18 pte utility and chemical standards 00-04-15

28
LG.PHILIPS DISPLAYS STANDARDISATION MECHANICAL CONSTRUCTIONS PRODUCTION TECHNOLOGY & ENGINEERING UTILITY & CHEMICAL STANDARDS 00-04-15 99 - 07 - 16 CONTENTS Page Utility standards 2 medium group : Air 3 code : A.. 3 medium group : Gasses 5 code : B.. 5 medium group : Water 6 code : C.. 6 medium group : cooling medium 9 code : D.. 9 medium group : heating medium 9 code : E.. 9 medium group : Exhausts 10 code : F.. 10 medium group : Fuels 11 code : H.. 11 medium group : Waste water drains 12 code : J.. 12 medium group : Power supply 12 code : T.. 12 code : TX.. 12 Chemical standards 14 medium group : Chemicals 15 code : K.. & L.. 15 medium group : Chemicals to Separation / Regeneration. 17 code : M.. 17 medium group : Chemicals PVA & Acids 19 code : N.. 19 Page - 1kk Tab 11

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  • LG.PHILIPS DISPLAYS STANDARDISATION MECHANICAL CONSTRUCTIONS

    PRODUCTION TECHNOLOGY & ENGINEERING

    UTILITY & CHEMICAL STANDARDS 00-04-15 99-07-16

    CONTENTS Page

    Utility standards 2 medium group : Air 3

    code : A.. 3 medium group : Gasses 5

    code : B.. 5 medium group : Water 6

    code : C.. 6 medium group : cooling medium 9

    code : D.. 9 medium group : heating medium 9

    code : E.. 9 medium group : Exhausts 10

    code : F.. 10 medium group : Fuels 11

    code : H.. 11 medium group : Waste water drains 12

    code : J.. 12 medium group : Power supply 12

    code : T.. 12 code : TX.. 12

    Chemical standards 14 medium group : Chemicals 15

    code : K.. & L.. 15 medium group : Chemicals to Separation / Regeneration. 17

    code : M.. 17 medium group : Chemicals PVA & Acids 19

    code : N.. 19

    Page - 1kk Tab 11

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    Tab 11 -

    00-04-15 02-01-15

    Utility standards (appendix to groupnumber sheet 411)

    Key & definitions:

    first piping

    second piping

    third piping

    first piping Main supply/drain piping (also called main piping). From utility building or chemicals preparation department to production area.

    second piping From first piping to production machine, chemicals preparation installation or utility installation, and is situated not further than 50 cm away from connection point on the equipment: 50 cm through the floor in case piping is situated under the machine floor 50 cm through ceiling incase piping is situated above machine floor the piping ends with a valve, and is ready for further connection.

    third piping From second piping to machine connection.

    Note: Second piping should be engineered and installed in such a way that the third piping length is minimized. The third piping should not obstruct the freedom of action for operators and maintenance people. To meet this requirement, the holes in floor or ceiling for the second piping should be drilled just before equipment installation but after the equipment is marked on the floor. Piping & appendage material used should meet the specifications as standardized in this chapter

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    Tab 11 -

    02-01-15 03-03-15

    coding:

    XXY-00

    serial number (only if the number of connections of the same medium on one machine > 1)

    S for supply and R for return (only if the medium is regenerated or separated)

    medium code

    example:

    DAS-03: The third chilled water 6 C supply connection on the machine.

    AC-05: The fifth filtered compressed air connection on the machine.

    medium group : Air

    code : A.. code medium unit physical properties chemical composition preferred pipe material and treatment AA

    see

    remark

    compressed air

    Nm3

    /h pressure at point of use = 6 bar (g)

    pressure dewpoint = -30 C

    10 ! temperature ! 30 C

    oil free seamless St.37.0:

    external & internal: grit blasted, hot dip galvanized or

    phosphated and externally painted AC

    see

    remark

    filtered compressed

    air dry

    Nm3

    /h pressure at point of use = 6 bar (g)

    pressure dewpoint = -30 C

    10 ! temperature ! 30 C

    particles < 1 m

    dust load < 1 mg/m3

    oil free AISI SS316L

    AD blower air Nm3

    /h pressure at point of use = 350 +/- 10 mbar(g)

    10 ! temperature ! 30 C

    particles < 5 m

    dust load < 5 mg/m3

    seamless St.37.0:

    external & internal: grit blasted, hot dip galvanized or phosphated and externally painted sealed with Loctite 570 or 577 exclusively

    AE blower air dry Nm3

    /h line pressure = 350 +/- 10 mbar (g)

    pressure at point of use = 0.2 bar (g)

    10 ! temperature ! 30 C

    particles < 45 m

    dust load < 1.3 mg/m3

    abs. humidity < ..... ppm

    AISI SS316L

    sealed with Loctite 570 or 577 exclusively

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    99-07-16 00-04-15

    UTILITY &

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    code medium unit physical properties chemical composition preferred pipe material and treatment AF

    see

    remark

    vacuum Am3

    /h pressure at point of use = 0.2 bar (abs.) seamless St.37.0:

    external & internal: grit blasted, hot dip galvanized or

    phosphated and externally painted piping from process equipment to main header AISI SS316L

    AG compressed air

    blow-off

    Nm3

    /h

    AH ambient air Nm3

    /h

    filter &drying unit

    flange &gasket

    St.37.0

    SS316L

    AA

    CA

    factory utillity buildingRemark compre

    ssed air installation

    :

    Filtered compressed air dry to be generated from raw compressed air by filter and drying unit

    located in factory. Piping for:

    raw compressed air seamless St.37.0. filtered compressed air dry from filter unit to machine AISI SS316L To avoid tension corrosion, stainless steel filter unit coupled to steel piping with flanges and rubber gasket.

