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Speeding Ahead with a Bright Light on Texas Instruments Digital Micro-mirror Device (DMD)

Rick Oden Ph.D.TI Fellow – Texas Instruments Inc. : [email protected]

ABSTRACT Through the 22 years since TI began commercial manufacturing of DMD (we are at an anniversary as of last week), many successes & changes have been encountered by the technology & business during this journey. The successes are a testimony not only to the manufacturing, design/modeling & materials & packaging capabilities –but, also to the passionate pursuit of excellence by its employees. In the course of this discussion, I will not only present to you the various directions these ‘dinky little mirrors’ are applied currently, but also provide some color to paths we are scoping for future opportunities of this massively-arrayed, surface-MEMS technology.

Outline• A little about Texas Instruments –

– History of Corporation– Technology segments & expanse of business– A little on the MEMS opportunity

• A lot more about DLP® Products and Micromirrors –– A history of the technology…– We do ‘it’ a little differently…– How does the technology work?– Where are we applying it for business advantage ($)

Texas Instruments – Corporate History

A history of great invention through the years

Oil exploration Defense systems Integrated circuit

1930s 1940s 1950s

1970s-’80s

Processors Applied research in Kilby Labs

2010 to present

Analog and Embedded Processing

2000-2010

Technologies that improve how we live our lives

Diverse and global workforce

MEMS – a Ubiquitous Technology

MEMS – a Ubiquitous Technology & Impact

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5

10

15

20

2015 2016 2017 2018 2019 2020 2021

$11.9

$20.0MEMS Market: Forecasted Revenue ($B)

Sources: [1][3][4] Yolé Développement. [2] Grand View Research



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0.5

1

1.5

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2016 2017 2018 2019 2020 2021 2022

AutomotiveConsumerIndustrialHealthcareOther

MEMS Market: Sector Revenue ($B) in U.S.



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5

10

15

20

25 Others

Environmental MEMS

Oscillators

RF MEMS

Microfluidics

PIR & thermopiles

Microbolometers

Optical MEMS

Inertial combos

Digital compass

Gyroscopes

Accelerometers

Microphones

Pressure sensors

Inkjet heads

MEMS Market Breakdown



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MEMS Market: Top manufacturers by revenue ($M)

*Includes MEMS sensors

DLP Products Division of Texas Instruments– Massively arrayed MEMS Micromirrors

Possible unknowns on MEMS-based DLP Technology

Each DLP chip can contain up to 8 million individually controlled micromirrors

80+ percent of digital movie theatres use MEMS-

based DLP Cinema® display technology

worldwide

Dr. Larry Hornbeck invented the digital micromirror device

(DMD) in 1987

He has since received an Academy Award of Merit

D L P t e c h n o l o g y i s f l e x i b l e e n o u g h t o b e

u s e d a c r o s s a u t o m o t i v e ,

i n d u s t r i a l a n d c o n s u m e r

a p p l i c a t i o n s

*Dr. Larry Hornbeck received the 2014 Scientific and Technical Academy Award® of Merit (Oscar© statuette)

TI DLP® Products: a history of innovation

1987Dr. Larry Hornbeck invents digital micromirror device (DMD), known as the DLP® chip

1998DLP Products receives first Emmy® Award for Outstanding Achievement In Engineering Development

2004DLP Products becomes highest volumeMEMS supplier worldwide

2009Consumer devices begin to ship worldwide featuring DLP Pico™ technology based projectors

2011Half of all movie theatres converted from film to digital enabled by DLP Cinema technology

2012New DLP development kit launches allowing developers to use DLP technology in new markets

2013Increasing adoption of DLP Pico solutions

For more than two decades, award-winning DLP Product innovations have solved some of the world’s most complex display and light control applications.

2015

1996First commercial DLP system ships; enables first ultra portable projector

Dr. Hornbeck receives the 2014 Scientific and Technical Academy Award® of Merit (Oscar® statuette) for the invention of the digital micromirror device (DMD) technology as used in DLP Cinema® projection.

Photo credit: Michael Yada / ©A.M.P.A.S.

First automotive‐qualified DLP chipset for head‐up display (HUD) applications

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Pixel – Package – Optics Interplay

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System Optics or Display - LED

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System Optics or Display - LED

DMD CMOS Drive Scheme

Vm VmVa

Va

24ArcViaArcVia

M3 Address Electrode

M3 Address Electrode

Mirror Control Bus

Mirror Control Bus

Arc ViaArc Via

DMD Superstructure – Metal 3 - Address

Spring TipSpring TipHingeVia

HingeVia

Raised Address Electrode

Raised Address Electrode

DMD Superstructure – Metal 4 - Hinge

Mirror ViaMirror Via

DMD Superstructure – Metal 5 - Mirror

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Pixel Node Timeline

Packaging

Smart Homes and Appliances

Infrared (IR) Sensing

Wearable Technology

Automotive Head-up Displays

What’s next…

MEMS Are All Around Us

Wearable Technology

Wearables bring HD mobile displays to the masses

Smarter• Enable information overlays for visual aid or entertainment in just about any

environment• Consumers can easily experience augmented reality (AR) in their full field of

vision compared to LCD technology

Smaller• Immersive experience with pocket-size colorful, crisp and bright displays• A cinema experience, made personal: Ranges from watching movies or TV on-

the-go, to experiencing new worlds wherever you are

Smart Homes and Appliances

MEMS deliver intelligent displays to smart homes and IoT devices

Smarter• Replace traditional touchpads with projection displays in homes, businesses and retailers to

provide an “on-demand” and reconfigurable interactive control• Projection-based lighting fixtures can share content, create a mood or deliver dynamic

pictures and information• Voice-activated personal assistants could show search results, traffic reports or visuals for

news stories

Smaller• Make convenient, portable displays a reality without the need for obtrusive installation• Integrating intelligent displays into appliances, such as cooktops or refrigerators, is now

possible with smaller chips and ultra-short throw optical solutions

Automotive Head-up Displays

MEMS drive augmented reality in the next generation of vehicles

Smarter• Wide field-of-view and augmented reality (AR) displays the information drivers need

to keep their eyes on the road• Versatile and advanced HD display solutions ensure a less distracted driving

experience • MEMS-based HUD enables clear image visibility regardless of weather, temperature

or polarization

Smaller• After-market HUD provides small, hands-free guidance, communication and

entertainment controls for vehicles without integrated solutions• Pico projection enables small size, low power, economical cost, and proven

reliability

Infrared (IR) Sensing

Using light as a sensor in consumer applications

Smarter• Consumers are empowered to know more about the ingredients or quality of foods• Doctors, patients and inspectors can test authenticity of pharmaceutical and medicinal

products

Smaller• Battery-operated portable analyzers transfer analysis out of testing labs and into the

hands of consumers• Cloud-based computing can manage the reference databases and material analysis• Wireless connectivity can send analysis results to smartphones or tablets

What’s next…

The future is bright for MEMS-based displays in consumer electronics

• MEMS-based electronics will continue to become ever-present in consumers’ lives

• There will continue to be a growing advantage for colorful, sharp and bright displays in homes, vehicles and wearable devices

• MEMS advancements will help innovators unlock endless opportunities for smaller, smarter, and more personal experiences in automotive and consumer electronics

• MEMS suppliers, like TI, are eager to keep pushing innovation in response to the great products and solutions OEMs continue to design

Hot off the Press…

DIY lithography System…

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