaning Parts

05 AL2O3, Y2O3 COATING QUAL Qualified AL2O3, Y2O3 Coating

03 부설연구소 설립 AL ARC SPRAY COATING QUAL Established New Research Center, Qualified Al Arc Spray Coating

01 호서대 산학 협력연구 체결 R&D Contracted with Hoseo University

2003 11 벤처기업 인증 (중소기업청) Certified Excellence Venture Company

07 ISO 9001 인증 Certified ISO 9001

04 우량 중소기업 인증 Qualified as Outstanding Company

03 QSI 협력업체 등록 Resitered As Official Cooperative Firm by QSI

01 삼성전기㈜ 협력업체 등록 Resitered As Official Cleaning Supplier by SEC

2002 12 삼성전자 세정제품 QUAL Quailified Cleaning Product by SEC

09 제 1공장 준공 (9.17) Completed 1st Facility Construction at Pal-tan Area

04 우량 중소기업 선정 Selected as a outstanding Company by Government

02 회사설립 Established "CINOS"

미래를 선도하는 초일류 기업

반도체 부품세정의 No.1기업 세계를 향상

CINOS의 도전입니다.

We, CINOS, are leading semiconductor parts

cleaning & coating industry in South Korea and seek

to become a corporation that is leading a global

semiconductor refurbishment business.

Cho Chul Hyung President

5A New Paradigm for Engineering4

Metal Type · 공정 Gas Type 유기물 Type · 입사정 Type 등

미세 오염물 제거

Metal Type · Process Gas TypeOrganic Type · Particle Type

Controlling Micro Contamination

ERP SYSTEM을 통한 체계적인 부품 Life Time 이력관리 전문화된 세정

Process의 전산 시스템 도입 통한 세정재현성 관리

Organized and ProfessionalManagement of Part Life TimeRecords through ERP System

PrecisionCleaning

오염제어Contamination Control

부품 흐름 관리Life Cycle

Management

특화기술SpecializedTechnology

테스트&분석Test&Analysis

To eliminate by-product on parts without any

damages Surface Treatment, ARC Spray 작업 등 부품 사용 시간 증가 및 CIS, DIS 등 특허기술을 통한

HOLE 내부 Contamination 제어

Increase Parts Durability During Surface Treatment, ARC Spray, Controlling Internal Hole Contamination Using Specialized Technologies

3차원 측정기, Airborne Particle Counter, RGA 등의 정밀 분석을 통한 세정 후 오염물 잔존여부 확인 및 품질 보증

Equipped State of ArtsAnalysis Tools for Increasing

the Quality of Product

Specilized Technology for

Chemical Cleaning

Etch Process Development of Removal Chemicals for Oxide, Poly and Metal Membranous

Metal Process Development of Removal Chemicals for Cu, W, Ti, TiN, AL, La, Ta, Co, Au, Ag, Ni, Ru Membranous

CVD Process Development of Process Membranous Chemicals for BPSG,ACL,ARC, Harp-USG,SiON, TeOS, HDP

Diffusion Process Development of Process Membranous Chemicals for Nitrid, HFO, MTO, SiN, ALD, ZrO

Implant Process Development of Contaminated Membranous Chemicals for AsH₃, BF₃, PH₃, B₂H6

Photo Process Development of Removal Chemicals for PR

CMP Process Development of Removal Chemicals for Slurry

LED Process Development of Removal Chemicals for Al, GaN, P, In

CIS Automatic Cleaning System for Mirco Porous Gas Hole Part

ACS Coolant line Cleaning System for the Inside of Fab

Specilized Technology for

Physical Cleaning

MPS Removal Device by using CO₂ Gas for Contaminated parts from Semiconductor process

APS Automatic device for surface treament

Dry Bead Blaster Elimination of contaminators on surface and process of generating roughness

Wet Bead Blaster Process of Elimination of contaminators on surface without Damage

Furnace Cleaning Process of Ejecting Gas from part by using heat treament

Specilized Technology for

Controlling Particle

HPWS Removal Device by using High Pressure for Micro P/C on Surface

UPW Special process of Pad Wiping for Miro P/C on Surface

MBS Elimination of Unstable P/C Factors for ARC Coated Part

DIS Automatic Cleaning System for Micro Poruos Gas Hole Part

PBRS Particle Removal System for Micro Poruos Gas Hole Part

세정품의 종류 Cleaning Application Product세정 Our Cleaning

세정 특화 기술 Specialized Cleaning Technologies

ETCH METAL

CVD DIFFUSION

Anodizing Cleaning Quartz Cleaning

Ceramic Dome(Epoxy) Cleaning Vaporizer Cleaning

Ceramic+ Y₂0₃ Coating Cleaning PVD W kit Cleaning

Shower Head Cleaning LFC Cleaning

7A New Paradigm for Engineering6

New Type H/W Y203 Powder Application Capability

● Process Control

·Y₂0₃ Oxidation Temp, Control

·Speed Factor(speed 1, 2, 3, 4) Control

·Nozzle Distance Control

● Qualified Powder

·Y₂0₃ Composition Control

·Impurities Control

·High Density Powder Shape

● Charateristic

·Porosity

·Adhesion

·Various Shapes and Materials

코팅 Our Coating

Coating Merit

Anodizing Ceramic

코팅 핵심 기술 Coating Core Technology

코팅 적용품 Coating Application Product

Inner Liner Bottom Edge Ring

GDP Top Edge Ring

Door Liner Ceramic Window

DecreaseCoatingPorosity

CINOSCoating

DevelopmentNew Coating

DecreaseHeat

Damage

IncreaseCoating

Hardness

·고온에서 Coating Damage Down -고온의 Chamber 내부에서도 Coating Damage Down

·Damage decrease on coated area at high temp as well as in high temp chamber

·Y203, YAG 및 YX Coating 개발

·Development of new generation coating -YX Coating

Inserting Coated Powder

·Coating Particle Source 인자 Down·Plasma Gas에 의한 Coating Damage Down - 내 Plasma 우수

