2017 micro technologies - spiespie.org/documents/conferencesexhibitions/emt17-final-lr.pdf ·...

2017

LEARN•CONNECT•

DO BUSINESS•

MICRO TECHNOLOGIES

Conferences: 8–10 May 2017Hotel Alimara, Barcelona, Spain

www.spie.org/MT

TECHNICAL PROGRAMME

SPIE Microtechnologies 2017 • www.spie.org/MT • Tel: +1 360 676 3290 • [email protected]

r

MICRO TECHNOLOGIES Conferences: 8–10 May 2017 Hotel Alimara, Barcelona, Spain

WelcomeCUTTING-EDGE RESEARCH

CONNECTING MINDS. ADVANCING LIGHT.

2017

www.spie.org/MT

WORLD-CLASS SPEAKERS

TRAINING AND EDUCATION

FOCUSED TECHNICAL TOPICS

CO-OPERATING ORGANISATIONSPONSOR

Onsite News: www.spie.org/MTnews • #SPIEmicrotechnologies 1

CONTENTSOrganize your week at Microtechnologies 2017The conference programme is organized by conference number.

Use the free SPIE Conference App and the online MySchedule tool (www.spie.org/MT) to build your custom schedule. Sign in with your SPIE account and save and sync your schedule between the tools.

10246 Smart Sensors, Actuators, and MEMS VIII (Fonseca, Prunnila, Peiner) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8

10247 Bio-MEMS and Medical Microdevices III (van den Driesche, Giouroudi, Delgado-Restituto) . . . . . . . . . . . . . . . . 11

10248 Nanotechnology VIII (Tiginyanu, Adelung, Sarua) . . . . . . . . . . . . . . . . 12

10249 Integrated Photonics: Materials, Devices, and Applications IV (Fédéli, Vivien) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

Conferences: Hear 150 presentations on the latest advances in digital pathology; tomography; image processing;

observer performance; image-registration, -informatics, and -segmentation; computer-aided diagnosis; and ultrasound.

Facility Maps p. 2

4 Conferences

Plenary Sessions p. 6

Don’t miss these world-class speakers discussing the latest directions and most promising breakthroughs.

Special Events p. 7

Join your colleagues at these relaxed events, including the Welcome Reception and Interactive Poster Session.

DAILY SCHEDULE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4

INDEX OF AUTHORS, CHAIRS, AND COMMITTEE MEMBERS . . . . . . . . 18–21

PROCEEDINGS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .23

GENERAL INFORMATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24–25

Registration · Author/Presenter Information · Policies · Food and Beverage · Onsite Services · Parking and Car Rental

SPIE POLICIES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26–27

Download the SPIE Conference App See p. 17 for information

MANAGED BY

SPIE Europe Ltd., a subsidiary of SPIE, is a not-for-profit UK-registered company serving SPIE constituents throughout Europe as an advocate and liaison to political and industry associations within the European optics and photonics community. In addition to providing membership services, SPIE Europe Ltd. organises and manages internationally recognised conferences, education programmes, and technical exhibitions featuring emerging technologies in optics and photonics.

SPIE Europe • 2 Alexandra Gate • Ffordd Pengam, Cardiff, CF24 2SA Tel: +44 29 2089 4747 • Fax: +44 29 2089 4750 • [email protected]


HOTEL ALIMARA FACILITY MAP

SPIE is the international society for optics and photonics, an educational not-for-profit organization founded in 1955 to advance light-based science and technology. The Society serves nearly 264,000 constituents from approximately 166 countries, offering conferences and their published proceedings, continuing education, books, journals, and the SPIE Digital Library in support of interdisciplinary information exchange, professional networking, and patent precedent. SPIE provided more than $4 million in support of education and outreach programs in 2016.

For more information, visit www.SPIE.org.

Get the free SPIE Conference and Exhibition AppFind the best networking and information-gathering opportunities with this powerful planning tool. Schedule your time in the conferences…navigate the exhibition floor…make new connections.

Available for iOS and Android. Search: SPIE Conferences.


EXECUTIVE ORGANISING COMMITTEE

Rainer Adelung, Christian-Albrechts-Univ. zu Kiel (Germany)

Manuel Delgado-Restituto, Instituto de Microelectrónica de Sevilla (Spain)

Jean-Marc Fédéli, CEA-LETI (France)

Luis Fonseca, Ctr. Nacional de Microelectrónica (Spain)

Ioanna Giouroudi, DWI an der RWTH Aachen e.V. (Austria)

Erwin Peiner, Technische Univ. Braunschweig (Germany)

Mika Prunnila, VTT Technical Research Ctr. of Finland Ltd. (Finland)

Andrei Sarua, Univ. of Bristol (United Kingdom)

Welcome to BarcelonaWelcome to the 8th SPIE Microtechnologies in Barcelona. Plan to participate and share your latest ideas in technological fields essential for shaping of the new millennium.

Four exciting conferences in the field of microtechnologies have been linked together. Take advantage of the synergies created by engineers, scientists, researchers, and managers working on various aspects of microtechnologies. The symposium presents a unique opportunity to hear about the latest advances in microtechnologies for smart sensors, energy harvesting and smart power, reconfigurable hardware, network on a chip, nano fabrication and self-assembly, hybrid nanosystems, biomedical applications and bioinspired systems, microfluidics and lab on a chip, silicon and nano photonics, quantum communication, and many other cutting-edge R&D results.

Exchange new ideas, address your shared concerns, and get access to information not yet published in these topical areas. Your paper is permanently archived in the SPIE Digital Library, where it will be available to others in the international scientific community who seek to learn, make discoveries, and innovate.

We welcome you to feel at home in Barcelona and join your colleagues and friends for the most stimulating scientific symposium.

SYMPOSIUM CHAIR

Ulrich Schmid Technische Univ. Wien (Austria)

SYMPOSIUM CO-CHAIRS

Jacopo Iannacci Findazione Bruno Kessler (Italy)

José Luis Sánchez-Rojas Aldavero Univ. de Castilla-La Mancha (Spain)

LOCAL CO-CHAIR

Carles Cané Ctr. Nacional de Microelectronica (Spain)

Ion M. Tiginyanu, Academy of Sciences of Moldova (Moldova)

Sander van den Driesche, Univ. Bremen (Germany)

Laurent Vivien, Institut d’Électronique Fondamentale (France)


TIME

Conference 10246Smart Sensors, Actuators,

and MEMS VIII

Conference 10247 Bio-MEMS and Medical

Microdevices III

Conference 10248 Nanotechnology VIII

Conference 10249 Integrated Photonics:

Materials, Devices, and Applications IV

MONDAY 8 MAY8:50 to 10:00 MONDAY PLENARY PRESENTATION: Smart Integrated Microsystems: The Energy Efficiency Challenge (Luca Benini)

10:00 COFFEE BREAK

10:30 SESSION 1 Modeling and Simulation I Session Chair: Michele Pozzi

SESSION 1 Nanoplatelets, Nanotubes, and NanowiresSession Chair: Ion M. Tiginyanu

12:10 LUNCH BREAK

13:40 14:00 SESSION 2 Modeling and Simulation II Session Chair: Jacopo Iannacci

13:35 SESSION 2 Luminescence and Light-emitting Devices Session Chair: Rainer Adelung

15:30 SESSION 3 Chemical and Biochemical Sensors I Session Chair: Mika Prunnila

SESSION 3 Multifunctional Applications and Sensors Session Chair: Andrei Sarua

16:30 SESSION 4 Chemical and Biochemical Sensors II Session Chair: Jürgen Wöllenstein

19:00 WELCOME RECEPTION

TUESDAY 9 MAY9:00 to 10:00 TUESDAY PLENARY PRESENTATION: MEMS Microphone Innovations Towards High Signal to Noise Ratios (Alfons Dehé)

10:00 COFFEE BREAK

10:30 SESSION 5 Physical Sensors I Session Chair: Robert J. Lad

SESSION 4 Thin Films and Photovoltaics Session Chair: Teresa Monteiro

SESSION 1 Biophotonics Session Chair: Iñigo Molina-Fernández

12:10 LUNCH BREAK

13:15 13:30 SESSION 6 Physical Sensors II Session Chair: Sören Fricke

13:15 SESSION 5 Material Nanostructuring and Microfabrication Session Chair: Hidenori Mimura

13:15 SESSION 2 Photonic Devices Session Chair: Jean-Marc Fédéli

14:30 POSTER SESSION

16:30 SESSION 7 Materials and Processes Session Chair: Erwin Peiner

SESSION 6 Synthesis Session Chair: Carlo Ricci

SESSION 3 Optical Sensing I Session Chair: Régis Orobtchouk

WEDNESDAY 10 MAY9:00 to 10:00 WEDNESAY PLENARY PRESENTATION: Graphene Technologies for Bioelectronics and Neuroprosthetics (Jose A. Garrido)

10:00 COFFEE BREAK

10:30 SESSION 8 Energy Devices I Session Chair: Gemma García Mandayo

SESSION 1 Biomedical Sensors and Microfluidics I Session Chair: Sander van den Driesche

SESSION 4 Quantum Photonics Session Chair: Laurent Vivien

12:10 LUNCH BREAK

13:40 SESSION 9 Energy Devices II Session Chair: Nathan M. Jackson

13:20 SESSION 2 Biomedical Sensors and Microfluidics II Session Chair: Georgios Kokkinis

13:15 SESSION 5 Optical Sensing II Session Chair: Laurent Vivien

15:30 SESSION 10 Interfacing and System Integration Session Chair: Luis Fonseca

SESSION 3 Biomedical Sensors and Microfluidics III Session Chair: Manuel Delgado-Restituto

DAILY SCHEDULE


Sign up to the free weekly newsletter and we’ll send the news to you.

optics.org/newsletter

Get the latest industry news.

He gets it.Shouldn’t you?

optics.org

follow us on twitter @opticsorg

CONNECTING MINDS. ADVANCING LIGHT.


PLENARY PRESENTATIONS

TUESDAY 9 MAY 9:00 TO 10:00 LOCATION: SITGES/LLÍVIA

9:00:Welcome and IntroductionsUlrich Schmid, Technische Univ. Wien (Austria)

MONDAY 8 MAY 8:50 TO 10:00 LOCATION: SITGES/LLÍVIA

8:50:Opening Remarks

WEDNESDAY 10 MAY 9:00 TO 10:00 LOCATION: SITGES/LLÍVIA

9:00:Welcome and IntroductionsUlrich Schmid, Technische Univ. Wien (Austria)

Ulrich Schmid, Technische Univ. Wien (Austria)

8:55:Welcome

Carles Cané, Ctr. Nacional de Microelectronica (Spain)

9:00 to 10:00

Smart Integrated Microsystems: The Energy Efficiency Challenge

Luca Benini, Univ. degli Studi di Bologna (Italy)

Abstract: The “internet of everything” envi-sions trillions of connected objects loaded with high-bandwidth sensors requiring massive amounts of local signal processing, fusion, pattern extraction and classification. From the computational viewpoint, the challenge is for-midable and can be addressed only by pushing computing fabrics toward massive parallelism and brain-like energy efficiency levels. CMOS technology can still take us a long way toward this goal, but technology scaling is losing steam. Energy efficiency improvement will increasingly hinge on architecture, circuits, design tech-niques such as heterogeneous 3D integration, mixed-signal preprocessing, event-based ap-proximate computing and non-Von-Neumann architectures for scalable acceleration.

Biography: Luca Benini holds the chair of Digital Circuits and Systems at ETHZ and is Full Pro-fessor at the Universita di Bologna. Dr. Benini received a Ph.D. degree in electrical engineering from Stanford University in 1997 and his research interests are in energy-efficient system design for embedded and high-performance comput-ing. He is also active in the area of energy-effi-cient smart sensors and ultra-low power VLSI design. Dr. Benini has published more than 700 papers in peer-reviewed international journals and conferences, four books, and several book chapters. He is a Fellow of the IEEE, the ACM, is a member of the Academia Europaea, and is the recipient of the 2016 IEEE CAS Van Valkenburg award.

9:05:

MEMS Microphone Innovations Towards High Signal to Noise Ratios

Alfons Dehé, Infineon Technologies AG (Germany)

Abstract: After decades of re-search and more than ten years of successful production in very high

volumes Silicon MEMS microphones are mature and unbeatable in form factor and robustness. Audio applications such as video, noise cancel-lation and speech recognition are key differen-tiators in smart phones. Microphones with low self-noise enable those functions. Backplate-free microphones enter the signal to noise ratios above 70dB(A). This talk will describe state of the art MEMS technology of Infineon Technologies. An outlook on future technologies such as the comb sensor microphone will be given.

Biography: Alfons Dehé is a Senior Principal on MEMS devices at Infineon Technologies. He ob-tained a diploma on solid state physics from the RWTH Aachen University in 1992. At the Techni-cal University of Darmstadt he finished his PhD in 1997 focusing on compound semiconductor micromachined sensors and actuators for ther-mal, optical and radio frequency applications. Since 1998 he is with the Infineon Technologies AG where he held different positions in the radio frequency and sensors department. He has start-ed Silicon microphone development and turned it into successful volume production. Today he is leading the MEMS innovation targeting mobile applications. He is the author and co-author of more than 90 papers and holds more than 30 patent families.

9:05:

Graphene Technologies for Bioelectronics and Neuroprosthetics

Jose A. Garrido, Institut Català de Nanociència i Nanotecnologia (ICN2) (Spain)

Abstract: Establishing a reliable bidirectional communication in-terface between the nervous

system and electronic devices is crucial for exploiting the full potential of neural prosthe-ses. Despite recent advancements, current microelectrode technologies evidence important shortcomings, e.g. challenging high density integration, low signal-to-noise ratio, poor long-term stability, etc. Thus, efforts to explore novel materials are essential for the development of next-generation neural prostheses. Graphene and graphene-based materials possess a rather exclusive set of physicochemical properties hold-ing great potential for biomedical applications, in particular neural prostheses. In this presenta-tion, I will provide an overview on fundamentals and applications of several graphene-based technologies and devices aiming at developing an efficient bidirectional communication with electrogenic cells and nerve tissue. The main goal of this talk is to discuss pros and cons of graphene technologies for bioelectronics and neuroprosthetics, and at the same time to iden-tify the main challenges ahead.

Biography: Jose A. Garrido is an ICREA Research Professor at the Catalan Institute of Nanosci-ences and Nanotechnology (ICN2), and head of the Advanced Electronic Materials and Devices group. He received a master and PhD degree in Telecommunication Engineering from the Tech-nical University of Madrid, in 1996 and 2000, respectively. From 2001 to 2004, he worked as a postdoc at the Walter Schottky Institute, Tech-nische Universität München, where he obtained his habilitation in experimental physics in 2010. From 2011 to 2015, Jose A. Garrido held a lecturer (privatdozent) position at the department of physics of the Technische Universität München. Currently, Jose A. Garrido is Deputy of the WP Biomedical Technologies of the EU Graphene Flagship.

Don’t miss these world-class speakers discussing the latest directions and most promising breakthroughs.


SPECIAL EVENTS

Welcome ReceptionMonday 8 May 2017 • 19:00 to 20:30 Location: Sagardi RestaurantJoin your colleagues for a networking event with light refreshments at 1881 per Sagardi Restaurant. Please remember to wear your conference registration badge.

Metro instructions: Take Metro L3 from stop “Mundet” [near Alimara Hotel], and go 11 stops to stop “Drassanes”. Then either walk or catch the bus. Go 4 stops to the harbour.

Interactive Poster SessionTuesday 9 May 2017 • 14:30 to 16:30 Location: Capri/Corfu

SETUP

Authors are encouraged to display their posters beginning at 10:00 on Monday for extended viewing. Each poster author will have a 1m x 1m (39 inches x 39 inches) area in which to display their poster presentation.

INTERACTIVE POSTER SESSION

Tuesday . . . . . . . . . . . . . . . . . . . . . . . . 14:30 to 16:30 Conference attendees are invited to attend the Poster Session on Tuesday afternoon. Come view posters, enjoy light refreshments, ask questions, and network with colleagues in your field. Attendees are required to wear their conference registration badges to the poster session.

Authors of poster papers will be present to answer questions concerning their papers. Posters not removed at the end of the interactive poster session will be considered unwanted and will be discarded.

Join your colleagues at these relaxed events, including the Welcome Reception and Interactive Poster Session.

