static light scattering particle size measurements v1

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Horiba Instruments (S) Pte Ltd

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Page 1: Static Light Scattering Particle Size Measurements v1

Horiba Instruments (S) Pte Ltd

Page 2: Static Light Scattering Particle Size Measurements v1

Content

Introduction

Important instrumental considerations

Applications

Measurement process

Static light scattering

Page 3: Static Light Scattering Particle Size Measurements v1

Introduction

Static light scattering (SLS) or more commonly known as laser scattering/diffraction is used for the size determination of micron to submicron particles. The laser diffraction technique for the determination of particle size distribution is based on the phenomenon that particles scatter light in all directions with an intensity pattern that is dependent on particle size (and shape).

Page 4: Static Light Scattering Particle Size Measurements v1

Introduction

• Analytical range generally from 10 nm to a few mm

• Powders, suspensions, emulsions, creams and pastes are possible

• Dry and wet measurement systems are available

• Possible to have de-agglomeration mechanism in dry and wet systems

• The whole measurement process can be completed in < 1 minute

• Uses Mie theory (needs refractive index) or Fraunhofer approximation (no need refractive index)

• Equivalent spherical diameter is obtained

• Volume based distribution

• ISO 13320:2009 Particle size analysis – Laser diffraction methods

Page 5: Static Light Scattering Particle Size Measurements v1

Static light scattering

Requirements

Assumptions

Characteristics

Theory

Page 6: Static Light Scattering Particle Size Measurements v1

Characteristics

• Particles suspended in a fluid • RI difference between particle and fluid

• Large particle • Small/low angle scattering

• Large signal/intensity

• Small particle • Big/high angle scattering

• Small signal/intensity

• Scattering pattern • Symmetrical on the axis of incident light

• Light wavelength dependent

• Particle size dependent

• Particle shape dependent

Page 7: Static Light Scattering Particle Size Measurements v1

Characteristics

The figure below shows the effect of size on the scattering pattern detected at different angles. Note that the scattering intensity at the front of a particle (close to 0 degree) is always the highest and bigger particle scatters more intensely as compared to a smaller one.

Page 8: Static Light Scattering Particle Size Measurements v1

Characteristics

Page 9: Static Light Scattering Particle Size Measurements v1

Characteristics

Why you need two light sources of different wavelengths?

Page 10: Static Light Scattering Particle Size Measurements v1

Theory

• Mie • Rigorous solution valid for all sizes of spherical particles

• Requires optical propety (RI) to be known for both sample and dispersant

• Fraunhofer • Approximation for large particles (~> 50 micron) or

opaque particles

• Optical property (RI) is not necessary

• Limited to forward (low angle) scattering

Page 11: Static Light Scattering Particle Size Measurements v1

Theory

“Big particle”

Page 12: Static Light Scattering Particle Size Measurements v1

Theory

“Small particle”

Page 13: Static Light Scattering Particle Size Measurements v1

Assumptions

All particles are spherical and optically homogeneous.

If particles are not spherical, then the scattering pattern obtained is used to calculate the equivalent spherical diameter for the particles.

Page 14: Static Light Scattering Particle Size Measurements v1

Requirements

1. Sample dispersion in a fluid (liquid or air) is necessary.

2. Sample cannot dissolve or react with the fluid it is dispersed in.

3. There must be a difference in refractive index of the sample and the fluid.

4. Particle concentration cannot be too high (multiple scattering) or low (low signal).

5. Refractive index of the sample and fluid should be known, especially for small particles.

Page 15: Static Light Scattering Particle Size Measurements v1

Requirements

Information obtained from ISO 13320:2009 Reflected

Refracted

Absorbed and

Reradiated

Diffracted

Real Index (degree of refraction) Imaginary Index (absorption of light within particle)

Page 16: Static Light Scattering Particle Size Measurements v1

Requirements

Information obtained from ISO 13320:2009

Page 17: Static Light Scattering Particle Size Measurements v1

Requirements

Information obtained from ISO 13320:2009

Page 18: Static Light Scattering Particle Size Measurements v1

Measurement process

Static/laser light scattering measurement process

• Sample is dispersed in a fluid (liquid or air) in a cell

• Monochromatic light source(s) illuminate(s) the cell

• The light scattered by the particles, at various angles, is measured by multi-element detectors

• The scattering pattern is used to calculate the particle size distribution

Page 19: Static Light Scattering Particle Size Measurements v1

Measurement process

0

14

5

10

0.010 50000.100 1.000 10.00 100.0 1000

0

100

20

40

60

80

q(%

)

Diameter(µm)

Un

dersiz

e(%

)

Page 20: Static Light Scattering Particle Size Measurements v1

Important instrumental considerations

1. Light source Number of light source(s) (2 is optimal)

Wavelength(s) (Long & short)

State of technology (solid state vs gas laser)

2. Detection system Number of detectors (> is better but not necessary best)

Detector angular coverage (> is better)

3. Sampling mechanism Circulation system (centrifugal vs peristaltic)

Dispersion system (ultrasonic probe vs bath)

4. Performance specifications Accuracy (compared to traceable standard)

Repeatability (< is better)

Page 21: Static Light Scattering Particle Size Measurements v1

Important instrumental considerations

5. Maintenance requirements Cell removable mechanism

Pumping tubing replacement (?)

