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2011 ITRS REVISION 2011 ITRS REVISION SCHEDULE AND GUIDELINES SCHEDULE AND GUIDELINES CONTENTS 2011 Due Dates and Meetings What’s New for 2011 ? Template info Chapter required topics outline and section guidelines Chapter section numbering examp les Difficult Challenges Technology Requirements Potential Solutions Citations and References The ITRS On the Internet ITRS Website Information ITRS Basecamp Forums ITRS Assistance SLIDE NUMBER 2-4 5 6 7-8 9 10 11 12 13 14 TIP ! For hyperlinks to work, use the Slide Show mode !

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Page 1: 2011 ITRS REVISION SCHEDULE AND GUIDELINES CONTENTS 2011 Due Dates and Meetings Whats New for 2011 ? Template info Chapter required topics outline and

2011 ITRS REVISION 2011 ITRS REVISION SCHEDULE AND GUIDELINESSCHEDULE AND GUIDELINES

CONTENTS2011 Due Dates and MeetingsWhat’s New for 2011 ? Template info Chapter required topics outline and section

guidelines Chapter section numbering examples Difficult Challenges Technology Requirements Potential Solutions Citations and ReferencesThe ITRS On the Internet ITRS Website Information ITRS Basecamp ForumsITRS Assistance

SLIDE NUMBER2-4

56

7-8910111213

14

☺ TIP ! For hyperlinks to work, use the Slide Show mode !

Page 2: 2011 ITRS REVISION SCHEDULE AND GUIDELINES CONTENTS 2011 Due Dates and Meetings Whats New for 2011 ? Template info Chapter required topics outline and

2011 ITRS Revision Guidelines 2

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• JAN – MARCH – ITRS TABLES DRAFTS PREPARED– ITWGs and CrossTWG Study Group meet each month with their teams to work

Difficult Challenges, Technology Requirements tables, and other tables to prepare for Spring workshop

• APRIL – ITRS SPRING WORKSHOP IN POTSDAM, GERMANY• April 10-12, 2011 -- IRC AND ITWG Workshop• April 13, 2011 -- More than Moore Workshop

• OBJECTIVE OF SPRING WORKSHOP MEETING:

– ITWGS have all draft tables completed to share with the other working groups for input and consensus

• PREPARE AND BRING YOUR ITWG FIRST DRAFT TABLES TO THE SPRING MEETING !

•  MAY AND JUNE – ITRS FIGURES PREPARED, CHAPTER WRITING IS UNDERWAY– ITWGs work on Potential Solutions to match the Technology Requirements

tables– ITWGS begin writing/editing draft chapter– Prepare for Summer workshop and to finalize all tables and charts

2011 ITRS SCHEDULE2011 ITRS SCHEDULE

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• JULY – 2011 ITRS SUMMER WORKSHOP AND SUMMER PUBLIC CONFERENCE IN SAN FRANCISCO CALIFORNIA

• July 11-12, 2011 -- IRC AND ITWG Workshop• July 13, 2011 – ITRS Summer Public Conference

• OBJECTIVE OF MEETING: FINAL DRAFTS OF TABLES AND FIGURES COMPLETED FOR MEETING

– ITWGs present at the conference for audience and other ITWG feedback.– FIRST Drafts of chapters are underway.

• AUGUST 1 – FINAL DRAFTS OF TABLES’ AND FIGURES’ FILES [EXCEL AND POWERPOINT] DUE TO ITRS EDITOR

– Global input from July meeting is completed by this date!– All tables / charts / figures sent to editor as final drafts and global feedback

finished for the ITWG authors to finish by September 15. 

•  AUGUST 15 – FINAL DRAFT [WORD DOCUMENT FILE] OF CHAPTER WRITING DUE TO ITRS EDITOR. 

– This step allows checking the progress of each team.– If there are any questions with the chapter, it is early enough to fix before the

freeze date of September 15.

2011 ITRS SCHEDULE2011 ITRS SCHEDULE

Page 4: 2011 ITRS REVISION SCHEDULE AND GUIDELINES CONTENTS 2011 Due Dates and Meetings Whats New for 2011 ? Template info Chapter required topics outline and

2011 ITRS Revision Guidelines 4

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• SEPTEMBER 15 – FREEZE DATE FOR ALL MATERIALS!– THIS IS A VERY IMPORTANT DATE FOR ALL ITWGs. – NOTE ! All chapter reviews and feedback by ALL Global Regions should be

completed BEFORE this date, by August 1, in time for the ITWG authors to finish by September 15. 

