835 vacuum quality monitor (vqm835 vacuum quality monitor …
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835 Vacuum Quality Monitor (VQMTM)835 Vacuum Quality Monitor (VQM )
© 2012 Brooks Automation, Inc. • Proprietary Information
The Revolutionary New Vacuum Quality Monitor
World’s Fastest, Accurate at low mass Single Gas Calibration
Small si e and lo o tgasing Small size and low outgasing Lowest Power (80% less)
Now with new options…
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What is a Mass Spectrometer?
Ionizer
M
Mass SpectrometerField Replaceable Filament Assembly
2” Mass
IonizerMass
SeparatorDetectorIonizer Mass
Separator Detector
Magnetic Sector, Quadrupole or Ion Trap Partial Pressure
Measurement
Ion Trap
A small fraction of the gas molecules are ionized (+ ions), and the resulting ions are separated, detected and
Electron Multiplier
Mass Separator
Measurement
pmeasured according to their mass‐to‐charge ratios (m/z).
The ion signals sensed and measured
Electron Multiplier
Detector
The ion signals sensed and measured by the Detector provide an indirect measurement of partial pressures in a high vacuum gas environment.
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Autoresonant Ion Trap Mass Separator
130 Vdc
Ionizere‐
‐685Vdc
2MHz to 200KHz in 80msec
.5V P‐P
El t t ti I T I fi d b l
125 Vdc
Electrostatic Ion Trap: Ions confined by purely electrostatic fields oscillate at a resonant frequency inversely proportional to
zm / zm /Where, m is mass, z is the total charge of the ion
Autoresonance: RF scan pushes ions when scan frequency matches ion’s resonant frequency
Electrostatic confinement = Ultra‐low power requirements
q y q y
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Mass Separator – Modern Trends
Mass Separationmethodology defines the type of mass spectrometer
Magnetic Sector and Quadrupoles are prevalent technologies
Th El t t ti I T i th ti f l ti
Ion Trap MSIon Trap MSQuadrupole MSQuadrupole MS
The Electrostatic Ion Trap is the new generation of low mass separation technology
ToDetector
Ion Beam Trapped IonsIon
Source
ToDetector
Ion Beam Trapped IonsIon
Source
Ion Source Stable
Trajectory ToDetector
Ion Source Stable
Trajectory ToDetector
Entry Plate
Unstable Trajectory
Exit PlateEntry
PlateUnstable
Trajectory
Exit Plate
Ionization is inside the trap
Ion Trap ‐ all ions stored together
Mass dependent ejection
Ionization is outside the mass separator
Mass filter ‐ one m/z at a time
Mass‐dependent throughput
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Fast spectral output Slow scanning
Why is it 20 Times Faster?Autoresonant Ion Trap MS vs. Quadrupole RGA
Quad RGA = 1.5 sec, Ion Trap MS= 70 msec – 1‐100 amu scan
QuadrupoleN
N2/CO(28)
O Ar
CO2(44)
How much information
Ion Trap MS
N(14)
H2O(18)
O2(32)
Ar(40)you get in a 70 msec scan
Quadrupole missed Freon (fluorocarbon)
How much resolution and gas detection you ( )
CF3 C2F3H2
get in 1.5 seconds
Mass (amu)Quadrupole missed Water Ion Trap MS
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Can it see Hydrogen?Low Mass Scan Capabilities
High Resolution Low Mass Spectra
■ Excellent He detection capabilities – Leak detectionp■ Excellent Hydrogen detection capabilities – No quadrupole Zero Blast!
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What is Zero Blast?
Quadrupole mass filters exhibit poor performance at low masses: Zero Blast + Poor Resolution.at o asses e o ast oo eso ut o
The RF amplitudes at low masses are too low to stop “all ions” from reaching the detector leading to
fa zero blast starting at 0 amu and extending as far as 4 amu.
The baseline for the low mass spectrum is raised The baseline for the low mass spectrum is raised. Hydrogen which is an amu of 1 cannot be detected
clearly in “standard” RGAs.clearly in standard RGAs. No zero blast problem with ART MS.
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835 VQM Improvements Over 830 VQM
Field replaceable electron multiplier Better dynamic range (approximately 2x better) Better dynamic range (approximately 2x better) Software interface – allows other software programs to control and
receive partial pressure information from the VQM 1-300 amu available as an option Scan range can be controlled so you don’t need to scan the entire
range Audio for leak detect VQI (Vacuum Quality Index) which allows you to create an equation VQI (Vacuum Quality Index) which allows you to create an equation
and drive alarms or the digital output on the controllero For example: Drive output if Water is less than 20% AND Argon
is >37% AND O2 is <24% Histogram display of partial pressures (instead of only normalized) Log files in both the software and Excel Auto Tune adjusts gauge parameters for optimum performance
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VQI (Vacuum Quality Index)
Can drive alarms and digital output based on total pressure and partial pressure measurementspressure and partial pressure measurements
o Example: Drive output if Total Pressure < 5E-7 AND Argon < 51% AND Nitrogen > .5%
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835 Product Specifications
Parameter Specification
P R UHV 1 10 5 TPressure Range UHV to 1x10‐5 Torr
Mass Range 1 – 300 amu or 1‐145 amu
Resolution 150 typical, 100 minimumResolution 150 typical, 100 minimum
Dynamic Range 2 decades single scan, >3 decades with averaging
Scan Time 125 Msec for 300 amu, 85 msec for 145 amu
Operating Temp 0‐50 oC for gauge, 0‐40 oC for controller
Power 15W max, 8W typ, 75W max with 390802
Communications USB 2.0
Operating System Windows XP 32 bit, Windows7 32 or 64 bit
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VQM Controller Highlights
15 W power requirement (without Total pressure Kit. 75 Watts with TPMK)
USB 2.0 Interface
SCPI Command set
Total Pressure Kit Connectivity
125 msec- 300 amu scan range
M lti l t i d Multiple trigger modes
External Analog In (total pressure.)
Trigger Out can be driven by VQI equation Trigger Out can be driven by VQI equation
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835 VQM Viewer: Tune Screen
G h C lib t Ad d S tti Graph- Raw signal
- Denoised signal
Calibrate- Peak selection
- Gaussian fit
Advanced Settings- Sensor control
- Current values
- Histogram
- Gaussian Fit
- Calibration controls Communications Header- Revision info, status,
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VQM System With Ethernet API
Ethernet Router
ProcessControl VQM
C t
VQMController
RouterComputer Computer
USB
Runs:•Process control•API
Runs:•Data analysis•Service
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API Service•Viewer App (with optional keyboard/monitor)
Ion Trap Gauge Configurations
835100-YG-1N 835100-YG-1DNo Envelope Demountable EnvelopeAccessible Multiplier Accessible MultiplierNo Port Screen Removable Port Screen
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Replaceable Filament Assembly
The 835 sensor has a single Yttria coated Iridium Filament in a fieldcoated Iridium Filament in a field replaceable assembly.
•Filament life should be similar to an ion gauge
fil i li ifilament in same application
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Field Replaceable Electron Multiplier
The 835 sensor has an electron l i li i fi ld l blmultiplier in a field replaceable
assembly.•Electron multipliers wear out over time
•Lifetime is based on usage
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835 VQM Features Summary
Highly Differentiated!
Fast (Scan time 85ms for 1-145 amu scan) Large Pressure Range UHV to 10-5 Torrg g Full 1-145 or 1-300 amu measurement range Unprecedented low power requirements (15W) Single point mass axis calibration Single point mass axis calibration Comprehensive, easy to use viewer Electronics remote from sensor Electronics not paired to the sensor
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