• FREE • OPEN TO ALL CONFERENCE ATTENDEES


CONFERENCE 10246LOCATION: SITGES/LLÍVIA

Monday–Wednesday 8 –10 May 2017 • Proceedings of SPIE Vol. 10246

Smart Sensors, Actuators, and MEMS VIIIConference Chair: Luis Fonseca, Ctr. Nacional de Microelectrónica, CSIC (Spain)

Conference Co-Chairs: Mika Prunnila, VTT Technical Research Ctr. of Finland Ltd. (Finland); Erwin Peiner, Technische Univ. Braunschweig (Germany)

Programme Committee: Francisco J. Arregui, Univ. Pública de Navarra (Spain); Joan Bausells, Ctr. Nacional de Microelectrónica, CSIC (Spain); Achim Bittner, Hahn-Schickard (Germany); Christian Bolzmacher, Commissariat à l’Énergie Atomique (France); Lionel Buchaillot, IEMN, Univ. Lille 1 (France); Viorel Dragoi, EV Group (Austria); Isabelle Dufour, IMS, Univ. Bordeaux 1 (France); Sören Fricke, Robert Bosch GmbH (Germany); Gerald Gerlach, Technische Univ. Dresden (Germany); Jorge Hernando García, Univ. de Castilla-La Mancha (Germany); Martin Hoffmann, Technische Univ. Ilmenau (Germany); Carmen Horrillo-Guemes, ITEFI, CSIC (Spain); Jacopo Iannacci, Fondazione Bruno Kessler (Italy); Enrique Iborra, Univ. Politécnica de Madrid (Spain); Nathan M. Jackson, Tyndall National Institute (Ireland); Konrad Kapser, Infineon Technologies AG (Germany); Robert J. Lad, Univ. of Maine (United States); Jeong-Bong Lee, The Univ. of Texas at Dallas (United States); Elie Lefeuvre, Univ. Paris-Sud 11 (France); Gemma Garcia Mandayo, CEIT-IK4 (Spain); Fernando Martinez, IKERLAN, IK4 (Spain); Dean P. Neikirk, The Univ. of Texas at Austin (United States); Patrick Pons, Lab. d’Analyse et d’Architecture des Systèmes, CNRS (France); Michele Pozzi, Newcastle Univ. (United Kingdom); Gabriele Schrag, Technische Univ. München (Germany); Andreas Schütze, Univ. des Saarlandes (Germany); Ashwin Seshia, Univ. Cambridge (United Kingdom); Pietro Siciliano, Istituto per la Microelettronica e Microsistemi (Italy), Consiglio Nazionale delle Ricerche (Italy); Gabriel Vanko, Slovak Academy of Sciences (Slovakia); Jürgen Wöllenstein, Fraunhofer-Institut für Physikalische Messtechnik (Germany)

MONDAY 8 MAYMONDAY PLENARY SESSION

LOCATION: SITGES/LLÍVIA . . . . . . . . . . . . MON 8:50 TO 10:00

8:50: Opening Remarks: Ulrich Schmid, Technische Univ. Wien (Austria)

8:55: Welcome: Carles Cané, Ctr. Nacional de Microelectronica (Spain)

9:00: Smart integrated microsystems: the energy efficiency challenge (Plenary), Luca Benini, Univ. degli Studi di Bologna (Italy)

Coffee Break . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Mon 10:00 to 10:30

SESSION 1LOCATION: SITGES/LLÍVIA . . . . . . . . . . . . . . MON 10:30 TO 12:10

Modeling and Simulation ISession Chair: Michele Pozzi, Newcastle Univ. (United Kingdom)

10:30: Multiscale numerical study on ferroelectric nonlinear response of PZT thin films, Hiroki Wakabayashi, Osaka Institute of Technology (Japan) and Tokai Univ. (Japan); Yasutomo Uetsuji, Osaka Institute of Technology (Japan); Kazuyoshi Tsuchiya, Tokai Univ. (Japan) . . . . . . . . . . . . . . . . . . . . . . . . [10246-1]

10:50: Fluid-structure interaction modelling of the roof tile-shaped modes in piezoelectric plate microresonators, Víctor Ruiz-Díez, Javier Toledo Serrano, Jorge Hernando-García, Univ. de Castilla-La Mancha (Spain); Georg Pfusterschmied, Ulrich Schmid, Technische Univ. Wien (Austria); José Luis Sánchez-Rojas Aldavero, Univ. de Castilla-La Mancha (Spain) . . . . . . . [10246-2]

11:10: Optimization of a Piezo-fiber scanning architecture, Ramin Khayatzadeh, Fehmi Civitci, Onur Ferhanoglu, Istanbul Technical Univ. (Turkey) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-3]

11:30: Optimal design of a microgripper-type actuator, David Ruiz, Alex Díaz, Univ. de Castilla-La Mancha (Spain); Ole Sigmund, Technical Univ. of Denmark (Denmark); José Carlos Bellido, Alberto Donoso, José Luis Sánchez-Rojas Aldavero, Univ. de Castilla-La Mancha (Spain) . . . . . . . . . . . . . . . . . . . . [10246-4]

11:50: Topologically optimised flexure hinge based XY stage, Adil Han Orta, Bogazici University (Turkey); Evren Samur, Cetin Yilmaz, Bogaziçi Univ. (Turkey) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-5]

Lunch Break . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Mon 12:10 to 14:00


Modeling and Simulation IISession Chair: Jacopo Iannacci, Fondazione Bruno Kessler (Italy)

14:00: Modelling high signal to noise ratio in a novel silicon MEMS microphone with comb readout, Johannes Manz, Technische Univ. München (Germany); Alfons Dehé, Infineon Technologies AG (Germany); Gabriele Schrag, Technische Univ. München (Germany) . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-6]

14:20: An FE model of a cellular polypropylene: exploring mechanical properties, Pavlos Sgardelis, Michele Pozzi, Newcastle Univ. (United Kingdom) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-8]

14:40: Efficient fluid transport by a bionically inspired micro-flapper: fluidic investigations using fully coupled finite element simulation, Gabriele Schrag, Regine Behlert, Gerhard Wachutka, Technische Univ. München (Germany) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-9]



Chemical and Biochemical Sensors ISession Chair: Mika Prunnila,

VTT Technical Research Ctr. of Finland Ltd. (Finland)

15:30: Development of a lab-on-chip electrochemical immunosensor array for detection of Polycyclic Aromatic Hydrocarbons (PAH) in the environmental, Shifa Jameel A. Felemban, Patricia Vazquez, Tyndall National Institute (Ireland); Eric Moore, Tyndall National Institute (Ireland) and Univ. College Cork (Ireland) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-10]

15:50: Gravimetric humidity sensor based on ZnO nanorods covered piezoresistive Si microcantilever, Jiushuai Xu, Maik Bertke, Alaaeldin Gad, Hao Zhou, Hutomo Suryo Wasisto, Erwin Peiner, Technische Univ. Braunschweig (Germany) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-11]

16:10: MEMS-based multi-array hydrogen sulfide detection employing a phase transition, Benedikt Bierer, Cem Dinc, Haitao Gao, Univ. of Freiburg (Germany); Jürgen Wöllenstein, Univ. of Freiburg (Germany) and Fraunhofer-Institut für Physikalische Messtechnik (Germany); Stefan Palzer, Univ. of Freiburg (Germany) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-12]



Chemical and Biochemical Sensors IISession Chair: Jürgen Wöllenstein,

Fraunhofer-Institut für Physikalische Messtechnik (Germany)

16:30: Direct measurement for organic solvents diffusion using ultra-sensitive optical resonator, Amir R. Ali, Catherine Elias, The German Univ. in Cairo (Egypt) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-13]

16:50: Inkjet-printed dissolved oxygen and pH sensors on flexible plastic substrates, Ana Moya, Miguel Zea, Instituto de Microelectrónica de Barcelona (Spain); Enrico Sowade, Technische Univ. Chemnitz (Germany); Rosa Villa, Eloi Ramon, Instituto de Microelectrónica de Barcelona (Spain); Reinhard R. Baumann, Technische Univ. Chemnitz (Germany); Gemma Gabriel, Instituto de Microelectrónica de Barcelona (Spain) . . . . . . . . . . . . . . . . . . . . . . . . . [10246-14]

17:10: Wax microfluidics light-addressable valve with multiple actuation, Maria Diaz-Gonzalez, Gerard Boix, Cesar Fernandez-Sanchez, Antonio Baldi, Instituto de Microelectrónica de Barcelona (Spain) and Consejo Superior de Investigaciones Científicas (Spain) . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-15]

17:30: Development of biosensors for non-invasive measurements of heart failure biomarkers in saliva, Albert Alcacer, Angelos Streklas, Ctr. Nacional de Microelectrónica (Spain) and Consejo Superior de Investigaciones Científicas (Spain); Abdoullatif Baraket, Nadia Zine, Abdelhamid Errachid, Univ. Claude Bernard Lyon 1 (France); Joan Bausells, Ctr. Nacional de Microelectrónica (Spain) and Consejo Superior de Investigaciones Científicas (Spain) . . [10246-16]

TUESDAY 9 MAYTUESDAY PLENARY SESSION

LOCATION: SITGES/LLÍVIA . . . . . . . . . . . . . TUE 9:00 TO 10:00

Session Chair: Ulrich Schmid, Technische Univ. Wien (Austria)

9:00: MEMS microphone innovations towards high signal to noise ratios (Plenary), Alfons Dehé, Infineon Technologies AG (Germany)

Coffee Break . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Tue 10:00 to 10:30

SESSION 5LOCATION: SITGES/LLÍVIA . . . . . . . . . . . . . . .TUE 10:30 TO 11:50

Physical Sensors ISession Chair: Robert J. Lad, The Univ. of Maine (United States)

10:30: MEMS direction finding acoustic sensor, Gamani Karunasiri, Fabio Alves, William Swan, Naval Postgraduate School (United States) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-17]

10:50: A multi-functional MEMS-SPM for quantitative characterisation of nano-objects, Zhi Li, Sai Gao, Uwe Brand, Physikalisch-Technische Bundesanstalt (Germany) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-18]

11:10: Asymmetric resonance response analysis of a thermally excited silicon microcantilever for mass-sensitive nanoparticle detection, Maik Bertke, Gerry Hamdana, Wenze Wu, Markus Marks, Hutomo Suryo Wasisto, Erwin Peiner, Technische Univ. Braunschweig (Germany) . . . . . . . . . . [10246-19]

11:30: Thermoelectric bolometers based on ultra-thin highly doped silicon membranes, Aapo Varpula, Andrey V. Timofeev, Andrey Shchepetov, Kestutis Grigoras, Jouni Ahopelto, Mika Prunnila, VTT Technical Research Ctr. of Finland Ltd. (Finland) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-20]

Lunch Break . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Tue 11:50 to 13:30


Physical Sensors IISession Chair: Sören Fricke, Ctr. Suisse d’Electronique et de

Microtechnique SA (Switzerland)

13:30: Oscillator circuit for monitoring the gas damping effect of piezoelectric microresonators, Javier Toledo Serrano, Victor Ruiz-Díez, Univ. de Castilla-La Mancha (Spain); Patrick Schwarz, Helmut Seidel, Univ. des Saarlandes (Germany); José Luis Sánchez-Rojas Aldavero, Univ. de Castilla-La Mancha (Spain) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-22]

13:50: Comparative assessment of PVDF and PVDF-TrFE piezoelectric polymers for flexible actuators applications, Graciela Gutiérrez-Sánchez, Jorge Hernando-García, Óscar Dura, Marco Antonio López de la Torre, José Luis Sánchez-Rojas Aldavero, Univ. de Castilla-La Mancha (Spain) . . [10246-23]

14:10: Thin film system with integrated load and temperature sensors for the technical application in deep drawing process, Saskia N. Biehl, Fraunhofer-Institut für Schicht- und Oberflächentechnik (Germany) . . [10246-24]

TUESDAY POSTER SESSIONLOCATION: CAPRI/CORFÚ . . . . . . . . . . . . . . . .TUE 14:30 TO 16:30

Conference attendees are invited to attend the Poster Session on Tuesday afternoon. Come view posters, enjoy light refreshments, ask questions, and network with colleagues in your field. Authors of poster papers will be present to answer questions concerning their papers. Attendees are required to wear their conference badges to the poster session.

Anti-collision radio frequency identification system using passive SAW tags, Alexander Sorokin, Alexander P. Shepeta, Saint-Petersburg State Univ. of Aerospace Instrumentation (Russian Federation) . . . . . . . . . . . . . . . . . [10246-40]

Mini- and microgenerators applicable in the MEMS technology, Pavel J. Fiala, Zoltán Szabó, Petr Marcon, Zdenek Roubal, Brno Univ. of Technology (Czech Republic) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-41]

Design and development of microfluidic pH sensor created using RF sputtering technique, Ganesh Kumar Mani, Asuka Saito, Kazuyoshi Tsuchiya, Yutaka Yasoda, Tokai Univ. (Japan) . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-42]

Modelling the microstructure of surface by applying BRDF function, Kamil Plachta, Wroclaw Univ. of Science and Technology (Poland) . . [10246-43]

Actuation control of PiezoMEMS a biomimetic jellyfish robot, Alvaro Alejandre, Oskar Z. Olszewski, Nathan M. Jackson, Tyndall National Institute (Ireland) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-44]

Stream cipher with a MEMS-based seed generator, Miguel Garcia-Bosque, Adrian Perez, Carlos Sánchez-Azqueta, Santiago Celma Pueyo, Guillermo Royo, Univ. de Zaragoza (Spain) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-45]

Analyses of electromagnetic and piezoelectric systems for efficient vibration energy harvesting, Zdenek Hadas, Jan Smilek, Ondrej Rubes, Brno Univ. of Technology (Czech Republic) . . . . . . . . . . . . . . . . . . . . . . . . . [10246-46]

Gold/polypyrrole nanorods for gas sensing application, Milena Setka, Jana Drbohlavová, Brno Univ. of Technology (Czech Republic); Eduard Llobet Sr., Univ. Rovira i Virgili (Spain) . . . . . . . . . . . . . . . . . . . [10246-47]

Four-segment Piezo-based micropump, Rakesh K. Haldkar II, Tanuja Sheorey, Vijay K. Gupta, PDPM Indian Institute of Information Technology, Design & Manufacturing Jabalpur (India) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-48]

Computational model and simulation for the whispering gallery modes inside micro-optical cavity, Amir R. Ali, The German Univ. in Cairo (Egypt) and Southern Methodist Univ. (United States); Abanoub Erian, The German Univ. in Cairo (Egypt); Kirelloss Shokry, The German Univ. in Cairo (Egypt) and Univ. Twente (Netherlands) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-49]

Thermal analysis of magnetic trapping with alternating magnetic fields, Vania Silverio, Raju Kumar, INESC MN (Portugal); Miguel Amaral, João Gaspar, International Iberian Nanotechnology Lab. (Portugal); Susana Cardoso, INESC MN (Portugal); Paulo P. Freitas, INESC MN (Portugal) and International Iberian Nanotechnology Lab. (Portugal) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-50]

Influence of binding material of PZT coating on microresonator’s electrical and mechanical properties, Giedrius Janušas, Alfredas Brunius, Elingas Cekas, Asta Guobiene, Arvydas Palevicius, Kaunas Univ. of Technology (Lithuania) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-51]

Colorimetric sensor for bad odor detection using automated color correction, Katrin Schmitt, Karina Tarantik, Carolin Pannek, Fraunhofer-Institut für Physikalische Messtechnik (Germany); Ismael Benito-Altamirano, Olga Casals, Cristian Fabrega, Albert Romano-Rodriguez, Univ. de Barcelona (Spain); Jürgen Wöllenstein, Univ. of Freiburg (Germany) and Fraunhofer-Institut für Physikalische Messtechnik (Germany); J. Daniel Prades, Univ. de Barcelona (Spain) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-52]

CONFERENCE 10246


Temperature simulation at ZnO surface processed by laser interference lithography, Laura Parellada-Monreal, Miguel Martínez-Calderon, Irene Castro-Hurtado, Ainara Rodríguez, Santiago M. Olaizola, Mikel Gómez-Aranzadi, Isabel Ayerdi, Enrique Castaño, Gemma García Mandayo, CEIT-IK4 (Spain) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-53]

Metal wafer bonding for microelectronics and MEMS devices, Bernhard Rebhan, Viorel Dragoi, EV Group (Austria) . . . . . . . . . . . . . . [10246-54]

Characterization of oscillator circuits for monitoring the density-viscosity of liquids by means of piezoelectric MEMS microresonators, Javier Toledo Serrano, Victor Ruiz-Díez, Univ. de Castilla-La Mancha (Spain); Georg Pfusterschmied, Ulrich Schmid, Technische Univ. Wien (Austria); José Luis Sánchez-Rojas Aldavero, Univ. de Castilla-La Mancha (Spain) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-55]

Radio link design framework for WSN deployment and performance prediction, Sergio Saponara, Filippo Giannetti, Univ. di Pisa (Italy) . . . [10246-56]

