efficient testing solutions - aimcal 2019-05-27آ  suragus gmbh | efficient testing solutions |...

Download Efficient Testing Solutions - AIMCAL 2019-05-27آ  SURAGUS GmbH | Efficient Testing Solutions | 25/05/2019

If you can't read please download the document

Post on 25-Jun-2020

0 views

Category:

Documents

0 download

Embed Size (px)

TRANSCRIPT

  • www.suragus.com 25.05.2

    019 1

    Efficient Testing Solutions Thin Film Characterization | Carbon Fiber Testing | Metal Testing

  • www.suragus.com 25.05.2

    019 2SURAGUS GmbH | Efficient Testing Solutions | www.suragus.com 25/05/2019 | 2

    Challenges in the inline chara- cterization of conductive thin films

    May 28 - 30, Daejeon, South Korea

    R2R Asia Conference

    Roll to Roll Web Coating and Finishing

  • www.suragus.com 25.05.2

    019 3SURAGUS GmbH | Efficient Inline Testing | www.suragus.comSURAGUS GmbH | Efficient Testing Solutions | www.suragus.com 25/05/2019 | 3

    Agenda

    1. Company overview of SURAGUS and ELIM GLOBAL

    2. Relevance, applications and materials used for conductive films

    3. Challenges for conductive film manufacturing

    4. Inline testing of conductive films

    5. Non-contact eddy current technology

    6. Challenges for metrology for conductive materials

    7. Considerations for good measurement setups

    8. Take home messages

  • www.suragus.com 25.05.2

    019 4SURAGUS GmbH | Efficient Testing Solutions | www.suragus.com 25/05/2019 | 4

    SURAGUS GmbH is a German Metrology Specialist

     Eddy current-based testing solutions (SURAGUS)

     SURface ArGUS = Surface guard (100 eyes on surfaces and thin films)

     Integrator of other optical metrology (OEM)

     R&D and manufacturing in Germany (Dresden)

     EddyCus systems are present on six continents

     World wide service and sales network

     Quality assurance systems for thin-films

    Technology

    Location and Presence

    Applications

  • www.suragus.com 25.05.2

    019 5SURAGUS GmbH | Efficient Testing Solutions | www.suragus.com 25/05/2019 | 5

    Conductive Coatings can be Found in Various Applications

    Relevance of Electrical Properties

    Direct electrical function

     Touch panel sensor (TPS), display and flat monitors

     Solar, semiconductor industry

     LED/OLED lightning, batteries, medical sensors

     Smart glass, deicing and heating applications

    Indirect properties for other functions

     Packaging foil (barrier)

     Architectural glass industry (emissivity)

     Mirrors (reflectance)

     Medical (antibacterial)

  • www.suragus.com 25.05.2

    019 6SURAGUS GmbH | Efficient Testing Solutions | www.suragus.com 25/05/2019 | 6

    Conductive Coatings are Realized with Various Materials

    Typical Materials

    Transparent Films

     TCO (ITO, FTO, AZO, ZnO, SnO2)

     Metal nano-wires

     CNT (carbon nanotubes)

     Graphene films

     Nano particle films

    Metallic Films

     Copper

     Aluminum

     Molybdenum

     Zinc

     Silver

  • www.suragus.com 25.05.2

    019 7SURAGUS GmbH | Efficient Testing Solutions | www.suragus.com 25/05/2019 | 7

    Conductive Coatings are Applied for Various Reasons

    Often Many Characteristics Matter

    Physical Characteristics

     Electrical

     Mechanical

     Chemical

     Optical

     Geometrical /Surface

    Soft characteristics

     Stable over time

    Financial Characteristics

     Cost per performance

  • www.suragus.com 25.05.2

    019 8SURAGUS GmbH | Efficient Testing Solutions | www.suragus.com 25/05/2019 | 8

    Transparent Conductive Materials have Complex Requirements

    Requirements/ trends

     Low cost

     Low sheet resistance

     High transparency

    Beneficial/ further characteristics

     Ability for flexible substrates

     Low aging effects

     Homogeny characteristics

    Costs

    Transparent Conductive Materials

  • www.suragus.com 25.05.2

    019 9SURAGUS GmbH | Efficient Testing Solutions | www.suragus.com 25/05/2019 | 9

    Various Material Types Offer Different Potentials for Cost to Sheet Resistance Ratios

    Trends for Cost Improvement

     Cheaper materials / material combinations

     Cheaper processes

     Larger substrate sizes / gapless production/R2R

     Higher throughput due to higher deposition/growth rate

     Optimized material / target usage

    Costs Sheet

    Resistance

  • www.suragus.com 25.05.2

    019 10SURAGUS GmbH | Efficient Testing Solutions | www.suragus.com 25/05/2019 | 10

