2_datasheet no. 9 carborex silicon carbide for wiresawing usage
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Datasheet no. 9
CARBOREX SILICON CARBIDE FOR WIRESAWING USAGE
JIS 1000, JIS 1200, JIS 1500 AND JIS 2000Carborex silicon carbide micro grits JIS 1000, JIS 1200, JIS 1500 and JIS 2000 are micro grits specially made forthe wiresawing of silicon wafers for the semiconductor and photovoltaic industry. Carborex is high quality siliconcarbide and is 100% virgin material containing no recycled silicon carbide.
The grits are carefully classified with our unique process technology to meet the particle size distribution requiredfor this manufacturing process.
In addition to chemical analyses and particle size these grits will be analysed systematically for their circularity andabrasive efficiency, which are very critical parameters for these applications.
PARTICLE SIZE DISTRIBUTION - CARBOREX JIS 1000, JIS 1200, JIS 1500 AND JIS 2000
Grain size d in μm
Mas
s pe
rcen
tage
coa
rser th
an d
CUTTING EDGE MATERIALSFor wiresawing of silicon wafers, Carborex silicon carbide is a high quality material that results in greater efficiency and consistency.
Data sh
eet no
. 9 - S
eptem
ber 2
01
1
Washington Mills ASNO-7300 OrkangerNorway
CARBOREX SILICON CARBIDE FOR WIRESAWING USAGE
Chemical Analyses (in weight) according to FEPA 45-1986, R 1993, resp. ISO 9286.
Tel: +47 72 48 35 00Fax: +47 72 48 35 01
E-mail: [email protected]
TYPICAL SURFACE CHEMICAL VALUESProduct % SiC % Free C % Si % SiO2 % Fe
JIS 1000 / JIS 1200
JIS 1500 / JIS 2000
99.2
98.3
0.15
0.25
0.25
0.35
0.40
0.60
0.07
0.10
Particle size distribution measured on Beckman CoulterMultisizer.
Gritdesignation
dS0 -valuemax.μm
dS3 -valuemax.μm
Mediangrain sizedS50 -value
μm
dS94 -valuemin.μm
JIS 1000
JIS 1200
JIS 1500
JIS 2000
32
27
23
19
27
23
20
17
11.5±1.0
9.5±0.8
8.0±0.6
6.7±0.6
7.0
5.5
4.5
4.0
PARTICLE SIZE DISTRIBUTION