    Remark vacuum installation:

    Preferred piping material: productionmachine

    flange &gasket

    floor

    AFSt.37.0

    SS316L

    from production machine to main header AISI SS316L mainheader AISI SS316L or St.37.0 (to be defined by supplier vacuum unit) To avoid tension corrosion, stainless steel piping coupled to steel piping with flanges and rubber

    gasket.

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    00-04-15 03-03-15

    medium group : Gasses

    code : B.. code medium unit physical properties chemical composition preferred pipe material and treatment BA oxygen Nm

    3/h pressure at point of use = 5.5 +/- 0.2 bar (g) O2 > 99.5% vol.

    CxHy < 20 vpm

    N2 < 100 vpm

    H2O < 5 vpm

    Ar < 4000 vpm

    seamless St.37.0:

    external & internal: grit blasted, hot dip galvanized or phosphated and externally painted sealed with Loctite 570 or 577 exclusively All parts made oil- and greese free

    BB nitrogen Nm3

    /h pressure at point of use = 1 bar (g) N2 > 99.98% vol.

    CxHy < 0.1 vpm

    O2 < 5 vpm

    H2O < 5 vpm

    Ar < 200 vpm

    seamless St.37.0:

    external & internal: grit blasted, hot dip galvanized or

    phosphated and externally painted

    BC hydrogen Nm3

    /h pressure at point of use = 500 mbar (g) H2 > 99.98% vol.

    CxHy < 1 vpm

    N2 < 100 vpm

    O2 < 10 vpm

    H2O < 10 vpm

    seamless St.37.0:

    external & internal: grit blasted, hot dip galvanized or

    phosphated and externally painted

    BD IFG

    (nitrogen/hydrogen)

    Nm3

    /h pressure at point of use = 500 mbar (g) H2 = 5 % vol.

    N2 = 95 % vol.

    CxHy < 0.20 vpm

    O2 < 10 vpm

    H2O < 10 vpm

    Ar < 200 vpm

    seamless St.37.0:

    external & internal: grit blasted, hot dip galvanized or

    phosphated and externally painted

    BE carbondioxide gas m3

    n/h pressure at point of use = 700 mbar (g) CO2 = 98.5% vol.

    CxHy < 0 vpm

    O2 < 0 vpm

    H2O < 0 vpm

    N2 < 0 vpm

    seamless St.37.0

    Used for fire extinguishing in lacquering room and lacquer

    separation.

    BF nitrogen Nm3

    /h pressure at point of use = 6 bar (g) N2 > 99.98% vol.

    CxHy < 0.1 vpm

    O2 < 5 vpm

    H2O < 5 vpm

    Ar < 200 vpm

    seamless St.37.0:

    external & internal: grit blasted, hot dip galvanized or

    phosphated and externally painted

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    medium group : Water

    code : C.. code medium unit physical properties chemical composition preferred pipe material and treatment CA cold tap water

    (only for process,

    non-potable)

    m3

    /h line pressure = 3 1 bar(g)

    6 ! PH value ! 9

    hardness < 20 DH = 3.57 mmol

    (to be confirmed and specified by supplier)

    toxic substance ! 1000 mg/m3

    dissolved O2 < 10 mg/l

    Iron (Fe) < 10 microg/l

    seamless St.37.0:

    external: coated internal: grit blasted & galvanized threaded connections and vapourtight insulations

    CB

    see

    remark

    warm tap water

    (for general use

    only, for process

    see ED)

    m3

    /h (to be confirmed and specified by supplier) according to local regulations

    Remark warm tap water:

    Warm tap water only for genera

    l use (showers, etc.). For production purpose ED (warm water supply) is prefered.

    code medium unit physical properties chemical composition preferred pipe material and treatment

    CC

    see

    remark

    raw demin water m3

    /h pressure at point of use = 4 0.1 bar (g)

    15 ! temperature ! 20 C

    conductivity < 0.5 S/cm (@ 25 C)

    filtration = 10 m

    SiO2 < 0.2 ppm

    Cu < 0.01 ppm

    Pb < 0.01 ppm

    Fe < 0.01 ppm

    indoor: PP PN10 outdoor: PP PN10

    CD

    see

    remark

    cold demin water m3

    /h pressure at process equipment = 5 0.1 bar (g)

    19 ! temperature ! 21 C

    conductivity < 0.5 S/cm (@ 25 C)

    filtration = 5 m

    SiO2 < 0.2 ppm

    Cu < 0.01 ppm

    Pb < 0.01 ppm

    Fe < 0.01 ppm

    indoor: PP insulated PN10

    CE

    see

    remark

    warm demin water m3

    /h pressure at process equipment = 5 0.1 bar (g)

    29 ! temperature ! 31 C

    conductivity < 0.5 S/cm (@ 25 C)

    filtration = 5 m

    SiO2 < 0.2 ppm

    Cu < 0.01 ppm

    Pb < 0.01 ppm

    Fe < 0.01 ppm

    indoor: PP insulated PN10

    CF

    see

    remark

    exposure demin

    water

    m3

    /h pressure at process equipment = 2 0.2 bar (g)

    16 ! temperature ! 24 C

    conductivity < 10 S/cm (@ 25 C)

    filtration = 5 m

    SiO2 < 0.2 ppm

    Cu < 0.01 ppm

    Pb < 0.01 ppm

    Fe < 0.01 ppm

    indoor: PP PN10

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    Remark demin water installation:

    Main target for the demin water installation is to achieve a stabil pressure on each process consumer independent of flow fluctuations. This goal can only be

    guaranteed by a break tank system. The by-pass system is sensitive for flow fluctuations but cheaper compared to the break tank system. The decision wich

    system to use is an investment / risk issue and therefor to be decide

    raw deminpreparation

    consumerconsumer

    CA

    drain drain

    same as20C demin

    by pass system

    20C deminpreparation

    30C deminpreparation

    exp. deminpreparation

    exp. deminbreaktank exp. table

    FI

    exp. table

    FIP

    regulation valve

    consumer

    FI

    consumer

    FI

    drain drain

    raw deminpreparation

    CA

    break tank system

    30C deminpreparation

    30C deminbreaktank consumer

    exp. deminpreparation

    exp. deminbreaktank exp. tableexp. table

    consumer

    regulation valve

    regulation valve

    d by the project.

    break tank system:

    Demi water system based on break tanks

    to avoid pressure fluctuations, regulation valve for stabile pressure and closed loop systems. For more detailed information see equipment documentation.