User centered integration of Internet of Things devices, Roberto Manione, Media on Line (Italy) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-57]


Materials and ProcessesSession Chair: Erwin Peiner,

Technische Univ. Braunschweig (Germany)

16:30: Low-cost nanomechanical surfaces stress based sensors fabricated by hybrid materials, Pedro Fernando Escudero Villa, Jose Yeste Lozano, Rosa Villa, Mar Alvarez, Instituto de Microelectrónica de Barcelona (Spain) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-25]

16:50: Zirconium diboride thin films for use in high temperature sensors and MEMS devices, Robert J. Lad, David M. Stewart, George P. Bernhardt, The Univ. of Maine (United States) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-27]

17:10: FT-IR analysis of high temperature annealing effects in a SiC:H thin films, Tobias Frischmuth, Michael Schneider, Technische Univ. Wien (Austria); Thomas Grille, Infineon Technologies Austria AG (Austria); Ulrich Schmid, Technische Univ. Wien (Austria) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-28]

WEDNESDAY 10 MAYWEDNESDAY PLENARY SESSION

LOCATION: SITGES/LLÍVIA . . . . . . . . . . . . WED 9:00 TO 10:00


9:00: Graphene technologies for bioelectronics and neuroprosthetics (Plenary), Jose A. Garrido, Institut Català de Nanociència i Nanotecnologia (ICN2) (Spain)

Coffee Break . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Wed 10:00 to 10:30

SESSION 8LOCATION: SITGES/LLÍVIA . . . . . . . . . . . . . . WED 10:30 TO 12:10

Energy Devices ISession Chair: Gemma García Mandayo, CEIT-IK4 (Spain)

10:30: Micro solid oxide fuel cells: a new generation of micro-power sources for portable applications (Invited Paper), Albert Tarancón, Institut de Recerca en Energia de Catalunya (Spain) . . . . . . . . . . . . . . . . . . . . . . . [10246-29]

11:10: Alkaline fuel cell with nitride membrane, Shen-Huei Sun, Institut für Mikroelektronik Stuttgart (Germany); Moritz Pilaski, Jens Wartmann, ZBT GmbH (Germany); Florian Letzkus, Institut für Mikroelektronik Stuttgart (Germany); Benedikt Funke, Georg Dura, Angelika Heinzel, ZBT GmbH (Germany) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-30]

11:30: Parameter identification from frequency response of MEMS energy harvesters, Binh D. Truong, Phu C. Le, Einar Halvorsen, Univ. College of Southeast Norway (Norway) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-31]

11:50: Powering a leadless pacemaker using a PiezoMEMS energy harvester, Nathan M. Jackson, Cian O’Murchu, Alan Mathewson, Oskar Z. Olszewski, Tyndall National Institute (Ireland) . . . . . . . . . . . . [10246-32]

Lunch Break . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Wed 12:10 to 13:40


Energy Devices IISession Chair: Nathan M. Jackson, Tyndall National Institute (Ireland)

13:40: Designing, modelling, and testing of vibration energy harvester with nonlinear stiffness, Ondrej Rubes, Zdenek Hadas, Brno Univ. of Technology (Czech Republic) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-33]

14:00: Comparison of methods for static charge energy harvesting on aircrafts, Michail E. Kiziroglou, Alexander Technological Educational Institute of Thessaloniki (Greece); Thomas Becker, Airbus Group Innovations (Germany); Eric M. Yeatman, Imperial College London (United Kingdom); James W. Evans, Paul K. Wright, Univ. of California, Berkeley (United States) . . . . . . . . [10246-34]

14:20: Improved thermal and electrical design for an all-Si thermoelectric micropower source, Inci Donmez, Marc Salleras, Carlos A. Calaza Cabanas, Institut de Microelectrònica de Barcelona (Spain); Gerard Gadea, Alex Morata, Albert Tarancón, Institut de Recerca en Energia de Catalunya (Spain); Luis Fonseca, Institut de Microelectrònica de Barcelona (Spain) . . . . . [10246-35]

14:40: Integrated TiN coated porous silicon supercapacitor with increased capacitance per foot print, Kestutis Grigoras, Leif Grönberg, Jouni Ahopelto, Mika Prunnila, VTT Technical Research Ctr. of Finland Ltd. (Finland) . [10246-36]



Interfacing and System IntegrationSession Chair: Luis Fonseca, Ctr. Nacional de Microelectrónica (Spain)

15:30: A programmable differential capacitance to voltage converter for MEMS accelerometers, Guillermo Royo, Univ. de Zaragoza (Spain); Cecilia Gimeno Gazca, Univ. Catholique de Louvain (Belgium); Carlos Sánchez-Azqueta, Concepción Aldea, Santiago Celma Pueyo, Univ. de Zaragoza (Spain) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-37]

15:50: Robust design of an inkjet-printed capacitive sensor for position tracking of a MOEMS-mirror in a Michelson interferometer setup, Lisa-Marie Faller, Hubert Zangl, Alpen-Adria-Univ. Klagenfurt (Austria) [10246-38]

16:10: Universal and inductorless DC/DC converter for multi-output power supplies in sensor and actuator networks, Sergio Saponara, Gabriele Ciarpi, Univ. di Pisa (Italy) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-39]

CONFERENCE 10246


CONFERENCE 10247LOCATION: LLAVORSÍ

Tuesday–Wednesday 9–10 May 2017 • Proceedings of SPIE Vol. 10247

Bio-MEMS and Medical Microdevices IIIConference Chair: Sander van den Driesche, Univ. Bremen (Germany)

Conference Co-Chairs: Ioanna Giouroudi, Technische Univ. Wien (Austria); Manuel Delgado-Restituto, Instituto de Microelectrónica de Sevilla (Spain)

Programme Committee: Artur Dybko, Warsaw Univ. of Technology (Poland); Michael Kraft, Univ. de Liège (Belgium); Laura Maria Lechuga, Ctr. d’ Investigacions en Nanociència i Nanotecnologia (Spain); Konstantinos Misiakos, National Ctr. for Scientific Research Demokritos (Greece); Niclas Roxhed, Royal Institute of Technology (Sweden); Ramón Ruiz-Merino, Univ. Politécnica de Cartagena (Spain); Josep Samitier Martí, Univ. de Barcelona (Spain); Uwe Schnakenberg, RWTH Aachen (Germany); Winnie E. Svendsen, Technical Univ. of Denmark (Denmark); Angeliki Tserepi, National Ctr. for Scientific Research Demokritos (Greece); Thomas Velten, Fraunhofer-Institut für Biomedizinische Technik (Germany); Sabeth Verpoorte, Univ. of Groningen (Netherlands); Fernando Vidal-Verdú, Univ. de Málaga (Spain); Jean-Louis Viovy, Institut Curie (France)

TUESDAY 9 MAYTUESDAY POSTER SESSION

LOCATION: CAPRI/CORFÚ . . . . . . . . . . . . . . . .TUE 14:30 TO 16:30


Microfluidic systems for monitoring of cardiac (h9c2) cell proliferation, Anna Kobuszewska, Pawel Cwik, Elzbieta Jastrzebska, Zbigniew Brzózka, Michal Chudy, Warsaw Univ. of Technology (Poland); Philippe Renaud, Ecole Polytechnique Fédérale de Lausanne (Switzerland); Artur Dybko, Warsaw Univ. of Technology (Poland) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10247-11]

Simulation of the novel compact structure of an interferometric biosensor based on multimode interference waveguides, Moisi Xhoxhi, Univ. Politeknik i Tiranes (Albania); Alma Dudia, Aurel Ymeti, Nanoalmyona B.V. (Netherlands) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10247-15]

Design of an embedded sensor system for measuring laser scattering on blood cells, Christodoulos Iosifidis, Alexander Technological Educational Institute of Thessaloniki (Greece); Korina Katsaliaki, International Hellenic Univ. (Greece); Peter Kollensperger, Norwegian Univ. of Science and Technology (Norway); Michail E. Kiziroglou, Imperial College London (United Kingdom) and Alexander Technological Educational Institute of Thessaloniki (Greece) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10247-16]

Travelling-wave dielectrophoresis allowing flexible microchannel design for suspended cell handling, Sander van den Driesche, Frank Bunge, Sebastian Tepner, Marcus Kotitschke, Michael J. Vellekoop, Univ. Bremen (Germany) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10247-17]






SESSION 1LOCATION: LLAVORSÍ . . . . . . . . . . . . . . . . . . WED 10:30 TO 11:50

Biomedical Sensors and Microfluidics ISession Chair: Sander van den Driesche, Univ. Bremen (Germany)

10:30: Multilayered tissues model for wave propagation loss assessment in cochlear implants, Maria-Alexandra Paun, Catherine Dehollain, Ecole Polytechnique Fédérale de Lausanne (Switzerland) . . . . . . . . . . . . . . . . [10247-1]

10:50: Integration of a capacitive pressure sensing system into the outer catheter wall for coronary artery FFR measurements, Frank Stam, Tyndall National Institute (Ireland); Feng Gao, Anu Karkkainen, VTT Technical Research Ctr. of Finland Ltd. (Finland); Sebastian Pintal, Brendan Marrinan, Creganna Medical (Ireland) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10247-2]

11:10: A novel, scalable microfluidic device for switching of microparticles using dielectrophoresis (DEP), Waqas Waheed, Anas Alazzam, Khalifa Univ. of Science, Technology and Research (United Arab Emirates); Bobby Mathew, United Arab Emirates Univ. (United Arab Emirates); Eiyad Abu-Nada, Khalifa Univ. of Science, Technology and Research (United Arab Emirates) . . . [10247-3]

11:30: Microfluidic platform for detection and quantification of magnetic markers, Georgios Kokkinis, Technische Univ. Wien (Austria); Susana Cardoso, INESC MN (Portugal); Ioanna Giouroudi, Technische Univ. Wien (Austria) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10247-4]



Biomedical Sensors and Microfluidics IISession Chair: Georgios Kokkinis, Technische Univ. Wien (Austria)

13:20: Easy-to-use microfluidic chip for long-term cultivation of mammalian cells in 3D cell cultures, Frank Bunge, Sander van den Driesche, Michael J. Vellekoop, Univ. Bremen (Germany) . . . . . . . . . . . . . . . . . . . [10247-5]

13:40: Ink-jet printed selective microfluidic bio-sensor using CNTs functionalised by cytochrome P450 enzyme, Matic Krivec, Raimund Leitner, CTR Carinthian Tech Research AG (Austria); Florian Überall, Johannes Hochleitner, Medizinische Univ. Innsbruck (Austria); Raimund Leitner, CTR Carinthian Tech Research AG (Austria) . . . . . . . . . . . . . . . . . . . . . . . . . . [10247-6]

14:00: A miniaturised bioanalytical system for rapid quantitative label-free detection of multiple analytes in a single run, Panagiota Petrou, Michailia Angelopoulou, Varvara Pagkali, Alexandros Salapatas, Eleni Makarona, Ioannis Raptis, Sotirios E. Kakabakos, National Ctr. for Scientific Research Demokritos (Greece); Athanasios Botsialas, ThetaMetrisis S.A. (Greece); Gerhard Jobst, Jobst Technologies GmbH (Germany); Konstantinos Misiakos, National Ctr. for Scientific Research Demokritos (Greece) . . . . . . . . . . . [10247-7]

14:20: Real-time phase correlation based integrated system for seizure detection, Manuel Delgado-Restituto, James B. Romaine, Ángel Rodríguez-Vázquez, Instituto de Microelectrónica de Sevilla (Spain) . . . . . . . . . . . . [10247-8]

14:40: Bio-optical sensor for brain activity measurement based on whispering gallery modes, Amir R. Ali, Yasmin M. Massoud, The German Univ. in Cairo (Egypt) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10247-9]



Biomedical Sensors and Microfluidics IIISession Chair: Manuel Delgado-Restituto,

Instituto de Microelectrónica de Sevilla (Spain)

15:30: Dark field imaging system for size characterization of magnetic micromarkers, Anna Malec, Technische Univ. Wien (Austria); Christoph Haiden, Technische Univ. Wien (Austria) and Austrian Ctr. of Competence for Tribology (Austria); Georgios Kokkinis, Franz Keplinger, Ioanna Giouroudi, Technische Univ Wien (Austria) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10247-10]

15:50: Infrared spectroscopy as a screening technique for colitis, A. G. U. Perera, Jitto Titus, Hemendra Ghimire, Emilie Viennois, Didier Merlin, Georgia State Univ. (United States) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10247-12]

16:10: Micro-resonator-based electric field sensors with long duration of sensitivity , Amir R. Ali, The German Univ. in Cairo (Egypt) and Southern Methodist Univ. (United States). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10247-14]


CONFERENCE 10248LOCATION: LLAVORSÍ

Monday–Tuesday 8–9 May 2017 • Proceedings of SPIE Vol. 10248

Nanotechnology VIIIConference Chair: Ion M. Tiginyanu, Academy of Sciences of Moldova (Moldova)

Conference Co-Chairs: Rainer Adelung, Christian-Albrechts-Univ. zu Kiel (Germany); Andrei Sarua, Univ. of Bristol (United Kingdom)

Programme Committee: Necmi Biyikli, Bilkent Univ. (Turkey); Robert K. Feidenhans’l, Univ. of Copenhagen (Denmark); Jochen Feldmann, Ludwig-Maximilians-Univ. München (Germany); Nicolas Grandjean, Ecole Polytechnique Fédérale de Lausanne (Switzerland); Bianchi Méndez, Univ. Complutense de Madrid (Spain); Arben Merkoçi, Institut Català de Nanotecnologia (Spain); Hidenori Mimura, Shizuoka Univ. (Japan); Teresa Monteiro, Univ. de Aveiro (Portugal); Carlo Ricci, Univ. degli Studi di Cagliari (Italy); Ionel-Valentin Vlad, The Romanian Academy (Romania); Vladimir A. Yuryev, A. M. Prokhorov General Physics Institute (Russian Federation); Anvar A. Zakhidov, The Univ. of Texas at Dallas (United States); Anatoly V. Zayats, King’s College London (United Kingdom)

MONDAY 8 MAYMONDAY PLENARY SESSION

LOCATION: SITGES/LLÍVIA . . . . . . . . . . . . MON 8:50 TO 10:00

8:50: Opening Remarks: Ulrich Schmid, Technische Univ. Wien (Austria)

8:55: Welcome: Carles Cané, Ctr. Nacional de Microelectronica (Spain)

9:00: Smart integrated microsystems: the energy efficiency challenge (Plenary), Luca Benini, Univ. degli Studi di Bologna (Italy)


SESSION 1LOCATION: LLAVORSÍ . . . . . . . . . . . . . . . . . . MON 10:30 TO 12:10

Nanoplatelets, Nanotubes, and NanowiresSession Chair: Ion M. Tiginyanu,

Academy of Sciences of Moldova (Moldova)

10:30: Metal halide perovskite nano-platelets (Invited Paper), Jochen Feldmann, Ludwig-Maximilians-Univ. München (Germany) . . . . [10248-1]

11:10: Tailoring the shape of oxide complex nanostructures, Bianchi Méndez, Manuel Alonso-Orts, Alejandro Sanz, Univ. Complutense de Madrid (Spain); Iñaki Lopez, Univ. Complutense de Madrid (Spain) and Istituto Nazionale di Ottica (Italy); Emilio Nogales Díaz, Pedro Hidalgo, Javier Piqueras, Univ. Complutense de Madrid (Spain) . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-2]

11:25: Fabrication and optical properties of InGaN/GaN nanotube for cavity based laser, Emmanuel D. Le Boulbar, Univ of Bath (United Kingdom); Pierre-Marie Coulon, University of Bath (United Kingdom); Modestos Athanasiou, The Univ. of Sheffield (United Kingdom); Jon Pugh, Univ. of Bristol (United Kingdom); Gunnar Kusch, Univ. of Strathclyde (United Kingdom); Andrei Sarua, University of Bristol (United Kingdom); Rob W Martin, University of Strathclyde (United Kingdom); Martin J. Cryan, Univ. of Bristol (United Kingdom); Tao Wang, University of Sheffield (United Kingdom); Duncan W.E. Allsopp, Philip A Shields, Univ of Bath (United Kingdom) . . . . . . . . . . . . . . . . . . . [10248-3]

11:40: Eu-implanted AlxGa1-xN nanowires for solid state light emission, Nabiha Ben Sedrine, Jose Cardoso, Adriana Alves, Univ. de Aveiro (Portugal); D. Nd. Faye, Instituto Superior Técnico (Portugal); Matthias Belloeil, Bruno Daudin, Univ. Grenoble Alpes (France); Marco B. Peres, Katharina Lorenz, Instituto Superior Técnico (Portugal); Maria Rosario Correia, Teresa Monteiro, Univ. de Aveiro (Portugal) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-4]

