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Tools for NANOTECH

Latest Developments in FEI’sForensic products

ENFSI meeting June 2th, 2006Copenhagen

2 FEI Company Copyright © 2006

FEI Forensic Solutions

SEM / EDS / GSR suppliers (listed in random order) SEM Suppliers

• FEI, Zeiss, Jeol etc EDS Suppliers

• Oxford, EDAX GSR Suppliers

• Oxford – INCA GSR• EDAX – Genesis GSR• FEI – GSR-XT

• Based on EDAX hardware



Introduction Hans Krüsemann

• Market Manager Forensic SEM• FEI headquarters (SEM, SDB, TEM)

• Hillsboro, USA• Eindhoven, Netherlands

• Forensic Demo and Training Center• Belgium, 150 km from Eindhoven• Main tasks

• Demo and training• Software development (GSR-XT)• Hardware development• WW support



Outline Outline of the presentation

• GSR-XT V3.0• Wizard controlled

• microValidator• Optical Camera System• Factory System Validation

• SEM/EDS/GSR performance check using microValidator



GSR-XT version 3.0 - Wizard controlled

• Unique 3 step wizard• Easy to control• Fully flexible

• Each stub can be setup independently• Double check mode built in

• Fast and secure mode• Different parameters possible

• Expert GSR (full) available



Wizard – Step 1Step 1•Sample setup•Maximum 20 samples•All the same•All different



Wizard – Step 2Step 2•2 Samples selected•Both using classic search parameters

•Both in Double check mode•Less than 5 particles of the a specific group > double check mode



Wizard – Step 2Step 2•2 Samples selected•Both in Double check mode using Sintoxsearch parameters



Wizard – Step 3Step 3•Height measurement•Start



GSR ExpertGSR Expert•GUI during run



GSR ExpertGSR Expert•After run all results are visible in different labels



Results Classic - Sintox

22TOTAL Number of Particles :

1Number of Unclassified Particles:

1Number of CuZn Particles:

2Number of Zn Particles:

1Number of Au Particles:

1Number of Sn Particles:

3Number of BaS Particles:

7Number of Fe Particles:

5Number of Pb Particles:

1Number of BaSb Particles:

SUMMARY OF PARTICLES FOUND

Stub 2 - Classical

25TOTAL Number of Particles :

17Number of Unclassified Particles:

3Number of Zn Particles:

4Number of Ti Particles:

1Number of TiZn Particles:

SUMMARY OF PARTICLES FOUND

Stub 2D - Sintox

Double check



microValidator

• Announced last year in Oslo, Norway

• Released product from June 1st

• The aim of microValidator is to determine if the system is set up adequately to achieve reliable results when working with SEM/EDS and for automatic GSR particle analysis.



microValidator

microValidator•Hardware•Software



microValidator What does it do?

• It will automatically test the SEM/EDS system• Test of

• SEM functions• EDS functions• Combined SEM & EDS system check• Launch GSR analysis on test sample (Plano)

• MicroValidator includes special standard mount• Easy to change• All coordinates of the standards are known • Can include your own GSR2003/GSR2005 sample



microValidator – SEM functionality• Checks if Quanta is running correctly• Checks vacuum status• Checks status of the HT• Checks status of stage• Checks if FWD/Stage Z is coupled• Checks Quanta analytical probe alignment• Checks the BSD behavior (black level setting)• Checks SEM magnification accuracy• Checks beam scan / X stage axis alignment



microValidator – EDS functionality• Checks if EDS hardware is communicating correctly• Checks HT bias and cooling• Checks EDS calibration• Checks optimum WD for EDS (sweet spot)• Checks EDS collimator alignment• Checks detector zero and gain• Checks BLM and fast discriminator settings• Checks detector resolution for each ampl. time• Checks detector efficiency



microValidator - GUITest of:

•SEM functions

•EDS functions

•Combined SEM & EDS system check



microValidatormicroValidator consists of• Software• Hardware

• Integrated beam current detector• Substage mount including

• Sn balls• SIRA grid• EDS calibration sample• Particle standard

• Dedicated sample map with know positions • All standards are certified



microValidator - GUI



microValidator - GUI

Test of:

Collimator alignment



microValidator – System tests• Checks the EDS imaging system• Checks the BSD response using EDS imaging• Automatically runs a GSR particle test sample

Output• The success of each test is reported• Failures are reported



microValidator

Stage positions table

All positions stored in map



MicroValidator - Conclusion• Validation of system needed to ensure reliable results

• SEM - Magnification• EDS-system• GSR sw

• Validations takes only a couple of minutes• In case GSR test run is included, up to 2 hrs

• Validation can be done now on regular basis• Every week / month



microValidator Two models

• microValidator• FEI Quanta + EDAX EDS system and FEI GSR-XT sw• Functionality check SEM, EDS and SEM/EDS

• microValidator L• FEI Quanta + Oxford EDS system and INCA GSR• Functionality check SEM only• EDS / GSR check under investigation



Optical Camera System• Optical images possible via SurveyXT sw

• Sw runs on support PC• Navigation via optical image

• High resolution CCD camera• Own door mount, spring type• Ring illumination, switches on when opened• 2048x1536 pixels camera• 55 mm telecentric lens• Field of view 18 mm

• SurveyXT sw can also be used to capture SEM images



Optical Camera System



Optical Camera System

Optical image:•Can be used to navigate•Compare to SEM image•Stitching



Factory System Validation

Forensic system is fully checked by our factory SEM/EDS/GSR performance check using microValidatorIncludes GSR2005 test runFactory approved / certifiedFor both EDAX and Oxford EDS suppliers



Thanks!

Booth 325A, ground floor

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