Spectroscopic ellipsometers

Spectroscopic ellipsometer family SENresearchLarge variety of options for R & D and routine applications from DUV to NIR

• Widest spectral range 190 – 3,500 nm• Step Scan Analyzer principle for highest

measurement accuracy• Proprietary ellipsometer software

SpectraRay/3

Cost-effective ellipsometer SENproFocused on speed and accuracy for the measurementofthinfilms(1nmto15μm)

• Spectral range 370 –1,050 nm• Goniometer with preset angles of incidence• Step Scan Analyzer principle for highest

measurement accuracy• Spectroscopic ellipsometer

software SpectraRay LT

Infrared spectroscopic ellipsometer

SENDIRAVibrational spectroscopic analysis of thin layers (dielectriclayers,TCOs,semiconductors,organiclayers)

• IR spectral range 1,700 – 25,000 nm• FullyapplicableFTIRspectrometer• Proprietary ellipsometer software

SpectraRay/3

Spectroscopic ellipsometer software SpectraRay/3User-friendly software with recipe orien-ted mode for operators and advanced mode for inter active measurement and modeling

• Supports variable angle, multi-experiment, and combinedphotometric measurements

• Ellipsometric,reflection,andtransmission data

• Huge library of materials‘ data,large number of dispersion models

• Sample effects: depolarization,non-uniformity,scattering(Mueller-matrix),backsidereflection

www.sentech.de

Automated ellipsometer for R & D SENDUROFast, highly precise, and repeatable measurements in production, process monitoring, and R & D

• Spectral range 290 – 850 nm• Patented automatic alignment sensors• Step Scan Analyzer principle for highest

measurement accuracy• Small footprint• Routine applications• Proprietary ellipsometer

software SpectraRay/3

Laser ellipsometers

Multipleanglelaserellipsometer SE 400advCharacterizationofsinglefilmsandsubstratesinmicroelectronic, photovoltaic, data storage, display technology, life science, metal processing, etc.

• Applicationspecificanglesofincidence• HeNe laser of 632.8 nm wavelength• Measurementprecisionof0.1Å• Highmeasurementspeedallowsforfilmgrowth

monitoring and endpoint detection

CombinedEllipsometryReflectometry SE 500advMaximumflexibilityfortheanalysisofthickdielectric, organic, photoresist, silicon, or polysiliconfilms

• Fast and unambiguous determination of thethicknessoftransparentfilmsupto25µm

• Multipleanglemanualgoniometerforthecharacterizationofsinglefilmsandlayerstacks

Automated measurement tools

Ellipsometer for routine applications SENDURO 200 / 300Veryfastmeasurementoffilmsbetweenafewångstromandmorethan50µmthickness

• Cassette to cassette loadfor 200 mm and 300 mm wafers

• Spectral range 290 – 850 nm• Recipe based measurements• Proprietary ellipsometer software

SpectraRay/3

Summary

Reflectometers

FilmThicknessProbe FTPadvFast and easy measurementoffilmthicknessinproduction, process monitoring, and R & D

• Thicknessrange30nm–25µm• Recipe oriented software• Adaptation to a microscope

for measurements in small areas

• Small spot size• UV to NIR spectral range• Mostaccuratemeasurementbyheight

and tilt adjustment of samples• Optionalhighresolutionmapping• Comprehensive, recipe-oriented

reflectometersoftwareFTPadv EXPERT

Spectroscopicreflectometer

RM 1000 / 2000Accurate measurements ofreflectance,filmthickness,andopticalconstantsoffilmsbetween5nmand50µm

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