11:55: Large-area fabrication of silicon nanostructures by templated nanoparticle arrays, Gerry Hamdana, Maik Bertke, Technische Univ. Braunschweig (Germany); Tobias Südkamp, Hartmut Bracht, Westfälische Wilhelms-Univ. Münster (Germany); Erwin Peiner, Technische Univ. Braunschweig (Germany) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-5]

Lunch Break . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Mon 12:10 to 13:35


Luminescence and Light-emitting DevicesSession Chair: Rainer Adelung,

Christian-Albrechts-Univ. zu Kiel (Germany)

13:35: Dynamics and emission characteristics of semiconductor nanowire lasers (Invited Paper), Carsten Ronning, Friedrich-Schiller-Univ. Jena (Germany) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-6]

14:15: Cathodoluminescence study of InGaN/GaN core-shell nanorod structures for optimising next generation LED devices, Christopher G. Bryce, Univ. of Strathclyde (United Kingdom); Emmanuel D. Le Boulbar, Univ. of Bath (United Kingdom); Paul R. Edwards, Univ. of Strathclyde (United Kingdom); Philip A. Shields, Duncan W. E. Allsopp, Univ. of Bath (United Kingdom); Robert W. Martin, Univ. of Strathclyde (United Kingdom) . . . . . . . . . . . [10248-7]

14:30: New nanosized hybrid phosphors for lighting applications, Pier Carlo Ricci, Marek Scholz, Daniele Chiriu, Carlo Maria Carbonaro, Carla Cannas, Claudio Cara, Univ. degli Studi di Cagliari (Italy) . . . . . . . . . . . [10248-8]

14:45: Characterisation of the structural and luminescence properties of microstructured and nanostructured nitride materials in the scanning electron microscope, Carol Trager-Cowan, G. Naresh-Kumar, M. Nouf-Allehiani, Jochen Bruckbauer, Gunnar Kusch, Paul R. Edwards, Catherine Brasser, Elena Pascal, Stefano Vespucci, Simon Kraeusel, Ben Hourahine, Robert W. Martin, Univ. of Strathclyde (United Kingdom); Yun Zhang, Modestos Athanasiou, Yipin Gong, Jie Bai, Kun Xing, Xiang Yu, Benbo Xu, Zhi Li, Yaonan Hou, Rick M. Smith, Tao Wang, The Univ. of Sheffield (United Kingdom); Emmanuel L. Boulbar, Univ. of Bath (United Kingdom); Juraj Priesol, Slovenska Technicka Univ. (Slovakia); Duncan W. E. Allsopp, Philip A. Shields, Univ. of Bath (United Kingdom); Frank Mehnke, Tim Wernicke, Christian Kuhn, Johannes Enslin, Technische Univ. Berlin (Germany); Michael Kneissel, Technische Univ. Berlin (Germany) and Ferdinand-Braun-Institut (Germany); Arne Knauer, Viola Kueller, Markus Weyers, Ferdinand-Braun-Institut (Germany); Aimo Winkelmann, Bruker Nano GmbH (Germany); Arantxa Vilalta-Clemente, Angus J. Wilkinson, Univ. of Oxford (United Kingdom) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-9]



Multifunctional Applications and SensorsSession Chair: Andrei Sarua, Univ. of Bristol (United Kingdom)

15:30: Flame based growth of ZnO nano- and microstructures for advanced optical, multifunctional devices, and biomedical applications, Yogendra K. Mishra, Jorit Gröttrup, Daria Smazna, Iris Hölken, Mathias Hoppe, Sindushree Sindushree, Sören Kaps, Christian-Albrechts-Univ. zu Kiel (Germany); Oleg Lupan, Technical Univ. of Moldova (Moldova); Jan Seidel, The Univ. of New South Wales (Australia); Teresa Monteiro, Univ. de Aveiro (Portugal); Ion M. Tiginyanu, Technical Univ. of Moldova (Moldova); Lorenz Kienle, Christian-Albrechts-Univ. zu Kiel (Germany); Carsten Ronning, Friedrich-Schiller-Univ. Jena (Germany); Karl Schulte, Bodo Fiedler, Technische Univ. Hamburg-Harburg (Germany); Rainer Adelung, Christian-Albrechts-Univ. zu Kiel (Germany) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-10]

15:45: GaP nanowire photocathode with integrated methanol sensor, Jozef Novák, Agáta Laurencíková, Stanislav Hasenohrl, Peter Elias, Institute of Electrical Engineering SAS (Slovakia) . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-11]

16:00: Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to ethanol, Ondrej Chmela, Brno Univ. of Technology (Czech Republic); Jakub Sadílek, CEITEC- Central European Institute of Technology (Czech Republic); Jordi Samà, Univ. de Barcelona (Spain); Stella Vallejos, Brno Univ. of Technology (Czech Republic); Albert Romano-Rodriguez, Univ. de Barcelona (Spain); Jaromír Hubálek, Brno Univ. of Technology (Czech Republic) . . . . . . . . . . . . . . . . . . . . . [10248-12]

16:15: Microfield emitters: characteristics and applications, Hidenori Mimura, Tomoaki Masuzawa, Yoichiro Neo, Shizuoka Univ. (Japan) . . . . . . . . . [10248-13]


16:30: Field emission properties of ring-shaped Si ridges with DLC coating, Christian Prommesberger, Christoph Langer, Robert Lawrowski, Mirgen Mecani, Rupert Schreiner, Ostbayerische Technische Hochschule Regensburg (Germany); Juncong She, Yifeng Huang, Sun Yat-Sen Univ. (China) . . [10248-14]

16:45: Li-ion battery performance of silicon microwire array anodes under extreme conditions, Sandra Hansen, Jürgen Carstensen, Christian-Albrechts-Univ. zu Kiel (Germany); Enrique Quiroga-Gonzalez, Benemérita Univ. Autónoma de Puebla (Mexico) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-15]

17:00: Plasmonic enhanced SnO2 gas sensor with segregated silver nanodots, Peter Gaiduk, Stanislav Prokopyev, Belarusian State Univ. (Belarus) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-16]

17:15: Nano and microcrystallites of KSbOSiO4 in glass matrix as a source of internal strain and fatal corrosion of historic turquoise glass, Tatyana V. Yuryeva, Irina F. Kadikova, GosNIIR (Russian Federation); Ekaterina A. Morozova, GosNIIR (Russian Federation) and N.S. Kurnakov Institute of General and Inorganic Chemistry (Russian Federation); Ilya B. Afanasyev, Forensic Science Ctr. of the Ministry of the Interior of the Russian Federation (Russian Federation); Irina A. Balakhnina, Nikolay N. Brandt, GosNIIR (Russian Federation) and M.V. Lomonosov Moscow SU (Russian Federation); Vladimir A. Yuryev, A. M. Prokhorov General Physics Institute of the Russian Academy of Sciences (Russian Federation) . . . . . . . . . . . . . . [10248-17]

17:30: NFFA-Europe: enhancing European competitiveness in nanoscience research and innovation, Flavio Carsughi, Forschungszentrum Juelich GmbH (Germany); Luis Fonseca, Ctr. Nacional de Microelectrónica (Spain) . . .10248-40]






SESSION 4LOCATION: LLAVORSÍ . . . . . . . . . . . . . . . . . . .TUE 10:30 TO 11:55

Thin Films and PhotovoltaicsSession Chair: Teresa Monteiro, Univ. de Aveiro (Portugal)

10:30: Carbon nanotube transparent charge collectors for hybrid perovskite photovoltaics (Invited Paper), Anvar A. Zakhidov, Univ of Texas Dallas (United States); Ross Haroldson, The Univ. of Texas at Dallas (United States); Danila Saranin, National Univ. of Science and Technology “MISiS” (Russian Federation); Patricia Martinez, The Univ. of Texas at Dallas (United States); Artur Ishteev, National Univ. of Science and Technology “MISiS” (Russian Federation) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-18]

11:10: Preparation and characterizations of ZnS thin films by the chemical bath deposition method with the self-catalyst growth process, Shizutoshi Ando, Taisuke Iwashita, Tokyo Univ. of Science (Japan) . . [10248-19]

11:25: Silicon-germanium and platinum silicide nanostructures for silicon-based photonics, Mikhail S. Storozhevykh, Vladimir P. Dubkov, Larisa V. Arapkina, Kirill V. Chizh, Sergey A. Mironov, Valery A. Chapnin, Vladimir A. Yuryev, A. M. Prokhorov General Physics Institute of the Russian Academy of Sciences (Russian Federation) . . . . . . . . . . . . . . . . . . . . . [10248-20]

11:40: Homogeneous, fluorescent thin films as long-term stable microscopy reference layers, Martina Brülisauer, Emine Cagin, Dietmar Bertsch, Klaus Dietrich, Stefan Lüthi, NTB Interstaatliche Hochschule für Technik Buchs (Switzerland); Ulrich Stärker, Volpi AG (Switzerland); André Bernard, NTB Interstaatliche Hochschule für Technik Buchs (Switzerland) . . . . . . . . [10248-21]


SESSION 5LOCATION: LLAVORSÍ . . . . . . . . . . . . . . . . . . . TUE 13:15 TO 14:30

Material Nanostructuring and Microfabrication

Session Chair: Hidenori Mimura, Shizuoka Univ. (Japan)

13:15: Displacement Talbot lithography: an alternative technique to fabricate nanostructured metamaterials, Emmanuel D. Le Boulbar, Philip A. Shields, Univ. of Bath (United Kingdom) . . . . . . . . . . . . . . . . . [10248-22]

13:30: Multilayer porous structures on MOCVD-grown GaN for the fabrication of Bragg reflectors, Tudor Braniste, Technical Univ. of Moldova (Moldova); Joachim Ciers, Ecole Polytechnique Fédérale de Lausanne (Switzerland); Eduard Monaico, Technical Univ. of Moldova (Moldova); Denis Martin, Ecole Polytechnique Fédérale de Lausanne (Switzerland); Jean-François Carlin, Ecole Polytechnique Fédérale de Lausanne (Switzerland) and Academy of Sciences of Moldova (Moldova); Veaceslav V. Ursaki, Academy of Sciences of Moldova (Moldova); Vladimir V. Sergentu, Institute of Applied Physics (Moldova); Nicolas Grandjean, Ecole Polytechnique Fédérale de Lausanne (Switzerland); Ion M. Tiginyanu, Academy of Sciences of Moldova (Moldova) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-23]

13:45: Self-nanostructuring in SiGeSn alloy layers induced by laser melting and fast recrystallization, Peter Gaiduk, Belarusian State Univ. (Belarus) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-24]

14:00: Nano scale doping in CdTe for radiation detector, Toru Aoki, Shizuoka Univ (Japan); Kateryna S. Zelenska, Taras Shevchenko National Univ. of Kyiv (Ukraine); Volodymyr Gnatyuk, V.E.Lashkaryov Instite of Semiconductor Physics (Ukraine); Akifumi Koike, ANSeeN Inc. (Japan) . . . . . . . . . . . . [10248-25]

14:15: Interlocked by nanoscale sculpturing: pure aluminum copper contacts, Melike Gerngross-Baytekin, Mark Daniel Gerngross, Jürgen Carstensen, Rainer Adelung, Christian-Albrechts-Univ. zu Kiel (Germany) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-26]



Two-electron states and time exchange control in quantum dash systems, Davit Baghdasaryan, Russian-Armenian (Slavonic) Univ. (Armenia) . . . [10248-31]

An electrochemical ceruloplasmin nanoaptasensor using a glassy carbon electrode modified by diazonium-functionalised multiwalled carbon nanotubes, Tayyebeh Madrakian, Esmaeel Haghshenas, Abbas Afkhami, Haidar Saify Nabiabad, Bu-Ali Sina Univ. (Iran, Islamic Republic of) . . [10248-32]

Resonant tunneling transport in ZnxBe1-xSe/ZnSe/ZnyBe1-ySe asymmetric quantum structures, Vadim P. Sirkeli, Oktay Yilmazoglu, Shihab Al-Daffaie, Ion Oprea, Technische Univ. Darmstadt (Germany); Duu Sheng Ong, Multimedia Univ. (Malaysia); Franko Küppers, Hans-Ludwig Hartnagel, Technische Univ. Darmstadt (Germany) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-34]

Ultrafast laser patterning of graphene, Ivan Bobrinetskiy, Aleksei V. Emelianov, National Research Univ. of Electronic Technology (Russian Federation); Nerea Otero, Pablo M. Romero, AIMEN - Asociación de Investigación Metalúrgica del Noroeste (Spain) . . . . . . . . . . . . . . . . . . [10248-36]

A low Curie temperature Fe-Cr-Nb-B ferrofluid for biomedical applications, Ecaterina Radu, Camelia-Mihaela Danceanu, George Stoian, Nicoleta Lupu, Horia Chiriac, National Institute of Research & Development for Technical Physics (Romania) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-37]

Design and fabrication of a novel impedimetric sensor for sensitive determination of Tecfidera, Abbas Afkhami, Pegah Hashemi, Bu-Ali Sina Univ. (Iran, Islamic Republic of); Hasan Bagheri, Baqiyatallah Univ. of Medical Sciences (Iran, Islamic Republic of); Salimeh Amidi, Shahid Beheshti Univ. of Medical Sciences (Iran, Islamic Republic of); Tayyebeh Madrakian, Bu-Ali Sina Univ. (Iran, Islamic Republic of); Bardia Jamali, Tehran Univ. of Medical Sciences (Iran, Islamic Republic of) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-38]

Endothelial cell proliferation under exposure to GaN nanoparticles, Fiodor Tudor Braniste, Ion Tiginyanu, Technical Univ of Moldova (Moldova); Tibor Horvath, Medizinische Hochschule Hannover (Germany); Simion Raevschi, State University of Moldova (Moldova); Serghei Cebotari, Marco Lux, Axel Haverich, Andres Hilfiker, Medizinische Hochschule Hannover (Germany) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-39]

CONFERENCE 10248


CONFERENCE 10248

SESSION 6LOCATION: LLAVORSÍ . . . . . . . . . . . . . . . . . . .TUE 16:30 TO 17:30

SynthesisSession Chair: Carlo Ricci, Univ. degli Studi di Cagliari (Italy)

16:30: Silver nanoparticles fabricated via green synthesis using plant leaf extracts, Rebecca E. Mfon, Natasa Vasiljevic, Andrei Sarua, Univ. of Bristol (United Kingdom) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-27]

16:45: Production of silver nanoparticles by the diatom Phaeodactylum tricornutum, Asher Wishkerman, Ruppin Academic Ctr. (Israel); Shoshana Malis Arad, Ben-Gurion Univ. of the Negev (Israel) . . . . . . . . . . . . . . . . . . . . [10248-28]

17:00: Growth scheme for entanglement ready quantum dots at telecom wavelength, Joanna Skiba-Szymanska, Richard M. Stevenson, Christiana Varana, Martin Felle, Jan Huwer, Tina Müller, Toshiba Research Europe Ltd. (United Kingdom); Peter Spencer, Univ. of Cambridge (United Kingdom); Ian Farrer, Andrey B. Krysa, The Univ. of Sheffield (United Kingdom); Lucy Goff, David A. Ritchie, Univ. of Cambridge (United Kingdom); Jon Heffernan, The Univ. of Sheffield (United Kingdom); Andrew J. Shields, Toshiba Research Europe Ltd. (United Kingdom) . . . . . . . . . . . . . . . . . [10248-29]

17:15: 3D flexible ZnO networks: synthesis and their multifunctional applications, Daria Smazna, Christian-Albrechts-Univ. zu Kiel (Germany) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-30]






CONFERENCE 10249LOCATION: CADAQUÉS

Tuesday–Wednesday 9–10 May 2017 • Proceedings of SPIE Vol. 10249

Integrated Photonics: Materials, Devices, and Applications IVConference Chair: Jean-Marc Fédéli, CEA-LETI (France)

Conference Co-chair: Laurent Vivien, Institut d’Électronique Fondamentale (France)

Programme Committee: Pavel Cheben, National Research Council Canada (Canada); Norbert Grote, Fraunhofer-Institut für Nachrichtentechnik Heinrich-Hertz-Institut (Germany); Giovanni Isella, Lab. for Epitaxial Nanostructures on Silicon and Spintronics (Italy); Laura Maria Lechuga, CIN2 (Spain); Andrea I. Melloni, Politecnico di Milano (Italy); Iñigo Molina-Fernandez, Univ. de Málaga (Spain); Régis Orobtchouk, Institut National des Sciences Appliquées de Lyon (France); Richard V. Penty, Univ. of Cambridge (United Kingdom); Lorenzo Pavesi, Univ. degli Studi di Trento (Italy); Günther Roelkens, Univ. Gent (Belgium); Kazumi Wada, The Univ. of Tokyo (Japan); Dan-Xia Xu, National Research Council Canada (Canada)






