IoT Enabling Smart Facilities

- an Owner Perspective

Arthur Chuang

Senior Director, 300mm Facility Div., TSMC

2

Arthur Chuang - Bio

EDUCATION

– BS, Mechanical Engineering, National Taiwan University of Science and

Technology

– Ph.D., Civil Engineering, National Taiwan University

OCCUPATION

– Senior Director, 300mm Facility Division, TSMC

– Vice-Chair, High-tech Facility Committee, SEMI Taiwan

ACCOMPLISHMENTS

– TEN Outstanding Project Managers (2011)

– Outstanding Alumnus, Civil Engineering Department, NTU (2014)

– National Industrial Innovation Elite Award (2015)

TSMC Conservation Volunteer (Since 2009)

3

Agenda

Evolution of Facility Monitoring and Control

System

What Does Industry 4.0 Mean in High-tech

Facility

How IoT Enabling Smart Facilities

Summary

4

FMCS Overview

Facility Monitoring and Control System (FMCS)

Control IO /

Marshalling

Redundant

ControllerRedundant

Controller

Engineer

Workstation

Database

DH Server Operator

WorkstationWeb

Server

Control

Redundant Network

OPC

Server

Control IO /

Marshalling

Control IO /

Marshalling

Control IO /

Marshalling

CIM

SI SCADA

DB Server

System SCADA

Financial

Production

Supply chain

Customer Service

Material

…

Manufacture Scheduling

Quality, Yield, …

…

Asset Management(PM/Materials)

Operation Management

Energy/Quality/ESH

…

SCADA HMI

Network

Control System

IO module

Smart

Instrument

MES

ERP

FAC Management

Control & Monitor

Field Instrument

AP Server AP Server

5

FMCS Evolution

Digital Technology Changed FMCS Landscape

1940

Value

Centralized

Control & Monitoring

Hardwired

Panel Boards

Digital Plant

Smart Management

1980 2000 2020 1960Time

6

FMCS R&R in Modern Facilities

Improve facility system reliability and availability, reduce

maintenance cost.

Improve situational awareness to reduce ESH incidents and

response time.

Reduce waste and loss to pursue high energy efficiency.

Enhance operation productivity.

Be ready for infrastructure integration with future smart

facility.

7

Agenda

Evolution of Facility Monitoring and Control

System

What Does Industry 4.0 Mean in High-tech

Facility

How IoT Enabling Smart Facilities

Summary

8

Industry 4.0

The 4th industrial revolution will be based on Cyber Physical

System (CPS), the Internet of Things (IoT) and the Internet

of Service.

It will generate enormous Big Data streams stored in the

Cloud that can be analyzed for resource-efficient and high

quantity production.

1784 1870 1969

End of

18th century

Start of

20th centuryStart of

1970s

Today

1.0 2.0 3.0 4.0

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Why Cyber Physical System

CPS is a system featuring a tight combination of, and

coordination between, the system’s cyber and physical

elements.

CPS uses computation, communication, and control

embedded in and interacting with physical processes to

add new capabilities (three-in-one) to physical system.

Reference：從集合、整合、融合看工業4.0發展藍圖Science & Technology Policy Research and

Information Center, NAR Labs

Combination Integration Merging

Cyber

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Why Internet of Things

CLOUD

(BIG DATA)

FMCS IoTProcess monitoring

Alarm handling

Process control

Auto operation

Image/sound info.

Operator info.

Environment info.

Material info.

EXTERNAL

Suppliers

management

Environmental

management

INTERNAL

Material management

Energy management

PM management

Cost management

11

Agenda

Evolution of Facility Monitoring and Control

System

What Does Industry 4.0 Mean in High-tech

Facility

How IoT Enabling Smart Facilities

Summary

12

Facility Automation

FMCS FrameworkInformation

Management

Control

13

FMCS+IoT+Cloud Sketch

Smart Facility Profile

I

ESHMaintenance EnergyReliabilityProductivity

IoT Gateway IoT Gateway

M2M & wirelesssensor network

Building management

Vehicle, asset, person monitoring & controlEmbedded Mobile Energy Consumption

Security & surveillance Every thingsSmart Factory

HMI OPC

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IoT Enabling Smart Facilities

Smart Facility is to apply the concept of “prediction”, so

that the facility system achieves zero-trouble such as zero-

failure and zero-contamination.