Final acknowledgments and 1 page summary of "What's New" due for 2011 Executive Summary.

Future Fab International article due September 20, 2011 [details provided by FFI editors]

• OCTOBER and NOVEMBER 2011 – IRC REVIEWS AND FINAL EDIT CYCLES

• DECEMBER 2011– RELEASE 2011 ITRS, SEOUL KOREA• December 12-13, 2011 -- IRC AND ITWG Workshop• December 14, 2011 – ITRS Winter Public Conference, Seoul Korea

2011 ITRS SCHEDULE2011 ITRS SCHEDULE

VERY IMPORTANT NOTES ON SEPTEMBER 15 DUE DATE TO ENSURE YOUR UPDATES ARE PUBLISHED IN 2011

No Group Reviews or Input after September 15! If FINAL material is NOT received on September 15,

it will NOT post until end of 2012!

Page 5: 2011 ITRS REVISION SCHEDULE AND GUIDELINES CONTENTS 2011 Due Dates and Meetings Whats New for 2011 ? Template info Chapter required topics outline and

2011 ITRS Revision Guidelines 5

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“GOLD” FILES ARE TO BE USED FOR ALL REVISIONS– Are the most accurate and are the posted versions online– Have the correct formats

• GOLD VERSION OF 2010 EXCEL TABLES– Unlocked worksheets – Can customize for ITWGS with formulas

• WORD VERSION OF 2009 CHAPTER

• GOLD VERSION OF 2009 POTENTIAL SOLUTIONS CHARTS

• mailto:[email protected] to get these versions or go online to http://www.itrs.net/Links/2011ITRS/2011Preparations.html– User name = 2010 ITRS and Password = roadmap

WHAT’S NEW FOR 2011?-- TEMPLATES

WHAT’S NEW FOR 2011?-- TEMPLATES

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ALL SECTIONS AND SUBSECTIONS ARE NOW NUMBERED!► Top Level Sections [Required Topics for each ITWG chapter]:• 1.0 Scope• 2.0 Difficult Challenges• 3.0 Technology Requirements • 4.0 Potential Solutions • 5.0 Cross-cut Issues

– 5.1 ESH, Metrology, Yield Enhancement, Modeling & Simulation– 5.2 Other Cross-TWG Discussions– 5.3 Impact of Future Emerging Research Devices & Materials– 5.4 Analog challenges/topics– 5.5 MEMS structures

• 6.0 Other Considerations…• 7.0 Conclusions• 8.0 References

► Guidelines• The top level sections above are the required topics and order for each chapter. Many

chapters have more than these required sections. In that case, there may be more than 8 sections, which is okay. However, if your chapter has other sections besides these topics, please discuss with the editor as soon as possible (for planning purposes).

• Use Word auto-numbering. • The next 2 slides have examples of numbering.• Try to limit numbered subsections to only 4 or 5 levels.

WHAT’S NEW FOR 2011?-- CHAPTER WRITING AND NUMBERED SECTIONS

WHAT’S NEW FOR 2011?-- CHAPTER WRITING AND NUMBERED SECTIONS

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3.0 TECHNOLOGY REQUIREMENTS3.1 Logic3.2 Memory3.2.1 DRAM3.2.2 Non-volatile Memory3.3 Reliability3.3.1 Introduction3.3.2 Requirements

4.0 POTENTIAL SOLUTIONS4.1 Logic4.2 Memory4.2.1 DRAM4.2.2 Non-volatile Memory4.3 Reliability

5.0 CROSS TWG ISSUES5.1 Modeling and Simulation5.2 Interconnect

WHAT’S NEW FOR 2011?-- EXAMPLE 1 OF NUMBERED SECTIONS

Technology Requirements and Potential Solutions as Separate Sections

WHAT’S NEW FOR 2011?-- EXAMPLE 1 OF NUMBERED SECTIONS

Technology Requirements and Potential Solutions as Separate Sections

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3.0 TECHNOLOGY REQUIREMENTS AND POTENTIAL SOLUTIONS

3.1 Logic Technology Requirements and Potential Solutions3.1.2 Logic Technology Requirements3.1.3 Logic Potential Solutions3.2 Memory Technology Requirements and Potential Solutions3.2.1 DRAM3.2.2 Non-volatile Memory3.3 Reliability Technology Requirements and Potential Solutions3.3.1 Introduction3.3.2 Reliability Requirements3.3.3 Reliability Potential Solutions