SESSION 1LOCATION: CADAQUÉS . . . . . . . . . . . . . . . . . . TUE 10:30 TO 11:45

BiophotonicsSession Chair: Iñigo Molina-Fernández, Univ. de Málaga (Spain)

10:30: Co-integrating plasmonics with Si3N4 photonics towards a generic CMOS-compatible PIC platform for high-sensitivity multi-channel biosensors: the H2020 PlasmoFab project approach (Invited Paper), Dimitris M. Tsiokos, George Dabos, Dimitra Ketzaki, Aristotle Univ. of Thessaloniki (Greece); Jean-Claude Weeber, Laurent Markey, Alain Dereux, Lab. Interdisciplinaire Carnot de Bourgogne (France); Anna Lena Giesecke, Caroline Porschatis, Bartos Chmielak, Thorsten Wahlbrink, AMO GmbH (Germany); Karl Rochracher, ams AG (Austria); Nikos Pleros, Aristotle Univ. of Thessaloniki (Greece) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-1]

11:00: Polymer ring resonator based devices prepared by DLW, Daniel Jandura, Dušan Pudiš, Peter Gašo, Matej Goraus, Univ. of Žilina (Slovakia) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-2]

11:15: Silicon photonics sub-wavelength structures for communications and sensing, Robert Halir, Juan Manuel Luque-González, Gonzalo Wangüemert-Pérez, Alejandro Ortega-Moñux, Univ de Malaga (Spain); Dan-Xia Xu, National Research Council Canada (Canada); Jens H. Schmid, Pavel Cheben, National Research Councial (Canada); Íñigo Molina-Fernández, Univ de Malaga (Spain) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-3]

11:30: Silicon photonic sensor arrays with complex microfluidics for compact automated biosensing, Markus Knoerzer, Crispin Szydzik, Pabudi Weerathunge, Phuong Tang, Samira Schaefer, Guanghui Ren, Sara Baratchi, Khashayar Khoshmanesh, Rajesh Ramanathan, Vipul Bansal, Arnan Mitchell, RMIT Univ. (Australia) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-4]


SESSION 2LOCATION: CADAQUÉS . . . . . . . . . . . . . . . . . . TUE 13:15 TO 14:30

Photonic DevicesSession Chair: Jean-Marc Fédéli, CEA-LETI (France)

13:15: Phase array antennas with silicon photonics (Invited Paper), Jérôme Bourderionnet, Thales Research & Technology (France) . . . . . . [10249-5]

13:45: Robust integration schemes for junction-based modulators in a 200mm CMOS compatible silicon photonic platform, Bertrand Szelag, Alexis Abraham, Stéphane Brision, Paul Gindre, Benjamin Blampey, André Myko, Segolene Olivier, Christophe Kopp, CEA-LETI (France) . . [10249-6]

14:00: Strain-induced Pockels effect in silicon waveguides, Mathias Berciano, Pedro Damas, Guillaume Marcaud, Xavier Le-Roux, Ctr. for Nanosciences and Nanotechnologies, Univ. Paris-Sud 11 (France); Paul Crozat, Ctr. for Nanosciences and Nanotechnologies, Univ. Paris-Sud 11 (France); Carlos Alonso-Ramos, Daniel Benedikovic, Delphine Marris-Morini, Eric Cassan, Laurent Vivien, Ctr. for Nanosciences and Nanotechnologies, Univ. Paris-Sud 11 (France) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-7]

14:15: Enhanced optical properties of GeSn photonic components by strain relaxation, Laurent Milord, CEA-LETI (France); Alban Gassenq, CEA-INAC (France); Joris Aubin, CEA-LETI (France); Kevin Guilloy, Samuel Tardif, Nicolas Pauc, CEA-INAC (France); Johan Rothman, Alexei Tchelnokov, Jean-Michel Hartmann, CEA-LETI (France); Vincent Calvo, CEA-INAC (France); Vincent Reboud, CEA-LETI (France) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-8]



Equalizing Si photodetectors fabricated in standard CMOS processes, Erick Guerrero Rodriguez, Javier Aguirre, Carlos Sánchez-Azqueta, Univ. de Zaragoza (Spain); Cecilia Gimeno, Univ. Catholique de Louvain (Belgium); Santiago Celma Pueyo, Univ. de Zaragoza (Spain) . . . . . . . . . . . . . . . [10249-23]

The increase in the starting torque of PMSM motor by applying of FOC method, Kamil Plachta, Wroclaw Univ. of Science and Technology (Poland) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-24]

Infrared wire-grid polarizer with sol-gel zirconia grating, Itsunari Yamada, Yoshiro Ishihara, Univ. of Shiga Prefecture (Japan) . . . . . . . . . . . . . . . [10249-25]

Diffusion doped p-i-n/p-n diodes for scalable silicon photonics devices, Riddhi Nandi, Sreevatsa R. Kurudi, Bijoy K. Das, Indian Institute of Technology Madras (India) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-26]

Development of a fast steering mirror of large diameter, Byoung-Uk Nam, Hakin Gimm, Jung-gon Kim, Gwang tae Kim, Byung-un Kim, Agency for Defense Development (Korea, Republic of). . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-27]

Polymer based 2D and 3D photonic crystals in the surface of photodiodes and LEDs, Dušan Pudiš, Matej Goraus, Univ. of Žilina (Slovakia); Marek Tlaczala, Wroclaw Univ. of Science and Technology (Poland); Lubos Šušlik, Univ. of Žilina (Slovakia); Wojciech A. Dawidowski, Wroclaw Univ. of Science and Technology (Poland); Peter Gašo, Univ. of Žilina (Slovakia); Jaroslav Kováč, Slovenska Technicka Univ. (Slovakia); Beata Sciana, Wroclaw Univ. of Technology (Poland); Jana Durisova, Ivana Lettrichova, Univ. of Žilina (Slovakia); Jaroslav Kováč, Slovenska Technicka Univ. (Slovakia); Iwona Zborowska-Lindert, Wroclaw Univ. of Science and Technology (Poland) . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-28]

1D and 2D Fresnel structure in LED surface, Ivana Lettrichova, Dušan Pudiš, Peter Gašo, Univ. of Žilina (Slovakia); Agáta Laurencíková, Institute of Electrical Engineering SAS (Slovakia); Lubos Šušlik, Daniel Jandura, Jana Durisova, Univ. of Žilina (Slovakia); Jozef Novak, Slovak Academy of Sciences (Slovakia) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-29]

Photonics integrated circuit based on 1x2 multimode-interferometer-Fabry-Perot laser diode, Hua Yang, Mingqi Yang, Alison Perrott, Zhengkai Jia, Tyndall National Institute (Ireland); Frank Hudson Peters, Tyndall National Institute (Ireland) and Univ. College Cork (Ireland) . . . . . . . . . . . . . . . . [10249-30]


SESSION 3LOCATION: CADAQUÉS . . . . . . . . . . . . . . . . . .TUE 16:30 TO 17:30

Optical Sensing ISession Chair: Régis Orobtchouk,

Institut National des Sciences Appliquées de Lyon (France)

16:30: Mid- and near-IR silicon waveguides for sensing applications (Invited Paper), Carlos A. Alonso-Ramos, Universite Paris Sud, Paris Saclay C2N (France); Xavier Le Roux, Univ. Paris Sud, Paris Saclay C2N (France); Daniel Benedikovic, Vladyslav Vakarin, Elena Durán-Valdeiglesias, Diego Pérez-Galacho, Eric Cassan, Delphine Marris-Morini, Universite Paris Sud, Paris Saclay C2N (France); Pavel Cheben, National Research Council (Canada); Laurent Vivien, Universite Paris Sud, Paris Saclay C2N (France) . . . . . . . . . . . . . [10249-9]

17:00: High sensitivity liquid sensing by optimized slot photonic crystal ring resonator, Reyhaneh Jannesary, Johannes Kepler Univ. Linz (Austria); Thomas Grille, Ursula Hedenig, Infineon Technologies Austria AG (Austria); Bernhard Jakoby, Johannes Kepler Univ. Linz (Austria) . . . . . . . . . . . . [10249-10]

17:15: 3D photonic devices in PDMS for sensing prepared by 3D laser lithography, Peter Gašo, Daniel Jandura, Dušan Pudiš, Univ. of Žilina (Slovakia) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-11]






SESSION 4LOCATION: CADAQUÉS . . . . . . . . . . . . . . . . . WED 10:30 TO 11:45

Quantum PhotonicsSession Chair: Laurent Vivien,

Ctr. de Nanosciences et de Nanotechnologies (France)

10:30: Squeezed light quantum sensing with Heisenberg scaling (Invited Paper), Clemens Schäfermeier, Timur Iskhakov, Technische Univ. Delft (Denmark); U. Busk-Hoff, Tobias Gehring, Ulrik Lund Andersen, Technical Univ. of Denmark (Denmark). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-13]

11:00: Optical signal processing and tracking of whispering gallery modes in real time for sensing applications, Amir R. Ali, The German Univ. in Cairo (Egypt) and Southern Methodist Univ. (United States); Amr N. Afifi, The German Univ. in Cairo (Egypt) and Sapienza Univ. di Roma (Italy); Hazem Taha, The German Univ. in Cairo (Egypt) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-14]

11:15: Noninvasive monitoring and control in silicon photonics (Invited Paper), Francesco Morichetti, Politecnico di Milano (Italy) . . . . . . . . . . [10249-15]


SESSION 5LOCATION: CADAQUÉS . . . . . . . . . . . . . . . . . WED 13:15 TO 15:15

Optical Sensing IISession Chair: Laurent Vivien,

Ctr. de Nanosciences et de Nanotechnologies (France)

13:15: Integrated photonics for infrared spectroscopic sensing (Invited Paper), Hongtao Lin, Derek Kita, Zhaohong Han, Peter Su, Anu Agarwal, Massachusetts Institute of Technology (United States); Anupama Yadav, Kathleen Richardson, University of Central Florida (United States); Tian Gu, Juejun Hu, Massachusetts Institute of Technology (United States) . . . [10249-16]

13:45: Characterising the geometrical tolerances of optimised vertical-cavity thermal emitter stack configurations for the mid-infrared via Monte Carlo testing, Gerald Pühringer, Bernhard Jakoby, Johannes Kepler Univ. Linz (Austria) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-17]

14:00: N-type Induced junction black silicon photodiode for UV detection, Mikko A. Juntunen, Juha Heinonen, Ville Vähänissi, Päivikki Repo, Hele I. Savin, Aalto Univ. (Finland). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-18]

14:15: Millimeter wave photonic emitter using antenna-integrated UTC photodiode on Si lens, Muhsin Ali, Univ. Carlos III de Madrid (Spain); Longfei Shen, Technische Univ. Eindhoven (Netherlands); Robinson C. Guzmán Martínez, Mu-Chieh Lo, Alejandro Rivera, Univ. Carlos III de Madrid (Spain); Jos J. G. M. van der Tol, Technische Univ. Eindhoven (Netherlands); Luis Enrique García Muñoz, Guillermo Carpintero, Univ. Carlos III de Madrid (Spain) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-19]

14:30: Design and fabrication of broadband long wavelength resonator-quantum well infrared photodetectors, Jason N. Sun, Kwong-Kit Choi, Kimberley A. Olver, Richard X. Fu, U.S. Army Research Lab. (United States) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-20]

14:45: Tunable multiple peak modulation in multi-cavity-coupled graphene-based waveguide system, Jicheng Wang, Xiaosai Wang, Hongyan Shao, Jiangnan Univ. (China) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-21]

15:00: A graphene-based electrically controllable directional coupler, Sangin Kim, Tran Quyet Tran, Ajou Univ. (Korea, Republic of) . . . . . . . [10249-22]

CONFERENCE 10249


GET THE FREE SPIE CONFERENCE APPFind the best networking and information-gathering opportunities with this powerful planning tool. Schedule your time in the conferences and make new connections.

Available for iOS and Android. Search: SPIE Conferences.

COURTESY OF

SPIE MICRO TECHNOLOGIESPLAN YOUR WEEK


INDEX OF AUTHORS, CHAIRS, AND COMMITTEE MEMBERSBold = SPIE Member

AAbraham, Alexis [10249-6] S2Abu-Nada, Eiyad [10247-3] S1Adelung, Rainer 10248 Conference

CoChair, 10248 S2 Session Chair, [10248-10] S3, [10248-26] S5

Afanasyev, Ilya B. [10248-17] S3Afifi, Amr N. [10249-14] S4Afkhami, Abbas [10248-32] SPTue,

[10248-38] SPTueAgarwal, Anuradha Murthy [10249-16]

S5Aguirre, Javier [10249-23] SPTueAhopelto, Jouni [10246-20] S5,

[10246-36] S9Alazzam, Anas [10247-3] S1Alcacer, Albert [10246-16] S4Al-Daffaie, Shihab [10248-34] SPTueAldea, Concepción [10246-37] S10Alejandre, Alvaro [10246-44] SPTueAli, Amir R. [10246-13] S4, [10246-

49] SPTue, [10247-14] S3, [10247-9] S2, [10249-14] S4

Ali, Muhsin [10249-19] S5Allsopp, Duncan W. E. [10248-3] S1,

[10248-7] S2, [10248-9] S2Alonso-Orts, Manuel [10248-2] S1Alonso-Ramos, Carlos A. [10249-7]

S2, [10249-9] S3Alvarez, Mar [10246-25] S7Alves, Adriana [10248-4] S1Alves, Fabio [10246-17] S5Amaral, Miguel [10246-50] SPTueAmidi, Salimeh [10248-38] SPTueAndersen, Ulrik Lund [10249-13] S4Ando, Shizutoshi [10248-19] S4Angelopoulou, Michailia [10247-7] S2Aoki, Toru [10248-25] S5Arapkina, Larisa V. [10248-20] S4Arregui, Francisco Javier 10246

Program CommitteeAthanasiou, Modestos [10248-3] S1,

[10248-9] S2Aubin, Joris [10249-8] S2Ayerdi, Isabel [10246-53] SPTue

BBaghdasaryan, Davit [10248-31]

SPTueBagheri, Hasan [10248-38] SPTueBai, Jie [10248-9] S2Balakhnina, Irina A. [10248-17] S3Baldi, Antonio [10246-15] S4Bansal, Vipul [10249-4] S1Baraket, Abdoullatif [10246-16] S4Baratchi, Sara [10249-4] S1Baumann, Reinhard R. [10246-14] S4Bausells, Joan 10246 Program

Committee, [10246-16] S4Becker, Thomas [10246-34] S9Behlert, Regine [10246-9] S2Bellido, José Carlos [10246-4] S1Belloeil, Matthias [10248-4] S1Ben Sedrine, Nabiha [10248-4] S1Benedikovic, Daniel [10249-7] S2,

[10249-9] S3Benini, Luca [10248-501] SPlenBenito-Altamirano, Ismael [10246-52]

SPTueBerciano, Mathias [10249-7] S2Bernard, André [10248-21] S4Bernhardt, George P. [10246-27] S7Bertke, Maik [10246-11] S3, [10246-

19] S5, [10248-5] S1Bertsch, Dietmar [10248-21] S4Biehl, Saskia N. [10246-24] S6Bierer, Benedikt [10246-12] S3Bittner, Achim 10246 Program

CommitteeBiyikli, Necmi 10248 Program

CommitteeBlampey, Benjamin [10249-6] S2

Bobrinetskiy, Ivan I. [10248-36] SPTue

Boix, Gerard [10246-15] S4Bolzmacher, Christian 10246

Program CommitteeBonaldi, Michele [10246-21] S6Borrielli, Antonio Lorenzo [10246-21]

S6Botsialas, Athanasios [10247-7] S2Boulbar, Emmanuel Le [10248-9] S2Bourderionnet, Jérôme [10249-5] S2Bracht, Hartmut [10248-5] S1Brand, Uwe [10246-18] S5Brandt, Nikolay N. [10248-17] S3Braniste, Fiodor Tudor [10248-39]

SPTueBraniste, Tudor [10248-23] S5Brasser, Catherine [10248-9] S2Bregadze, Vasil [10247-13] S3Brision, Stéphane [10249-6] S2Bruckbauer, Jochen [10248-9] S2Brülisauer, Martina [10248-21] S4Brunius, Alfredas [10246-51] SPTueBryce, Christopher G. [10248-7] S2Brzózka, Zbigniew [10247-11] SPTueBuchaillot, Lionel 10246 Program

