valves · 2018. 12. 13. · stainless steel high pressure cylinder valves for specialty gas sus-55l...

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STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES VALVES SUS series ( FOR SPECIALTY GAS ) SUS/SCR series ( FOR SPECIALTY GAS ) FS/FSC series ( FOR SPECIALTY GAS ) AD-M/AD-P series ( FOR SPECIALTY GAS - CORROSIVE etc. ) EGV/EGV2 series ( FOR SPECIALTY GAS - CORROSIVE etc. ) SOFIC series ( PNEUMATIC ACTUATOR )

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Page 1: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES

VALVES

SUS series ( FOR SPECIALTY GAS )

SUS/SCR series ( FOR SPECIALTY GAS )

FS/FSC series ( FOR SPECIALTY GAS )

AD-M/AD-P series ( FOR SPECIALTY GAS - CORROSIVE etc. )

EGV/EGV2 series ( FOR SPECIALTY GAS - CORROSIVE etc. )

SOFIC series ( PNEUMATIC ACTUATOR )

Page 2: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

SUS-12

STAINLESS STEEL HIGH PRESSURE CYLINDER VALVESFOR SPECIALTY GAS

PRESSURE SEAL TYPE

FEATURES

Double O-ring sealing structure is suitable for vacuuming.

Valves suitable for high purity gas.

Available to meet a wide range of international standards.

Specifications are subject to change without notice.

MODEL No. SUS-12-0HK

SUSF304

MATERIAL

C3604

SUS304orSUS303

SUS316

PCTFE

FPM

PTFE

ADC12

SWPA

A1100P

C3604

FIBER

C3711

NNCP

AgP

ITEM PART NAME

10

9

8

7

6

5

4b

11

4a

3

2

1 VALVE BODY

GLAND NUT

SPINDLE

PLUG

HANDWHEEL PACKING

SEAT DISC

O-RING

GLAND PACKING

HANDWHEEL

SPRING

SPRING CAP

HANDWHEEL NUT

14

13

12

15 FUSIBLE METAL

SAFETY NUT

RUPTURE DISC

SAFETY PACKING

DESCRIPTION

Pressure seal type

Stainless steel cylinder valve

For high purity gases

SUS-12 type

Page 3: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

STAINLESS STEEL HIGH PRESSURE CYLINDER VALVESFOR SPECIALTY GAS

SUS-55LSCR-55L

DIAPHRAGM SEAL TYPE(Cleaning and assembling in clean room)

( 36 )32.75

(113)

50 21

20

19

18

17

MODEL No. SCR-55L-1HFMODEL No. SUS-55L-350K

0.825-14NGO-LH(CGA No.350)

FEATURES

Inside surface of gas wetted area of polished body is

less than Rmax 1μm.

Ultra pure water cleaning and assembling in clean room.

External leak tightness(gland nut area) checked by helium

pressure method.(helium leak detector)

Removable fusible metal for baking.

(Maximum baking temperature 50℃)

SCR-55L type(Cleaning and assembling in clean room)

DESCRIPTION

Diaphragm seal type

Stainless steel cylinder valve

For ultra high purity gases (for the semi-conductor industries)

DESCRIPTION

Diaphragm seal type

Stainless steel cylinder valve

For high purity gases

FEATURES

High leak tightness integrity through diaphragm sealing.

Valve orifice is 4mm and Cv value is 0.3.

Seat disc materials. (PCTFE,PVDF,PI,NYLON66)(Option)

Adjustable seat plug type.(NOZZLE,FLAT type)(Option)

Available with optional restricted flow orifice threading

in outlet.

Connections available to meet a wide range of international

standards (CGA, DISS, etc.).

Specifications are subject to change without notice.

SUSF316L

MATERIAL

C3604

C3604

SUS304

Co ALLOY

SUS316L

SUS316L

SUS304-WPB

PCTFE

ITEM PART NAME

8

7

6

5b

5a

4

3

2

1 VALVE BODY

GLAND NUT

SPINDLE

STEM HEAD

DIAPHRAGM

DIAPHRAGM

PLUG

SPRING

SEAT DISC

C3771

MATERIAL

AgP

NNCP

SWRM

SWRH

A1100P

ITEM PART NAME

16

15

14

11

10

9 SAFETY NUT

SAFETY PACKING

RUPTURE DISC

ADC1213

12 FUSIBLE METAL

HANDWHEEL

SCREW

WASHER

NAME PLATE

MATERIALITEM PART NAME MATERIALITEM PART NAME

18

19

20

21

17 SUS321

NNCP

C3604

SUS304

C3771

O-RING

RUPTURE DISC

FUSIBLE PLUG

SAFETY SLEEVE

SAFETY NUT

SUS-55L type

Page 4: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

FS-55LNFSC-55LN

STAINLESS STEEL HIGH PRESSURE CYLINDER VALVESFOR SPECIALTY GAS

DIAPHRAGM SEAL TYPE(Cleaning and assembling in clean room)

MODEL No. FSC-55LN-640K2

0.825-14NGO-LH(CGA No.350)

25

24

23

22

21

MODEL No. FS-55LN-350K

FSC-55LN type(Cleaning and assembling in clean room)

DESCRIPTION

Diaphragm seal type

Stainless steel cylinder valve

For ultra high purity gases for the semi-conductor industries

DESCRIPTION

Diaphragm seal type

Stainless steel cylinder valve

For high purity gases

FEATURES

Inside surface of gas wetted area of polished body is

less than Rmax 1μm.

Ultra pure water cleaning and assembling in clean room.

External leak tightness(gland nut area) checked by helium

pressure method.(helium leak detector)

Removable fusible metal for baking.

(Maximum baking temperature 50℃)

FEATURES

High leak tightness integrity through diaphragm sealing.

Manual operating mechanism designed to prevent loosening

by vibration in transit.

Valve orifice is 4mm and Cv value is 0.3.

Seat disc materials. (PCTFE,PVDF,PI,NYLON66) (Option)

Adjustable seat plug type.(NOZZLE,FLAT type)(Option)

Available with optional restricted flow orifice threading

in outlet.

Connections available to meet a wide range of international

standards (CGA, DISS, etc.).

Specifications are subject to change without notice.

