3 due-axis laser tracker calibration device

Laser tracker’s calibration device 激光跟踪仪校准装置

Reporter: Gao ting 汇报人：高廷

Otc. 2014 2014年10月

• Introduce about laser tracker’s performance

evaluation （现有激光跟踪仪评定方法）

• Method for how to calibrate a laser tracker ’s angle &

distance （激光跟踪仪测角和测距精度的校准方法）

• c（双轴激光跟踪仪校准装置）

• 4 Design plans for Laser tracker calibration device（4

种跟踪仪校准装置的设计方案）

Contents 内容

1 Laser tracker’s performance evaluation

Calibrating

In-lab 实验室校准

Evaluating

in-site 现场检查

Evaluating in-site means to check the performance of laser

tracker measuring a point in workshop environment .

检查跟踪仪在某种特定的使用环境下所能达到的综合测量能力（如空间坐标

测量能力、空间测长测量能力）。

Two paths to laser tracker’s performance evaluation (激光跟踪仪的两种评定方式)

Calibrating In-lab means to check the performance of laser

tracker’s angle indexes Interferometer, laser distance meter,

retro-reflector, environment sensor etc. in a standard environment

laboratory and verify their maximum permission error(MPE).

检查的是集成在跟踪仪内部的双向测角编码器、激光干涉仪、激光测距仪、目

标跟踪传感器及目标反射镜、环境传感器等关键部件的技术指标是否满足生产

商提供的指标要求，即检查出设备的最佳测量能力。

Laser tracker （linear slider）whose standard magnitude is

reference length;

（激光干涉仪（直线导轨）--标准量是参考长度）

Linear target array whose standard magnitude is the

distance between target center coordinates and the target itself.

（直线目标阵列--标准量是目标中心点坐标和目标之间距离）

1 Laser tracker’s calibration method现有激光跟踪仪校准方法

Calibrating

In-lab 实验室校准

Calibrating

In-site 现场校准

Fixed length scale whose standard magnitude is reference length.

（定长标尺--标准量是参考长度）

Fixed target whose standard magnitude is space coordinates.

（固定目标--标准量是空间坐标）

Laser Tracker’s commonly used calibration equipment 激光跟踪仪常用的校准设备

序号单位建立时间测量范围备注

1 中航304所(AVIC 304 Institute)

1999 水平轴 36m俯仰轴2.1m

horizontal axis 36m

pitching axis 2.1m

水平轴、俯仰轴独立

Independent horizontal axis and pitching axis

2 中国计量院 2010 水平轴80m俯仰轴1.2m 俯仰轴位于水平轴上

pitching axis above horizontal axis

3 成都飞机制造公司 2011 水平轴25m俯仰轴1.0m 俯仰轴位于水平轴上

4 西安飞机制造公司 2012 水平轴 25m 仅有水平轴

5 航天计量测试技术所

2013 水平轴 10m俯仰轴2.0m 水平轴、俯仰轴独立

At present the domestic main calibration method of laser tracker is double-axis calibration method:

Horizontal axis is used to calibrate horizontal angle of tracker,built-in interferometer and rangefinder.

Vertical axis is used to calibrate pitch angle of tracker.

Units which have the ability to carry out calibrating In-lab in domestic are shown in Table 1.

目前国内激光跟踪仪的校准方法基本上采用双轴校准法：

水平轴--校准跟踪仪的水平角和内置干涉仪及测距仪

垂直轴--校准跟踪仪的俯仰角。

目前能够实现跟踪仪实验室校准的典型单位见表1。

1 Laser tracker’s calibration method现有激光跟踪仪校准方法

2 Due-axis Laser tracker calibration principle激光跟踪仪双轴校准原理

Basic idea--Adjust relative position between the laser tracker and rail in order to separate individual

errors of system.

基本思路--调整激光跟踪仪与导轨的相对位置分离出系统的单项误差。

Placed at one end of

the horizontal guide

rail 放置在水平导轨一端

Remain tracker's azimuth and pitch

angle unchanged，and calibrate its

ranging error.

（跟踪仪的方位角和俯仰角保持不变，校准跟踪仪测距误差。）

Remain tracker's pitch angle

unchanged，and calibrate its azimuth

angle measurement error.

（跟踪仪俯仰角保持不变时，校准跟踪仪方位角的测角误差。）

Remain tracker's azimuth unchanged

，and calibrate its pitch angle

measurement error.