CommitteeBunge, Frank [10247-17] SPTue,

[10247-5] S2Busk-Hoff, U. [10249-13] S4

CCagin, Emine [10248-21] S4Calaza Cabanas, Carlos A. [10246-

35] S9Calvo, Vincent [10249-8] S2Cané, Carles Symposium ChairCannas, Carla [10248-8] S2Cara, Claudio [10248-8] S2Carbonaro, Carlo Maria [10248-8] S2Cardoso, Jose [10248-4] S1Cardoso, Susana [10246-50] SPTue,

[10247-4] S1Carlin, Jean-François [10248-23] S5Carpintero, Guillermo [10249-19] S5Carstensen, Jürgen [10248-15] S3,

[10248-26] S5Casals, Olga [10246-52] SPTueCassan, Eric [10249-7] S2, [10249-

9] S3Castaño, Enrique [10246-53] SPTueCastro-Hurtado, Irene [10246-53]

SPTueCebotari, Serghei [10248-39] SPTueCekas, Elingas [10246-51] SPTueCelma Pueyo, Santiago [10246-37]

S10, [10246-45] SPTue, [10249-23] SPTue

Chapnin, Valery A. [10248-20] S4Cheben, Pavel 10249 Program

Committee, [10249-3] S1, [10249-9] S3

Chiriac, Horia [10248-37] SPTueChiriu, Daniele [10248-8] S2Chizh, Kirill V. [10248-20] S4Chmela, Ondrej [10248-12] S3Chmielak, Bartos [10249-1] S1Choi, Kwong-Kit [10249-20] S5Chudy, Michal [10247-11] SPTueCiarpi, Gabriele [10246-39] S10Ciers, Joachim [10248-23] S5Civitci, Fehmi [10246-3] S1Correia, Maria Rosario [10248-4] S1Coulon, Pierre-Marie [10248-3] S1Crozat, Paul [10249-7] S2Cryan, Martin J. [10248-3] S1Cwik, Pawel [10247-11] SPTue

DDabos, George [10249-1] S1Damas, Pedro [10249-7] S2Danceanu, Camelia-Mihaela [10248-

37] SPTueDas, Bijoy Krishna [10249-26] SPTueDaudin, Bruno [10248-4] S1Dawidowski, Wojciech A. [10249-28]

SPTueDehé, Alfons [10246-500] SPlen,

[10246-6] S2Dehollain, Catherine [10247-1] S1Delgado-Restituto, Manuel 10247

Conference CoChair, 10247 S3 Session Chair, [10247-8] S2

Dereux, Alain [10249-1] S1Díaz, Alex [10246-4] S1Diaz-Gonzalez, Maria [10246-15] S4Dietrich, Klaus [10248-21] S4Dinc, Cem [10246-12] S3Donmez, Inci [10246-35] S9Donoso, Alberto [10246-4] S1Dragoi, Viorel 10246 Program

Committee, [10246-54] SPTueDrbohlavová, Jana [10246-47] SPTueDubkov, Vladimir P. [10248-20] S4Dudia, Alma [10247-15] SPTueDufour, Isabelle 10246 Program

CommitteeDura, Georg [10246-30] S8Dura, Óscar [10246-23] S6Durán-Valdeiglesias, Elena [10249-9]

S3?uri?ová, Jana [10249-28] SPTue,

[10249-29] SPTueDybko, Artur 10247 Program

Committee, [10247-11] SPTue

EEdwards, Paul R. [10248-7] S2,

[10248-9] S2Elias, Catherine [10246-13] S4Elias, Peter [10248-11] S3Emelianov, Aleksei V. [10248-36]

SPTueEnslin, Johannes [10248-9] S2Erian, Abanoub [10246-49] SPTueErrachid, Abdelhamid [10246-16] S4Escudero Villa, Pedro Fernando

[10246-25] S7Evans, James W. [10246-34] S9

FFabrega, Cristian [10246-52] SPTueFaller, Lisa-Marie [10246-38] S10Farrer, Ian [10248-29] S6Faye, D. Nd. [10248-4] S1Fédéli, Jean-Marc 10249 Conference

Chair, 10249 S2 Session ChairFeidenhans’l, Robert K. 10248

Program CommitteeFeldmann, Jochen 10248 Program

Committee, [10248-1] S1Felemban, Shifa Jameel A. [10246-10]

S3Felle, Martin [10248-29] S6Ferhanoglu, Onur [10246-3] S1Fernandez-Sanchez, Cesar [10246-

15] S4Fiala, Pavel J. [10246-41] SPTueFiedler, Bodo [10248-10] S3Fonseca, Luis 10246 Conference

Chair, 10246 S10 Session Chair, [10246-35] S9

Freitas, Paulo P. [10246-50] SPTueFricke, Sören 10246 Program

Committee, 10246 S6 Session Chair

Frischmuth, Tobias [10246-28] S7Fu, Richard X. [10249-20] S5Funke, Benedikt [10246-30] S8

GGabriel, Gemma [10246-14] S4Gad, Alaaeldin [10246-11] S3Gadea, Gerard [10246-35] S9Gaiduk, Peter [10248-16] S3, [10248-

24] S5Gao, Feng [10247-2] S1Gao, Haitao [10246-12] S3Gao, Sai [10246-18] S5García Muñoz, Luis Enrique [10249-

19] S5Garcia-Bosque, Miguel [10246-45]

SPTueGarrido, Jose A. [10248-500] SPlenGa?o, Peter [10249-11] S3, [10249-2]

S1, [10249-28] SPTue, [10249-29] SPTue

Gaspar, João [10246-50] SPTueGassenq, Alban [10249-8] S2Gehring, Tobias [10249-13] S4Gerlach, Gerald 10246 Program

CommitteeGerngross, Mark Daniel [10248-26]

S5Gerngross-Baytekin, Melike [10248-

26] S5Ghimire, Hemendra [10247-12] S3Giannetti, Filippo [10246-56] SPTueGiesecke, Anna Lena [10249-1] S1Gimeno Gazca, Cecilia [10246-37]

S10Gimeno, Cecilia [10249-23] SPTueGimm, Hakin [10249-27] SPTueGindre, Paul [10249-6] S2Giorgadze, Tamar G. [10247-13] S3Giouroudi, Ioanna 10247 Conference

CoChair, [10247-10] S3, [10247-4] S1

Gnatyuk, Volodymyr A. [10248-25] S5Goff, Lucy [10248-29] S6Gómez-Aranzadi, Mikel [10246-53]

SPTueGong, Yipin [10248-9] S2Goraus, Matej [10249-2] S1, [10249-

28] SPTueGrandjean, Nicolas 10248 Program

Committee, [10248-23] S5Grigoras, Kestutis [10246-20] S5,

[10246-36] S9Grille, Thomas [10246-28] S7, [10249-

10] S3Grönberg, Leif [10246-36] S9Grote, Norbert 10249 Program

CommitteeGröttrup, Jorit [10248-10] S3Gu, Tian [10249-16] S5Guerrero Rodriguez, Erick [10249-23]

SPTueGuilloy, Kevin [10249-8] S2Guobiene, Asta [10246-51] SPTueGupta, Vijay Kumar [10246-48]

SPTueGutiérrez-Sánchez, Graciela [10246-

23] S6Guzmán Martínez, Robinson C.

[10249-19] S5

HHadas, Zdenek [10246-33] S9,

[10246-46] SPTueHaghshenas, Esmaeel [10248-32]

SPTueHaiden, Christoph [10247-10] S3Haldkar, Rakesh Kumar [10246-48]

SPTueHalir, Robert [10249-3] S1Halvorsen, Einar [10246-31] S8Hamdana, Gerry [10246-19] S5,

[10248-5] S1Han, Zhaohong [10249-16] S5Hansen, Sandra [10248-15] S3Haroldson, Ross [10248-18] S4



SPIE is the international society for optics & photonics.

Membership

YOUR RESOURCE.YOUR SOCIETY.Join or Renew your SPIE Membership· Enhance your network· Take charge of your career· Broaden your knowledge

• 10 SPIE Digital Library downloads

• Complimentary online SPIE Journal

• Complimentary online courses

• Networking and access to information

• Discounts on events, courses, and publications

• Career advancement and peer recognition

NOMINATE A COLLEAGUE OR YOURSELF FOR SPIE SENIOR MEMBER

Nominations due 15 March spie.org/seniormember

www.spie.org/[email protected] · +1 360 676 3290

Hartmann, Jean-Michel [10249-8] S2Hartnagel, Hans-Ludwig [10248-34]

SPTueHasenohrl, Stanislav [10248-11] S3Hashemi, Pegah [10248-38] SPTueHaverich, Axel [10248-39] SPTueHedenig, Ursula [10249-10] S3Heffernan, Jon [10248-29] S6Heinonen, Juha [10249-18] S5Heinzel, Angelika [10246-30] S8Hernando-García, Jorge 10246

Program Committee, [10246-2] S1, [10246-23] S6

Hidalgo, Pedro [10248-2] S1Hilfiker, Andres [10248-39] SPTueHoffmann, Martin 10246 Program

CommitteeHölken, Iris [10248-10] S3Hoppe, Mathias [10248-10] S3Horrillo Güemes, M. Carmen 10246

Program CommitteeHorvath, Tibor [10248-39] SPTueHou, Yaonan [10248-9] S2Hourahine, Ben [10248-9] S2Hu, Juejun [10249-16] S5Huang, Yifeng [10248-14] S3Hubálek, Jaromír [10248-12] S3Huwer, Jan [10248-29] S6

IIannacci, Jacopo Symposium Chair,

10246 Program Committee, 10246 S2 Session Chair

Iborra, Enrique 10246 Program Committee

Iosifidis, Christodoulos [10247-16] SPTue

Isella, Giovanni 10249 Program Committee

Ishihara, Yoshiro [10249-25] SPTueIshteev, Artur [10248-18] S4Iskhakov, Timur [10249-13] S4Iwashita, Taisuke [10248-19] S4

JJackson, Nathan M. 10246 Program

Committee, 10246 S9 Session Chair, [10246-32] S8, [10246-44] SPTue

Jakoby, Bernhard [10249-10] S3, [10249-17] S5

Jamali, Bardia [10248-38] SPTueJandura, Daniel [10249-11] S3,

[10249-2] S1, [10249-29] SPTueJannesari, Reyhaneh [10249-10] S3Janu?as, Giedrius [10246-51] SPTueJastrzebska, El?bieta [10247-11]

SPTueJia, Zhengkai [10249-30] SPTueJobst, Gerhard [10247-7] S2Juntunen, Mikko A. [10249-18] S5

KKadikova, Irina F. [10248-17] S3Kakabakos, Sotirios E. [10247-7] S2Kaps, Sören [10248-10] S3Kapser, Konrad 10246 Program

CommitteeKarkkainen, Anu [10247-2] S1Karunasiri, Gamani [10246-17] S5Katsaliaki, Korina [10247-16] SPTueKeplinger, Franz [10247-10] S3Ketzaki, Dimitra [10249-1] S1Khayatzadeh, Ramin [10246-3] S1Khoshmanesh, Khashayar [10249-

4] S1Khuskivadze, Temur [10247-13] S3Khutsishvili, Irine [10247-13] S3Kienle, Lorenz [10248-10] S3Kim, Byung-un [10249-27] SPTueKim, Gwang Tae [10249-27] SPTue

Kim, Jung-gon [10249-27] SPTueKim, Sangin [10249-22] S5Kita, Derek [10249-16] S5Kiziroglou, Michail E. [10246-34] S9,

[10247-16] SPTueKnauer, Arne [10248-9] S2Kneissel, Michael [10248-9] S2Knoerzer, Markus [10249-4] S1Kobuszewska, Anna [10247-11] SPTueKoike, Akifumi [10248-25] S5Kokkinis, Georgios 10247 S2 Session

Chair, [10247-10] S3, [10247-4] S1Kollensperger, Peter [10247-16]

SPTueKopp, Christophe [10249-6] S2Kotitschke, Marcus [10247-17] SPTueKovac, Jaroslav [10249-28] SPTueKová?, Jaroslav [10249-28] SPTueKraeusel, Simon [10248-9] S2Kraft, Michael 10247 Program

CommitteeKrysa, Andrey B. [10248-29] S6Kueller, Viola [10248-9] S2Kueppers, Franko [10248-34] SPTueKuhn, Christian [10248-9] S2Kukaev, Alexander S. [10246-7] S2Kumar, Raju [10246-50] SPTueKurudi, Sreevatsa [10249-26] SPTueKusch, Gunnar [10248-3] S1, [10248-

9] S2

LLad, Robert J. 10246 Program

Committee, 10246 S5 Session Chair, [10246-27] S7

Langer, Christoph [10248-14] S3Lauren?íková, Agáta [10248-11] S3,

[10249-29] SPTueLawrowski, Robert [10248-14] S3Le Boulbar, Emmanuel D. [10248-7]

S2Le Boulbar, Emmanuel D. [10248-

22] S5, [10248-3] S1Le, Phu C. [10246-31] S8Lechuga, Laura Maria 10247 Program

Committee, 10249 Program Committee

Lee, Jeong-Bong 10246 Program Committee

Lefeuvre, Elie 10246 Program Committee

Leitner, Raimund [10247-6] S2Le-Roux, Xavier [10249-7] S2,

[10249-9] S3Lettrichova, Ivana [10249-28] SPTue,

[10249-29] SPTueLetzkus, Florian [10246-30] S8Li, Zhi [10246-18] S5Li, Zhi [10248-9] S2Lin, Hongtao [10249-16] S5Llobet, Eduard [10246-47] SPTueLo, Mu-Chieh [10249-19] S5López de la Torre, Marco Antonio

[10246-23] S6Lopez, Iñaki [10248-2] S1Lorenz, Katharina [10248-4] S1Lukyanov, Dmitry P. [10246-7] S2Lupan, Oleg [10248-10] S3Lupu, Nicoleta [10248-37] SPTueLuque-González, José Manuel

[10249-3] S1Lüthi, Stefan [10248-21] S4Lux, Marco [10248-39] SPTue

MMadrakian, Tayyebeh [10248-32]

SPTue, [10248-38] SPTueMakarona, Eleni [10247-7] S2Malec, Anna [10247-10] S3Malis Arad, Shoshana [10248-28] S6Mandayo, Gemma García 10246

Program Committee, 10246 S8 Session Chair, [10246-53] SPTue

Mani, Ganesh Kumar [10246-42] SPTue

Manione, Roberto [10246-57] SPTueManz, Johannes [10246-6] S2Marcaud, Guillaume [10249-7] S2Marcon, Petr [10246-41] SPTueMarconi, Lorenzo [10246-21] S6Marin, Francesco [10246-21] S6Marino, Francesco [10246-21] S6Markey, Laurent [10249-1] S1

Marks, Markus [10246-19] S5Marrinan, Brendan [10247-2] S1Marris-Morini, Delphine [10249-7]

S2, [10249-9] S3Martin, Denis [10248-23] S5Martin, Robert W. [10248-3] S1,

[10248-7] S2, [10248-9] S2Martinez, Fernando 10246 Program

CommitteeMartinez, Patricia [10248-18] S4


Martínez-Calderon, Miguel [10246-53] SPTue

Massoud, Yasmin M. [10247-9] S2Masuzawa, Tomoaki [10248-13] S3Mathew, Bobby [10247-3] S1Mathewson, Alan [10246-32] S8Mecani, Mirgen [10248-14] S3Mehnke, Frank [10248-9] S2Melikishvili, Zaza G. [10247-13] S3Melloni, Andrea I. 10249 Program

CommitteeMéndez, Bianchi 10248 Program

Committee, [10248-2] S1Merkoçi, Arben 10248 Program

CommitteeMerlin, Didier [10247-12] S3Mfon, Rebecca E. [10248-27] S6Milord, Laurent [10249-8] S2Mimura, Hidenori 10248 Program


Mironov, Sergey A. [10248-20] S4Mishra, Yogendra K. [10248-10] S3Misiakos, Konstantinos 10247

Program Committee, [10247-7] S2Mitchell, Arnan [10249-4] S1Molina-Fernández, Iñigo 10249

Program Committee, 10249 S1 Session Chair, [10249-3] S1

Monaico, Eduard [10248-23] S5Monteiro, Teresa 10248 Program

Committee, 10248 S4 Session Chair, [10248-10] S3, [10248-4] S1

Moore, Eric [10246-10] S3Morana, Bruno [10246-21] S6Morata, Alex [10246-35] S9Morichetti, Francesco [10249-15] S4Morozova, Ekaterina A. [10248-17] S3Moya, Ana [10246-14] S4Müller, Tina [10248-29] S6Myko, André [10249-6] S2

NNam, Byoung-Uk [10249-27] SPTueNandi, Riddhi [10249-26] SPTueNaresh-Kumar, G. [10248-9] S2Neikirk, Dean P. 10246 Program