SUSF316L

MATERIAL

C3604

C3604

SUS304

Co ALLOY

SUS316L

SUS316L

SUS304-WPB

PCTFE

ITEM PART NAME

8

7

6

5b

5a

4

3

2

1 VALVE BODY

GLAND NUT

SPINDLE

STEM HEAD

DIAPHRAGM

DIAPHRAGM

PLUG

SPRING

SEAT DISC

C3771

MATERIAL

AgP

NNCP

SWPA

ADC12

A1100P-H18

C3604

C6782

ITEM PART NAME

16

15

14

13

12

11

1710

9 SAFETY NUT

SAFETY PACKING

RUPTURE DISC

FUSIBLE METAL

HANDWHEEL

SPRING

SPRING CAP

HANDWEEL NUT

STEM

C3604

MATERIAL

PTFE

FIBER

ITEM PART NAME

20

19

18 STEM GUIDE

GLAND PACKING

HANDWHEEL PACKING

MATERIALITEM PART NAME

22

23

24

25

21 SUS321

NNCP

C3604

SUS304

C3771

O-RING

RUPTURE DISC

FUSIBLE PLUG

SAFETY SLEEVE

SAFETY NUT

FS-55LN type

Page 5: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

SUS-01L-N

STAINLESS STEEL HIGH PRESSURE CYLINDER VALVESFOR SPECIALTY GAS

DIAPHRAGM SEAL TYPE

FEATURES

High leak tightness integrity through diaphragm sealing.

Selectable handwheel color. (Red,Gray)

SUS-01L-N is designed and developed for specialty gases used

in ion implantation systems in the semiconductor field.

SUS-01L-N type

DESCRIPTION

Diaphragm seal type

Stainless steel cylinder valve

For specialty gases (AsH3/PH3/11BF3, etc.) used with ion implantation

systems.

Specifications are subject to change without notice.

MODEL No. SUS-01L-N

SUSF316L

MATERIAL

SUS304

PCTFE

Co ALLOY

SUS316L

SUS304

C3604

SUS304-WPB

C3604

ADC12

NNCP

C3771

PCTFE

A1100P-H18

SWRM12

SWRH57B

AgP

C3604

SUS304-WPB

NYLON/BRASS

ITEM PART NAME

10

9

8

7

6

5

4b

11

4a

3

2

1 VALVE BODY

PLUG

SEAT DISC

DIAPHRAGM

SCREW

DIAPHRAGM

STEM HEAD

GLAND NUT

SPRING

SPINDLE

HANDWHEEL

NAME PLATE

14

13

12

15

16

19

18

17

20

SAFETY PACKING

WASHER

RUPTURE DISC

SAFETY NUT

PACKING

FUSIBLE METAL

NUT

RING

CHAIN / CLIP

Page 6: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES

DESCRIPTION

Tied-Diaphragm seal type

Stainless steel cylinder valve

For ultra high purity gases

FEATURES

Tied-diaphragm design for minimal particle generation

and dead space.

Approximate 60% reduction in dead space improves

purging performance.

Valve orifice is 5.5mm and Cv value is 0.35.

Maximum service pressure is 20MPa.

Flat seat design prevents seat deformation.

Protected safety device.

Optional materials available for gas wetted area.

Connections available to meet a wide range of international

standards (CGA, DISS, etc.).

OPTION

Inside surface of gas wetted area polished.

Cleaning and assembling in clean room.

EGV type

Specifications are subject to change without notice.

MODEL No. EGV-S3640-006

22

23

24

25

21 SWRH

A1100P-H18

C3604

SUS304

WASHER

FUSIBLE METAL

NAME PLATE

SAFETY SLEEVE

SAFETY PLUG

26

27

NNCP

AgP

RUPTURE DISC

SAFETY PACKING

PCTFE

NICKEL

SEAT DISC

MELT RING

SUS304

STAINLESS STEEL

SUS304-WPB

SUS630

C360413

12

11

10

9 UPPER STEM

SET SCREW

SPRING

STEM RETAINER

SPRING RETAINER

SUSF316L

MATERIAL

C3604

C3604

SUS304

Co-Ni ALLOY

SUS316L

ITEM PART NAME

6W

4

3

2

1 VALVE BODY

GLAND NUT

SPINDLE

STEM HEAD

LOWER STEM ASSY

DIAPHRAM

LOWER STEM

C6782

STAINLESS STEEL

POM

FKM

16

15

14

17

DIAPHRAGM RETAINER

PLUG

LEAK PORT PACKING

O-RING(S14)

FKM

MATERIAL

ADC12

SWRM

ITEM PART NAME

20

19

18 O-RING(S26)

HANDWHEEL

SCREW

722

658

321817131615

41210119141

1923

2120

24252627

33 28

64.9

(132)

EGV FOR SPECIALTY GAS (CORROSIVE etc.)

TIED-DIAPHRAGM SEAL TYPE

Page 7: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES

DESCRIPTION

Tied-Diaphragm seal type

Stainless steel cylinder valve

For ultra high purity gases

FEATURES

Tied-diaphragm design for minimal particle generation

and dead space.

Approximate 60% reduction in dead space improves

purging performance.

Valve orifice is 7mm and Cv value is 0.6.

Maximum service pressure is 4.5MPa.

Flat seat design prevents seat deformation.

Protected safety device.

Optional materials available for gas wetted area.

Connections available to meet a wide range of

international standards (CGA, DISS, etc.).

OPTION

Inside surface of gas wetted area polished.

Cleaning and assembling in clean room.

Pneumatic type.

EGV2 type

Specifications are subject to change without notice.

MODEL No. EGV2-S3720-006

22

23

24

25

21 SWRH

A1100P-H18

C3604

SUS304

WASHER

FUSIBLE METAL

NAME PLATE

SAFETY SLEEVE

SAFETY PLUG

26

27

NNCP

AgP

RUPTURE DISC

SAFETY PACKING

PCTFE

NICKEL

SEAT DISC

MELT RING

SUS304

STAINLESS STEEL

SUS304-WPB

SUS630

C360413

12

11

10

9 UPPER STEM

SET SCREW

SPRING

STEM RETAINER

SPRING RETAINER

SUSF316L

MATERIAL

C3604

C3604

SUS304

Co-Ni ALLOY

SUS316L

ITEM PART NAME

6W

4

3

2

1 VALVE BODY

GLAND NUT

SPINDLE

STEM HEAD

LOWER STEM ASSY

DIAPHRAGM

LOWER STEM

C6782

STAINLESS STEEL

POM

FKM

16

15

14

17

DIAPHRAGM RETAINER

PLUG

LEAK PORT PACKING

O-RING(S14)

FKM

MATERIAL

ADC12

SWRM

ITEM PART NAME

20

19

18 O-RING(S26)

HANDWHEEL

SCREW

7

22

6

5

8

3

2

18

17

13

16

15

4

12

10

11

9

14

1

19

23

21

20

24

25

26

27

6W

31.4

33.5

33 28

64.9

(132)

n 67

EGV2 FOR SPECIALTY GAS (CORROSIVE etc.)

TIED-DIAPHRAGM SEAL TYPE

Page 8: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES

DESCRIPTION

Pneumatic type

Diaphragm seal type

Stainless steel cylinder valve

For high purity gases

FEATURES

Actuator is miniaturized by single operated tandem dual

piston technology. (Normally closed)

In combination with other controlling equipment,

the valve can be:

1) Shut off in emergency situations

2) Remotely controlled

3) Auto closed-opened

Actuator lock function to prevent accidental opening.