·Decrease the source of coating particle·Damage decrease on coated area by plasma gas - Excellent Plasma resisting

Coating Mechanism

Coating

Melted Powder

9A New Paradigm for Engineering8

가공(관계사) Fabrication(Associated company)

<VM1260>

<NARA 4311>

<MYNX 650>

<NSM-A>

Vertical

Machining

Center

Miling

M/C

부품가공Parts Fabrication

미세가공Micro part

Manufacturing

Jig 제작 부품Jig

시스템 제작System

사업 영역 Business Area

(주)화영테크놀로지는 부품 가공, 미세 가공, JIG제작, SYSTEM 제작 분야에 끊임없는 기술개발로 성장해 가고 있습니다.Hwa Young Tech Co.,Ltd offers such as Parts Fabrication, Precision Manufacturing, JIG & System for customer's needs.

품질경영시스템의 지속적 개선을 통한 고객 만족

Satisfying Our Customer by Improving our Quality Control System

품질경영시스템 Quaility Control System

Customer

VOC

Satisfaction

of Customer

Responsibility of Management

Manufacturing Product Product & Service

Management of Resource

ContinuousImproving

Analysis and Estimation

Value added Activity

Information Flow

OutputInput

QM(Quality Management)

QA(Quality Assurance)

QC(Quality Control)

·Quality Planning(품질 기획)

·QM & EM System Control

(품질 & 환경경영 시스템 관리, ISO 인증관리)

·Design Review (개발 품질 관리)

·SOP Control (표준 관리)

·System & Process Audit (시스템 & 공정감사)

·Quality Innovation (품질 혁신)

·Customer Satisfaction (고객만족)

·Education & Certification(사내 교육 및 자격인증)

·Supplier Quality Control (공급업체 품질관리)

·Measurement System Control (측정 시스템 관리)

·Product & Work Shop Contamination Control

(제품 및 작업장 오염 관리)

·Quality Test (품질검사)

·Non-Conformity Control (부적합품 관리)

·SPC (통계적 품질 관리)

·Clean Room Control(클린룸 환경 관리)

·Quality CFT Activity (품질개선 분임조 활동)

P-D-C-ACycle

주요 부품 현황 Core Part

주요설비 Manufacturing Equipment

부품가공 (Parts Fabrication)

*Machining Center가공 Machining Center*자동자 부품 가공 Automobile Part*반도체 세정 Jig가공 Semiconductor Clesning Jig

지그제작 (JIG Prodcting)

*NC용 Fixture Fixture for NC*자동차부품용 Fixture Automoblie part*Inspection Jig

미세가공 (Precision Manufacturing)

*정밀부품가공 Micro Part Manufacturing*광학기기 등 정밀가공 Optical Device Precision Part Producing

시스템제작 (System Producting)

*자동화설비 Automation system*Loader & Unloader System*Conveyor System

품질인증 Quaility Certification·ISO 9001 (품질경영시스템) Quality Management System ·ISO 14001 (환경경영시스템) Environmental Management System

A New Paradigm for Engineering10 11

World Best Technical Leader

Kitting & Assembly

Test & Analysis

Repair Service

Part Supply

Life Cycle Management

Cleaning & Coating

Part Management

USA

China

Singapore

Japan

Europe

제1사업장(경기 화성) Pal-Tan Base Facility

Address. 경기도 화성시 팔탄면 삼천병마로 517-19

517-19, Samcheonbyeongma-ro, Paltan-myeon,

Hwaseong-si, Gyeonggi-do, 445-911 Korea

TEL. +81-31-366-3390 FAX. +81-31-366-3394

제2사업장(경기 화성) Hyangnam Base Facility

Address. 경기도 화성시 향남읍 구문천리 930-13

930-13, Gumuncheon-ri, Hyangnam-eup,

Hwaseong-si, Gyeonggi-do, Korea

TEL. +81-31-8014-4595

신공장(경기 화성) New Hyangnam Base Facility

Address. 경기도 화성시 향남읍 구문천리 930-17

930-17, Gumuncheon-ri, Hyangnam-eup,

Hwaseong-si, Gyeonggi-do, Korea

시노스유한공사(중국 서안) Cinos China

Address. 중국 산서성 서안시 개발구

South Fenghui Rord, High-tech Development Zone,

Xi' an China

관계사 - ㈜화영테크놀로지(경기 화성) HwaYoung Tech

Address. 경기도 화성시 안녕동 178-118

178-118, Annyeong-dong,

Hwaseong-si, Gyeonggi-do, Korea

TEL. +81-31-225-5680 FAX. +81-31-225-5690

사업장 위치 Our Facility Location

Our goal is to be a Total Engineering Company specialized in

"Refurbishment Business"