    Remark: 20C demin water will be generated from 30C demin water by a local cooler

    To secure stable pressure:

    each demin water loop (except raw demin) equipped with:

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    break tank with return connection and level control Items to be defined in preliminary consultation with architect and customer:

    capacity of demin water installations specification (capacity) of break tanks and pumps

    By pass system:

    Demin water system based on closed loop systems with by pass and regulation valves on each process consumer. Stabile pressure is achieved by constant flow

    from main header to return. The system (and pressure at point of use) is sensitive for flow fluctuations. For more detailed information see equipement

    documentation.

    To secure stable pressure:

    20 & 30C demin water loop equipped with: Samson regulation valve between supply and return flow measuring instrument on supply to each consumer regulation valve in supply and by pass at each consumer

    exposure demin water loop equiped with: break tank with return connection and level control flow measuring instrument on supply to each consumer frequency controlled pump

    Items to be defined in preliminary consultation with architect and customer:

    capacity of demin water installations specification (capacity) of 20 & 30C regulation valves specification (capacity) of exposure break tanks and pumps

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    medium group : cooling medium

    code : D.. code medium unit physical properties chemical composition preferred pipe material and treatment DAS chilled water 6 C,

    supply

    m3

    /h 6 ! temperature ! 7 C seamless St.37.0:

    external: painted & vapourtight insulation internal: grit blasted

    DAR chilled water 12

    C, return

    m3

    /h temperature ! 12 C seamless St.37.0:

    external: painted & vapourtight insulation internal: grit blasted

    DBS

    see

    remark

    cooling water 16

    C, supply

    m3

    /h temperature = 16 2 C

    2 ! pressure ! 3 bar(g)

    seamless St.37.0:

    external: painted & vapourtight insulation internal: grit blasted

    DBR

    see

    remark

    cooling water 21

    C, return

    m3

    /h temperature ! 21 C seamless St.37.0:

    external: painted & vapourtight insulation internal: grit blasted

    Remark cooling water 16C, supply:

    If cooling water supply of the ILEs is very critical, separate systems (partly

    stand by) for ILEs and other consumers should be considered.

    chilled water 6Cinstallation

    consumer cooling water16C installation

    consumer

    regain installation

    CA

    Remark cooling water 21C, return:

    Cooling water can be re-used in a closed loop. In this case the 21C return will

    be regained for chilled water 6C use. The chemical composition of cooling

    water 21C return must therefor be specified by the regain apparatus supplier

    (for example: maximum pollution level).

    medium group : heating medium

    code : E.. code medium unit physical properties chemical composition preferred pipe material and treatment EA

    see

    remark

    steam

    (saturated)

    kg/h pressure at point of use = 4 0.5 bar (g) originate from: raw demin water [CC]

    or softened water

    seamless St.37.0:

    external: painted and thermal insulated internal: grit blasted

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    code medium unit physical properties chemical composition preferred pipe material and treatment EB condensate kg/h temperature < 100 C seamless St.37.0:

    external: painted and thermal insulated internal: grit blasted

    ECS

    see

    remark

    hot water, supply m3

    /h temperature = 140 C

    hardness < 5.6 DH = 1 mmol

    originate from:cold tap water [CA] seamless St.37.0:

    external: painted and thermal insulated internal: grit blasted

    ECR hot water, return m3

    /h temperature = 120 C seamless St.37.0:

    external: painted and thermal insulated internal: grit blasted

    EDS warm water,

    supply

    m3

    /h 70 ! temperature ! 90 C originate from:cold tap water [CA] seamless St.37.0:

    external: painted and thermal insulated internal: grit blasted

    EDR warm water, return m3

    /h 50 ! temperature ! 70 C seamless St.37.0:

    external: painted and thermal insulated internal: grit blasted

    Remark: hot water or steam supply:

    Separate boiler preferred for hot water to prepare PVA. Also steam is used. To be decided in project w

    hich heating medium will be chosen.

    medium group : Exhausts

    code : F.. code medium unit physical properties chemical composition preferred pipe material and treatment

    FA exhaust (fan

    included in

    production

    equipment)

    m3

    /h pressure at point of use and temperature to be

    specified by equipment supplier

    temperature depending

    galvanized sheet metal

    FB exhaust (fan not

    included in

    production

    equipment)

    m3

    /h pressure at point of use and temperature to be

    specified by equipment supplier

    temperature depending

    galvanized sheet metal

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    code medium unit physical properties chemical composition preferred pipe material and treatment FC exhaust to

    scrubber

    m3

    /h pressure at point of use to be specified by

    equipment supplier

    20 ! temperature ! 40 C

    plastic piping PP

    flanged piping butterfly valves at each process exhaust

    FD chimney m3

    /h natural draft

    temperature to be specificated by equipment

    supplier

    temperature depending

    galvanized sheet metal

    FF exhaust to

    incinerator

    m3

    /h pressure at point of use and temperature to be

    specified by equipment supplier

    temperature depending

    galvanized sheet metal

    medium group : Fuels

    code : H.. code medium unit physical properties chemical composition preferred pipe material and treatment HA natural gas Nm

    3/h pressure at point of use = 340 +/- 10 mbar (g)

    net caloric value: = 31.7 MJ/Nm3

    seamless St.37.0:

    external: gritt blasted and painted internal: grit blasted sealed with Loctite 570 or 577 exclusively

    HB LPG Nm3

    /h pressure at point of use = 340 +/- 10 mbar (g)

    net caloric value = 108.56 MJ/Nm3

    wobbe number = 81 8

    mixture of propane C3H8 and

    butane

    C5Hx content < 0.5 Vpm

    seamless St.37.0:

    external: gritt blasted and painted internal: grit blasted sealed with Loctite 570 or 577 exclusively

    HC water gas Nm3

    /h

    HD

    see

    remark

    heavy oil kg/h to be specified by plant engineering. to be specified by plant engineering. to be specified by plant engineering.