（跟踪仪方位角保持不变，校准跟踪仪俯仰角的测角误差。）

Placed in front of

the horizontal guide

rail 放置在水平导轨前方

Placed in front of

the verticle guide

rail 放置在垂直导轨前方

Basic Principle--Placed tracker mirror and interferometer mirror on the same workbench,when the

workbench is moved a certain distance, displacement measured by the interferometer-

L0 and coordinates of two target points measured by tracker --P1,P2 can be

obtained.Then the distance between the 2 points (L) can be calculated by the

following formula:

in which A means angle between 2 target points.

基本原理--跟踪仪的反射镜与干涉仪的反射镜放置在同一工作台上，当工作台移动一定距离后，得到干涉仪的位移量L0和跟踪仪的两点坐标P1、P2，它们之间的距离为L,

其中A为两目标点之间的交角。

跟踪仪

导轨

工作台干涉仪反射镜跟踪仪反射镜

d1d

L

2 2 2

1 2 1 2L (d d ) 2d d cos A

2 2 2

1 2 1 2L (d d ) 2d d cos A


Remain tracker's azimuth

and pitch angle unchanged 当方位角和俯仰角不变时

Ignored angle measurement impact,ranging error of tracker is

忽略测角误差影响，跟踪仪的测距误差

Ignored ranging and pitch impact, azimuth measurement error of

tracker is

忽略测距和俯仰角的影响，跟踪仪的方位角测角误差

Remain pitch angle

unchanged，and change

azimuth 当俯仰角不变，方位角改变时

Remain azimuth unchang-

ed，and change pitch

angle . 当方位角不变俯仰角改

变时

d L

1 2 sin

LL

d d

Ignored ranging and azimuth impact, pitch angle measurement

error of tracker is

忽略测距和方位角的影响，跟踪仪的俯仰角测角误差

1 2 sin

LL

d d

d L

1 2 sin

LL

d d

1 2 sin

LL

d d


3 Due-axis Laser tracker calibration device双轴激光跟踪仪校准装置

(oprating stroke)＞10m工作行程

(straightness)≤0.15mm直线度

(uncertainty of measurement)测量不确定度

(2.0+0.5L) μm,k=2,

(working speed)＞500mm/s运动速度

(oprating stroke)＞2.0m工作行程

(straightness)≤0.05mm直线度

(uncertainty of measurement)测量不确定度

（2.0+0.5L) μm,k=2,

(working speed)＞100mm/s 运动速度

Vertical axis 垂直轴

Horizontal axis 水平轴

Technical parameters技术参数

Horizontal X axis:10m precision linear guide rail,length measuring system

Vertical Y axis:2m linear guide system,length measuring system

4 environmental compensation system，dual-axis motion controlling system ,

Analysising software platform,etc. (水平X轴：10m精密直线导轨、长度测量系统

垂直Y轴：2m直线导轨系统、长度测量系统

四路环境补偿系统

双轴运动控制系统

分析处理软件应用平台等组成。)

Regard laser interferometer as measurement standard of the distance between

two target points,place tracker mirror and interferometer mirror on

workbench,which is motor-driven and move along linear guide rail.The

deviation between distance that interferometer moved and distance that

target moved can reflect the measurement error. (采用激光干涉仪作为两点之间距离的测量标准，干涉仪的反射镜和跟踪仪的反射镜放置在工作台上，工作台由电机驱动，沿直线导轨运动。工作台移动时干涉仪反射镜的移动距离与被测目标的移动距离的偏差值反映了被校系统的测量偏差。)

Components

系统构成

Working process

工作过程


10m long precision linear guide rail which has cog belt structure,

feature：fast movement speed,can save time of calibrating.

Supporting mechanism--select marble platform with high rigidity and stability as a

reference

feature：high flatness and straightness accuracy,large-area workbench

environmental compensation uints--4 branches of temperature，1 branch of air pressure，1

branch of humidity

feature:placed on horizental guide rail,closed to light path，can measure environment

temperature around light path with higher accuracy.

•10m精密直线导轨---选用齿形带结构的直线运动导轨特点：运动速度快，可大大减少校准所用的时间。

•支撑机构---选择刚性好稳定性强的大理石平台作为基准特点：平面度和直线度精度高，工作平台面积大。

•环境补偿单元---4路温度、1路气压、1路湿度特点：放置在水平导轨上，与光路靠近，可更准确的获得测量光路所处环境的温度值。

Horizontal axis水平导轨


laser interferometer

激光干涉仪

reference platform

基准平台

Interferometric

combination

干涉组合

interferometer

mirror

干涉仪反射镜 linear guide rail

直线导轨

air sensor

空气传感器

marble platform

大理石平台

moving

platform

移动平台


•2m long vertical linear guide rail which is ball screw driven

feature:high load and long-term bearing capacity , reliable linear motion and stability.

