2_datasheet no. 9 carborex silicon carbide for wiresawing usage

2
Datasheet no. 9 CARBOREX SILICON CARBIDE FOR WIRESAWING USAGE JIS 1000, JIS 1200, JIS 1500 AND JIS 2000 Carborex silicon carbide micro grits JIS 1000, JIS 1200, JIS 1500 and JIS 2000 are micro grits specially made for the wiresawing of silicon wafers for the semiconductor and photovoltaic industry. Carborex is high quality silicon carbide and is 100% virgin material containing no recycled silicon carbide. The grits are carefully classified with our unique process technology to meet the particle size distribution required for this manufacturing process. In addition to chemical analyses and particle size these grits will be analysed systematically for their circularity and abrasive efficiency, which are very critical parameters for these applications. PARTICLE SIZE DISTRIBUTION CARBOREX JIS 1000, JIS 1200, JIS 1500 AND JIS 2000 Grain size d in μm Mass percentage coarser than d CUTTING EDGE MATERIALS For wiresawing of silicon wafers, Carborex silicon carbide is a high quality material that results in greater efficiency and consistency.

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Page 1: 2_Datasheet No. 9 Carborex Silicon Carbide for Wiresawing Usage

Datasheet no. 9

CARBOREX SILICON CARBIDE FOR WIRESAWING USAGE

JIS 1000, JIS 1200, JIS 1500 AND JIS 2000Carborex silicon carbide micro grits JIS 1000, JIS 1200, JIS 1500 and JIS 2000 are micro grits specially made forthe wiresawing of silicon wafers for the semiconductor and photovoltaic industry. Carborex is high quality siliconcarbide and is 100% virgin material containing no recycled silicon carbide.

The grits are carefully classified with our unique process technology to meet the particle size distribution requiredfor this manufacturing process.

In addition to chemical analyses and particle size these grits will be analysed systematically for their circularity andabrasive efficiency, which are very critical parameters for these applications.

PARTICLE SIZE DISTRIBUTION - CARBOREX JIS 1000, JIS 1200, JIS 1500 AND JIS 2000

Grain size d in μm

Mas

s pe

rcen

tage

coa

rser th

an d

CUTTING EDGE MATERIALSFor wiresawing of silicon wafers, Carborex silicon carbide is a high quality material that results in greater efficiency and consistency.

Page 2: 2_Datasheet No. 9 Carborex Silicon Carbide for Wiresawing Usage

Data sh

eet no

. 9 - S

eptem

ber 2

01

1

Washington Mills ASNO-7300 OrkangerNorway

CARBOREX SILICON CARBIDE FOR WIRESAWING USAGE

Chemical Analyses (in weight) according to FEPA 45-1986, R 1993, resp. ISO 9286.

Tel: +47 72 48 35 00Fax: +47 72 48 35 01

E-mail: [email protected]

TYPICAL SURFACE CHEMICAL VALUESProduct % SiC % Free C % Si % SiO2 % Fe

JIS 1000 / JIS 1200

JIS 1500 / JIS 2000

99.2

98.3

0.15

0.25

0.25

0.35

0.40

0.60

0.07

0.10

Particle size distribution measured on Beckman CoulterMultisizer.

Gritdesignation

dS0 -valuemax.μm

dS3 -valuemax.μm

Mediangrain sizedS50 -value

μm

dS94 -valuemin.μm

JIS 1000

JIS 1200

JIS 1500

JIS 2000

32

27

23

19

27

23

20

17

11.5±1.0

9.5±0.8

8.0±0.6

6.7±0.6

7.0

5.5

4.5

4.0

PARTICLE SIZE DISTRIBUTION