    HE

    see

    remark

    light oil kg/h to be specified by plant engineering. to be specified by plant engineering. to be specified by plant engineering.

    HF propane Nm3

    /h pressure at point of use = 100 mbar (g)

    net caloric value: = 93.575 MJ/Nm3

    seamless St.37.0:

    external: gritt blasted and painted internal: grit blasted

    Remark heavy oil & light oil:

    Alternative fuel, not preferred by Philips DCE.

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    medium group : Waste water drains

    code : J.. code medium unit source & chemical composition concentration Waste Water Treatment (WWT) line

    JA HF drain Chrome/(Phosphor) drain

    m3

    /h Screen processing: HF/HNO3 Screen processing: Phosphor, Cr Reclaim: HF

    max. 800 mg/l n.a. max. 500 mg/l

    Fluoride

    JB Lead (Pb) drain m3

    /h Reclaim: Pb, Zn, Ba, HNO3 max. 300 mg/l Lead

    JD Acid/Alkaline drain m3

    /h Several: acid, alkaline, demin water Thermal: softflash

    pH:1-13

    Neutralization - Fluoride

    JF Domestic drain m3

    /h Several

    JH Organic drain m3

    /h Screen processing: Toluene, Acetone, PVA, PVP max. 35 g/l Organic

    JJ Chrome/(Phosphor) drain

    m3

    /h Thermal: Cr, Pb, Zn, Isopropanol Screen processing: Phosphor, Cr

    max. 80 mg/l n.a.

    Fluoride

    medium group : Power supply

    code : T.. code medium unit frequency tolerance current tolerance

    TA 230 Volt (-10% / +6%) - 50 Hz, fixed connection kVA 0.1 Hz 5 %

    TB 230 Volt (-10% / +6%) - 60 Hz, fixed connection kVA

    TC 400/230 Volt (-10% / +6%) - 50 Hz, fixed connection kVA

    TD 400/230 Volt (-10% / +6%) - 60 Hz, fixed connection kVA

    TE 480/277 Volt - 50 Hz, fixed connection kVA

    TF 480/277 Volt - 60 Hz, fixed connection kVA

    TK 230 Volt (-10% / +6%) - 50 Hz, socket outlet kVA

    TL 230 Volt (-10% / +6%) - 60 Hz, socket outlet kVA

    TM 400/230 Volt (-10% / +6%) - 50 Hz, socket outlet kVA

    TN 400/230 Volt (-10% / +6%) - 60 Hz, socket outlet kVA

    TP 480/277 Volt - 50 Hz, socket outlet kVA

    TQ 480/277 Volt - 60 Hz, socket outlet kVA

    code : TX.. TXA 230 Volt (-10% / +6%) - 50 Hz, emergency power fixed connection kVA

    TXB 230 Volt (-10% / +6%) - 60 Hz, emergency power fixed connection kVA

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    00-04-15 03-03-15

    TXC 400/230 Volt (-10% / +6%) - 50 Hz, emergency power fixed connection kVA

    TXD 400/230 Volt (-10% / +6%) - 60 Hz, emergency power fixed connection kVA

    TXE 480/277 Volt - 50 Hz, emergency power fixed connection kVA

    TXF 480/277 Volt - 60 Hz, emergency power fixed connection kVA

    TXK 230 Volt (-10% / +6%) - 50 Hz, emergency power socket outlet kVA

    TXL 230 Volt (-10% / +6%) - 60 Hz, emergency power socket outlet kVA

    TXM 400/230 Volt (-10% / +6%) - 50 Hz, emergency power socket outlet kVA

    TXN 400/230 Volt (-10% / +6%) - 60 Hz, emergency power socket outlet kVA

    TXP 480/277 Volt - 50 Hz, emergency power socket outlet kVA

    TXQ 480/277 Volt - 60 Hz, emergency power socket outlet kVA

    Remark emergency power: The total electric power as needed by an equipment(group) should be listed coded: T..

    The part of this total electrical power that needs to be connected to the emergency power should be listed coded: TX..

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    00-04-15 02-01-15

    UTILITY &

    CH

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    Chemical standards (appendix to groupnumber sheet 411)

    Key & definitions:

    first piping

    second piping

    third piping

    first piping Main supply/drain piping (also called main piping). From utility building or

    chemicals preparation department to production area. second piping From first piping to production machine, chemicals preparation installation or

    utility installation, and is situated not further than 50 cm away from connection point on the equipment: 50 cm through the floor in case piping is situated under the machine floor 50 cm through ceiling incase piping is situated above machine floor the piping ends with a valve, and is ready for further connection.

    third piping From second piping to machine connection.

    Note:

    Second piping should be engineered and installed in such a way that the third piping

    length is minimized.

    The third piping should not obstruct the freedom of action for operators and maintenance

    people. To meet this requirement, the holes in floor or ceiling for the second piping should

    be drilled just before equipment installation but after the equipment is marked on the floor.

    Piping & appendage material used should meet the specifications as standardized in this

    chapter.

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    00-04-15 02-01-15

    coding: XXY-00

    serial number (only if the number of connections of the same medium on one machine > 1)

    S for supply and R for return (only if the medium is regenerated or separated)

    medium code

    example:

    DAS-03: The third chilled water 6 C supply connection on the machine.

    AC-05: The fifth filtered compressed air connection on the machine.

    medium group : Chemicals

    code : K.. & L.. code medium unit physical properties chemical composition preferred pipe material and treatment appendix KAS

    KAR

    green suspension m3

    /h pressure 2 to 4 bar

    temperature 20 C

    Phosphors.

