satellite atmospheric robotic arms robotic components · robotic components hatm-5.0 atmospheric...
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Robotic ComponentsSatellite Atmospheric Robotic Arms
12495 34th Street North n Suite B n St. Petersburg, FL 33716 U.S.A. n Phone: 813.749.7519 n Fax: 813.475.5940 n [email protected]
Robotic ComponentsHAtm-5.0 Atmospheric Robotic Arm
FEATURESn High reliability of > 10 million MCBFn 3-axis servo motion controln Pay load up to 0.5kgn Standard and custom size arm segmentsn Standard and custom end effectorsforSEMIstandard wafers and custom substratesn Compact design including integrated controllern RS-232/Ethernetcontrol interfacen The best replacement for the Zbot robot
OPTIONS n Endeffectortypes:Vacuum chuck,Edgegrippern Wafer mapping sensorn Single/Dualendeffectorbladesn Custom vertical strokesn Track mountingn Custom payloads
Hine Automation’s Atmospheric Robotic Arms are the next generation atmospheric SCARA Robots. Designed to transfer semiconductor substrates to and from cassettes for substrates 200mm or smaller, the HAtm-5.0 is capable of handling all aspects of the material control at various levels of host interfacing. Thanks to its onboard controller, the integrationoftheHAtm-5.0withOEMsystemsrequiresonlypowerandacommunicationsinterface.TheHAtm-5.0offersidenticalcommandsetsastheZbotIIrobotandcanbeusedasitsreplacement.
HAtm-5.0
12495 34th Street North n Suite B n St. Petersburg, FL 33716 U.S.A. n Phone: 813.749.7519 n Fax: 813.475.5940 n [email protected]
Robotic ComponentsHAtm-4.0 Atmospheric Robotic Arm
FEATURESn High reliability of > 10 million MCBFn 3-axis servo motion controln Pay load up to 0.5kgn Standard and custom size arm segmentsn Standard and custom end effectorsforSEMIstandard wafers and custom substratesn Compact design including integrated controllern RS-232/Ethernetcontrol interfacen The best replacement for the Orbitran robot
OPTIONS n Endeffectortypes:Vacuum chuck,Edgegrippern Wafer mapping sensorn Single/Dualendeffectorbladesn Custom vertical strokesn Track mountingn Custom payloads
Hine Automation’s Atmospheric Robotic Arms are the next generation atmospheric SCARA Robots. Designed to transfer semiconductor substrates to and from cassettes for substrates 200mm or smaller, the HAtm-4.0 is capable of handling all aspects of the material control at various levels of host interfacing. Thanks to its onboard controller, the integration of theHAtm-4.0withOEM systems requires only power and acommunications interface.TheHAtm-4.0offers identicalcommandsetsastheOrbitranRobotandcanbeused as its replacement.
HAtm-4.0
12495 34th Street North n Suite B n St. Petersburg, FL 33716 U.S.A. n Phone: 813.749.7519 n Fax: 813.475.5940 n [email protected]
Robotic ComponentsSatellite Atmospheric Robotic Arms
12495 34th Street North n Suite B n St. Petersburg, FL 33716 U.S.A. n Phone: 813.749.7519 n Fax: 813.475.5940 n [email protected]
HAtm-4.0 HAtm-5.0
Z‐Travel 10mm Up from the Home Position 184mm Up from the Home PositionRotational Travel 365° CW from the Home PositionReach 329mm from Home Position
(with 114mm standard arms)465mm from center
(with 140mm standard arms)Z‐Repeatability ±0.05mm (measured at the wrist) ±0.03mm (measured at the wrist)Reach Repeatability ±0.1mm (measured at the wrist) ±0.03mm (measured at the wrist)Rotational Repeatability ±0.01° (measured at the wrist)Z‐Speed ±450mm/sReach Speed ±1000mm/sRotational Speed ±360°/sMaximum Payload 0.5 Kg (standard configuration)Power 24VDC @ 3.0 Amps 24VDC @ 7.0 AmpsWeight 5 Kg 14 KgMCBF > 1.5 x 107 CyclesStations Available 60Position Teaching Teach Utility IncludedControl Interface Digital, RS‐232 and Ethernet Digital, RS‐232 & Ethernet
12495 34th Street North n Suite B n St. Petersburg, FL 33716 U.S.A. n Phone: 813.749.7519 n Fax: 813.475.5940 n [email protected]
About Hine AutomationHine Automation, LLC is a designer and manufacturer of automation systems and robotic components. We serve Original Equipment Manufacturers(OEMs) in thesemiconductor, solar,flatpaneldisplayand related industriesacross the globe. Our robotic components satisfy a wide range of needs; from flexibleresearchanddevelopmentenvironmentstostringentmanufacturingenvironments.Combiningourunsurpassedqualityandreliabilitywithmodularand versatile designs to meet today’s automation challenges, our products provide functional and economical solutions.
Our MissionOur goal is to design andmanufacture themost cost effective automationsolutions and deliver unparalleled customer service and support.
Our Strengthsn Demonstrated Reliability n Lightning Speed Responsen CostEffectiveSolutions andTurn-aroundTimesn Custom Solutions n Knowledge,Experience- driven Designs
Our Productsn Cluster Systems: Constellation Systems
n Automated Load Locks: Star Systems
n Robotic Components: VacuumRoboticArms VacuumElevators VacuumAligners Atmospheric Robotic Arms AtmosphericElevators Atmospheric Aligners