icp h2/nf3 remote-plasma simulation
TRANSCRIPT
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Plasma Enhanced materials processing and
rarefied GAS dynamics Unified Simulation tools
PEGASUS
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ICP
H2/NF3 Remote-plasma simulation
Modules : PHM NMEM
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Purpose
Usually remote-plasma equipment is used as plasma CVD equipment and dry etching equipment. The feature reduces the incidence ion bombardment and the influence of photonsto the substrate, and makes easy control of distribution of the activated species on the substrate compared with parallel plate type plasma equipment in thin-film generation and thin-film processing.
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Outline of equipment Model of simulation
H2
NF3
Substrate
r
z
RF
ε= 3.8r
R.F.
Gas-ring
H2
NF3
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400
Operating conditions
ICP coil Power : 200 [W] Freq. : 13.56 [MHz]Total gas flow rates : 300 [sccm] H2 : NF3 = 2:1 (=200 : 100)Pressure on the outlet : 10 [Pa]
Geometry
Temperature of walls and substrate : 313 [K]Gas temperature : 313 [K]
Unit [mm]100
60
100
603
5
180
60
400140
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Species ( electron, ions, and neutrals )
Charged spec. : 13Neutral spec. : 13
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Gas-phase reactions ( hydrogen )
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Gas-phase reactions ( nitrogen,fluorine)
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Surface reactions
H 0.97 H2 0.5 H2 1.0N 0.97 N2 0.5N2 1.0F 0.97 F2 0.5F2 1.0NxFy 1.0 I+ ( 正イオン ) 0.0 I 1.0(H,H2,N,N2,F,F2,NF,NF2,NF3)H3
+ 0.0 H 1.0 H2 1.0
rr : Reflection coeff.1-r : Sticking coeff.a 、 b : Emitted coeff.
1-r
(1-r)*a (1-r)*b
Incident Spec. Reflection coeff. Emitted spec./coeff.
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Computational results
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Time history of electron temp. at each monitoring cell
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Physical quantitiesby R.F. coil
Electron densityand temperature
InductiveE-field[V/cm]
Adsorbedpower
[W/cm3]
Electrontemperature
[eV]
Electrondensity[/m3]
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H3+
F - NF2+
Ion density [/m3]
H+
Ion density [/m3]
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N H
Neutral density [/m3]
NF2 F
Neutral density [/m3]
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Mixture gas
Pressure[Pa]
Velocity[m/s]
NF3 H2
Neutral density [/m3]