Easy to connect and take off the piping for actuating pressure.

OPTION

Open and close indicator.

PAS-55L type

MODEL No. PAS-55L-2000-P

17

16 TUBE CONNECTORFKM(Hs70)O-RING

AgPSAFETY PACKING

Co ALLOY

SUSF316L

MATERIAL

SUS316L

PCTFE

SUS304-WPB

SUS316L

NBR(Hs70)

ITEM PART NAME

6

7

8

5

4

3

2b

2a

1 VALVE BODY

PLUG

SEAT DISC

SPRING

DIAPHRAGM

DIAPHRAGM

O-RING

C6191

C6782

NNCP11

10

9

12

BONNET

STEM

RUPTURE DISC

FUSIBLE METAL

C3771

MATERIAL

C6782

ITEM PART NAME

15

14

13 SAFETY NUT

DIAPHRAM RETAINER

ACTUATOR ASSY

Specifications are subject to change without notice.

14

5

1

2a

2b

3

4

6

7

9

10

13

12

11

8

15

16(146)

n 73.7

50

32.75 (37 )

PAS-55L FOR SPECIALTY GAS (CORROSIVE etc.)

DIAPHRAGM SEAL TYPE

Page 9: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES

MODEL No. AD-PS-2100

17

16 ACTUATOR ASSY

TUBE CONNECTOR

FKMO-RING

SUS304

SUSF316L

MATERIAL

PCTFE

Coi ALLOY

SUS316L

SUS304-WPB

NBR(Hs70)

ITEM PART NAME

6

7

8

5

4

3b

3a

2

1 VALVE BODY

SEAT DISC

DIAPHRAGM

DIAPHRAGM

DIAPHRAGM RETAINER

SPRING

O-RING

C6191

SUS304

SUS304

C3604

11

10

9

12

BONNET

STEM

SAFETY PLUG

FUSIBLE PLUG

NNCP

MATERIAL

SUS321

SUS304

ITEM PART NAME

15

14

13 RUPTURE DISC

O-RING

SAFETY SLEEVE

Specifications are subject to change without notice.

AD-MAD-P

DIRECT-DIAPHRAGM SEAL TYPE(Cleaning and assembling in clean room)

FOR SPECIALTY GAS (CORROSIVE etc.)

FEATURES

Gas wetted area of body polished to less than Rmax1μm.

Ultra pure water cleaning and assembling in clean room.

External leak tightness(gland nut area) checked by helium

pressure method.(helium leak detector)

Purging performance and moisture removal improved

by minimal dead space.

OPTION

Open and close indicator.

AD-M type (MANUAL OPERATION)

(Cleaning and assembling in clean room)

AD-P type (PNEUMATIC ACTUATOR)

(Cleaning and assembling in clean room)

DESCRIPTION

Direct diaphragm seal type

Stainless steel cylinder valve

For ultra high purity gases for the semi-conductor industries

FEATURES

Actuator is miniaturized by single operated tandem

dual piston technology. (Normally closed)

In combination with other controlling equipment,

the valve can be

1) Shut off in emergency situations

2) Remotely controlled

3) Auto closed-opened

Actuator lock function to prevent accidental opening.

Easy to connect and take off the piping for actuating pressure

Page 10: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES

Specifications are subject to change without notice.

FOR SPECIALTY GAS

SOFIC

SOFIC PNEUMATIC ACTUATOR TYPE

MATERIALITEM PART NAME

FUSIBLE METAL

Co ALLOY

SUSF316L

MATERIAL

SUS316L

PCTFE

SUS304-WPB

SUS316L

C3771

ITEM PART NAME

7

8

9

10

11

12

13

14

6

5

4

3

2

1 VALVE BODY

PLUG

SEAT DISC

SPRING

DIAPHRAGM

DIAPHRAGM

SAFETY NUT

GLAND NAT

NNCP

PCTFE

C6191

C6782STEM

SAFETY PACKING

ACTUATOR ASSY

TUBE CONNECTOR

RUPTURE DISC

17

18

19

20

16

SUSF316L

MATERIALITEM PART NAME

7

8

9

10

11

12

6

5

4

3

2

1 VALVE BODY

11

10

9

12

MATERIALITEM PART NAME

15

14

13

C6191

C6782

FKM

Co-Ni ALLOY

SUS316L

PCTFE

NICKEL

SUS304

STAINLESS STEEL

SUS304-WPB

FKM

GLAND NAT

STEM

O-RING(S7)

O-RING(S26)

DIAPHRAGM

LOWER STEM

SEAT DISC

MELT RING

UPPER STEM

SET SCREW

SPRING

C3604

C6782

STAINLESS STEEL

POM

C3604

SUS304

NNCP

AgP

C3604

SPRING RETAINER

DIAPHRAGM RETAINER

PLUG

LEAK PORT PACKING

TUBE CONNECTOR

FUSIBLE METAL

SAFETY SLEEVE

SAFETY PLUG

RUPTURE DISC

SAFETY PACKING

Spacer

ACTUATOR ASSY

SOFICSafety Oil-Free Inhibit Compact

OPTION

Open and close indicator. ■

FEATURES (PNEUMATIC ACTUATOR)

Actuator is miniaturized by single operated tandem dual

piston technology. (Normally closed)

In combination with other controlling equipment,

the valve can be:

1) Shut off in emergency situations

2) Remotely controlled

3) Auto closed-opened

Actuator lock function to prevent accidental opening.

Easy to connect and take off the piping for actuating pressure.

MODEL No. PAT-55L-2100 MODEL No. EGV4

2833

64.9

n 57

(160)

24

2

5

1516

23

867

22

18191720211

43

12131011

914

141

10

9

8

7

11

13

12

5

6

4

3

2

(37 )32.75

n 57

(148)

50

DESCRIPTIONSelectable in low-open valve.

The slow-open movement is designed to suppress sharply

rising pressure and temperature during opening to prevent

adiabatic compression.