    Deminwater.

    PVA 5.4 %.

    Plastic hose ( protected of light ).

    Multibar hose PVC material. app. 1

    KBS

    KBR

    red suspension m3

    /h pressure 2 to 4 bar

    temperature 20 C

    Phosphors.

    Deminwater.

    PVA 5.4 %.

    Plastic hose ( protected of light ).

    Multibar hose PVC material. app. 1

    KCS

    KCR

    blue suspension m3

    /h pressure 2 to 4 bar

    temperature 20 C

    Phosphors.

    Deminwater.

    PVA 5.4 %.

    Plastic hose ( protected of light ).

    Multibar hose PVC material. app. 1

    KE Butanol m3

    /h pressure 1 to 2 bar,

    temperature 20 to 30 C

    Butanol Stainless steel welding.

    Earthed. Insulated.

    app. 2

    KFS

    KFR

    Photoresist m3

    /h pressure 2 to 3 bar

    temperature 20 C

    Photoresist.

    Deminwater 20 C

    Plastic piping PP

    Butt welded, ball valves. app. 3

    KGS

    KGR

    Prewet Liquid m3

    /h pressure 2 to 3 bar

    temperature 30 C

    xxxxxx

    xxxxxx

    Plastic piping PP.

    Butt welded, ball valves. app. 4

    KHS

    KHR

    Polyetheneoxide

    1%

    m3

    /h pressure 1 to 2 bar

    temperature 20 C

    Polyox

    Deminwater 20 C

    Plastic piping PP. Butt welded, ball valves.

    app. 4

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    00-04-15 02-01-15

    KI Ludox m3

    /h pressure 1 to 2 bar

    temperature 30 C

    Ludox

    Deminwater

    Plastic piping PP.

    Butt welded, ball valves. Stainless steel piping 316L

    Butt welded, insulated.

    app. 5

    KJ Isopropanol m3

    /h pressure 1 bar

    temperature 20 C

    Isopropanol Stainless steel piping 316L

    Butt welded, insulated. Earthed

    app. 6

    KK Sorgen. m3

    /h pressure 1 to 2 bar

    temperature 30 C

    Sorgen

    PVA 5.4 % 40-80

    Deminwater

    Plastic piping PP.

    Butt welded, ball valves. Stainless steel piping 316L Butt welded, insulated.

    app. 5

    KLS

    KLR

    Soda m3

    /h pressure 2 to 3 bar

    temperature 30 C

    Soda

    Deminwater

    Plastic piping PP.

    Butt welded, ball valves. app. 8

    KM Prosol m3

    /h pressure 1 to 2 bar

    temperature 20 C

    Plastic piping PP.

    Butt welded, ball valves.

    KN Acetone m3

    /h pressure 2 bar, temperature 20 C Acetone Stainless steel piping 316L

    Butt welded. Earthed

    app. 9

    KO photoresist

    concentrate

    m3

    /h pressure 2 bar

    temperature 20 C

    Toluene

    Hardeners

    Deminwater

    Stainless steel piping 316L

    Butt welded, insulated. Earthed.

    app. 3

    KP Lacquer m3

    /h pressure 2 bar

    temperature 20 C

    Toluene

    Hardeners

    Stainless steel piping 316L

    Butt welded, insulated. Earthed.

    app. 10

    KQ Lissapol m3

    /h pressure 2 to 3 bar

    temperature 20 to 30 C

    Lissapol xxx %

    Deminwater

    Plastic piping PP.

    Butt welded, ball valves. app. 7

    KU Graphite m3

    /h xxxxxxxxxxxxxxxx xxxxxxxxxxxxxxxxxx xxxxxxxxxxxxxxxxxxxxxxxxxx

    KV Silicate m3

    /h xxxxxxxxxxxxxxxx xxxxxxxxxxxxxxxxxx xxxxxxxxxxxxxxxxxxxxxxxxxx

    KX Soft Flash m3

    /h xxxxxxxxxxxxxxxx xxxxxxxxxxxxxxxxxx xxxxxxxxxxxxxxxxxxxxxxxxxx

    KY Bismuth

    Suspension

    m3

    /h xxxxxxxxxxxxxxxx xxxxxxxxxxxxxxxxxx xxxxxxxxxxxxxxxxxxxxxxxxxx

    KZ Ethanol m3

    /h Pressure 1 to 2 bar

    temperature 20 to 30 C

    Ethanol Stainless steel piping 316 L

    Butt welded, ball valves. Earthed

    app. 2

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    00-04-15 02-01-15

    code medium unit physical properties chemical composition preferred pipe material and treatment appendix

    LI Ludox m3

    /h pressure 1 to 2 bar

    temperature 34 C

    Ludox

    Deminwater

    Stainless steel piping 316L

    Butt welded, insulated, earthed. app. 5

    LK Sorgen. m3

    /h pressure 1 to 2 bar

    temperature 30 to 34 C

    Sorgen

    PVA 5.4 % 40-80

    Deminwater

    Stainless steel piping 316L

    Butt welded, insulated, earthed. app.5

    medium group : Chemicals to Separation / Regeneration.

    code : M.. code medium unit physical properties chemical composition preferred pipe material and treatment appendix MA

    see

    remark

    Suspension to

    Decanter

    m3

    /h Pressure 0 to 3 bar

    Temperature 20 C

    Red, Blue and Green Waste

    Phosphors.

    Deminwater

    PVA 5,4 %

    Plastic piping HDPE

    Butt welded, ball valves. Piping slope to the receiving tanks 1

    app. 1

    MB Green Suspension m3

    /h Pressure 0 to 3 bar

    Temperature 20 C

    Green Phosphors.