4.0 CROSS TWG ISSUES4.1 Modeling and Simulation4.2 Interconnect

WHAT’S NEW FOR 2011?-- EXAMPLE 2 OF NUMBERED SECTIONS

Requirements and Potential Solutions based on each Topic

WHAT’S NEW FOR 2011?-- EXAMPLE 2 OF NUMBERED SECTIONS

Requirements and Potential Solutions based on each Topic

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► Difficult Challenges Table Guidelines

► Near-term 2011-2018

► Long-term 2019-2026

► TEN Total Challenges ONLY

Target the Top 5 most difficult challenges for near-term and the Top 5 most difficult challenges for long-term

► Difficult Challenges Table Guidelines

► Near-term 2011-2018

► Long-term 2019-2026

► TEN Total Challenges ONLY

Target the Top 5 most difficult challenges for near-term and the Top 5 most difficult challenges for long-term

WHAT’S NEW FOR 2011?-- DIFFICULT CHALLENGES BASED ON YEARS

WHAT’S NEW FOR 2011?-- DIFFICULT CHALLENGES BASED ON YEARS

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► TEMPLATE INFORMATION: ITWGS USE THE “GOLD” EXCEL FILE FOR REVISING YOUR TABLES! CONTACT LINDA WILSON AT mailto:[email protected] IF NECESSARY.

► Timeframe : 2011—2026

► Numbering for Tables, Figures, and Citations are self-consistent within each chapter.

► Tables and Figures use a prefix for each chapter, e.g., FEP tables start at FEP1; Lithography tables start at LITH1

Technology Requirements Legend Guidelines:

► Yellow cannot exist in 2011

► Red cannot exist in next 3 years (2011, 2012, 2013**)** An ITWG can have an exception approved through the IRC:

“Solution NOT known, but does not prevent production manufacturing.”

Manufacturable solutions exist, and are being optimized

Manufacturable solutions are known

Interim solutions are known Manufacturable solutions are NOT known

Manufacturable solutions exist, and are being optimized

Manufacturable solutions are known

Interim solutions are known Manufacturable solutions are NOT known

WHAT’S NEW FOR 2011?-- TECHNOLOGY REQUIREMENTS TABLES FROM 2011-2026

WHAT’S NEW FOR 2011?-- TECHNOLOGY REQUIREMENTS TABLES FROM 2011-2026

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First Year of IC Production 2009 2010 2011 2012 2013 2014 2015 2016 2017 2018 2019 2020 2021 2022 2023 2024 2025 2026

This legend indicates the time during which research, development, and qualification/pre-production should be taking place for the solution.

Research Required

Development Underway

Qualification / Pre-Production

Continuous Improvement

Work-in-Progress--Do Not Publish

Columns for 2009/2010 will be deleted

WHAT’S NEW FOR 2011?-- POTENTIAL SOLUTIONS TEMPLATE FROM 2011-2026

WHAT’S NEW FOR 2011?-- POTENTIAL SOLUTIONS TEMPLATE FROM 2011-2026

► GUIDELINES—2011-2026• ALL possible solutions are included. The ITRS does NOT pick solutions but

instead identifies many potential areas of innovation needed to meet future requirements.

• Potential solutions should map to Technology Requirements.• Example of 2011 Potential Solutions Excel template:

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WHAT’S NEW FOR 2011?-- FOOTNOTES, CITATIONS, AND REFERENCES

WHAT’S NEW FOR 2011?-- FOOTNOTES, CITATIONS, AND REFERENCES

► GUIDELINES• FOOTNOTES are NOT cited works, but special notations to text.

– Footnotes appear at the bottom of pages and are numbered uniquely to each chapter.

• CITATIONS are credited sources and must be correctly formatted as part of the draft process or will be rejected.

– Citations appear as endnotes at the back of each chapter in the “References” section and are numbered starting at “1” sequentially and uniquely to each chapter.

– NOTE! Sub-section numbering is part of the sequential numbering [so only one “number 1” citation per chapter].