Page 22: Static Light Scattering Particle Size Measurements v1

Important instrumental considerations

Images are obtained from the internet and are copyright of respective owners

Page 23: Static Light Scattering Particle Size Measurements v1

Important instrumental considerations

Scattering patterns

for 0.05 and 0.07

micron particles with

650 nm laser and 405

nm LED

0 o

90 o

180 o

270 o

Page 24: Static Light Scattering Particle Size Measurements v1

Important instrumental considerations

Images obtained from the internet.

Page 25: Static Light Scattering Particle Size Measurements v1

Important instrumental considerations

Images obtained from the Cole Parmer website

Page 26: Static Light Scattering Particle Size Measurements v1

Important instrumental considerations

Page 27: Static Light Scattering Particle Size Measurements v1

Important instrumental considerations

Page 28: Static Light Scattering Particle Size Measurements v1

Applications

CMP slurry

Pigment ink

Page 29: Static Light Scattering Particle Size Measurements v1

CMP slurry

What is a CMP process?

CMP or chemical mechanical planarization is a process used by semiconductor manufacturers to make wafers flat and smooth using specially formulated abrasive suspensions

http://www.horiba.com/semiconductor/products/processes/semicond

uctor-process/cmp-process/

Page 30: Static Light Scattering Particle Size Measurements v1

CMP slurry

http://www.horiba.com/scientific/products/particle-characterization/applications/cmp/ Images from https://www.crystec.com/alpovere.htm

Page 31: Static Light Scattering Particle Size Measurements v1

CMP slurry

What is a CMP slurry?

CMP slurry is a special chemical formulation that has abrasive particles with a specific (narrow) size range and pH value. The abrasive particles can be silica, alumina, ceria, titania, diamond, etc.

A silica CMP slurry normally has a high pH value that has a certain weight % of silica abrasives. The alkaline solution helps to soften/etch the silicon wafer surface while the abrasive particles remove material from the surface through mechanical action.

Page 32: Static Light Scattering Particle Size Measurements v1

CMP slurry

An example of a silica CMP slurry

http://www.fujimico.com/catalog/Chemical%20Mechanical%20Planarization/33

Page 33: Static Light Scattering Particle Size Measurements v1

CMP slurry

A certain CMP slurry particle size specification

Page 34: Static Light Scattering Particle Size Measurements v1

CMP slurry

Particle size measurements needed by:

CMP slurry producers to control their product quality

End users to confirm specification before use and periodic check to ensure consistent performance

Page 35: Static Light Scattering Particle Size Measurements v1

CMP slurry

0

40

10

20

30

0.010 10.000.100 1.000

0

100

20

40

60

80

q (

%)

Diameter (µm)

Un

ders

ize (

%)

Silica CMP slurry

Page 36: Static Light Scattering Particle Size Measurements v1

CMP slurry

0

45

10

20

30

40

0.010 10.000.100 1.000

0

100

20

40

60

80

q (

%)

Diameter (µm)

Un

ders

ize (

%)

Diamond CMP slurry

Page 37: Static Light Scattering Particle Size Measurements v1

Pigment ink

What are pigments?

Industrially, a pigment is any finely divided insoluble black, white or colored solid material, a major function of which is to improve the appearance of or give color to the medium in which it is to be used.

Image and information obtained from BASF website: https://www.dispersions-

pigments.basf.com/portal/basf/ien/dt.jsp?setCursor=1_561069

Page 38: Static Light Scattering Particle Size Measurements v1

Pigment ink

Table obtained from BASF website: https://www.dispersions-

pigments.basf.com/portal/basf/ien/dt.jsp?setCursor=1_561069

Types of pigments

Page 39: Static Light Scattering Particle Size Measurements v1

Pigment ink

What are pigment inks?

Pigment inks are complex liquid dispersions of pigments, binding agent and additives. A binding agent is normally a plastic resin. Additives commonly consist of anti-foam, waxes, extenders, pH-controllers and surfactants. Pigment inks can be solvent based or aqueous based.

Page 40: Static Light Scattering Particle Size Measurements v1

Pigment ink

Why do you need to know particle size and distribution for pigment inks?

Page 41: Static Light Scattering Particle Size Measurements v1

Pigment ink

Particle size and distribution for pigment inks

Page 42: Static Light Scattering Particle Size Measurements v1

Pigment ink

C I pigment blue 15

0

16

5

10

0.010 1.0000.100

0

100

20

40

60

80

q (

%)

Diameter (µm)

Un

ders

ize (

%)

Page 43: Static Light Scattering Particle Size Measurements v1

Pigment ink

C I pigment blue 15:3

0

23

5

10

15

20

0.010 1.0000.100

0

100

20

40

60

80

q (

%)

Diameter (µm)

Un

ders

ize (

%)

Page 44: Static Light Scattering Particle Size Measurements v1

Danke

Gracias

Большое спасибо

Grazie اُشْكر Σας ευχαριστούμε

감사합니다 Obrigado

Tack

谢谢 ขอบคุณครับ

ありがとうございました

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