    Deminwater

    PVA 5.4 %

    Plastic piping HDPE

    Butt welded, ball valves. Piping slope to the receiving tanks 1

    app. 1

    MC Red Suspension m3

    /h Pressure 0 to 3 bar

    Temperature 20 C

    Red Phosphors.

    Deminwater

    PVA 5.4 %

    Plastic piping HDPE

    Butt welded, ball valves. Piping slope to the receiving tanks 1

    app. 1

    MD Blue Suspension m3

    /h Pressure 0 to 3 bar

    Temperature 20 C

    Blue Phosphors.

    Deminwater

    PVA 5.4 %

    Plastic piping HDPE

    Butt welded, ball valves. Piping slope to the receiving tanks 1

    app. 1

    ME Rewashed

    Suspension

    m3

    /h Pressure 0 to 3 bar

    Temperature 20 C

    Blue Phosphors.

    Deminwater

    PVA 5.4 %

    Plastic piping HDPE

    Butt welded, ball valves. Piping slope to the receiving tanks 1

    app. 1

    MF Bismuth m3

    /h Pressure 0 to 3 bar

    Temperature 20 C

    Bismuth

    Deminwater

    Plastic piping PP

    Butt welded, ball valves. Piping slope to the receiving tanks 1

    app. 11

    MG Softflash m3

    /h Pressure 0 to 3 bar

    Temperature 20 C

    Softflash

    Deminwater

    Plastic piping PP

    Butt welded, ball valves. Piping slope to the receiving tanks 1

    app. 11

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    00-04-15 02-01-15

    MH Dag / anti crack m3

    /h Pressure 0 to 3 bar

    Temperature 20 C

    DAG

    Anti crack

    Deminwater

    Plastic piping PP

    Butt welded, ball valves. Piping slope to the receiving tanks 1

    app. 11

    MJ aceton m3

    /h Pressure 0 to 3 bar

    Temperature 20 C

    Aceton

    Deminwater

    AISI SS316L

    Butt welded, ball valves app. 9

    MK PVA regeneration m3

    /h Pressure 0 bar

    Temperature 25 C

    Deminwater

    PVA 8-88

    2.3 ! concentration ! 2.8 % (1)

    Plastic piping PP

    Butt welded, ball valves. Piping slope to the receiving tanks 1

    app. 13

    MLS

    MLR

    green pourback

    suspension

    m3

    /h Pressure 2 to 3 bar

    Temperature 20 C

    Green phosphor

    PVA 5.4%

    Deminwater

    Plastic hose ( protected of light ).

    Multibar hose PVC material. app. 1

    MMS

    MMR

    red pourback

    suspension

    m3

    /h Pressure 2 to 3 bar

    Temperature 20 C

    Red phosphor

    PVA 5.4%

    Deminwater

    Plastic hose ( protected of light ).

    Multibar hose PVC material. app. 1

    MNS

    MNR

    blue pourback

    suspension

    m3

    /h Pressure 2 to 3 bar

    Temperature 20 C

    Blue phosphor

    PVA 5.4%

    Deminwater

    Plastic hose ( protected of light ).

    Multibar hose PVC material. app. 1

    MP lacquer m3

    /h pressure 2 bar

    temperature 20 C

    Toluene

    Hardeners

    Deminwater

    Stainless steel piping 316L

    Butt welded, insulated. Earthed.

    app. 10

    remark suspension to decanter:

    Waste green or red suspension (to decanter) i

    s produced on six positions: flowcoat green, flowcoat red, corner cup washing, separation green, separation red, regeneration green and regeneration red. The

    waste suspension can be transported to the decanter with six seperate pipes or in one communal. In both cases all connections are coded MA.

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    00-04-15 02-01-15

    medium group : Chemicals PVA & Acids

    code : N.. code medium unit physical properties chemical composition preferred pipe material and treatment appendix NAS

    NAR

    PVA 5.4%

    m3

    /h pressure 2 to 3 bar

    temperature 20 C

    viscosity 100 mPa/sec

    Deminwater

    PVA 40-88

    5.0 ! concentration ! 5.8 % (1)

    Plastic piping PP.

    Butt welded, ball valves.

    app. 5

    app. 1

    app. 12

    NES

    NER

    PVA 0.2% m3

    /h pressure 2 to 3 bar

    temperature 30 C

    viscosity 1 mPa/sec

    Deminwater

    PVA 40-88

    0.16 ! concentration ! 0.24 (1)

    Plastic piping PP.

    Butt welded, ball valves.

    app.12

    NBS

    NBR

    PVA 0.1% m3

    /h pressure 2 to 3 bar

    temperature 30 C

    viscosity 1 mPa/sec

    Deminwater

    PVA 40-88

    0.08 ! concentration ! 0.12 (1)

    Plastic piping PP.

    Butt welded, ball valves.

    app.12

    NCS

    NCR

    PVA 0.05% m3

    /h pressure 2 to 3 bar

    temperature 30 C

    viscosity 1 mPa/sec

    Deminwater

    PVA 40-88

    0.04 ! concentration ! 0.06 % (1)

    Plastic piping PP.

    Butt welded, ball valves.

    app.12

    NDS

    NDR

    PVA 0.02% m3

    /h pressure 2 to 3 bar

    temperature 30 C

    viscosity 1 mPa/sec

    Deminwater

    PVA 40-88

    0.015 ! concentration ! 0.025 % (1)

    Plastic piping PP.

    Butt welded, ball valves.

    app. 12

    NI PVA 10%

    m3

    /h pressure 2 to 3 bar

    temperature 20C

    viscosity 90 mPa/sec

    Deminwater

    PVA 8-88

    9 ! concentration ! 11 % (1)

    Plastic piping PP.

    Butt welded, ball valves.

    app. 13

    app. 14

    NJS

    NJR

    PVA 2.5% m3

    /h pressure 2 to 3 bar

    temperature 30C

    viscosity 7.5 mPa/sec

    Deminwater

    PVA 8-88

    2.3 ! concentration ! 2.8 % (1)

    Plastic piping PP.

