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Traditional metrology technologies have limitations when inspecting micro features

• Optical Metrology• (a) Microscope

• (b) Scanning Electron Microscope (SEM)

• (c) White light interferometry

• Contact/Tactile Metrology• (d) Coordinated Measurement Machine (CMM)

• (e) Atomic Force Microscope (AFM)

• Destructive Testing.

(a)

(b)

(c)

(e)

(d)

Manufacturer of Leading Micro Machining Technology Copyright © 2017 SmalTec International

•How many here are involved with Metrology ‐ Micro parts

•How many different types of equipment do you have available to you

•How small of a hole/feature and what aspect ratio can you measure

•How small do you need to go

•Are you ready to “Lean Forward” with me today?


EFM Micro Probe System is an Ultra High Precision metrology method for measuring micro features in conductive parts. This process is non‐contact and non‐destructive.

• 1 AA Battery could run a continuous sensing energy for 70 hours.

• The Control System• SmalTec Ultra low energy sensing circuit

• Nanometers of energy gap

• Pico‐Joule energy levels

• Real‐Time Control• Closed Loop Feedback• Nanometer Level Precision• Programmable Motion and Data Acquisition

• In‐situ data collection

Contact event-Spark-

Non-contact event-EFM-

Conventional CMM feedback system

Laser Laser

µAmps

+ -0

+ - µAmps

SmalTec Feedback Control System


By keeping the part in a single machining space; reference points, and/or part centers are maintained from process to process. Examining and verifying a part without removing it from its machining space allows the user to return to the part for additional machining processes to complete the part.

70 micron Probe tip 45 micron by 1.0 mm stem

Shank 55um wide Shank 3mm long Disk 45 um tall Disk 80 um radius Material W


Machining/ Metrology Check List• On Platform Tooling/Re‐Tooling

• Machining Tools• Metrology Tools• Complex Probes < 100 micron Diameter

• Motion and Response• Highly Precise Motion• Rapid Response to Surroundings

•Measuring Process• EFM Micro Probe System TM

• Software data acquisition.

Topographies

Micro holes come in many sizes, shapes and depths.

• Small diameters• 5um to 250 um (0.0002” to .010”)

• High Aspect ratios• 10:1• 25:1• 35:1

• Complex geometries• Straight hole• Defined angle• Parabolic shape.

Entrance111 um diameter(0.0044”)

Length of hole750 um (0.03”)

Exit 102 um diameter(0.004”)

Probe (a) 31 um (0.0012”) diameter(b) 34 um (0.0013”) disk diameter

(a) (b)


Nozzle orifices are a dominant feature type in the Micro machining industry. There are a variety of applications that demand exacting shape control and diameter precision.


Exit 36 um diameter(0.0014”)

Probe 18 um diameter(0.0007”)Manufacturer of Leading Micro Machining Technology Copyright © 2017 SmalTec International

• Applications exist in many industries today• Industrial

• Medical

• Aerospace

• Automotive

• Clothing

• And even art.

There are several applications that require this type of hole. Today the method to measure this hole is to destroy the part and apply one of the traditional metrology methods

• Fuel injectors

• Cooling holes for jet engines

• Medical devices with features on tubes.

Pick up PointBlind through hole – an oxymoron or reality?


Reverse taper70 um diameter(0.0027”)


Wide variety of applications and features can be measured using EFM technology.

On CNC MachineMicro threadsComplex Inside AnglesUnder HangsReverse taperSurface Inside Micro HolesHigh Aspect Micro HolesSteep AnglesMicro HolesMicro FeaturesSteep CornersSmall FeaturesSmall Parts


This is a critical step for any metrology equipment or device. It is critical that the device can achieve accuracy, precision, and stability

Manufacturer of Leading Micro Machining Technology

Probe shape

0.0250 mm

0.00098 inches

0.0340 mm

0.00134 inches

#1Wall Thickness

0.0726 mm

0.00286 inches

ID ‐ Y axis0.1605 mm

0.00632 inches

#4 #2Wall Thickness Wall Thickness

mm 0.0718 0.0732 mm

inches 0.00283 0.00288 inches

ID ‐ X axis0.1557 mm

0.00613 inches

#3Wall Thickness

0.0681 mm

0.00268 inches

Copyright © 2017 SmalTec International

• Application description• Wall thickness measurement• Diameter calculation

• Inner Diameter• Outer Diameter

• Ten parts total.