    Transparency and Sheet Resistance are Competing Properties

    Trends For Sheet Resistance Improvement

     Material variation / combined layer stacks

     Additional layer treatment

     Doping

     Annealing/ Tempering

     Smart layout

    Optical Transparency

    Sheet Resistance

    Source: SVC 2017, FEP

  • www.suragus.com 25.05.2

    019 11SURAGUS GmbH | Efficient Testing Solutions | www.suragus.com 25/05/2019 | 11

    Anisotropy Needs to be Considered For Anisotropic Films

    Anisotropy of Wire-Based Films

     Wire and mesh structures can have an anisotropic sheet resistance

     Fast deposition processes tend to cause high anisotropy

     Electrical anisotropy affects the function of the device

     Anisotropy is mostly considered as a disadvantage as it is difficult to control

     Anisotropy can be also used for achieving even better sheet resistance to anisotropy rations

     Anisotropy can be optimized according to the layout of the contact pattern

    Benchmarking Transparent Conductive Film Technologies

    Source: IDTECHEX Berlin, 2018

  • www.suragus.com 25.05.2

    019 12SURAGUS GmbH | Efficient Testing Solutions | www.suragus.com 25/05/2019 | 12

    Smart Layouts For Wire-based Films can Boost Sheet Resistance to Transparency Ratio

    Anisotropic Wire Film Isotropic Wire Film

    Anisotropic Wire Film vs. Isotropic Wire Film

     Anisotropy can be optimized according to the layout of the contact pattern

     Anisotropy can save material and improve optical transparency

     Anisotropy can be measured in non-contact mode by EddyCus TF inline anisotropy sensor

     More of the conductive (and intransparent) material is required in order to sufficiently supply this structure with current

    Enhanced sheet resistance

    co n

    ta ct

    co n

    ta ct

    co n

    ta ct

    co n

    ta ct

  • www.suragus.com 25.05.2

    019 13SURAGUS GmbH | Efficient Testing Solutions | www.suragus.com 25/05/2019 | 13

    Various Metrology can be Applied on TCMs

    Testing Technologies

    Main quality parameters

     Transparency (+ Haze)

     Sheet resistance

    Common methods in general

     Optical (spectrometric) testing (reflectance, transmittance, haze)

     4PP / Eddy Current, Van der Pauw / Hall effect

     TEM and SEM, high magnification optical microscopes,

     Raman, Ellipsometry and Others

    Mostly relevant methods

     Spectrometer

     4PP or Eddy Current

    Optical Transparency

    Sheet Resistance

  • www.suragus.com 25.05.2

    019 14SURAGUS GmbH | Efficient Testing Solutions | www.suragus.com 25/05/2019 | 14

    Commonly Applied Electrical Metrology for TCMs are 4PP and EC

    4-point-probe testing Non-contact eddy current testing by EddyCus®

    Comparison of Electrical Testing Methods

     Contact / Contact quality influences measurement

     Single point and mapping solutions

     Possible damage to sensitive layers

     Single point sheet resistance testing only

     Wearing of probe with time

     No measurement of encapsulated films

     Non-contact & real-time, no wearing

     High accuracy without influence of contact resistance

     No harm or artefacts to sensitive films

     High resolution mapping, inline measurement for process control

     Encapsulated films & multilayer systems

     Best usage for touch-sensitive layers

  • www.suragus.com 25.05.2

    019 15SURAGUS GmbH | Efficient Testing Solutions | www.suragus.com 25/05/2019 | 15

    Non-contact Eddy Current Testing provides significant better repeatability

    Comparison of Standard Deviation

     Demonstration of metal films with optimal surface for 4PP (on PET)

     Non-contact EC measurement results in better repeatability

     High sampling rate of Eddy Current enables to average many measurements in same time

     Results on wired forms or difficult to contact films are even more difficult for 4PP

    Sample Number

    4PP-measurement Eddy Current

    Mean [ohm/sq]

    Standard deviation [ohm/sq]

    Min [ohm/sq]

    Max [ohm/sq]

    Mean [ohm/sq]

    Standard deviation [ohm/sq]

    Min [ohm/sq]

    Max [ohm/sq ]

    1 0.496 0.052 0.467 0.64 0.485 0.0002 0.4842 0.4847

    2 1.120 0.022 1.079 1.16 1.120 0.0001 1.1203 1.1206

    3 1.759 0.032 1.720 1.81 1.772 0.0002 1.7715 1.7721

    4 4.430 0.100 4.300 4.61 4.425 0.0006 4.4244 4.4263

    5 11.840 0.200 11.350 12.09 11.622 0.0102 11.6055 11.6421

    6 30.400 0.500 29.800 31.30 30.498 0.0241 30.4544 30.5360

    7 82.500 0.700 81.500 83.40 81.359 0.1145 81.2

Recommended

View more >