WP6: Equipment Forum (Contact: lothar.pfitzner@iisb.fraunhofer.de)

General Information

WP1: Survey, Specification, Architecture(contact : martin.schellenberger@iisb.fraunhofer.de)

Objectives

Current Activities1.1: Conduct surveys regarding current status at partners and their requirements1.2: Develop HW/SW requirements for virtual metrology integration 1.3: Develop HW/SW requirements for predictive maintenance related decision systems1.4: Develop HW/SW requirements for adaptive control planning1.5: Develop HW/SW requirements for advanced sensor networks1.6: Develop HW/SW requirements for a fab-wide master framework1.7: Develop models for ROI calculations

The overall objective of WP 1 is to support the other work packages by providing generic specifications and general architectures in order to avoid the implementation of singular solutions or solutions that are not re-usable.

The Equipment Forum represents the interface between the IMPROVE project and other European companies, especially equipment suppliers, which are not IMPROVE partners. The Equipment Forum should serve as a communication and networking platform to exchange data and information.

ObjectivesIt is the overall objective of WP6 to create contacts and collaborations between the users and the equipment suppliers. The close collaboration and the exchange of results gained in the IMPROVE project should lead to enhanced and novel equipment that better suits the needs and requirements of the IC manufactures and IDMs.

Survey1. Workshops at Manufacturer site 2. Discussion of current status and future

requirements3. Analysis of answers

Guidelines and HW/SW requirements

• VM, PM, ACP• Sensor networks• Fab-wide master framework

Setup a database for eqipment specifications and equipment quality requirements

Step 5:

Definition of Equipment Forum & rules in cooperation with IMPROVE partners

Step 1:

Workshops

Step 2: Startup workshop with IMPROVE partners

Step 3: Contacting companies not participating in IMPROVE

ST CrollesST ItalyST RoussetIFXAMSIntelNumonyx

Contacting

Information

Startup Workshop

Multiple workshops and discussions with IMPROVE partners, equipment suppliers and additional IDMs

Step 4:

Additional IDMs

Equipment suppliers

Other companies (Not IMPROVE)

Organization/management

European Nanoelectronics Forum, November 17, 18 2009 Noordwijk, The Nederlands