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Page 1: Supplementary Materials for - Science Advances...2016/08/08  · Supplementary Figures fig. S1. Wafer pattern used for evaluating the magnification factor and field of view of a TiO

advances.sciencemag.org/cgi/content/full/2/8/e1600901/DC1

Supplementary Materials for

Three-dimensional all-dielectric metamaterial solid immersion lens for

subwavelength imaging at visible frequencies

Wen Fan, Bing Yan, Zengbo Wang, Limin Wu

Published 12 August 2016, Sci. Adv. 2, e1600901 (2016)

DOI: 10.1126/sciadv.1600901

This PDF file includes:

fig. S1. Wafer pattern used for evaluating the magnification factor and field of

view of a TiO2 mSIL.

fig. S2. Estimation of the effective refractive index and particle volume fraction of

a TiO2 mSIL.

fig. S3. Field of view of a TiO2 mSIL.

fig. S4. The limiting resolution obtained with a TiO2 hemispherical mSIL.

fig. S5. The super-resolution images obtained with a TiO2 super-hemispherical

mSIL.

fig. S6. Direct imaging of wafer patterns by an optical microscope.

fig. S7. Direct optical observation of 50-nm latex beads located on the surface of a

Blu-ray disk.

fig. S8. Comparisons of TiO2 hemispherical mSIL assembled from 15- or 45-nm

anatase TiO2 nanoparticles.

fig. S9. Nano–solid-fluid assembly for the TiO2 optical fiber.

fig. S10. Characterizations of 15-nm anatase TiO2 nanoparticles.

Page 2: Supplementary Materials for - Science Advances...2016/08/08  · Supplementary Figures fig. S1. Wafer pattern used for evaluating the magnification factor and field of view of a TiO

Supplementary Figures

fig. S1. Wafer pattern used for evaluating the magnification factor and field of view of a TiO2

mSIL. (a) SEM image of the wafer pattern, which shows 400-nm-wide squares with a pitch of 200

nm. (b) Optical micrograph of the wafer pattern at a magnification of ×2,100, indicating that the

conventional optical microscopy will fail to reveal the shape of the squares due to the Abbe

diffraction limit.

Page 3: Supplementary Materials for - Science Advances...2016/08/08  · Supplementary Figures fig. S1. Wafer pattern used for evaluating the magnification factor and field of view of a TiO

fig. S2. Estimation of the effective refractive index and particle volume fraction of a TiO2 mSIL.

The experimentally observed correlation between the magnification factor and the height-to-width

ratio for mSIL of 10 μm (red), 15 μm (green) and 20 μm (blue) in Fig. 2. Theoretical curve (black) is

obtained using geometry optics analysis with an effective index of 1.95. Moreover, the effective

index of mSIL mSILn can be expressed as pam rSI tiL a clir e partiir ca len n V n V , where airn =1 is the

refractive index of air, particlen =2.55 is the refractive index of anatase TiO2 nanoparticles at λ=550 nm,

airV is the volume fraction of air in mSIL and particleV is the volume fraction of TiO2 nanoparticles in

mSIL. Therefore, we can calculate that particleV =61.3%.

Page 4: Supplementary Materials for - Science Advances...2016/08/08  · Supplementary Figures fig. S1. Wafer pattern used for evaluating the magnification factor and field of view of a TiO

fig. S3. Field of view of a TiO2 mSIL. In Fig. 2, the field of view of mSIL increases almost linearly

with an increase in the width of mSIL from 10 μm to 20 μm.

Page 5: Supplementary Materials for - Science Advances...2016/08/08  · Supplementary Figures fig. S1. Wafer pattern used for evaluating the magnification factor and field of view of a TiO

fig. S4. The limiting resolution obtained with a TiO2 hemispherical mSIL. Optical micrographs

focused on (a) the wafer pattern, and (b) the 1.8 times magnified virtual image created by a TiO2

hemispherical mSIL. The corresponding SEM images of (c) the hemispherical mSIL and (d) the

wafer pattern with 75 nm features, the dashed circle in (d) represents the field of view seen in (b).

The hemispherical mSIL has a width of 15 μm. The results indicate that the hemispherical mSIL

with a magnification factor of 1.8 is insufficient to resolve the features below 75 nm.