Smart Facility is built on the foundation of FMCS system.

IoT is the basic construction to start Smart Facility, so to

develop IoT elements and applications is currently the most

important.

Digitalized

Data

FMCS

Foundation

Cloud

Computing

IOT

Information

Big data

Analysis

Smart

Facility

3D

Model

Industry 4.0Industry 3.0

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Example – Electrical System

Current Pictures:

– Power remote control

– Auto-Switch while abnormal

– Energy information and alarm

monitoring

Better Future?

– Predict fault of high voltage

equipment

– Real time fault analysis and

smart recovery guide

– Build energy map for smart

demand response

High Voltage

TPC

Substation

UP

S

G

Generators

Main

Transformer

M

PLC

Temp.

M

M

Relay M

Abnormal Point

Handling Notice

Troubleshooting GuideLo

ad

Battery Monitoring Vibration MonitoringEnergy Saving

Power SCADA

Vibration, Noise

Partial Discharge

Over Temp.

Battery

SCADA

IoT

Gateway

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Example – Waste Water Treatment

Current Pictures:

– Lack of monitoring for tool waste drain

– Hindsight and labor-intensive

operations along abnormal discharge

Better Future?

– Real-time “devices” for monitoring of

tool drains, such as frequency, volume

and time.

– Smart Operation : Predict water

variation, Optimize treatment

parameter, Minimize chemical

consumption.

Quantity

H2 O

2

UP

W

H2 S

O4

NH

4 OH

HF

IPA

Tools

Chemical

Drain

Sensor

Reclaim & WWT

Sensor

Quality

Smart Water Apps

IoT

Gateway

WWT SCADA SCADA

17

Example – Air Abatement System

Current Pictures:

– Equipment status monitoring

– Process performance and

efficiency tracking

– Exhaust sub-main static

pressure monitoring

Better Future?

– Real-time emission

monitoring for emergency

response and audit

– Predictive maintenance

replace preventive

maintenance to eliminate

risk of abnormal emission.

Central Scrubber

VOC Oxidizer

Exhaust Fan

Exhaust Fan

Stack

Stack

ProcessMaterial

Product Tool

Scrubber

(Wet )

(Plasma)

(Adsorb.)Velocity sensorUtility measure sensorRemoval efficiency sensorVibration SensorExhaust concentration and intensity Sensor

Exhaust toatmosphere

Vibration MonitoringConcentration

Monitoring

Performance

Monitoring

AAS ControlSCADA

Internet

Central Weather Bureau

IoT Gateway

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Example – Security System

Current Pictures:

– People identity and access

control

– Video recording and retrieve

– Unlock security equipment &

CCTV tracking (Fire/ gas leak

alarm)

Better Future?

– Acquire ERT member status and

monitor accident situation

– Intelligent video analysis for

property and fire protection

Fire protectionPeople counting Vehicle tracking

Video Analytics

19

Agenda

Evolution of Facility Monitoring and Control

System

What Does Industry 4.0 Mean in High-tech

Facility

How IoT Enabling Smart Facilities

Summary

20

Future Facility Needs

Develop all kinds of IoT application technique, build the big

database that facility system required.

Develop simulation learning system and technique, as a

training strategy for complete automatic facilities.

Develop cyber physical system (beyond FMCS) for smart…

– Safety management,

– Environmental management, and

– Energy management etc.

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Summary

FMCS automation uses electronics and information technique,

to replace manual operation with automatic control.

Smart Facility is built on the basis of existing automation, and

it collects information with IoT devices, then integrates it to

could for big data analysis via Internet of service, and finally

engineer decides new strategy according to the results.

IoT is basic element of the innovation of future Smart Facility.

Therefore, the development effectiveness of IoT devices will

affect directly the progress of Smart Facility.

SMART

FACILITY