Page 11: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

VALVES FOR SPECIALTY GASES

DISS OUTLET

No.TYPE OF GAS JIS OUTLET INLET Standard Manual Type Pneumatic Valve

AsH3

GeH4

SiH4

B2H6

H2Se

Si2H6

PH3

BCL3

HBr

CL2

HCL

SiH2CL2

WF6

NF3

SiF4

BF3

N2O

C2F6

C3F8

CF4

CHF3

C4F8

SF6

NH3

CO

CH2F2

CL2

Arsine

Germane

Silane

Diborane

Hydrogen Selenide

Disilane

Phosphine

Boron Trichloride

Hydrogen Bromide

Chlorine

Hydrogen Chloride

Dichlorosilane

Tungsten Hexafluoride

Nitrogen Trifluoride

Silicon Tetrafluoride

Boron Trifluoride

Nitorous Oxide

Hexafluoroethane

Octafluoro Propane

Tetrafluoromethane

Fluoroform

Octafluorocyclobutane

Sulfur Hexafluoride

Ammonia

Carbon monoxide

Difluoromethane

Chlorine

W22-14L

W22-14L

W22-14L

W22-14L

W22-14L

W22-14L

W22-14L

W22-14L

W22-14L

W26-14R

W26-14R

W22-14L

W22-14R

W22-14L

W22-14L

W22-14L

W22-14R

W22-14L

W22-14L

W22-14L

W22-14L

W22-14L

W22-14R

W22-14R

W22-14L

W22-14L

W26-14R

632

632

632

632

632

632

632

634

634

634

634

636

638

640

642

642

712

716

716

716

716

716

716

720

724

724

728

JIS B8246

(V1)

(V2)

3/4-14NGT

BS 341

DIN 477/

ISO 25E

KHK

KGS

GB

CGA

Hamai high quality stainless steel valves are designed for

the demanding gas properties of specialty gases.

Manufactured to the high pressure gas laws in Japan and

JIS B8246.

Also ready for the increasing demand for valves with CGA

standard (DISS) outlets.

SUS-12

STAINLESS STEELPRESSURE SEAL TYPE(FOR SPECIALTY GAS)

SUS-55LSCR-55L

FS-55LNFSC-55LN

PAS-55LPASC-55LPAT-55L(SOFIC)

STAINLESS STEEL DIAPHRAGM SEAL TYPE(FOR SPECIALTY GAS)

AD-MS AD-PS

STAINLESS STEEL DIRECT DIAPHRAGM SEAL TYPE(FOR SPECIALTY GAS)

EGVEGV2

EGV4(SOFIC)

STAINLESS STEEL TIED-DIAPHRAGM SEAL TYPE(FOR SPECIALTY GAS)

Specifications are subject to change without notice.

Page 12: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

BRASS HIGH PRESSURE CYLINDER VALVES

VALVES

K series ( FOR INDUSTRIAL GAS )

YVRH series ( FOR MEDICAL CARE )

A-55-F series ( FOR ACETYLENE GAS )

G-700 series ( FOR HYDROGEN/HELIUM GAS )

G-12/G-55L series ( FOR HIGH PURITY GAS )

Page 13: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

BRASS HIGH PRESSURE CYLINDER VALVESFOR INDUSTRIAL GAS

PRESSURE SEAL TYPEK-40K-10

K-10series

wrench type wrench typewith residual pressure valve

RPV BODY O-RING

O-RING X-RING SPRING

K-40 series handwheel type

VALVINGELEMENT

PIN

ATTACHMENT

DESCRIPTION

Pressure seal type

Brass cylinder valve

For industrial gases

For small gas cylinders with V1 inlet

FEATURES

K-10 series are designed with JIS V1 inlet threads

for small sized gas cylinders for industrial gases.

K-10 series(For small gas cylinders with V1 inlet)

K-40 series(Handwheel or wrench operated/ Residual pressure valve option)

Specifications are subject to change without notice.

MATERIALITEM PART NAME

8

7

6

5

4

3

2b

2a

1

MATERIALITEM PART NAME

11

10

9

FIBERHANDWHEEL PACKING

ADC12

C1100P-0

CSM

HANDWHEEL

O-RING

SAFETY PACKING

SWPA

A1100P-H1813

12 SPRING

SPRING CAP

C3604

66-NYLON

C3604

C3771

C3604

C3604

PTFE

C3771

C1220

14

15

HANDWHEEL NUT

SEAT DISC

SPINDLE

PLUG

VALVE BODY

GLAND NUT

GLAND PACKING

SAFETY NUT

RUPTURE DISC FUSIBLE METAL

MATERIALITEM PART NAME

8

7

6

5

4

3

2b

2a

1

MATERIALITEM PART NAME

11

10

9

C3604HANDWHEEL NUT

C3771

SWPA

A1100P-H18

SAFETY NUT

SPRING CAP

SPRING

C1100P-0

C122013

12 SAFETY PACKING

RUPTURE DISC

CSM

66-NYLON

C3604

C3771

C6782

C3604

PTFE

FIBER

ADC12

14

15

O-RING

SEAT DISC

SPINDLE

PLUG

VALVE BODY

GLAND NUT

GLAND PACKING

HANDWHEEL PACKING

HANDWHEEL FUSIBLE METAL

DESCRIPTION

Pressure seal type

Brass cylinder valve

For industrial gases

FEATURES

K-40 series available for 19.6 MPa gas cylinders.

Residual pressure type with backflow prevention.

W22-14

W22-14

Page 14: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

BRASS HIGH PRESSURE CYLINDER VALVESFOR INDUSTRIAL GAS

PRESSURE SEAL TYPE(Female thread outlet type) K-30

Specifications are subject to change without notice.

DESCRIPTION

Pressure seal type

Brass cylinder valve

For industrial gases

FEATURES

Wrench operated with female outlet threads.■

K-30 series

MODEL No. K-30

C3771

MATERIAL

C3604

BAKELITE

C3604/303/XM7

SUS304-WPB

C3604

PTFE

C3771

C1220

C1100P-0

CSM

ITEM PART NAME

10

9

8

7

6

5

4

11

3

2b

2a

1 VALVE BODY

PLUG

SEAT DISC

SPINDLE

FUSIBLE METAL

SPRING

GLAND NUT

GLAND PACKING

SAFETY NUT

RUPTURE DISC

SAFETY PACKING

O-RING

W22-14

Page 15: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

BRASS HIGH PRESSURE CYLINDER VALVESFOR INDUSTRIAL GAS

PRESSURE SEAL TYPE(W-O-ring Type)

K-44 series

DESCRIPTION

Pressure seal type

Brass cylinder valve

For industrial gases

FEATURES

Double o-rings for superior vacuuming.

Available with optional handwheel or

wrench operated.

Open - closed indicator

SAFETY PRO series

FEATURES

Safety Pro series provides a safe and secure

environment by protecting against incorrect operation.

Polycarbonate handwheels are light and tough.

Available for valves needing more than 360 degrees

to open and close.

half open closed

K-44 series

KX-44Model No.

KH-07Handle model No.

full open

K-44

Specifications are subject to change without notice.

MODEL No. K-44 series

C3604

BAKELITE

SUS304 or 303

SUS304-WPB

PTFE

C3771

C1220

C1100P-0

CSM

C3771VALVE BODY

PLUG

SEAT DISC

SPINDLE

FUSIBLE METAL

SPRING

GLAND PACKING

SAFETY NUT

RUPTURE DISC

SAFETY PACKING

O-RING

MATERIAL

C3604

ITEM PART NAME

8

7

6

5

4

3

2b

2a

1

GLAND NUT

MATERIALITEM PART NAME

11

10

9

W22-14

Page 16: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

PIN-INDEX YOKE TYPE VALVEFOR MEDICAL CARE

YOKE TYPE

DESCRIPTION

O-ring seal type

Brass cylinder valve

For medical care

FEATURES

Available with round or butterfly shaped

handles or wrench operated to meet

various needs.