Part Name: Test part #1 USL = 0.0032 Operators = 1 Date:Device: SmalTec EFM Machine LSL = 0.0028 Trials = 3 Name: DJW/JM

Characteristic: Wall Thickness #1 Tolerance = 0.0004 Parts = 10

OperatorSample Trial 1 Trial 2 Trial 3 Range Trial 1 Trial 2 Trial 3 Range Trial 1 Trial 2 Trial 3 Range

1 0.00287 0.00286 0.00286 0.00001 0.00312 0.00312 0.00311 0.00001 0.00285 0.00285 0.00283 0.000022 0.00312 0.00312 0.00311 0.00001 0.00292 0.00291 0.00289 0.00003 0.00285 0.00287 0.00285 0.000023 0.00292 0.00291 0.00289 0.00003 0.00287 0.00285 0.00285 0.00002 0.00280 0.00280 0.00278 0.000024 0.00287 0.00285 0.00285 0.00002 0.00282 0.00279 0.00280 0.00003 0.00266 0.00266 0.00267 0.000015 0.00282 0.00279 0.00280 0.00003 0.00285 0.00285 0.00283 0.00002 0.00275 0.00276 0.00277 0.000026 0.00285 0.00285 0.00283 0.00002 0.00285 0.00287 0.00285 0.00002 0.00287 0.00286 0.00286 0.000017 0.00285 0.00287 0.00285 0.00002 0.00280 0.00280 0.00278 0.00002 0.00312 0.00312 0.00311 0.000018* 0.00280 0.00280 0.00278 0.00002 0.00266 0.00266 0.00267 0.00001 0.00292 0.00291 0.00289 0.000039 0.00266 0.00266 0.00267 0.00001 0.00275 0.00276 0.00277 0.00002 0.00287 0.00285 0.00285 0.0000210 0.00275 0.00276 0.00277 0.00002 0.00287 0.00286 0.00286 0.00001 0.00282 0.00279 0.00280 0.00003

Average = 0.00285 0.00002 Average = 0.00285 0.00002 Average = 0.00285 0.00002

EV (Equipment Variation) = 0.00 AV (Appraiser Variation) = 0.00 R&R = 0.00SigmaEV = 0.00 SigmaAV = 0.00 SigmaR&R = 0.00 Rdbar = 0.000019

Repeatability = 14.49 Reproducibility = 2.65 Gage R & R = 14.73 UCLRange = 0.000049Your results are adequate. Your results are excellent. Your results are adequate. Xbar

difference = 0.000000

Check to see if any of the individual EV = Rdbar * K1 AV = (Xbar

diff * K2)2 - (EV2 / (parts*trials)) R&R = EV2 + AV2 range values are above this control limit

SigmaEV = EV / 5.15 SigmaAV = AV / 5.15 SigmaR&R = R&R / 5.15 UCLRange = Rdbar*D4

Repeatability = 100 * (EV / Tolerance) Reproducibility = 100 * (AV / Tolerance) Gage R&R = 100 * (R&R / Tolerance)

Results Key0 to 10 Excellent EV and AV are based on 5.15sigma Constants

10 to 20 Adequate 5.15sigma = (99% of the area under the normal distribution curve) Trials D4 K1 K2

20 to 30 Marginal 2 3.27 4.56 3.65> 30 Unacceptable Check = 10 Operators*Samples must be greater than 20 3 2.58 3.05 2.7

Gauge Repeatability & Reproducibility (GR&R) -- Variable Data

A B C

UCL Range Check

0.000000

0.000010

0.000020

0.000030

0.000040

0.000050

0.000060

1 2 3 4 5 6 7 8 9 10

Ran

ge

Part

Range by Part Number

0.002400

0.002500

0.002600

0.002700

0.002800

0.002900

0.003000

0.003100

0.003200

1 2 3 4 5 6 7 8 9 10

Ave

rage

Part

Ave rage by Part

Real data collected using the EFM Micro Probe SystemTM

• Test parts data

• Repeatability• 14.49

• Reproducibility • 2.65

• Gage R&R• 14.73


EFM Micro Probe System is an Ultra High Precision metrology method for collecting data and measuring micro features in conductive parts.

Manufacturer of Leading Micro Machining Technology

Future of micro metrology ?

Currently in use

Copyright © 2017 SmalTec International

• Capable of measuring micro features• Non‐ Contact• Non‐Destructive

• In‐situ metrology• Process refinement• Reduces wasted material and time

• So go ahead and add a few pages to your

Design For Manufacturing book.

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