CommitteeNeo, Yoichiro [10248-13] S3Nogales Díaz, Emilio [10248-2] S1Nouf-Allehiani, M. [10248-9] S2Novák, Jozef [10248-11] S3, [10249-

29] SPTue

OOlaizola, Santiago M. [10246-53]

SPTueOlivier, Segolene [10249-6] S2Olszewski, Oskar Z. [10246-32] S8,

[10246-44] SPTueOlver, Kimberley [10249-20] S5O’Murchu, Cian [10246-32] S8Ong, Duu Sheng [10248-34] SPTueOprea, Ion [10248-34] SPTueOrobtchouk, Régis 10249 Program

Committee, 10249 S3 Session Chair

Orta, Adil Han [10246-5] S1Ortega-Moñux, Alejandro [10249-3]

S1Otero, Nerea [10248-36] SPTue

PPagkali, Varvara [10247-7] S2Palevicius, Arvydas [10246-51] SPTuePalzer, Stefan [10246-12] S3Pandraud, Gregory [10246-21] S6Pannek, Carolin [10246-52] SPTueParellada-Monreal, Laura [10246-53]

SPTuePascal, Elena [10248-9] S2


Pauc, Nicolas [10249-8] S2Paun, Maria-Alexandra [10247-1] S1Pavesi, Lorenzo 10249 Program

CommitteePeiner, Erwin 10246 Conference

CoChair, 10246 S7 Session Chair, [10246-11] S3, [10246-19] S5, [10248-5] S1

Penty, Richard V. 10249 Program Committee

Perera, A. G. Unil [10247-12] S3Peres, Marco B. [10248-4] S1Perez, Adrian [10246-45] SPTuePérez-Galacho, Diego [10249-9] S3Perrott, Alison [10249-30] SPTuePeters, Frank Hudson [10249-30]

SPTuePetrou, Panagiota [10247-7] S2Pfusterschmied, Georg [10246-2] S1,

[10246-55] SPTuePilaski, Moritz [10246-30] S8Pintal, Sebastian [10247-2] S1Piqueras, Javier [10248-2] S1Plachta, Kamil [10246-43] SPTue,

[10249-24] SPTuePleros, Nikos [10249-1] S1Pons, Patrick 10246 Program

CommitteePontin, Antonio [10246-21] S6Porschatis, Caroline [10249-1] S1Pozzi, Michele 10246 Program


Prades, J. Daniel [10246-52] SPTuePriesol, Juraj [10248-9] S2Prodi, Giovanni Andrea [10246-21] S6Prokopyev, Stanislav [10248-16] S3Prommesberger, Christian [10248-

14] S3Prunnila, Mika 10246 Conference


Pudi?, Du?an [10249-11] S3, [10249-2] S1, [10249-28] SPTue, [10249-29] SPTue

Pugh, Jon [10248-3] S1Pühringer, Gerald [10249-17] S5

QQuiroga-Gonzalez, Enrique [10248-

15] S3

RRadu, Ecaterina [10248-37] SPTueRaevschi, Simion [10248-39] SPTueRamanathan, Rajesh [10249-4] S1Ramon, Eloi [10246-14] S4Raptis, Ioannis [10247-7] S2Rebhan, Bernhard [10246-54] SPTueReboud, Vincent [10249-8] S2Ren, Guanghui [10249-4] S1Renaud, Philippe [10247-11] SPTueRepo, Päivikki [10249-18] S5Ricci, Pier Carlo 10248 Program


Richardson, Kathleen A. [10249-16] S5

Ritchie, David A. [10248-29] S6Rivera, Alejandro [10249-19] S5Rochracher, Karl [10249-1] S1Rodríguez, Ainara [10246-53] SPTueRodríguez-Vázquez, Ángel B. [10247-

8] S2Roelkens, Gunther 10249 Program

CommitteeRomaine, James B. [10247-8] S2Romano-Rodriguez, Albert [10246-

52] SPTue, [10248-12] S3

Romero, Pablo M. [10248-36] SPTueRonning, Carsten [10248-10] S3,

[10248-6] S2Rothman, Johan [10249-8] S2Roubal, Zdenek [10246-41] SPTueRoxhed, Niclas 10247 Program

CommitteeRoyo, Guillermo [10246-37] S10,

[10246-45] SPTueRubes, Ondrej [10246-33] S9, [10246-

46] SPTueRuiz, David [10246-4] S1Ruiz-Díez, Víctor [10246-2] S1,

[10246-22] S6, [10246-55] SPTueRuiz-Merino, Ramón 10247 Program

Committee

SSadílek, Jakub [10248-12] S3Saify Nabiabad, Haidar [10248-32]

SPTueSaito, Asuka [10246-42] SPTueSalapatas, Alexandros [10247-7] S2Salleras, Marc [10246-35] S9Samà, Jordi [10248-12] S3Samitier Martí, Josep 10247 Program

CommitteeSamur, Evren [10246-5] S1Sánchez-Azqueta, Carlos [10246-37]

S10, [10246-45] SPTue, [10249-23] SPTue

Sánchez-Rojas Aldavero, José Luis Symposium Chair, [10246-2] S1, [10246-22] S6, [10246-23] S6, [10246-4] S1, [10246-55] SPTue

Sanz, Alejandro [10248-2] S1Saponara, Sergio [10246-39] S10,

[10246-56] SPTueSaranin, Danila [10248-18] S4Sarro, Pasqualina M. [10246-21] S6Sarua, Andrei 10248 Conference


Savin, Hele Irene [10249-18] S5Schaefer, Samira [10249-4] S1Schäfermeier, Clemens [10249-13] S4Schmid, Jens H. [10249-3] S1Schmid, Ulrich Symposium Chair,

10246 SPlen Session Chair, [10246-2] S1, [10246-28] S7, [10246-55] SPTue, 10247 SPlen Session Chair, 10248 SPlen Session Chair, 10249 SPlen Session Chair

Schmitt, Katrin [10246-52] SPTueSchnakenberg, Uwe 10247 Program

CommitteeSchneider, Michael [10246-28] S7Scholz, Marek [10248-8] S2Schrag, Gabriele 10246 Program

Committee, [10246-6] S2, [10246-9] S2

Schreiner, Rupert [10248-14] S3Schulte, Karl [10248-10] S3Schütze, Andreas 10246 Program

CommitteeSchwarz, Patrick [10246-22] S6Sciana, Beata [10249-28] SPTueSeidel, Helmut [10246-22] S6Seidel, Jan [10248-10] S3Sergentu, Vladimir V. [10248-23] S5Serra, Enrico [10246-21] S6Seshia, Ashwin 10246 Program

CommitteeSetka, Milena [10246-47] SPTueSgardelis, Pavlos [10246-8] S2Shao, Hongyan [10249-21] S5Shchepetov, Andrey [10246-20] S5She, Juncong [10248-14] S3Shen, Longfei [10249-19] S5Sheorey, Tanuja [10246-48] SPTueShepeta, Alexander P. [10246-40]

SPTueShevchenko, Sergey Yu [10246-7] S2

Shields, Andrew J. [10248-29] S6Shields, Philip A. [10248-22] S5,

[10248-3] S1, [10248-7] S2, [10248-9] S2

Shokry, Kirelloss [10246-49] SPTueSiciliano, Pietro 10246 Program

CommitteeSigmund, Ole [10246-4] S1Silverio, Vania [10246-50] SPTueSindushree, Sindushree [10248-10]

S3Sirkeli, Vadim P. [10248-34] SPTueSkiba-Szymanska, Joanna [10248-

29] S6Smazna, Daria [10248-10] S3, [10248-

30] S6Smilek, Jan [10246-46] SPTueSmith, Rick M. [10248-9] S2Sorokin, Alexander [10246-40]

SPTueSowade, Enrico [10246-14] S4Spencer, Peter [10248-29] S6Stam, Frank [10247-2] S1Stärker, Ulrich [10248-21] S4Stevenson, Richard Mark [10248-

29] S6Stewart, David M. [10246-27] S7Stoian, George [10248-37] SPTueStorozhevykh, Mikhail S. [10248-20]

S4Streklas, Angelos [10246-16] S4Su, Peter [10249-16] S5Südkamp, Tobias [10248-5] S1Sun, Jason N. [10249-20] S5Sun, Shen-Huei [10246-30] S8?u?lik, ?ubo? [10249-28] SPTue,

[10249-29] SPTueSvendsen, Winnie E. 10247 Program

CommitteeSwan, William [10246-17] S5Szabó, Zoltán [10246-41] SPTueSzelag, Bertrand [10249-6] S2Szydzik, Crispin [10249-4] S1

TTaha, Hazem [10249-14] S4Tang, Phuong [10249-4] S1Tarancón, Albert [10246-29] S8,

[10246-35] S9Tarantik, Karina [10246-52] SPTueTardif, Samuel [10249-8] S2Tchelnokov, Alexei [10249-8] S2Tepner, Sebastian [10247-17] SPTueThang, Tran Quyet [10249-22] S5Tiginyanu, Ion M. 10248 Conference

Chair, 10248 S1 Session Chair, [10248-10] S3, [10248-23] S5, [10248-39] SPTue

Timofeev, Andrey V. [10246-20] S5Titus, Jitto [10247-12] S3Tlaczala, Marek [10249-28] SPTueToledo Serrano, Javier [10246-2] S1,

[10246-22] S6, [10246-55] SPTueTrager-Cowan, Carol [10248-9] S2Truong, Binh D. [10246-31] S8Tserepi, Angeliki 10247 Program

CommitteeTsiokos, Dimitris [10249-1] S1Tsuchiya, Kazuyoshi [10246-1] S1,

[10246-42] SPTue

UUetsuji, Yasutomo [10246-1] S1Ursaki, Veaceslav V. [10248-23] S5



VVähänissi, Ville [10249-18] S5Vakarin, Vladyslav [10249-9] S3Vallejos, Stella [10248-12] S3van den Driesche, Sander 10247

Conference Chair, 10247 S1 Session Chair, [10247-17] SPTue, [10247-5] S2

van der Tol, Jos J. G. M. [10249-19] S5

Vanko, Gabriel 10246 Program Committee

Varnava, Christiana [10248-29] S6Varpula, Aapo [10246-20] S5Vasiljevic, Natasa [10248-27] S6Vazquez, Patricia [10246-10] S3Vellekoop, Michael J. [10247-17]

SPTue, [10247-5] S2Velten, Thomas 10247 Program

CommitteeVerpoorte, Sabeth 10247 Program

CommitteeVespucci, Stefano [10248-9] S2Vidal-Verdú, Fernando 10247

Program CommitteeViennois, Emilie [10247-12] S3Vilalta-Clemente, Arantxa [10248-9]

S2

Villa, Rosa [10246-14] S4, [10246-25] S7

Viovy, Jean-Louis 10247 Program Committee

Vivien, Laurent 10249 Conference CoChair, 10249 S4 Session Chair, 10249 S5 Session Chair, [10249-7] S2, [10249-9] S3

Vlad, Ionel-Valentin 10248 Program Committee

WWachutka, Gerhard [10246-9] S2Wada, Kazumi 10249 Program

CommitteeWaheed, Waqas [10247-3] S1Wahlbrink, Thorsten [10249-1] S1Wakabayashi, Hiroki [10246-1] S1Wang, Jicheng [10249-21] S5Wang, Tao [10248-3] S1, [10248-9] S2Wang, Xiaosai [10249-21] S5Wangüemert-Pérez, Juan Gonzalo

[10249-3] S1Wartmann, Jens [10246-30] S8Wasisto, Hutomo Suryo [10246-11]

S3, [10246-19] S5Weeber, Jean-Claude [10249-1] S1Weerathunge, Pabudi [10249-4] S1

Wernicke, Tim [10248-9] S2Weyers, Markus [10248-9] S2Wilkinson, Angus J. [10248-9] S2Winkelmann, Aimo [10248-9] S2Wishkerman, Asher [10248-28] S6Wöllenstein, Jürgen 10246 Program

Committee, 10246 S4 Session Chair, [10246-12] S3, [10246-52] SPTue

Wright, Paul K. [10246-34] S9Wu, Wenze [10246-19] S5

XXhoxhi, Moisi [10247-15] SPTueXing, Kun [10248-9] S2Xu, Benbo [10248-9] S2Xu, Dan-Xia 10249 Program

CommitteeXu, Dan-Xia [10249-3] S1Xu, Jiushuai [10246-11] S3

YYadav, Anupama [10249-16] S5Yamada, Itsunari [10249-25] SPTueYang, Hua [10249-30] SPTueYang, Mingqi [10249-30] SPTueYasoda, Yutaka [10246-42] SPTue

Yeatman, Eric M. [10246-34] S9Yeste Lozano, Jose [10246-25] S7Yilmaz, Cetin [10246-5] S1Yilmazoglu, Oktay [10248-34] SPTueYmeti, Aurel [10247-15] SPTueYu, Xiang [10248-9] S2Yuryev, Vladimir A. 10248 Program

Committee, [10248-17] S3, [10248-20] S4

Yuryeva, Tatyana [10248-17] S3

ZZakhidov, Anvar A. 10248 Program

Committee, [10248-18] S4Zangl, Hubert [10246-38] S10Zayats, Anatoly V. 10248 Program

CommitteeZborowska-Lindert, Iwona [10249-28]

SPTueZea, Miguel [10246-14] S4Zelenska, Katerina S. [10248-25] S5Zhang, Yun [10248-9] S2Zhou, Hao [10246-11] S3Zine, Nadia [10246-16] S4

Expand Your Network with SPIE Social Media.

#SPIEmicrotech


www.spie.org/journals

All SPIE Journals are part of the SPIE Digital Library, the world’s largest collection of optics and photonics research.

Get the benefit of Open Access for your paper, as a paid option: www.spie.org/JournalsOA

Join SPIE and get a subscription to one online journal with your membership, or request access from your librarian.

Submit your next paper to an SPIE Journal

Optical EngineeringMichael Eismann, Editor-in-Chief

Journal of Electronic ImagingKaren Eglazarian, Editor-in-Chief

Journal of Biomedical OpticsLihong V. Wang, Editor-in-Chief

Journal of Micro/Nanolithography, MEMS, and MOEMSChris Mack, Editor-in-Chief

Journal of Applied Remote SensingNi-Bin Chang, Editor-in-Chief

Journal of Photonics for EnergyZakya H. Kafafi, Editor-in-Chief

Journal of NanophotonicsAli Adibi, Editor-in-Chief

Journal of Medical ImagingMaryellen L. Giger, Editor-in-Chief

NeurophotonicsDavid A. Boas, Editor-in-Chief

Journal of Astronomical Telescopes, Instruments, and SystemsMark Clampin, Editor-in-Chief

* * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * *

* * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * *


PROCEEDINGS

Proceedings.Paid conference registration includes online Proceedings of SPIE. In the tables below you will find product order numbers to use on the registration form.

Available as part of registration:Online Proceedings Collection—access to multiple related proceedings volumes via the SPIE Digital Library. Available as papers are published.

Accessing Online ProceedingsTo access your proceedings:

• Go to http://spiedigitallibrary.org and sign in. If you do not have an SPIE account, create one using the email address you used to register for the conference.

• Click the My Account link at the top of the page, then find the My Conference Proceedings tab, which will show your available proceedings volumes.

You can also access this content via your organization’s SPIE Digital Library account.

For assistance, contact SPIE:Email: [email protected] (North America): +1 888 902 0894Phone (Rest of World): +1 360 685 5580

10246 Smart Sensors, Actuators, and MEMS VIII $90.00 Luis Fonseca, Mika Prunnila, Erwin Peiner

10247 Bio-MEMS and Medical Microdevices III $45.00 Sander van den Driesche

10248 Nanotechnology VIII $67.50 Ion Tiginyanu, Andrei Sarua

10249 Integrated Photonics: Materials, Devices, and $60.00 Applications IV

Jean-Marc Fédéli, Laurent Vivien

Product Order Number

Print Volume

Volume Title/Volume Editors Meeting Attendees

Print Proceedings Volumes

DLC655 SPIE Microtechnologies 2017 $175.00Volumes #: 10246, 10247, 10248, 10249

Online Proceedings Collections

Print conference proceedings volumes are also available; see pricing below.

Product Order Number

Collection Title/Included Volumes(See next page for volume titles and editors) Meeting

Attendees

Price for separate purchase

Price for separate purchase


GENERAL INFORMATION

LOCATION The meeting is held at

Hotel AlimaraBerruguete, 126 08035 Barcelona Spain

Phone: (+34) 93 427 00 00, Fax: (+34) 93 427 9292, Email: [email protected]

RegistrationOnsite Registration and Badge Pick-Up Hours Hotel Alimara Conference Foyer

Sunday 7 May 2017 . . . . . . . . . . . . . . . . . . . 15:00 to 17:00 hrs.Monday 8 May 2017 . . . . . . . . . . . . . . . . . . . 7:00 to 17:00 hrs.Tuesday 9 May 2017 . . . . . . . . . . . . . . . . . . . 7:30 to 17:00 hrs.Wednesday 10 May 2017 . . . . . . . . . . . . . . . 8:00 to 16:00 hrs.

