1 vacuum and plasma science and technology 1 ming-show wong sept. 2015
TRANSCRIPT
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• A space contains nothing?• A space devoid absolutely of
mater• Any region of space devoid of
atoms and molecules– vacuum was impossible
Vacuum
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• Vacuum: a space relatively empty of matter– vacuum was impossible ( Aristotle)
• an ancient view until end of 16th century– In 1640, Gasparo Berti produced vacuum (Galileo)– In 1644, Torricelli invented barometer– In 1648, Pascal’s brother-in-law Perier measured the atmosphere
pressure using a barometer at different attitude– In 1650, Otto Von Guericke invented air (vacuum) pump
• To the birth of modern physics, chemistry and engineering – In the 18th century: Huge engines, industrial Revolution– In the late 19th century: gaseous discharge, photoelectric effect,
discovery of the electron, x-ray, sputtering, chemistry, cryogenics and cryopumping, metology, incandescent lighting
– In the 20th century: Microelectronics Revolution
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• Kinetic theory of gases– molecular velocity– pressure– gas impingement on surfaces
• Gas transport and pumping– gas flow regimes– conductance– pumping speed
• Vacuum pump and systems– rotary mechanical, roots– diffusion, turbomolecular, cryopump, sputter-ion– systems– system pumping considerations
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Otto van Guerike’s experiment:16 horses were unable to separate the evaculated Magdeburg semisphere. (1657)
American Vacuum Society(AVS) Founded in 1953
https://www.youtube.com/watch?v=luIqVQT4QWs
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Office: Eng. Building D108 Laboratory: Eng. Building D107 Phone: 03-8634206 E-mail: [email protected] Office Hours: Tuesday 3-5 PM or by individual appointment
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Course Goals
• Learn the basics about the vacuum science and technology and its applications in scientific research and practical industrial production.
• Introduce important developments and new advances in vacuum science and technology.
• It presents fundamental ideas in physics and chemistry that would be useful to both scientists and engineers dealing with problems associated with the use, production and measurement of high vacuums.
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Teaching methodology 教學方法 :
Classroom presentation and discussion
Laboratory tour and experiment
Every student must preview and study class note and textbook before the class.
Everyone should give a short talk (with handout)
for 15-20 minutes. The topic should be related to vacuum and plasma, components and systems, their design, operation and application..
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Presentation materials at department website: http://www.ndhu.edu.tw/~imeng
Textbooks: Handbook of Vacuum Science and TechnologyEdited by:Dorothy M. Hoffman, Bawa Singh, John H. Thomas
III and John H. Thomas III ISBN: 978-0-12-352065-4http://www.sciencedirect.com/science/book/9780123520654
The User's Guide to Vacuum Technology, 2nd edition), (John F. O'Hanion), Wiley-Interscience, 1989.
蘇青森著 真空技術精華 (Vacuum Technology) (2009) 五南圖書出版股份有限公司
真空技術與應用 國科會 儀器科技研究中心 (2001)
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Journal:.Journal of Vacuum Science & Technology - Vacuum, Surfaces and Films..Vacuum - Surface Engineering, Surface Instrumentation & Vacuum Technology.
Website:.American Vacuum Society (AVS), www.vacuum.org ....Society for Vacuum Coaters (SVC), www.svc.org. 中華民國真空科技學會 , www.tvs.org.tw中華民國鍍膜科技學會, www.tact.org.tw
Vacuum Technology Page: http://nyquist.ee.ualberta.ca/~schmaus/vacf/index.html…...
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Home Work #1
Read Chapter 1.1 - Vacuum Nomenclature and Definitions Pages 3-7 of the web textbook;Visit and study the four websites listed in the syllabus;And write a short assay (about 1000 words) on “What is Vacuum Science and Technology”.
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Novel Photocatalyst preparation
VVeenntt
DDCC PPoowweerr SSuuppppllyy
⊙ ⊙ ⊙ ⊙ ⊙
M F C
M F C
Ar OO22
Rotation
TT..CC.. GGaauuggee 11
IIoonn GGaauuggee
MV
RRVV
TT..PP
.
TT..CC.. GGaauuggee 22
MM..PP..
FFVV
Target
AAuuttoo MMaattcchh BBooxx
RRFF GGeenneerraattoorr
PPuullssee DDCC PPoowweerr
Substrate Holder
SputteringEvaporation
lenslaser
target
substrateheater
pump
gas
Window
Burner
Precursor
MFC MFC
Pump
2N
MFC
2O 22HCArGap distance
Cold Trap
MFC
MFC
Window
BurnerBurner
PrecursorPrecursor
MFC MFC
PumpPump
2N2N
MFC
2O2O 22HCArArGap distance
Cold Trap
MFC
MFC
PLD Flat-Flame CVD
Sol-Gel;Hydrothermal
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|Small Brass Magdeburg Hemispheres, mid 19th century, maker unknown. For classroom demonstration.