operation and maintenance of a diffusion-pumped vacuum system

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Operation and maintenance of a diffusionpumped vacuum system Dorothy M. Hoffman Citation: Journal of Vacuum Science & Technology 16, 71 (1979); doi: 10.1116/1.569870 View online: http://dx.doi.org/10.1116/1.569870 View Table of Contents: http://scitation.aip.org/content/avs/journal/jvst/16/1?ver=pdfcov Published by the AVS: Science & Technology of Materials, Interfaces, and Processing Articles you may be interested in Safety interlock and remote computer monitoring for a diffusion-pumped vacuum system J. Vac. Sci. Technol. A 15, 201 (1997); 10.1116/1.580467 CMOS diffusionpump monitor Rev. Sci. Instrum. 47, 1218 (1976); 10.1063/1.1134806 Optical Properties of Some Silicone DiffusionPump Oils in the Vacuum Ultraviolet—Using an OpenDish Technique J. Appl. Phys. 42, 4258 (1971); 10.1063/1.1659762 Optical Properties of Some Silicone DiffusionPump Oils in the Vacuum Ultraviolet—Using a ClosedCell Technique J. Appl. Phys. 42, 4252 (1971); 10.1063/1.1659761 Combustion of Diffusion-Pump Fluids in Oxygen Atmospheres J. Vac. Sci. Technol. 2, 228 (1965); 10.1116/1.1492432 Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 129.174.21.5 On: Sat, 20 Dec 2014 21:27:41

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Page 1: Operation and maintenance of a diffusion-pumped vacuum system

Operation and maintenance of a diffusionpumped vacuum systemDorothy M. Hoffman Citation: Journal of Vacuum Science & Technology 16, 71 (1979); doi: 10.1116/1.569870 View online: http://dx.doi.org/10.1116/1.569870 View Table of Contents: http://scitation.aip.org/content/avs/journal/jvst/16/1?ver=pdfcov Published by the AVS: Science & Technology of Materials, Interfaces, and Processing Articles you may be interested in Safety interlock and remote computer monitoring for a diffusion-pumped vacuum system J. Vac. Sci. Technol. A 15, 201 (1997); 10.1116/1.580467 CMOS diffusionpump monitor Rev. Sci. Instrum. 47, 1218 (1976); 10.1063/1.1134806 Optical Properties of Some Silicone DiffusionPump Oils in the Vacuum Ultraviolet—Using an OpenDishTechnique J. Appl. Phys. 42, 4258 (1971); 10.1063/1.1659762 Optical Properties of Some Silicone DiffusionPump Oils in the Vacuum Ultraviolet—Using a ClosedCellTechnique J. Appl. Phys. 42, 4252 (1971); 10.1063/1.1659761 Combustion of Diffusion-Pump Fluids in Oxygen Atmospheres J. Vac. Sci. Technol. 2, 228 (1965); 10.1116/1.1492432

Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 129.174.21.5 On: Sat, 20 Dec 2014 21:27:41

Page 2: Operation and maintenance of a diffusion-pumped vacuum system

Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 129.174.21.5 On: Sat, 20 Dec 2014 21:27:41

Page 3: Operation and maintenance of a diffusion-pumped vacuum system

Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 129.174.21.5 On: Sat, 20 Dec 2014 21:27:41

Page 4: Operation and maintenance of a diffusion-pumped vacuum system

Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 129.174.21.5 On: Sat, 20 Dec 2014 21:27:41

Page 5: Operation and maintenance of a diffusion-pumped vacuum system

Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 129.174.21.5 On: Sat, 20 Dec 2014 21:27:41