• basis platform：solid metal platform of Level 00

feature:no distortion,can adjust to parallel with the horizontal guide rail .

• Supporting mechanism：l=l type metal back frame

feature：solid structure， Stable structure,good shock resistance, convenient to adjust rail

straightness .

•2m垂直直线导轨----选用滚珠丝杆传动的直线导轨

特点：具有高载荷和长时承载的能力，能够拥有可靠的直线运动、稳定性好。

•基础平台---00级稳固的金属平台

特点：不易变形，可通过调整与水平导轨平行。

•支撑机构---I=I型金属背架，

特点：结构稳定，抗震性好，便于导轨直线度调整。

Vertical guide rail (竖直导轨)


•Controller which adopts PLC as control core, and is responsible for motion control of

entire system

feature:it can improve the system's stability and controlling accuracy,enhance system's

anti-interference ability.

•Motor:the horizontal and vertical axes are both driven by AC servo motor

features:can be controlled by high-speed pulse output of PLC , select high-speed pulse +

direction control mode,can pinpoint the location of the mechanical movement position.

•Operation ---- touch screen and keyboard control in two ways

features:Touch screen can provide a clear man-machine interface,keyboard control can

make the operation easier and more convenient

•控制器---采用PLC作为控制核心，负责整个系统的运动控制

特点：可提高系统的稳定性和控制精度，增强系统的抗干扰性。

•电机---水平轴和垂直轴都采用AC伺服电机驱动

特点：可由PLC的高速脉冲输出口控制，选用高速脉冲+方向的控制模式，可以精确定位机械运动位置。

• 操作方式----触摸屏与键盘控制两种方式

特点：触摸屏可提供清晰的人机操作界面，键盘控制可使操作更加简单方便。

controller控制器


software platform软件平台

Interference ranging

module （干涉测距模块）

This module can achieve Interferometer configuration, display interference

data,and control measurement mode.

可以实现干涉仪的配置、干涉数据的显示、测量模式控制。

Environmental

monitoring module 环境监控模块

This module can display,collect and manage lab environment state

automatically , support real-time monitoring of quad temperature, one

branch of pressure and one branch of humidity.

可以自动采集显示、管理实验室环境状态，支持四路温度、一路气压、一路湿度的实时监控

Dual-axis linear motion

guides controlling module 双轴直线运动导轨控制模块

This module can control movements of horizontal and vertical linear

motion guides in several patterns, including manual, automatic, cycling

moving mode,etc.

可以对水平直线运动导轨和竖直直线运动导轨进行多种运动模式控制，包括手动、自动、循环等运动模式。

data managing module 数据管理模块

This module can manage data measured by interferometer, including data

naming, storage, display, analysis, preservation, and other functions, in

addition,analysis function include calibration results evaluation.

可以对干涉仪测量是数据进行管理，包括数据的命名、存储、显示、分析保存等功能，其中分析功能中包括对被校设备校准结果的评价。


Software--chart软件--结构图

干涉测距模块

Interferen

ce ran

gin

g

mo

du

le

环境监控模块

En

viro

nm

enta

l mo

nito

ring

mo

du

le

运动控制模块

Mo

tion

Co

ntro

l Mo

du

le

temperatu

repressure

humidity 温度

气压

湿度

h o r i z o n t a l

/vertical axis

displacement 水平轴位移竖直轴位移

data managing

module 数据管理模块

i n t e r f e r o m e t e r

measurement data 干涉仪测量数据

relationships of modules

各模块之间的关系

干涉仪状态显示区

数据库管理区数据树状管理区

测量控制区

Software-- Measurement and data management module软件--测量及数据管理模块

环境历史数据曲线显示区

当前环境数据显示区环境历史数据管理区

Software--Environmental monitoring module软件--环境监控模块

Software-- Due-axis motion control module软件--双轴运动控制模块

四、 Tracker calibration device design scheme comparison跟踪仪校准装置设计方案比较

Program1

Independent vertical axis, horizontal axis adopt three-light-path

interferometry, and marble guide rail, air floating workbench.