With taper or parallel inlet threads.

YVRH series YVRH-PX2

19

20

18

C3771

MATERIALITEM PART NAME

7

8

9

10

6

5

4

3

2

1 VALVE BODY

13

12

11

14

17

16

15

C6782

66- NYLON

C6782

C3604

FPM(Hs70)

PTFE

C1100

SUS304-WPB

C3604

PLUG

SEAT DISC

SPINDLE

GLAND NUT

O-RING

GLAND PACKING

PACKING

SPRING

SAFETY PLUG

MATERIALITEM PART NAME

C1220

C1100

PLASTIC

PLASTIC

PTFE

PTFE

PLASTIC

SYNTHETIC RESIN FILM

SYNTHETIC RESIN FILM

C3604

RUPTURE DISC

SAFETY PACKING

HANDWHEEL

HANDWHEEL PACKING

NUT

O-RING

CAP

SEAL 1

SEAL 2

FUSIBLE METAL

Quick connector

FEATURES

WEH-C1-110469 for superior cost performance.

WEH-C1-64002 for increased safety in operation. MODEL No. WEH-C1-110469

MODEL No. WEH-C1-64002

WEH series■

YVRH

Specifications are subject to change without notice.

WEH-C1-110469

22MPa

22MPa

S-4623-A

O2

W22-14TPI※Without swiveljoint ※Straight type

Cam lever type ※Without lock function

Designed for gas tightness at low temperatures

22MPa

22MPa

S-4376-A

WEH-C1-64002

O2

W22-14TPI ※With swiveljoint ※Angle type

Rotating lever type ※With lock function

※Quick connectors are imported from WEH GmbH in Germany

Type New ly Product Conventional Product

Name

Drawing No.

Design Pressure

Leakage Test Pressure Gas

Connector

Handle Type

Note

③×⑥C3H6

N2O

GAS NAME PINHOLE NUMBER

①×③

②×④

③×⑤

O2 ②×⑤

CO2/O2 Mix(CO2 Mix rate is less than or equal to 7%)

O2/He Mix(He Mix rate is less than or equal to 80%)

②×⑥

H2C=CH2

GAS NAME PINHOLE NUMBER

O2/N2O Mix(N2O Mix rate is 30% or 50%) ⑩

N2 ①×④

Air ①×⑤

He or He/O2 Mix(O2 Mix rate is under 20%)

①×⑥

④×⑥

CO2 or CO2/O2 Mix(O2 Mix rate is over 7%)

TWO PINHOLE

ONE PINHOLE

4.7

5.7 +0.20

0+0.1

D

PINHOLE SIZE

Page 17: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

BRASS HIGH PRESSURE CYLINDER VALVESFOR ACETYLENE GAS

PRESSURE SEAL TYPE

DESCRIPTION

Pressure seal type

Brass cylinder valve

For acetylene gas

FEATURES

Brass valve for dissolved acetylene service.

Available with optional fusible plug.

A-55-F

A-55-F

Specifications are subject to change without notice.

MODEL No. A-55-F

C3771

MATERIAL

SUS403

C3604

C3604

NYLON

PTFE

SUS304

FLANNEL

NBR

EPR

ITEM PART NAME

10

9

8

7

6

5b

5a

4

3

2

1 VALVE BODY

SPINDLE

GLAND NUT

PACKING SHEET

GLAND PACKING

GLAND PACKING

WIRE MESH

FILTER SEAT

PACKING

FUSIBLE METAL

O-RING

Page 18: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

BRASS HIGH PRESSURE CYLINDER VALVESFOR HYDROGEN / HELIUM

DESCRIPTION

Pressure seal type

Brass cylinder valve

For hydrogen / helium gas

FEATURES

For use with high pressure tubes, cylinders with self-loader

or manifolds.

Available with pressure relief devices with tube connection

for outside exhaust.

G-700-K79/G-700-K81

PRESSURE SEAL TYPEG-700-K79G-700-K81

Specifications are subject to change without notice.

15

14

3

5

4b

4a

6

2

1

11

12

13

108 79

(35.3)

n 67

46.4

(119)

52.9

32.3

MODEL No. G-700-K81

C3771

MATERIAL

C3604

C6782

C6782

PCTFE

FPM

PTFE

C3771

C1220

FIBER

C1100P-0

ITEM PART NAME

10

9

8

7

6

15

14

13

12

11

5

4b

4a

3

2

1 VALVE BODY

GLAND NUT

SPINDLE

PLUG

SEAT DISC

O-RING

GLAND PACKING

SAFETY NUT

RUPTURE DISC

SAFETY PACKING

HANDWHEEL PACKING

ADC12HANDWHEEL

C3604HANDWHEEL NUT

SWPASPRING

A1100P-H18SPRING CAP

FUSIBLE METAL

Page 19: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

BRASS HIGH PRESSURE CYLINDER VALVESFOR HIGH PURITY GAS

PRESSURE SEAL TYPE

Pressure seal type Brass cylinder valveDouble o-ring sealing design in gland nutwith safety relief port

DESCRIPTION

Hamai brass cylinder valves deliver safety to the specialty

gas industry.

FEATURES

Double O-ring sealing structure is suitable for vacuuming

Available for gas cylinders with 19.6MPa/24.5MPa working pressure

Valves suitable for high purity gas

Available to meet a wide range of international standards

Specifications are subject to change without notice.

G-12

MODEL No. G-12

C3771

C3771

C1220

MATERIAL

C3604

C6782

C6782

PCTFE

FPM

PTFE

ADC12

SWPA

A1100P

C1100P-0

C3604

FIBER

ITEM PART NAME

10

9

8

7

6

15

14

13

12

11

5

4b

4a

3

2

1 VALVE BODY

GLAND NUT

SPINDLE

PLUG

SEAT DISC

SAFETY PACKING

SAFETY NUT

HANDWHEEL PACKING

RUPTURE DISC

GLAND PACKING

HANDWHEEL

SPRING

FUSIBLE METAL

HANDWHEEL NUT

SPRING CAP

O-RING

W22-14

Page 20: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

BRASS HIGH PRESSURE CYLINDER VALVESFOR HIGH PURITY GAS

DIAPHRAGM SEAL TYPE

Specifications are subject to change without notice.