    Butt welded, ball valves.

    app. 13

    app. 14

    NK

    PVA 2.5% from

    regeneration

    m3

    /h pressure 2 to 3 bar

    temperature 30C

    viscosity 7.5 mPa/sec

    Deminwater

    PVA 8-88

    2.3 ! concentration ! 2.8 % (1)

    Plastic piping PP.

    Butt welded, ball valves.

    app. 13

    NO Hydrofluoric Acid m3

    /h pressure 2 bar

    viscosity 1 mPa/sec

    Hydrofluoric Acid

    Deminwater

    5 ! concentration ! 8 % (1)

    Plastic piping Double wall HDPE / PP

    Butt-welded. Double wall.

    app. 15

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    00-04-15 02-01-15

    code medium unit physical properties chemical composition preferred pipe material and treatment appendix NP Hydrofluoric Acid,

    storage

    m3

    /h pressure 2 bar

    5 ! temperature ! 20 C

    viscosity 1 mPa/sec

    Hydrofluoric Acid

    30 ! concentration ! 80 % (1)

    Plastic piping Double wall HDPE / PP

    Butt-welded. Double wall. In tank preferred to be placed outside factory

    and sealed from UV light.

    app. 15

    NQ Nitric Acid m3

    /h pressure 2 bar

    viscosity 1 mPa/sec

    Nitric Acid

    Deminwater

    5 ! concentration ! 8 % (1)

    Plastic piping Double wall HDPE / PP

    Butt-welded. Double wall.

    app. 15

    NR Nitric Acid, storage

    technical grade

    m3

    /h pressure 2 bar

    5 ! temperature ! 20 C

    viscosity 1 mPa/sec

    Nitric Acid

    Deminwater

    40 ! concentration ! 60 %

    technical grade (1)

    Plastic piping Double wall HDPE / PP

    Butt-welded. Double wall.

    app. 15

    NS Nitric Acid, storage

    chemical pure

    m3

    /h pressure 2 bar

    5 ! temperature ! 20 C

    viscosity 1 mPa/sec

    Nitric Acid

    Deminwater

    40 ! concentration ! 60 %

    chemical pure (1)

    Plastic piping Double wall HDPE / PP

    Butt-welded. Double wall.

    app. 15

    NT Hydrofluoric and

    Nitric Acid

    m3

    /h pressure 2 bar

    viscosity 1 mPa/sec

    Hydrofluoric Acid

    Nitric Acid

    Deminwater

    5 ! concentration HF ! 12 %

    10 ! concentration HNO3 ! 20 (1)

    Plastic piping Double wall HDPE / PVDF

    Butt-welded. Double wall.

    app. 15

    NU Boric acid m3

    /h pressure 2 bar

    viscosity 1 mPa/sec

    Boric Acid

    Deminwater

    Plastic piping Double wall HDPE / PP

    Butt-welded. Double wall.

    app. 16

    (1) remark: to be defined in project

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    Tab 11 -

    00-04-15 02-01-15

    Appendices

    dosingblue

    pourbackblue

    preparationphosphor

    blue

    KCS

    KCR

    MNR

    MNS

    preparationphosphor

    green

    KAR

    MLR

    MLS

    KAS dosinggreen

    pourbackgreen

    MMS

    MMR

    KBR

    KBS

    preparationphosphor

    red pourbackred

    dosingred

    seperationphosphor

    green

    seperationphosphor

    red

    regenerationphosphor

    red

    regenerationphosphor

    green

    decanterphosphor

    MB

    MC

    MA

    MA

    MA

    MA

    waste

    flowcoat green

    flowcoat red

    flowcoat blue

    separation

    ME

    process

    rewash

    chem. prep.

    MA

    MA

    seperationphosphor

    blue

    regenerationphosphor

    blue

    MD

    MA

    MA

    regeneration

    CCW

    CCW

    CCW

    MA

    PREFERRED TO BE DONE AT

    SUPPLIER

    CCW = Corner Cup Washing

    app. 1: Phosphor preparation, regeneration and separation.

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    00-04-15 02-01-15

    photoresist supply

    KFR

    KFS

    KO

    photoresistcart

    matrix #1

    processchem. prep.

    photoresistpreparation

    KO

    matrix #2photoresist

    cart

    KFS

    KFRphotoresist supply

    remark: for every single matrix line a extra photoresist supply unit and supply system is needed.

    butanoltank

    (outside building)

    KE

    processouter screen coating

    chem. prep.

    ethanoltank

    (outside building) KZ

    AS - AG preparation

    app. 2: Anti Static - Anti Gloss preparation.

    remark: direct routing from photoresist preparation to matrix by photoresists cart PREFERRED

    app. 3: photo resist preparation.

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    Page - 23 kk

    STA

    ND

    AR

    DIS

    ATIO

    N

    ME

    CH

    AN

    ICA

    L CO

    NS

    TRU

    CTIO

    NS

    Tab 11 -

    00-04-15 02-01-15

    prewet preparation KGR

    polyoxeparation

    KHS

    KHR

    KGSprewet belt

    processchem. prep.

    pr

    app. 4: prewet liquid preparation.

    sorgen preparation

    KK

    process

    prewet belt

    chem. prep.

    ludox preparation

    KI tank(high level)

    tank(high level)

    staticmixer

    LK

    LI

    distribution

    NAS

    app. 5: new wetting preparation.

    isopropanol preparation

    KJ

    processchem. prep.gun washing

    remark: separated distribution for each line PREFERRED

    app. 6: isopropanol preparation.

