the scanning electron microscope

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The chapter gives insight into the scanning electron microscope technique. From "Electron Microscopy and Analysis" textbook by Peter J. Goodhew, John Humphreys and Richard Beanland. Courtesy of Taylor and Francis Books UK.

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Page 2: The scanning electron microscope

Contents (Note: Page numbers are as in the whole book so that the index remains valid)

Acronyms …………………………………………………….……………………… iii Preface ………………………………………………………………………………. iv

5 The scanning electron microscope 5.1 How it works ……………………………………………… 122 5.2 Obtaining a signal in the SEM ……………….………….… 124 5.3 The optics of the SEM ………………………….…………. 131 5.4 The performance of the SEM ………………….………….. 133 5.5 The ultimate resolution of the SEM .…………….…..……. 135 5.6 Topographic images ...…………………………..………… 141 5.7 Compositional images ……………...…………..……….… 146 5.8 Crystallographic information from the SEM …………...…. 149 5.9 The use of other signals in the SEM ……………….....…... 153 5.10 Image acquisition, processing and storage ……….……….. 159 5.11 The preparation of specimens for examination in the SEM .. 162 5.12 Low voltage microscopy……………………………………164 5.13 Environmental scanning electron microscopy (ESEM) …… 166 5.14 Questions …………………………………………………... 167

Further reading ……………………………………………………………..…………... 236 Answers …………………………………………………………………………………... 238 Index …………………………………………………………………………..…………... 243

Page 3: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 4: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 5: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 6: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 7: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 8: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 9: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 10: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 11: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 12: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 13: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 14: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 15: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 16: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 17: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 18: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 19: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 20: The scanning electron microscope
Page 21: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 22: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 23: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 24: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 25: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 26: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 27: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 28: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 29: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 30: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 31: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 32: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 33: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 34: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 35: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 36: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 37: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 38: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 39: The scanning electron microscope
Page 40: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 41: The scanning electron microscope
Page 42: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 43: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 44: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 45: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 46: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 47: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 48: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 49: The scanning electron microscope
Page 50: The scanning electron microscope
Page 51: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 52: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 53: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 54: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 55: The scanning electron microscope
Page 56: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 57: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 58: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 59: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 60: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 61: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 62: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 63: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 64: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 65: The scanning electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________