（竖轴独立，水平轴采用三光路干涉测量,水平轴采用大理石导轨，气浮式工作台。）

Program2

Vertical axis above horizontal axis, horizontal axis adopt three-light-path


竖轴位于水平轴上，水平轴采用三光路干涉测量，水平轴采用大理石导轨，气浮式工作台。

Program3

Independent vertical axis, horizontal axis adopt single-light-path


竖轴独立，水平轴采用单光路干涉测量，水平轴采用大理石导轨，气浮式工作台。

Program4

Independent vertical axis, horizontal axis adopt single-light-path

interferometry, and marble guide rail,metal guide rail.

竖轴独立，水平轴采用单光路干涉测量，水平轴采用大理石平台，金属导轨。

Scheme 1方案1

light path 光路

Horizontal axis adopt three-light-path synchronous interferometry, compensate

Abbe error in real time to achieve "coaxial synclastic" measurement.

水平轴采用三光路干涉同步测量，实时进行阿贝误差补偿，实现“同轴同向”测量。

structure 结构

independent horizontal axis and vertical axis.Horizontal axis adopt marble guide

rail,air floating workbench. Vertical linear guide rail is mechanical axis，which

is ball screw driven. .

水平轴与竖轴分开，各自独立。水平轴采用大理石导轨，气浮式工作台。竖轴为机械轴，滚珠丝杆传动。

index 指标

horizontal axis measurable range(横轴可测范围):<80m,

Measurement Uncertainty（测量不确定度）:0.3+0.3L mm

Verticle axis measurable range（竖轴可测范围）:>2m ,

Measurement Uncertainty（测量不确定度）:1+0.5L mm

Feature 特点

High precision, simple structure.（精度高，结构简单。）

The overall effect diagram总体效果图

Scheme 1方案1

Independent vertical axis独立竖轴

Scheme 1方案1

Horizontal axis three-light-path水平轴三光路

Scheme 1方案1

Vertical axis single -light-path竖轴单光路

Scheme 1方案1

Scheme 2方案2

Horizontal axis adopt three-light-path synchronous interferometry, compensate

Abbe error in real time to achieve "coaxial synclastic" measurement.

水平轴采用三光路干涉同步测量，实时进行阿贝误差补偿，实现“同轴同向”测量。

Vertical axis is above horizontal axis，biaxial linkage.Horizontal axis adopt

marble guide rail,air floating workbench. Vertical linear guide rail is mechanical

axis，which is ball screw driven. .

竖轴位于横轴上，双轴联动。水平轴采用大理石导轨，气浮式工作台。竖轴为机械轴，滚珠丝杆传动。


Measurement Uncertainty（测量不确定度）:0.3+0.3L mm

Verticle axis measurable range（竖轴可测范围）:1m ,

Measurement Uncertainty（测量不确定度）:2+2L mm(single marble 4m)

Horizontal axis has high precision, can provide standard laser plane, while its

structure is complicated, and vertical axis's precision is difficult to ensure.

横轴精度高，可提供标准激光平面，结构复杂，竖轴精度能难保证。

light path 光路

structure 结构

index 指标

Feature 特点

Scheme 2方案2


The horizontal axis on the horizontal axis竖轴位于水平轴上

Scheme 2方案2

The light path of vertical axis and horizontal axis move together竖轴光

路与水平轴光路联动

Scheme 2方案2

Scheme 3方案3

Horizontal axis and vertical axis both adopt single-light-path interferometry,

横轴与竖轴均采用单光路干涉测量。

Independent vertical axis and horizontal axis.Horizontal axis adopt marble

guide rail,air floating workbench. Vertical linear guide rail is mechanical axis，which is ball screw driven. .

水平轴与竖轴分开，各自独立。水平轴采用大理石导轨，气浮式工作台。竖轴为机械轴，滚珠丝杆传动。



Verticle axis measurable range（竖轴可测范围）:>2m ,


Horizontal axis has high precision, can provide standard laser plane, while its

structure is complicated, and vertical axis's precision is difficult to ensure.

横轴精度高，可提供标准激光平面，结构复杂，竖轴精度能难保证。

light path 光路

structure 结构

index 指标

Feature 特点

Scheme 3方案3


Verticle axis single-light-path水平轴单光路

Scheme 3方案3

Scheme 4方案4


Marble platform + machine guide rail大理石平台+机械导轨

Scheme 4方案4

Thank you！

3 due-axis laser tracker calibration device

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