  • PR

    OD

    UU

    TILITY & C

    HEM

    ICA

    L STA

    ND

    AR

    DS

    LG.P

    HILIP

    S D

    ISP

    LAY

    S

    CTIO

    N TE

    CH

    NO

    LOG

    Y &

    EN

    GIN

    EE

    RIN

    G

    Page - 24 kk

    STA

    ND

    AR

    DIS

    ATIO

    N

    ME

    CH

    AN

    ICA

    L CO

    NS

    TRU

    CTIO

    NS

    Tab 11 -

    99-07-16 00-04-15

    soda preparation

    KLR

    KLS

    cone wash (zone 3)

    processchem. prep.

    tank tanktank

    cone wash (zone 2) cone wash (zone 1)

    lisapol preparation

    KQ

    processchem. prep.gun mounting

    app. 7: lisapol preparation.

    app. 8: soda preparation.

    lacquersupply

    KP

    lacquerseperation

    MP

    seperationprocesschem. prep.lacquering

    acetonsupply

    KN

    acetonseperation

    MJ

    seperationprocesschem. prep.prewet belt

    app. 9: aceton preparation.

    app. 10: lacquer preparation.

  • PR

    OD

    UU

    TILITY & C

    HEM

    ICA

    L STA

    ND

    AR

    DS

    LG.P

    HILIP

    S D

    ISP

    LAY

    S

    CTIO

    N TE

    CH

    NO

    LOG

    Y &

    EN

    GIN

    EE

    RIN

    G

    Page - 25 kk

    STA

    ND

    AR

    DIS

    ATIO

    N

    ME

    CH

    AN

    ICA

    L CO

    NS

    TRU

    CTIO

    NS

    Tab 11 -

    99-07-16 00-04-15

    b ism uth preparation

    b ism uth / so ftflash / D AG seperation

    (filte r press)

    M F

    seperationprocesschem . prep.bism uth spraying

    softflash preparation

    softflash app ly ing

    M G

    aquadag app ly ing

    M H

    D AG preparation

    app. 11: bismuth, softflash & aquadag preparation.

  • UTILITY &

    CH

    EMIC

    AL

    STAN

    DA

    RD

    S LG

    .PH

    ILIPS

    DIS

    PLA

    YS

    PR

    OD

    UC

    TION

    TEC

    HN

    OLO

    GY

    &E

    NG

    INE

    ER

    ING

    Page - 26 kk

    STA

    ND

    AR

    DIS

    ATIO

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    L CO

    NS

    TRU

    C

    Tab

    0002-01-15

    TION

    S

    11 -

    -04-15

    PVA 0.02 %

    PVA 0.2 %

    PVA 0.1 %

    NBS

    NBR

    NER

    NES

    NDR

    NDS

    PVA 5.4 %

    preparationphotoresist

    NAS

    NAR

    NAS

    tank(high level)

    tank(high level)

    tank(high level)

    wash & precoat

    flowcoat developing

    lacquering prewet

    NAS

    NAS

    NAS

    wash & precoat

    chemical preparation process

    tank(high level)

    NAS

    NCS

    NCRPVA 0.05 %

    NAS preparationsorgen

    preparationphosphor

    red

    NAS

    NASpreparationphosphor

    green

    preparationphosphor

    blue

    NAS

    app. 12: PVA 5.4%, 0.2%, 0.1%, 0.05% and 0.02% preparation.

  • PR

    OD

    UU

    TILITY & C

    HEM

    ICA

    L STA

    ND

    AR

    DS

    LG.P

    HILIP

    S D

    ISP

    LAY

    S

    CTIO

    N TE

    CH

    NO

    LOG

    Y &

    EN

    GIN

    EE

    RIN

    G

    Page - 27 kk

    STA

    ND

    AR

    DIS

    ATIO

    N

    ME

    CH

    AN

    ICA

    L CO

    NS

    TRU

    CTIO

    NS

    Tab 11 -

    00-04-15 02-01-15

    chemical preparation process

    PVA 2.5 %

    PVA 2.5 %regeneration

    NI MK

    NK

    regeneration

    chemical preparation process

    NJR

    NJS

    PVA 10 % NI

    matrix

    PVA 2.5 %

    NJS

    PVA 10 % NI

    NJR

    matrixNJS

    JH

    NJR

    app. 13: PVA 10% & 2.5% preparation and 2.5% regeneration

    app. 14: PVA 10% & 2.5% preparation (no regeneration)

  • PR

    OD

    UU

    TILITY & C

    HEM

    ICA

    L STA

    ND

    AR

    DS

    LG.P

    HILIP

    S D

    ISP

    LAY

    S

    CTIO

    N TE

    CH

    NO

    LOG

    Y &

    EN

    GIN

    EE

    RIN

    G

    Page - 28 kk

    STA

    ND

    AR

    DIS

    ATIO

    N

    ME

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    AN

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    L CO

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    NS

    Tab 11 -

    00-04-15 02-01-15

    HFstorage

    (outside building)

    chem. prep.

    technical HNO3storage

    (outside building)

    chemical HNO3storage

    (outside building)

    acids supplyunit

    NR

    NP

    NS

    NP

    NR

    NS

    HFpreparation

    HF/HNO3preparation

    HNO3preparation

    NP

    processmatrix

    HFcart

    HF/HNO3tank

    wash & precoat

    rewash

    matrix

    HF/HNO3tank

    HNO3cart

    NT

    NO

    NQ

    NT

    DRAIN JA

    DRAIN JA

    DRAIN JA

    DRAIN JD app. 15: hydrofloric-, nitric-, and hydrofloric & nitric acid preparation

    process

    lacquering supply tank NU

    JD

    Boric acid

    NU

    app. 16: boric acid preparation

    Utility standardsmedium group : Aircode : A..medium group : Gassescode : B..BFmedium group : Watercode : C..medium group : cooling mediumcode : D..medium group : heating mediumcode : E..medium group : Exhaustscode : F..medium group : Fuelscode : H..medium group : Waste water drainscode : J..medium group : Power supplycode : T..code : TX..Chemical standardsmedium group : Chemicalscode : K.. & L..medium group : Chemicals to Separation / Regeneration.code : M..medium group : Chemicals PVA & Acidscode : N..