MODEL No. G-55L

C3771

ADC12

A1100P

MATERIAL

C3604

C6604

SUS304

Co ALLOY

SUS316L

SUS316L

SUS304-WPB

PCTFE

C3771

SWRM

SWRH

C1100P-0

NNCP

ITEM PART NAME

10

9

8

7

6

16

14

13

12

11

5b

5a

4

3

2

1 VALVE BODY

GLAND NUT

SPINDLE

STEM HE AD

DI APHR AGM

SCREW

15 WASHER

HANDWHEEL

RUPTURE DISC

NAME PLATE

PLUG

SPRING

SEAT DISC

FUSIBLE METAL

SAFETY PACKING

SAFETY NUT

DI APHR AGM

G-55L

DESCRIPTION

Diaphragm seal type

Brass cylinder valve

For high purity gases

FEATURES

This type has the identical structure as SUS-55L type of

stainless steel cylinder valve.

Hamai diaphragm seal type valves are designed to be

grease-free through the use of highly polished lower diaphragms.

Available with JIS V1 inlet threads for small size gas cylinders.

G-55L

W22-14

Page 21: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

VALVES FOR INDUSTRIAL GASES

Hamai provides stable supplies of valves for industrial

gases such as oxygen, nitrogen and argon to a wide

range of industries.

Specifications are subject to change without notice.

CGA OUTLET

No.TYPE OF GAS JIS OUTLET

BSOUTLET

DINOUTLET Standard INLET Manual Type

(Air)

Ar

AsH3

BF3

CL2

F2

HCL

H2

H2S

He

Kr

NH3

NO

N2

N2O

Ne

O2

PH3

SF6

SiH4

SO2

Xe

CCL2F2

CHCLF2

CH4

CO

CO2

C2H2

C2H4

C2H4O

C2H6

C3H6

C3H8

C4H10

Air

Argon

Arsine

Boron Trifluoride

Chlorine

Fluorine

Hydrogen Chloride

Hydrogen

Hydrogen sulfide

Helium

Krypton

Ammonia

Nitric Oxide

Nitrogen

Nitrous Oxide

Neon

Oxygen

Phosphine

Sulfur Hexafluoride

Monosilane

Sulfur Dioxide

Xenon

Fluorocarbon-12

Fluorocarbon-22

Methane

Carbon monoxide

Carbon Dioxide

Acetylene

Ethylene

Ethylene oxide

Ethane

Propylene

Propane

butane

W22-14R

W22-14R

W22-14L

W22-14L

W26-14R

W22-14L

W26-14R

W22-14L

W22-14L

W21-14L

W26-14R

W22-14L

W22-14R

W22-14R

W22-14R

W22-14R

W22-14R

W22-14L

W22-14R

W22-14L

W22-14R

W22-14R

W26-14R

W26-14R

W22-14L

W22-14L

W22-14R

YOKE GATT TYPE

W22-14L

W22-14L

W22-14L

W22-14L

W22.5-14L

W22-14L

346

580

350

330

660

670

330

350

330

580

580

660

660

580

326

580

540

350

590

350

660

580

660

660

350

350

320

510

350

510

350

510

510

510

No.3

No.3

No.6

No.6

No.4

No.15

No.3

No.3

No.10

No.3

No.13

No.3

No.3

No.4

No.6

No.3

No.10

No.3

No.6

No.6

No.4

No.4

No.8

No.2

No.4

No.7

No.2

No.2

No.4

No.9

No.13

No.6

No.8

No.8

No.8

No.8

No.1

No.5

No.6

No.6

No.6

No.8

No.10

No.11**1

No.6

No.9

No.1

No.6

No.1

No.7

No.6

No.6

No.6

No.1

No.5

No.6

No.3

No.1

No.1

No.1

No.1

No.1**2

No.1**2

JIS B8246

(V1)

(V2)

3/4-14NGT

BS 341

DIN 477

/ISO 25E

KHK

KGS

GB

CGA

K-40K-30K-44

BRASSPRESSURE SEAL TYPE(FOR INDUSTRIAL GAS)

G-12G-55L

BRASS (FOR HIGH PURITY GAS)

Page 22: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

VALVES

STAINLESS STEEL HIGH PRESSURE LINE VALVES

PS series ( FOR SPECIALTY GAS )

PS/GS-12 series ( FOR SPECIALTY GAS )

PS/GS-55L series ( FOR SPECIALTY GAS )

PAV/PAVS-55L series-PNEUMATIC ACTUATOR- ( FOR SPECIALTY GAS )

Page 23: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

STAINLESS STEEL HIGH PRESSURE LINE VALVESFOR SPECIALTY GAS EQUIPMENT

Specifications are subject to change without notice.

CONNECTION

IN : W29-16TPI.RH

OUT : W29-16TPI.RH

Design Pressure 17MPa/25MPa

Cv Value 2.0

CONNECTION

IN : M36×3

OUT : M36×3

PS-110-R DESCRIPTIONStainless steel high pressure line valve

FEATURESCompact sized line valve with 10 mm seat diameter.

MATERIAL

SUSF316

SUS316

SUS316

SUS316

PCTFE

ITEM PART NAME

6

5

4

3

2

1 VALVE BODY

GLAND NUT

SPINDLE

PLUG

SEAT DISC

MATERIAL

FPM

PTFE

ITEM PART NAME

7

MODEL No. PS-110-R

O-RING

GLAND PACKING

SUS316

9

8 PACKING

MATERIAL

ADC12

SWPA

ITEM PART NAME

10

HANDWHEEL

SPRING

11

MATERIAL

A1100P

C3604

FIBER

ITEM PART NAME

13

12

SPRING CAP

HANDWHEEL NUT

HANDWHEEL NUT

PS-115-R DESCRIPTIONStainless steel high pressure line valve

FEATURESLarge sized line valve with 15 mm seat diameter.

Also available with a bearing type gland area for

reduced friction at high pressure.

MATERIAL

SUSF316

SUS316

SUS316

SUS316

PCTFE

ITEM PART NAME

5

4b

4a

3

2

1 VALVE BODY

GLAND NUT

SPINDLE

PLUG

SEAT DISC

MATERIAL

SUS316

PTFE

ITEM PART NAME

6

MODEL No. PS-115-R

GLAND PACKING

SPINDLE PACKING

SWPA

9

8 SPRING

MATERIAL

C3604

FC20

ITEM PART NAME

10

SPRING RETAINER

HANDWHEEL

PTFE11 HANDWHEEL PACKING

12

MATERIAL

C2801P

SUS304

FPM

ITEM PART NAME

14

13

NAME PLATE

SPLIT PIN

O-RING

PS-119-WB DESCRIPTIONStainless steel high pressure line valve

FEATURESLarge sized line valve with 19 mm seat diameter.

With a bearing type gland area for reduced friction

at high pressure.

A standard type without bearing is also available.

