div class=ts-pagebutton class=gotoPage data-page=1Page 1button div class=ts-imageimg data-url=substrate-damage-in-film-thickness-measurement-by-beam-interferometryhtmlpage=1 data-page=1 class=ts-thumb lazyload alt=Page 1: Substrate Damage in Film Thickness Measurement by Beam Interferometry loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAIAAAACCAQAAADYv8WvAAAAD0lEQVR42mP8X8AwAgiABKBAv+vAXklAAAAAElFTkSuQmCC data-src=https:reader035vdocumentssitereader035viewer2022080320575068131a28ab0f07ae7ae3html5thumbnails1jpg width=140 height=200 divp© 1959 Nature Publishing Grouppdivdiv class=ts-pagebutton class=gotoPage data-page=2Page 2button div class=ts-imageimg data-url=substrate-damage-in-film-thickness-measurement-by-beam-interferometryhtmlpage=2 data-page=2 class=ts-thumb lazyload alt=Page 2: Substrate Damage in Film Thickness Measurement by Beam Interferometry loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAIAAAACCAQAAADYv8WvAAAAD0lEQVR42mP8X8AwAgiABKBAv+vAXklAAAAAElFTkSuQmCC data-src=https:reader035vdocumentssitereader035viewer2022080320575068131a28ab0f07ae7ae3html5thumbnails2jpg width=140 height=200 divp© 1959 Nature Publishing Grouppdiv