CONFERENCE REGISTRATION Includes admission to all conference sessions, plenaries, panels, and poster sessions, Welcome Reception, coffee breaks, and online proceedings.

SPIE MEMBER, SPIE STUDENT MEMBER, AND STUDENT PRICING• SPIE Members receive conference registration discounts. Discounts are applied at the time of registration.

• Student registration rates are available only to undergraduate and graduate students who are enrolled full time and have not yet received their Ph.D. Post-docs may not register as students. A student ID number or proof of student status is required with your registration.

PRESS REGISTRATIONFor credentialed press and media representatives only. Please email con-tact information, title, and organization to [email protected].

SPIE CashierRegistration Area Open during registration hours

REGISTRATION PAYMENTS If you are paying by cash or cheque as part of your onsite registration, wish to add a course, workshop, or special event requiring payment, or have questions regarding your registration, visit the SPIE Cashier.

RECEIPTS AND CERTIFICATE OF ATTENDANCEPreregistered attendees who did not receive a receipt or attendees who need a Certificate of Attendance may obtain those from the SPIE Cashier.

BADGE CORRECTIONSBadge corrections can be made by the SPIE Cashier. Please have your badge removed from the badge holder and marked with your changes before approaching the counter.

REFUND INFORMATIONThere is a €40 service charge for processing refunds. Requests for refunds must be received by 24 April 2017; all registration fees, will be forfeited after this date. Membership dues, SPIE Digital Library subscriptions or Special Events purchased are not refundable.

Author / Presenter Information

SPEAKER CHECK-IN All conference rooms have a computer workstation, projector, screen, lapel microphone, and laser pointer. All presenters are requested to come to their conference room during the breaks with their memory devices or laptops to confirm their presentation display settings.

POSTER SETUP INSTRUCTIONS Authors are encouraged to display their posters beginning at 10:00 on Monday for extended viewing. Each poster author will have a 1m x 1m (39 inches x 39 inches) area in which to display their poster presentation. Presenters who have not set up by 14:30 on Tuesday will be considered a “no show” and their manuscript will not be published. Posters not removed at the end of the interactive poster session will be considered unwanted and will be discarded.


GENERAL INFORMATION

Onsite Services

INTERNET ACCESSComplimentary Internet will be available. Connection speeds will depend on the number of users. Please read the SPIE Wireless Internet Service Policy.

SPIE CONFERENCE APPDownload the free SPIE Conference App, available for iPhone and Android phones. Search and browse the programme, special events, participants, exhibitors, and more.

SPIE PUBLICATIONSAt SPIE Registration Desk

Browse the latest SPIE Press Books and Proceedings.

SPIE LUGGAGE + COAT CHECKHotel Alimara Concierge Desk

Luggage, package, and coat storage are available at the concierge desk.

URGENT MESSAGE LINEAn urgent message line is available during registration hours:

+34 – 93 – 427 0000 and ask to be directed to the SPIE Microtechnologies Registration Desk. Attendees should check the message board in the registration area for any messages held for them.

AIRLINE CHECK-IN AND BOARDING PASS KIOSKHotel Alimara Front Desk

Use this service to check in for your flight and print your boarding pass. The charge is €0.10 for black and white copies per page and €0.20 for colour copies per page.

Food + Beverage InformationHotel Alimara Conference Foyer

COFFEE BREAKSConference Garden

Complimentary coffee will be served twice daily, at 10:00 and 15:00 hrs. Check individual conference listings for exact times and locations.

FOOD & REFRESHMENTS FOR PURCHASEThe Hotel Alimara offers lunch to guests at the hotel. Please use the hotel reservation form to book the lunch direct with the hotel. There are some restaurants available in the area where lunch can be bought.

Travel to Barcelona

AIRPORT INFORMATIONGetting to Barcelona is easy. A total of 94 scheduled airlines service the location, including low-cost carriers such as Vueling and Spainair Easyjet, Ryanair, and others. For more detailed information, visit the Barcelona airport website.

https://www.barcelona-tourist-guide.com/en/airport/ barcelona-airport.html

AEROBUS AIRPORT SHUTTLE SERVICEThe Aerobus airport shuttle is a bus service that runs every 5 - 10 - 20 minutes, depending on the time of day and route. At the time of writing, tickets cost EU 5.65 for a single and EU 9.75 for a return journey (return within 9 days). Tickets can be bought at vending machines in front of the bus stop or from the driver. Private transfers are also available for groups of travellers, but need to be pre-booked with the relevant company. Taxis are also available at a cost of EU 40 - 50 depending on the time of day. To transfer from the airport directly to the venue, please leave the bus at Plaza Cataluña where you will

find the Urquinaona metro station on the yellow line (line 4). This leads directly to the CCIB (Maresme- Fòrum station).

Transportation from the Airport

FROM THE AIRPORT: By Taxi / Car: From C-32B road, (direction to Barcelona), drive trough the C-32 road and then take B-20 road called “Ronda de Dalt”, (direction to “Besós”) until exit #5 “Vall d’Hebrón”. Continue along the side lane, called “Passeig de la Vall d´Hebrón”, until finding the hotel. (approximate cost by taxi: 35 €)

By Train: From the airport take “RENFE” until “Pg de Gràcia” or “Barcelona Sants” station. Take the underground green line #3, direction to “Trinitat Nova”, and get off at called “Mundet” station.

By Bus: There is a shuttle bus service which stops outside each terminal and goes to central Plaça Catalunya every 15 minutes. The “Aerobus” is the most comfortable and easy way to travel between the city centre and the airport, it stops at Plaça d’Espanya, Urgell, and Plaça Catalunya. A single ticket costs EUR 3.20. The Transports Metropolitans de Barcelona (TMB) public bus on line 46 runs every 16 minutes from Plaça Espanya.

https://www.barcelona-tourist-guide.com/en/airport/ barcelona-airport-transport.html

PUBLIC TRANSPORTION: • Underground Take the green line #3 (direction to “Trinitat Nova”),

getting off at “Mundet” station.

• RENFE trains Take the “Cercanías” line, getting off at “Passeig de Grà-cia/Catalunya”. Then take the underground green line #3 (direction to “Trinitat Nova”), getting off at “Mundet” station.

• FGC trains From Sabadell /Terrasa: Get off at Provença/Catalunya sta-tions. Then take the underground green line #3 (direction to “Trinitat Nova”), getting off at “Mundet” station.

• Bus Get off at the stop called 236 -Arquitecte Moragues-Francesc Manrique

https://www.barcelona-tourist-guide.com/en/transport/ transport-in-barcelona.html

Car Rental Call the Hertz International Reservation Center at 1-800-654-3001 in the USA or your local Hertz Reservations Center to receive a special discount for SPIE. Reservations may also be placed on-line

at www.hertz.com. You will receive 15% off qualifying Affordable rates at participating locations in Spain.

Be sure to identify yourself as a SPIE attendee. The PC#137480 must be on your advance reservation to receive this special offer. You must present this coupon at the time of rental in order to receive this discount.

This special offer is available for rentals from May 1-31 2017.


Acceptance of Policies and Registration ConditionsThe following Policies and Conditions

apply to all SPIE Events. As a condition

of registration, you will be required to

acknowledge and accept the SPIE Registration

Policies and Conditions contained herein.

Granting Attendee Registration and AdmissionSPIE, or their officially designated event management, in their sole dis-cretion, reserves the right to accept or decline an individual’s registration for an event. Further, SPIE, or event management, reserves the right to prohibit entry or remove any individual whether registered or not, be they attendees, exhibitors, representatives, or vendors, who in their sole opinion are not, or whose conduct is not, in keeping with the character and purpose of the event. Without limiting the foregoing, SPIE and event management reserve the right to remove or refuse entry to any attend-ee, exhibitor, representative, or vendor who has registered or gained ac-cess under false pretenses, provided false information, or for any other reason whatsoever that they deem is cause under the circumstances.

SPIE Safe Meeting and Misconduct PolicySPIE is a professional, not-for-profit society committed to providing valuable and safe conference and exhibition experiences. SPIE is ded-icated to equal opportunity and treatment for all its members, meeting attendees, staff, and contractors. Attendees are expected to be respect-ful to other attendees, SPIE staff, and contractors. Harassment and other misconduct will not be tolerated; violators will be addressed prompt-ly and seriously. Consequences up to and including expulsion from the event as appropriate will be implemented immediately.

The SPIE anti-harassment policy can be found at http://spie.org/policy.

Reporting of Unethical or Inappropriate BehaviorSPIE is an organization with strong values of responsibility and integrity. Our Harassment Policy, Ethics Statement, and Code of Professional Con-duct contain general guidelines for behavior and for conducting busi-ness with the highest standards of ethics.

Onsite at a SPIE meeting, contact any SPIE Staff member with concerns or questions for thorough follow-up. If you feel in immediate danger, please dial 911 for police intervention.

SPIE has established a confidential reporting system for staff and all meetings participants to raise concerns about possible unethical or in-appropriate behavior within our community. Complaints may be filed by phone at +1-888-818-6898 or at www.SPIE.ethicspoint.com and, if pre-ferred, may be made anonymously.

IdentificationTo verify registered participants and provide a measure of security, SPIE will ask attendees to present a government-issued Photo ID at registra-tion to collect registration materials.

Individuals are not allowed to pick up badges for attendees other than themselves. Further, attendees may not have some other person partici-pate in their place at any conference-related activity. Such other individ-uals will be required to register on their own behalf to participate.

Access to Technical and Networking Events All technical and networking events require a conference badge for ad-mission. Registered attendees may bring their children with them as long as everyone is badged. Registration badges for children under 18 are free and available at the SPIE registration desk onsite. Children under 14 years of age must be accompanied by an adult at all times, and guard-ians are asked to help maintain a professional, disturbance-free confer-ence environment.

Exhibition Hall Policy Everyone who attends the exhibition must be registered and have a badge. Badges for children are free and available onsite at the registra-tion desk. Children under 14 years of age must be accompanied by an adult at all times. Guardians are asked to help maintain a professional, disturbance-free exhibition environment. For safety and insurance rea-sons, children under 18 are not allowed in the exhibition area during ex-hibition move-in and move-out.

Payment MethodRegistrants for paid elements of the event, who do not provide a method of payment, will not be able to complete their registration. Individuals with incomplete registrations will not be able to attend the conference until payment has been made. SPIE accepts VISA, MasterCard, American Express, Discover, Diner’s Club, checks and wire transfers. Onsite regis-trations can also pay with Cash.

Authors/CoauthorsBy submitting an abstract, you agree to the following conditions:

• An author or coauthor (including keynote, invited, and solicited speakers) will register at the author registration rate, attend the meeting, and make the presentation as scheduled.

• A manuscript (minimum 6 pages, maximum 20 pages) for any accept-ed oral, invited, keynote, or poster presentation will be submitted for publication in the Proceedings of SPIE in the SPIE Digital Library. Some SPIE events have other requirements that the author is made aware of at the time of submission.

• Only papers presented at the conference and received according to publication guidelines and timelines will be published in the Proceed-ings of SPIE in the SPIE Digital Library (or via the requirements of that event).

Audio, Video, Digital Recording PolicyConferences, courses, and poster sessions: For copyright reasons, re-cordings of any kind are prohibited without prior written consent of the presenter or instructor. Attendees may not capture or use the materi-als presented in any meeting/course room or in course notes on dis-play without written permission. Consent forms are available at Speak-er Check-In. Individuals not complying with this policy will be asked to leave a given session and/or asked to surrender their recording media.

EXHIBITION HALL: For security and courtesy reasons, recordings of any kind are prohibited unless one has explicit permission from on-site com-pany representatives. Individuals not complying with this policy will be asked to surrender their recording media and to leave the exhibition hall.

SPIE EVENT POLICIES


Capture and Use of a Person’s ImageBy registering for an SPIE event, I grant full permission to SPIE to capture, store, use, and/or reproduce my image or likeness by any audio and/or visual recording technique (including electronic/digital photographs or videos), and create derivative works of these images and recordings in any SPIE media now known or later developed, for any legitimate SPIE marketing or promotional purpose.

By registering for an SPIE event, I waive any right to inspect or approve the use of the images or recordings or of any written copy. I also waive any right to royalties or other compensation arising from or related to the use of the images, recordings, or materials. By registering, I release, defend, indemnify and hold harmless SPIE from and against any claims, damages or liability arising from or related to the use of the images, re-cordings or materials, including but not limited to claims of defamation, invasion of privacy, or rights of publicity or copyright infringement, or any misuse, distortion, blurring, alteration, optical illusion or use in com-posite form that may occur or be produced in taking, processing, reduc-tion or production of the finished product, its publication or distribution.

Laser Pointer Safety Information/PolicySPIE supplies tested and safety-approved laser pointers for all confer-ence meeting rooms. For safety reasons, SPIE requests that presenters use provided laser pointers.

Use of a personal laser pointer represents user’s acceptance of liability for use of a non-SPIE-supplied laser pointer. If you choose to use your own laser pointer, it must be tested to ensure <5 mW power output. La-ser pointers in Class II and IIIa (<5mW) are eye safe if power output is correct, but output must be verified because manufacturer labeling may not match actual output. Come to Speaker Check-In and test your laser pointer on our power meter. You are required to sign a waiver releasing SPIE of any liability for use of potentially non-safe, personal laser point-ers. Misuse of any laser pointer can lead to eye damage.

Unauthorized Solicitation PolicyUnauthorized solicitation in the Exhibition Hall is prohibited. Any non-exhibiting manufacturer or supplier observed to be distributing information or soliciting business in the aisles, or in another company’s booth, will be asked to leave immediately.

Unsecured Items PolicyPersonal belongings should not be left unattended in meeting rooms or public areas. Unattended items are subject to removal by security. SPIE is not responsible for items left unattended.

Wireless Internet Service Policy At SPIE events where wireless is included with your registration, SPIE provides wireless access for attendees during the conference and exhi-bition but cannot guarantee full coverage in all locations, all of the time. Please be respectful of your time and usage so that all attendees are able to access the internet.

Excessive usage (e.g., streaming video, gaming, multiple devices) reduc-es bandwidth and increases cost for all attendees. No routers may be attached to the network. Properly secure your computer before access-ing the public wireless network. Failure to do so may allow unauthorized access to your laptop as well as potentially introduce viruses to your computer and/or presentation. SPIE is not responsible for computer vi-ruses or other computer damage.

Mobile Phones and Related Devices PolicyMobile phones, tablets, laptops, pagers, and any similar electronic devic-es should be silenced during conference sessions. Please exit the confer-ence room before answering or beginning a phone conversation.

SmokingFor the health and consideration of all attendees, smoking, including e-cigarettes, is not permitted at any event elements, such as but not limited to: plenaries, conferences, workshops, courses, poster sessions, hosted meal functions, receptions, and in the exhibit hall. Most facilities also prohibit smoking and e-cigarettes in all or specific areas. Attendees should obey any signs preventing or authorizing smoking in specified locations.

Hold HarmlessAttendee agrees to release and hold harmless SPIE from any and all claims, demands, and causes of action arising out of or relating to your participation in the event you are registering to participate in and use of any associated facilities or hotels.

Event CancellationIf for some unforeseen reason SPIE should have to cancel the event, reg-istration fees processed will be refunded to registrants. Registrants will be responsible for cancellation of travel arrangements or housing reser-vations and the applicable fees.

SPIE International HeadquartersPO Box 10

Bellingham, WA 98227-0010 USA

Tel: +1 360 676 3290

Fax: +1 360 647 1445

[email protected] • www.SPIE.org

SPIE Europe Offices2 Alexandra Gate

Ffordd Pengam, Cardiff, CF24 2SA UK

Tel: +44 29 2089 4747

Fax: +44 29 2089 4750

[email protected] • www.SPIE.org

SPIE EVENT POLICIES


NOTES


SPIEDigitalLibrary.org

The world’s largest collection of optics and photonics applied researchMore than 450,000 interdisciplinary academic & research papers from around the world.

Powered by photonics


Mark your calendar for 23–26 April 2018

The Premier European Optics and Photonics R&D Conference

Plan to attendPhotonics Europe

2018

Strasbourg, France www.spie.org/PE2018

2017 micro technologies - spiespie.org/documents/conferencesexhibitions/emt17-final-lr.pdf ·...

Documents