(Model No. PS-119-R)MODEL No. PS-110-R

MATERIAL

SUSF316

PCTFE

SUS316

PCTFE

ITEM PART NAME

4

3

2

1 VALVE BODY

SEAT DISC

PLUG

PACKING FOR PLUG

C3771

6

5 VALVE GUIDE

SUS304SPINDLE

MATERIAL

SUS316

PTFE

C3604

FPM

ITEM PART NAME

10

9

8

7 MALE-ADAPTER

V PACKING

FEMALE-ADAPTER

O-RING

12

11 O-RING

C3604TAP BOLT FOR V PACKING

POLYURETHANE RUBBER

MATERIAL

C3771or C3604

C3604

PTFE

ITEM PART NAME

16

15

14

13 BEARING

BEARING COVER NUT

BEARING RETAINER

HANDWHEEL PACKING

C3604

18

17 WASHER

FC20HANDWHEEL

MATERIAL

C3604

C2801P

C3604

PTFE

ITEM PART NAME

22

21

20

19 FLAT WASHER

NAME PLATE

NUT

BACKUPRING

PTFE

24

23 BACKUPRING

SUS304SPRING WASHER

NUT7 C3604

17MPa/20MPa/25MPa

Cv Value

Design Pressure

3.2

Design Pressure 17MPa/25MPa

Cv Value 5.5

PS-110-R PS-115-R PS-119-WB

CONNECTION

IN : W44-12TPI.RH

OUT : W44-12TPI.RH

Page 24: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

STAINLESS STEEL HIGH PRESSURE LINE VALVESFOR SPECIALTY GAS EQUIPMENT

PS-12GS-12 PRESSURE SEAL TYPE

MODEL No. GS-12MODEL No. PS-12

Specifications are subject to change without notice.

SUSF316

MATERIAL

SUS316

SUS316

SUS316

PCTFE

FPM

ADC12

ITEM PART NAME

8

6

5

4

3

2

1 VALVE BODY

GLAND NUT

SPINDLE

PLUG

SEAT DISC

O-RING

PTFE7 GLAND PACKING

HANDWHEEL

SWPA

MATERIAL

A1100P

C3604

FIBER

ITEM PART NAME

12

11

10

9 SPRING

SPRING CAP

HANDWHEEL NUT

HANDWHEEL PACKING

SUSF316

MATERIAL

SUS316

SUS316

SUS316

PCTFE

FPM

PTFE

ADC12

ITEM PART NAME

8

7

6

5

4

3

2

1 VALVE BODY

GLAND NUT

SPINDLE

PLUG

SEAT DISC

O-RING

GLAND PACKING

HANDWHEEL

SWPA

MATERIAL

A1100P

C3604

FIBER

ITEM PART NAME

12

11

10

9 SPRING

SPRING CAP

HANDWHEEL NUT

HANDWHEEL PACKING

C360413 LOCK NUT

DESCRIPTION

Pressure seal type

Stainless steel high pressure line valve

For high purity gases

GS-12

DESCRIPTION

Pressure seal type

Stainless steel high pressure line valve

For high purity gases

Angle type

FEATURES

Available for maximum service pressure of

33 MPa (336Kgf/Cm2).

Available with nut to connect a pressure gauge.

Model No. GS-12AS connection Inlet : W22-14TPI.RH

Outlet : G1/2

Also available with panel mouted type.

Model No. GS-12-PNL

FEATURES

Available for maximum service pressure of

41.2 MPa (420Kgf/Cm2).

Also available with panel mouted type.

Model No. PS-12-PNL

PS-12

Cv Value 0.3

Design Pressure 17MPa/25MPa/41.2MPa

Cv Value 0.35

Design Pressure 17MPa/25MPa/33MPa

Connection

IN : W22-14TPI.RH

OUT : W22-14TPI.RH

Connection

IN : W22-14TPI.RH

OUT : W22-14TPI.RH

Page 25: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

STAINLESS STEEL HIGH PRESSURE LINE VALVESFOR SPECIALTY GAS EQUIPMENT

PS-55LGS-55L DIAPHRAGM TYPE

MODEL No. GS-55LMODEL No. PS-55L

Connection

IN : W22-14TPI.RH

OUT : W22-14TPI.RH

Connection

IN : W22-14TPI.RH

OUT : W22-14TPI.RH

Specifications are subject to change without notice.

SUSF316

MATERIAL

C3604

C3604

SUS304

CoALLOY

SUS316L

SUS316L

SUS304-WPB

PCTFE

ITEM PART NAME

8

7

6

5b

5a

4

3

2

1 VALVE BODY

GLAND NUT

SPINDLE

STEM HEAD

DIAPHRAGM

DIAPHRAGM

PLUG

SPRING

SEAT DISC

ADC12

MATERIAL

A1100P

SWRM

SWRH

ITEM PART NAME

12

11

10

9 HANDWHEEL

NAME PLATE

SCREW

WASHER

SUSF316

MATERIAL

C3604

C3604

SUS304

CoALLOY

SUS316L

SUS316L

SUS304-WPB

PCTFE

ITEM PART NAME

8

7

6

5b

5a

4

3

2

1 VALVE BODY

GLAND NUT

SPINDLE

STEM HEAD

DIAPHRAGM

DIAPHRAGM

PLUG

SPRING

SEAT DISC

ADC12

MATERIAL

A1100P

SWRM

SWRH

ITEM PART NAME

12

11

10

9 HANDWHEEL

NAME PLATE

SCREW

WASHER

C360413 LOCKNUT

DESCRIPTION

Diaphragm seal type

Stainless steel high pressure line valve

For ultra high purity gases

GS-55L

DESCRIPTION

Diaphragm seal type

Stainless steel high pressure line valve

For ultra high purity gases

Angle type

FEATURES

Standard version with 4mm diameter seat and

Cv value of 0.35

Optional version with 6mm diameter seat and

Cv value of 0.45.

Available with optional polish for gas wetted body.

Available as panel mounted type.

FEATURES

Standard version with 4mm diameter seat and

Cv value of 0.35..

Optional version with 6mm diameter seat and

Cv value of 0.45.

Available with optional polish for gas wetted body.

Available as panel mounted type.

PS-55L

Design Pressure 17MPa/25MPa

Cv Value 0.35

Design Pressure 17MPa/25MPa

Cv Value 0.35

Page 26: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

STAINLESS STEEL HIGH PRESSURE LINE VALVESFOR SPECIALTY GAS EQUIPMENT

DIAPHRAGM TYPEPAV-55LPAVS-55L

MODEL No. PAV-55L

FEATURES

Line valve with air operated actuator.

Available with angle and straight shaped structure.

A straight type called PAVS is also available.

Model No. PAVS-55L

PAV-55L

DESCRIPTION

Diaphragm seal type

Stainless steel high pressure line valve

For high purity gases

Specifications are subject to change without notice.

