Microcontact Printing and its Applications using Self-Assembled Monolayers , Department of Chemistry , SungKyunKwan University

Introduction INORGANIC MATERIALS LAB.Nano structure resolution and various precursors of Soft lithography What is SAMs( self assembled monolayers) ? Microcontact Printing and its Applications MOCVD CSD SOL-GEL Method Microfabrication

method resolution microcontact printing (CP) 35nmreplica molding(REM) 30nmmitrotransfer molding(TM) 1 mmicromolding in capiliaries(MIMIC) 1 msolvent-assisted micromolding(SAMIM) 60nm

Soft Lithography INORGANIC MATERIALS LAB.

Sheet1

substrateprecursorbinding

AuRSH , ArSHRS-Au

AuRSSR'RS-Au

AuRSR'RS-Au

AuRSO2HRSO2-Au

AuR3PR3P-Au

AgRSH , ArSHRS-Ag

CuRSH , ArSHRS-Cu

PdRSH , ArSHRS-Pd

PtRNCRNC-Pt

GaAsRSHRS-GaAs

InPRSHRS-InP

SiO2 , glassRSiCl3 , Rsi(OR')3siloxane

Si/Si-H(RCOO)2R-Si

Si/Si-HRCH=CH2RCH2CH2Si

Si/Si-ClRLi , RMgXR-Si

metal oxideRCOOHRCOO-MOn

metal oxideRCONHOHRCONHOHMOn

ZrO2RPO3H2RPO2-3- Zr4+

InO3/SnO2(ITO)RPO3H2RPO2-3- Mn+

SAMs form spontaneously by chemisorption and self-organization of functionalized, long-chain organic molecules onto the surfaces of appropriate substrates.2-3nmtiltedFunctional groupAlkyl chainReaction groupsubstrateSelf-Assembled Monolayers (SAMs) INORGANIC MATERIALS LAB.

OTS : n-octadecyltrichlorosilane (CH3(CH2)17SiCl3)Tilted angle 8o - 10oHydrophobic functional groupsOxide layerCross linkingChemical bonding on the surfaceOTS monolayer INORGANIC MATERIALS LAB.

Microcontact PrintingPeal off PDMS from MasterPDMS : poly(dimethylsiloxane) silicone elastomer PhotoresistPour PDMS against Master and CurePhotolithographyPDMSPDMSPDMSAu or other materialsInking of SAMsPreparation of PDMS stamp INORGANIC MATERIALS LAB.

Fabrication of patterned OTS SAMsMicrocontact printingSpin casting of OTS solutionPDMSSiSiPDMSPDMSSiPDMSSi(hydrophilic area)(hydrophobic area) (25)PDMSSurface chemical ReactionInk (OTS solution)Silicone oxide layerMicrocontact Printing INORGANIC MATERIALS LAB.

+ 2H2O- 2HCl- HCl- H2Ocondensation+ H2O+surfaceMechanism of surface reaction

surfaceunder air(spin casting)in hexanesurface INORGANIC MATERIALS LAB.

Selectivity of OTS SAMs OTS SAMs Moisture Optical Microscope ImageSubstrate : Si(100) p-type waferSiO2 / SiMoisture OTS SAMs(hydrophobic area) INORGANIC MATERIALS LAB.

Applications of patterned OTS SAMs(1)MOCVDOptical Microscope Image -Step ProfileTiO2OTS SAMs(Metal Organic Chemical Vapor Deposition) INORGANIC MATERIALS LAB.

1100mOptical Microscope Image -Step ProfileCdSOTS SAMs(Chemical Solution Deposition)CSDApplications of patterned OTS SAMs(2) INORGANIC MATERIALS LAB.

Applications of patterned OTS SAMs(3)SOL - GEL MethodOptical Microscope ImageSubstrate : Slide glassPrecursor : Tantalum(V) EthoxideDeposition Method : spin coatingBaking temperature : 450C Ta2O5 INORGANIC MATERIALS LAB.

Microfabrication of double layered thin film

200mSlide glassITOTa2O5CdSOptical Microscope Image INORGANIC MATERIALS LAB.

Conclusion & Future prospects Soft lithography tolerates a wide range of materials and surface chemistry. Patterned OTS-SAMs form very stable organic thin films. Optimize all about microcontact printing method. Application of microcontact printing and OTS SAMs on three dimensional nano fabrication. INORGANIC MATERIALS LAB.