• Use the IEEE Citation Style Guide– This is a short and simple “cheat sheet” provided by the ITRS

managing editor and is also online at this link: http://www.itrs.net/Links/2009ITRS/IEEE%20Citation%20Style%20Guide.pdf

► Citations’ and references’ or materials uses’ permissions are the responsibility of the ITWG editors. Proofs of sources must be provided to the managing editor.

► Check all web links for accuracy

► GUIDELINES• FOOTNOTES are NOT cited works, but special notations to text.

– Footnotes appear at the bottom of pages and are numbered uniquely to each chapter.

• CITATIONS are credited sources and must be correctly formatted as part of the draft process or will be rejected.

– Citations appear as endnotes at the back of each chapter in the “References” section and are numbered starting at “1” sequentially and uniquely to each chapter.

– NOTE! Sub-section numbering is part of the sequential numbering [so only one “number 1” citation per chapter].

• Use the IEEE Citation Style Guide– This is a short and simple “cheat sheet” provided by the ITRS

managing editor and is also online at this link: http://www.itrs.net/Links/2009ITRS/IEEE%20Citation%20Style%20Guide.pdf

► Citations’ and references’ or materials uses’ permissions are the responsibility of the ITWG editors. Proofs of sources must be provided to the managing editor.

► Check all web links for accuracy

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► ITRS WEBSITE

• www.itrs.net is the public homepage

• http://www.itrs.net/ITWG/home.html is the members-only working group site that requires a username and password.

– VERY HELPFUL INFORMATION

• Meeting information and files, IRC/ITWG team contacts, most recent ITRS chapters as Word files, pointers for ITWG memberships, guidelines for the ITRS process, and MORE...!

– ITRS website working group login information is Username = “2010 ITRS”, Password = “roadmap”. (These are case sensitive.)

► ITRS BASECAMP FORUMS

– These various sites are available for each ITWG to use.

– Easy to set up for each team! Easy to use for posting, downloading files, uploading files and communicating to all your team!

– Administered by the SRC team and ITRS managing editor.

– Contacts:

• Leslie Faiers, [email protected]

• Linda Wilson, [email protected]

– https://itrs.basecamphq.com/clients

– Please send your teams contact information for each member: Name, Email, and Company to start the process of registration.

► FUTURE FAB INTERNATIONAL

– Each January issue is devoted to only the new 2011 ITRS

– All ITWG teams write an article based on their latest work. Deadlines for these ITWG articles are due end of September 2011 to the Future Fab editors.

– Details for these articles will be provided by Future Fab editors.

► ITRS WEBSITE

• www.itrs.net is the public homepage

• http://www.itrs.net/ITWG/home.html is the members-only working group site that requires a username and password.

– VERY HELPFUL INFORMATION

• Meeting information and files, IRC/ITWG team contacts, most recent ITRS chapters as Word files, pointers for ITWG memberships, guidelines for the ITRS process, and MORE...!

– ITRS website working group login information is Username = “2010 ITRS”, Password = “roadmap”. (These are case sensitive.)

► ITRS BASECAMP FORUMS

– These various sites are available for each ITWG to use.

– Easy to set up for each team! Easy to use for posting, downloading files, uploading files and communicating to all your team!

– Administered by the SRC team and ITRS managing editor.

– Contacts:

• Leslie Faiers, [email protected]

• Linda Wilson, [email protected]

– https://itrs.basecamphq.com/clients

– Please send your teams contact information for each member: Name, Email, and Company to start the process of registration.

► FUTURE FAB INTERNATIONAL

– Each January issue is devoted to only the new 2011 ITRS

– All ITWG teams write an article based on their latest work. Deadlines for these ITWG articles are due end of September 2011 to the Future Fab editors.

– Details for these articles will be provided by Future Fab editors.

ITRS ON THE INTERNETITRS ON THE INTERNET

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ITRS ASSISTANCEITRS ASSISTANCE

► Have Questions…?• about the ITRS Process or ITWG Membership• 2011 preparation files• latest contact information for an ITWG chair or IRC member• general meeting information• about Forums or login information

► Need…?• to post files• to discuss due dates• help with Word, Excel, or Powerpoint

Linda Wilson

[email protected]

512-356-3605

► Have Questions…?• about the ITRS Process or ITWG Membership• 2011 preparation files• latest contact information for an ITWG chair or IRC member• general meeting information• about Forums or login information

► Need…?• to post files• to discuss due dates• help with Word, Excel, or Powerpoint

Linda Wilson

[email protected]

512-356-3605