MODEL No. PAV-55L

SUSF316

MATERIAL

C6782

C6782

NBR

CoALLOY

SUS316L

SUS316L

SUS304-WPB

POLYIMID

C3604

C3771

C3771

S60CM

C3604

C3604

C3604

C3604

NBR

NBR

NBR

NBR

ITEM PART NAME

10

9

8

7

6

5b

5a

11

4

3

2

1 VALVE BODY

BONNET

STEM

O-RING

LOCKNUT

DIAPHRAGM

DIAPHRAGM

PLUG

SPRING

SEAT DISC

LOCKNUT

CYLINDER GLAND

14

13

12

15

16

19

18

17

20

DISC SPRING

CYLINDER

LOWER PISTON

UPPER PISTON

CYLINDER HEAD

O-RING

O-RING

O-RING

O-RING

Page 27: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

BRASS HIGH PRESSURE LINE VALVES

VALVESG series ( FOR VARIOUS GAS )

P/G-12 series ( FOR VARIOUS GAS )

Page 28: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

BRASS HIGH PRESSURE LINE VALVESFOR VARIOUS GAS EQUIPMENT

Specifications are subject to change without notice.

Connetion

IN : W29-16TPI.RH

OUT : W29-16TPI.RH

G-110-R DESCRIPTIONBrass line valve

FEATURES10 mm seat diameter.

Available with angle shaped structure.

Design Pressure 17MPa/25MPa/30MPa

Cv Value 2.1

MATERIAL

C3771

C6782

PCTFE

C3604

C3604

ITEM PART NAME

6

5

4

3

2

1 VALVE BODY

PLUG

SEAT DISC

SPINDLE

GLAND NUT

MATERIAL

PTFE

FIBER

ITEM PART NAME

7

MODEL No. G-110-R

GLAND PACKING

HANDWHEEL PACKING

SWPA

10

9 SPRING

FC208 HANDWHEEL

MATERIAL

C3604

C3604

ITEM PART NAME

11

12

HANDWHEEL NUT

SPRING RETAINER

C3604SPRING GUIDE

13

MATERIAL

C2801P

FPM

PTFE

ITEM PART NAME

15

14

NAME PLATE

O-RING

BACK UP RING

S25C16 MOUNTING BOLT(OPTION)

FPM21 O-RING

G-119-R DESCRIPTIONBrass line valve

FEATURESLarge sized 19 mm seat diameter.

MODEL No. PS-110-RMATERIAL

C3771

C3771 or C3604

C6191

C3771

ITEM PART NAME

4a

3

2

1 VALVE BODY

PLUG

SPINDLE

PLUG SEAT

PCTFE4b SEAT DISC

MATERIAL

C3604

ITEM PART NAME

12

SPRING RETAINER

LOCK NUT10 C3604

NAME PLATE C2801P

SPRING

11

SWPA

C3604

13

HANDLE HOOK14

15

MATERIAL

HARD VINYL PLASTIC

C3604

SUS304

FC20

WASHER

SPLIT PIN

HANDWHEEL

FPMO-RING

ITEM PART NAME

17

16

PACKING

18

19

PTFE

7

6 SPINDLE PACKING

MATERIAL

C3604

C3604

ITEM PART NAME

8

INDICATOR HARDWARE

5 C1100PACKING FOR PLUG

INDICATOR THREAD

NUT9 C3604

Connection

IN : W44-12TPI.RH

OUT : W44-12TPI.RH

Design Pressure 17MPa/25MPa

Cv Value 5.5

G-115-R

Connection

IN : W32-12TPI.RH

OUT : W32-12TPI.RH

DESCRIPTIONBrass line valve

FEATURESLarge sized 15 mm seat diameter.

Available as G-115R panel-mounted flange type

or G-115RB bolt-stationary type.

MATERIAL

C3771

C3771 or C3604

C6191

C3771

ITEM PART NAME

4a

3

2

1 VALVE BODY

PLUG

SPINDLE

PLUG SEAT

MODEL No. G-115-R

PCTFE4b SEAT DISC

MATERIAL

C3604

ITEM PART NAME

13 SPRING RETAINER

LOCK NUT10 C3604

SPRING12 SWPA

C360414 HANDLE HOOK

HARD VINYL PLASTIC15 PACKING

16

MATERIAL

C3604

SUS304

FC20

ITEM PART NAME

18

17

WASHER

SPLIT PIN

HANDWHEEL

SS4119 MOUTING FLANGE

C2801P20 NAME PLATE

PTFE

7

6 SPINDLE PACKING

MATERIAL

C3604

C3604

ITEM PART NAME

8

INDICATOR HARDWARE

5 C1100PACKING FOR PLUG

INDICATOR THREAD

NUT9 C3604

17MPa/25MPa

Cv Value

Design Pressure

3.3

G-110-R G-115-R G-119-R

Page 29: VALVES · 2018. 12. 13. · STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room)32.75 (36) (113)

BRASS HIGH PRESSURE LINE VALVESFOR VARIOUS GAS EQUIPMENT

P-12G-12 PRESSURE SEAL TYPE

DESCRIPTION

Pressure seal type

Brass line valve

G-12 series (Main valve for filling)

DESCRIPTION

Pressure seal type

Brass line valve

Angle type

FEATURES

Also available with W22 LH outlet.

Available with nut to connect a pressure gauge.

Model No. G-12-AS connection Inlet : W22-14TPI.RH

Outlet : G1/2

FEATURES

Available with nut to connect a pressure gauge.

Model No. P-12-0FM connection Inlet : W22-14TPI.RH

Outlet : G1/2

P-12 series

MODEL No. G-12MODEL No. P-12

Connection

IN : W22-14TPI.RH

OUT : W22-14TPI.RH

Conection

IN : W22-14TPI.RH

OUT : W22-14TPI.RH

(MAIN VALVE FOR FILLING)

Specifications are subject to change without notice.

MATERIAL

C3771

C3604

C6782

C6782

ITEM PART NAME

4a

3

2

1 VALVE BODY

GLAND NUT

SPINDLE

PLUG

PCTFE

5

4b SEAT DISC

FPMO-RING

MATERIAL

PTFE

ADC12

SWPA

A1100P

ITEM PART NAME

9

8

7

6 GLAND PACKING

HANDWHEEL

SPRING

SPRING CAP

C3604

11

10 HANDWHEEL NUT

FIBERHANDWHEEL PACKING

MATERIAL

C3604

C6782

C6782

ITEM PART NAME

4a

3

2

1 VALVE BODY

GLAND NUT

SPINDLE

PLUG

PCTFE

C3771

5

4b SEAT DISC

FPMO-RING

MATERIAL

ADC12

SWPA

A1100P

ITEM PART NAME

9

8

7

6

HANDWHEEL

PTFEGLAND PACKING

SPRING

SPRING CAP

C360410 HANDWHEEL NUT

FIBER11 HANDWHEEL PACKING

C360412 ROCKNUT

Cv Value 0.3

Design Pressure 17MPa/25MPa

Cv Value 0.35

Design Pressure 17MPa/25MPa/27MPa