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UNCLASSIFIED
UNCLASSIFIED The Nation’s Premier Laboratory for Land ForcesUNCLASSIFIED The Nation’s Premier Laboratory for Land Forces
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Piezoelectric Microelectromechanical Systems (PiezoMEMS) Technology
Dr. Ronald G. PolcawichU.S. Army Research [email protected]
Contributors – J.S. Pulskamp, R. Rudy, R. Knight, G. Smith, D. Potrepka, S. Bedair, R. Benoit, B. Power, J. Martin, S. Isaacson
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UNCLASSIFIED The Nation’s Premier Laboratory for Land Forces
Mission Objectives for PiezoMEMS
PNT Components for SWAP-C Constrained
Platforms
Software Defined Warfighter
Spectrum Sensing & ID
S SeRF
Covert Radar
GPS (M-code)
Health Monitoring
Distributed Navigation
Moto-z
Mesh Network Radio
Ad-hoc 2-way comms
Secure 4G (& 5G+)
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UNCLASSIFIED The Nation’s Premier Laboratory for Land Forces
Piezoelectric MEMS
Material Property RF Switch Logic Resonator / Filters
Tunable Passives Actuators Piezo-Enhanced QMG
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UNCLASSIFIED The Nation’s Premier Laboratory for Land Forces
Lead Zirconate Titanate (PZT)Pb(Zr0.52Ti0.48)O3
Piezoelectric EffectDirect effect the generation of
charge under the application of an applied stress Converse effect the generation of
strain under an applied electric field
PZT
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Implementation of PiezoMEMS
Piezoelectrically Induced Dimensional Changes at the Unit Cell
Practical Implementation with Thin Films
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UNCLASSIFIED The Nation’s Premier Laboratory for Land Forces
PZT Fabrication Capabilities - 2016
ARL
Penn State Univ.
TI
Philips
CEA-LETI
EPFL
Sintef
NXP
FujitsuMatsushita
ToshibaSeiko-EpsonRohm Semi
HynixInostek
TIT
Captive Fab
University R&D
STMicro
Fuji
Sandia National Lab
CypressSilicon
Sensing
Bosch
Foundry ServicesFlexible Protyping
Silex
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UNCLASSIFIED The Nation’s Premier Laboratory for Land Forces
PZT Processing Patents
US 8,866,367 - G. Fox, R. Polcawich, D. Potrepka, “Thermally Oxidized Seed Layers for the Production of {001} Textured Electrodes and PZT Capacitors,” Oct 21, 2014.
G. Fox, R. Polcawich, D. Potrepka, L. Sanchez,“Stylo-Epitaxial Piezoelectric and Ferroelectric Devices and Method of Manufacturing,” Filed Mar 30, 2012
US 8,966,993 - J.S. Pulskamp and R. G. Polcawich, “Three Dimensional Piezoelectric MEMS,” Mar 3, 2015
US 9,096,426 – G. Smith, B. Hanrahan, C.M. Waits, R. G. Polcawich, L. Sanchez, S. Bedair, “Electronic Device Structure And Method Of Making Electronic Devices And Integrated Circuits Using Grayscale Technology And Multilayer Thin-Film Composites,” Aug 4, 2015.
D. Potrepka, J. Mulcahy, R. G. Polcawich, “In-situ Process for Lead Zirconate Titanate (PZT) Thin Films and Platinum (Pt) Electrodes,” ARL 15-42, filed on Mar 4, 2016.
ARL PiezoMEMS Patent Portfolio
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PZT Device Patents – Switch relatedUS 7,518,474 - “In-Line PZT RF MEMS Switch” – J. S. Pulskamp, R. G. Polcawich, D. JudyUS 7,532,093 - “RF MEMS Series Switch Using Piezoelectric Actuation and Method of Fabrication” continuation in part filed –J. S. Pulskamp, R. G. Polcawich, D. JudyUS 8,461,948 – “Electrostatic Ohmic Shunt RF MEMS Switch and Method of Manufacture” – J. Pulskamp, D. Judy, R.G. Polcawich –Jun 11, 2013.US 8,541,926 - “Nano/ Micro Electro-Mechanical Relay,” J. Pulskamp, R. Proie, D. Judy, R. G. Polcawich, Sep 24, 2013.
PLA PendingUS 9,385,306 – “Ferroelectric Mechanical Memory and Method of Manufacturing,” G. Fox, J. S. Pulskamp, R. G. Polcawich, Jul 5, 2016.G. Fox, J. S. Pulskamp, R. G. Polcawich, “Ferroelectric Mechanical Memory and Method of Manufacturing Continuation in Part,” ARL-13-32, Jul 1, 2016G. Fox, J. S. Pulskamp, R. G. Polcawich, “Ferroelectric Mechanical Memory Based on Remanant Piezoelectric Displacement and Method of Manufacturing,” ARL-14-07, filed Apr 18, 2016
ARL PiezoMEMS Patent Portfolio
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UNCLASSIFIED The Nation’s Premier Laboratory for Land Forces
PZT Device Patents
US 7,876,026 - Large Force and Displacement Piezoelectric MEMS Lateral Actuation” – J.S. Pulskamp and R. G. Polcawich – Jan 25, 2011
US 7,944,121 - “Negative Vertical Deflection Piezoelectric MEMS Actuators and Method of Fabrication,” May 17, 2011.
US 8,872,595 - “MEMS Resonator Binary-Phase Modulator”, R. Kaul, J. Pulskamp, R.G. Polcawich, S. Bedair, Oct 28, 2014.
US 9,252,704 – “Voltage tunable oscillator using bilayer graphene and a lead zirconate titanate capacitor,” O. M. Nayfeh, S. J. Kilpatrick, J. Wilson, M. Dubey, R. G. Polcawich, Feb. 2, 2016.
ARL PiezoMEMS Patent Portfolio
UNCLASSIFIED
UNCLASSIFIED The Nation’s Premier Laboratory for Land Forces
Piezoelectric MEMS
Material Property RF Switch Logic Resonator / Filters
Tunable Passives Actuators Piezo-Enhanced QMG