Page 6: Supplementary Materials for - Science Advances...2016/08/08  · Supplementary Figures fig. S1. Wafer pattern used for evaluating the magnification factor and field of view of a TiO

fig. S5. The super-resolution images obtained with a TiO2 super-hemispherical mSIL. Optical

micrographs of a TiO2 super-hemispherical mSIL focused on the surface of a wafer pattern with 50

nm features (without gold coating) under an illumination of (a) white light, (b) green light (λ~540

nm) or (c) blue light (λ~470 nm), respectively. The super-hemispherical mSIL has a magnification

factor of 3.0 and a width of 15 μm. The optical micrographs were taken using an Olympus BX63

light microscope equipped with a 5-megapixel CCD camera (Olympus, DP26) and a 100× objective

lens (Olympus, LMPlanFL N, NA=0.8).

Page 7: Supplementary Materials for - Science Advances...2016/08/08  · Supplementary Figures fig. S1. Wafer pattern used for evaluating the magnification factor and field of view of a TiO

fig. S6. Direct imaging of wafer patterns by an optical microscope. Optical micrographs of a

wafer pattern with (a to c) 50 nm features (without gold coating) or (e to g) 45 nm features (after

gold coating) under an illumination of (a, e) white light, (b, f) green light (λ~540 nm) or (c, g) blue

light (λ~470 nm), respectively. The optical micrographs were taken using an Olympus BX63 light

microscope equipped with a 5-megapixel CCD camera (Olympus, DP26) and a 100× objective lens

(Olympus, LMPlanFL N, NA=0.8). SEM images of the corresponding wafer pattern with (d) 50 nm

features or (h) 45 nm features. The results indicate that the optical microscope is unable to resolve

the subwavelength details of the wafer patterns.

Page 8: Supplementary Materials for - Science Advances...2016/08/08  · Supplementary Figures fig. S1. Wafer pattern used for evaluating the magnification factor and field of view of a TiO

fig. S7. Direct optical observation of 50-nm latex beads located on the surface of a Blu-ray disk.

(a) Optical micrograph and (b) SEM image of 50 nm polystyrene latex beads (Coulter N4 size

control standards, Beckman Coulter, USA) located on the surface of a blank Blu-ray disk, as

indicated by the arrows. The mSIL has a magnification factor of 2.5 and a width of 18 μm. The

optical micrograph was taken using an Olympus BX63 light microscope.

Page 9: Supplementary Materials for - Science Advances...2016/08/08  · Supplementary Figures fig. S1. Wafer pattern used for evaluating the magnification factor and field of view of a TiO

fig. S8. Comparisons of TiO2 hemispherical mSIL assembled from 15- or 45-nm anatase TiO2

nanoparticles. Optical micrographs of a Blu-ray disc observed through hemispherical mSIL

composed of (a) 15 nm or (b) 45 nm anatase TiO2 nanoparticles, respectively. High magnification

SEM images of (c and d) the top surfaces, and (e and f) the bottom surfaces of the hemispherical

mSIL composed of 15 nm or 45 nm TiO2 nanoparticles, respectively. The results indicate that 15 nm

TiO2 nanoparticles will provide a denser packing structure of nanoparticles and better imprinting of

nano-scale features, leading to more clear observation of subwavelength details.

Page 10: Supplementary Materials for - Science Advances...2016/08/08  · Supplementary Figures fig. S1. Wafer pattern used for evaluating the magnification factor and field of view of a TiO

fig. S9. Nano–solid-fluid assembly for the TiO2 optical fiber. (a) SEM image of a 260-µm-

diameter TiO2 wire prepared by injection molding of 15 nm TiO2 nano-solid-fluid using a 25 G

plastic needle. (b) Photograph obtained by illuminating one end of a TiO2 wire with 650 nm laser,

indicating that the TiO2 wire can be used as optical fiber for low-loss light transmission over long

distances. Inset: The optical micrograph indicates that the TiO2 wire is highly transparent to visible

light.

Page 11: Supplementary Materials for - Science Advances...2016/08/08  · Supplementary Figures fig. S1. Wafer pattern used for evaluating the magnification factor and field of view of a TiO

fig. S10. Characterizations of 15-nm anatase TiO2 nanoparticles. (a) Number-average particle

size distribution of the anatase TiO2 nanoparticles measured by Zetasizer Nano ZS90 (Malvern

instruments Ltd., UK), showing a peak at 15 nm. (b) Typical HRTEM image of a single anatase TiO2

nanoparticle performed on a Tecnai G2 F20 (Philips, Holland), indicating the nanocrystal has a

highly crystalline structure and an approximately spherical shape. (c) High magnification SEM

image of the dense and short-range order arrangement of TiO2 nanoparticles in mSIL.


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