micropumps/microvavles. outline different types of micropumps mechanic pump membrane pump diffuser...

36
Micropumps/Microvavles

Post on 21-Dec-2015

240 views

Category:

Documents


2 download

TRANSCRIPT

Page 1: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Micropumps/Microvavles

Page 2: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Outline

Different types of micropumpsMechanic pump

Membrane pumpDiffuser pump

Non-Mechanic pumpBubble pumpElectrohydrodynamic (EHD) pump

Page 3: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Mechanical Pump

• In general, mechanical pump consists of moveable components, such as moveable valves, moveable membrane, moveable channel, etc.

• Mechanical pump can be categorized into:• Membrane pump• Rotary pump• Micro gear pump• Diffuser pump

Page 4: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Pump chamber

Page 5: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Valves

Page 6: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Check valve-example

Page 7: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Fixed geometry valve pump

Page 8: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Membrane Pump

• Membrane Pump often consists of two check valves and a chamber with moveable membrane.

• By some mechanisms, membrane can be actuated to change the volume of chamber.

• Because the check valve can be opened only in one direction, for each circle, some fluid will be moved from inlet to outlet.

Page 9: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Electrostatic Membrane Pump

R. Zengerle et. al., MEMS’95

• Goodness:

Low power, good control of actuation and short response time.

• Weakness:

High actuation voltage, small stroke.

Page 10: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Pieozelectric Membrane Pump

V. Lintel et al., Sensors and Actuators A, 1988, 15:p. 153-167

• Goodness:

Large actuation force, and short response time.

• Weakness:

Low working frequency, small stroke.

Page 11: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Lammerink, 1993; Lammerink, 1996

Thermopneumatic Membrane Pump

• Goodness:

Large actuation force, low operating voltage.

• Weakness:

Low driving frequency

Page 12: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Suction State Pumping State

W.L., Benard, et. al., “A Titanium-Nickel Shape-Memory Alloy Actuated Micropump”, Proceedings of Transducers’97, vol. 1, pp.361-364

Shape Memory Alloy Driven Membrane Pump

• Goodness: Large pumping rate, high working pressure.

• Weakness: Low driving frequency, low energy efficiency

Page 13: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Centrifugal pump- rotary pump

• Magnetically driven

• Magnetic stator and central pin are permalloy

• Rotors were separately made and assembled into pump by hand (50 microns tall, 500 microns diameter).

• Problems are the complex fabrication process and reliability.

C.H. Ahn and M.G. Allen, “Fluid Micropumps Based on Rotary Magnetic Actuators”, MEMS’s 95, 1995, pp. 408-412

Page 14: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Micro gear pump

Page 15: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Diffuser Pump

inlet outlet

Diffuser action Nozzle action

Q1 Q2

Supplying Mode: |Q1|>|Q2|

Volumeincreasing

inlet outlet

Diffuser action Nozzle action

Q1Q2

Pumping Mode: |Q1|<|Q2|

Volumedecreasing

• Difference between diffuser pump and membrane pump is that diffuser pump has no check valves. Instead, two diffusers are introduced.

• Diffuser is a channel with a increasing cross –sectional area. When fluid flows in one way or the other, it will encounter different flow resistances caused by the diffuser.

Page 16: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

• Except the difference between diffusers and valves, diffuser pump is similar with membrane pump.

• Many mechanisms can be used to drive a diffuser pump.

• Goodness: simple fabrication, free of valve fatigue.

• Weakness: sensitive to bubbles, low operating pressure

Stemme et al., 1993,

Diffuser Pump

Page 17: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Non-Mechanical Pump

• Without movable parts, non-mechanical pump is often much simpler than mechanical pump.

• Non-mechanical pump includes:• Electric field mediated pump• Bubble pump• Other pumps

Page 18: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Electric field mediated pump

Page 19: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Electric-osmotic pump

Page 20: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Electric-osmotic pump-example

Page 21: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Static EHD pump

Page 22: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

EHD pump-example

Page 23: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

EHD Pump

Page 24: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

EHD Pump

• EHD pump uses applied electric field to induce and drag charges in fluid.

• Goodness: no moving parts, very simple fabrication process

• Weakness: unsuitable for conductive fluid

Page 25: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

EHD PUMP-example

Page 26: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

A Planar EHD Pump

+ - + - + -

flow

positive ion

+ - + - + -

flow

Si-Hong Ahn, Yong-Kweon Kim, “Fabrication and experiment of a planar micro ion drag pump,” Sensors and Actuators A70 (1998) 1-5

Page 27: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Design of EHD Pump

1. Build the electrodes and channel on the same wafer.

2. Electrodes go across the sidewall, resulting in a higher efficiency.

Page 28: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Two Successive Pumping Photos

FluidFluid

Page 29: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Simplest Pump: Bubble Pump

T.K. Jun and C.-K. kim, J. Appl. Phys., Vol. 83, No. 11, 1998

• Goodness: simple

• Weakness: low flow rate, and fluid will be overheated near the heater.

Page 30: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Bubble Pump

T.K. Jun and C.-K. kim, J. Appl. Phys., Vol. 83, No. 11, 1998

Page 31: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Magnetic Pump

Page 32: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Magnetic Pump-example

Page 33: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Ultrasonic pump

Page 34: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Acoustic pump-example

Page 35: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Pump by interfacial tension

Page 36: Micropumps/Microvavles. Outline Different types of micropumps  Mechanic pump Membrane pump Diffuser pump  Non-Mechanic pump Bubble pump Electrohydrodynamic

Interfacial tension pump- Example