chemical processing of dielectrics, insulators and...

Chemical Processing ofDielectrics, Insulators and

Electronic Ceramics

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Cambridge University Press978-1-107-41320-7 - Materials Research Society Symposium Proceedings: Volume 606:Chemical Processing of Dielectrics, Insulators and Electronic CeramicsEditors: Anthony C. Jones, Janice Veteran, Donald Mullin, Reid Cooper and Sanjeev KaushalFrontmatterMore information

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MATERIALS RESEARCH SOCIETYSYMPOSIUM PROCEEDINGS VOLUME 606

Chemical Processing ofDielectrics, Insulators and

Electronic CeramicsSymposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.

EDITORS:

Anthony C. JonesInorgtech Limited

Mildenhall, Suffolk, United Kingdomand

The University of LiverpoolUnited Kingdom

Janice VeteranAdvanced Micro Devices

Austin, Texas, U.S.A.

Donald Mull inSPA WAR System Center

San Diego, California, U.S.A.

Reid CooperUniversity of Wisconsin-Madison

Madison, Wisconsin, U.S.A.

Sanjeev KaushalTokyo Electron AmericaAustin, Texas, U.S.A.

Materials Research SocietyWarrendale, Pennsylvania






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CONTENTS

Preface xi

Acknowledgments xiii

Materials Research Society Symposium Proceedings xiv

CHEMICAL VAPOR DEPOSITIONOF OXIDE CERAMICS

*Design, Synthesis and Characterization of Precursors forChemical Vapor Deposition of Oxide-Based Electronic Materials 3

Oliver Just, Bettie Obi-Johnson, Jason Matthews, Dianne Levermore,Tony Jones, and William S. Rees, Jr.

*MOCVD of High-K Dielectrics and Conductive Metal NitrideThin Films 13

Yoshihide Senzaki, Richard F. Hamilton, Kimberly G. Reid,Christopher C. Hobbs, Rama I. Hegde, and Mike J. Tiner

*Group IVB Oxides as High Permittivity Gate Insulators 23S.A. Campbell, B. He, R. Smith, T. Ma, N. Hoilien, C. Taylor,and W.L. Gladfelter

* Application of Pulsed Injection MOCVD to the Deposition ofDielectric and Ferroelectric Oxide Layers and Superlattices 33

Jean-Pierre Senateur, Johannes Lindner, Francois Weiss,Catherine Dubourdieu, Carmen Jimenez, and Adolfas Abrutis

Growth of MgO by Metal-Organic Molecular Beam Epitaxy 45Feng Niu, Brent H. Hoerman, and Bruce W. Wessels

Selection and Design of Precursors for the MOCVD of LeadScandium Tantalate 51

A.C. Jones, H.O. Davies, T.J. Leedham, M.J. Crosbie, P.J. Wright,P. O'Brien, and K.A. Fleeting

Deposition of SiO2:F:C Films With Low Dielectric Constant and WithHigh Resistance to Annealing 57

J. Lubguban, Jr., Y. Kurata, T. Inokuma, and S. Hasegawa

•Invited Paper






Analysis of a TEOS/Oxygen Plasma: Influence of Energy and ParticleFlux on the Deposition Parameters 63

M.L. Pereira da Silva, A.N. Rodrigues da Silva, andJ.J. Santiago-Aviles

Metal Organic Chemical Vapor Deposition of Co-, Mn-, Co-Zr andMn-Zr Oxide Thin Films 69

D. Barreca, F. Benetollo, M. Bozza, S. Bozza, G. Carta,G. Cavinato, G. Rossetto, and P. Zanella

Chemical Vapor Deposition of Conformal Alumina Thin Films 75Bradley D. Fahlman and Andrew R. Barron

CHEMICAL VAPOR DEPOSITION OFNON-OXIDE CERAMICS

Monomeric Chelated Amides of Aluminum and Gallium: Volatile,Miscible Liquid Precursors for CVD 83

Sean T. Barry, Roy G. Gordon, and Valerie A. Wagner

Low Temperature Chemical Vapor Deposition of Titanium NitrideThin Films With Hydrazine and Tetrakis-(dimethylamide)Titanium 91

Carmela Amato-Wierda, Edward T. Norton, Jr., andDerk A. Wierda

Aspects of Gas Phase Chemistry During Chemical Vapor Depositionof Ti-Si-N Thin Films With Ti(NMe2)4 (TDMAT), NH3, and SiH4 97

Carmela Amato-Wierda, Edward T. Norton, Jr., and Derk A Wierda

Molecular Beam Mass Spectrometry Studies of the ThermalDecomposition of Tetrakis(dimethylamino)Titanium 103

Carmela C. Amato-Wierda, Edward T. Norton, Jr., andDerk A. Wierda

Low Temperature Thermal Chemical Vapor Deposition of SiliconNitride Thin Films for Microelectronics Applications 109

Spyridon Skordas, George Sirinakis, Wen Yu, Di Wu,Haralabos Efstathiadis, and Alain E. Kaloyeros

Methylamine Growth of SiCN Films Using ECR-CVD 115C-Y. Wen, J-J. Wu, HJ. Lo, L.C. Chen, K.H. Chen, S.T. Lin,Y-C. Yu, C-W. Wang, and E-K. Lin






Preparation of High-Quality Ultra-Thin Gate Dielectrics by Cat-CVDand Catalytic Anneal 121

Hidekazu Sato, Akira Izumi, and Hideki Matsumura

Group III Metal Sulfide Thin Films From Single-Source Precursorsby Chemical Vapor Deposition (CVD) Techniques 127

Mike R. Lazell, Paul O'Brien, David J. Otway, and Jin-Ho Park

Iron Sulfide (FeS2) Thin Films From Single-Source Precursorsby Aerosol-Assisted Chemical Vapor Deposition (AACVD) 133

Paul O'Brien, David J. Otway, and Jin-Ho Park

Volatile Liquid Precursors for the Chemical Vapor Deposition (CVD)of Thin Films Containing Alkali Metals 139

Randy N.R. Broomhall-Dillard, Roy G. Gordon, and Valerie A. Wagner

MOCVD of CuInE2 (Where E = S or Se) and Related Materialsfor Solar Cell Devices 147

Michael Kemmler, Michael Lazell, Paul O'Brien, and David J. Otway

SOLUTION DEPOSITION OFELECTRONIC CERAMICS

*Wet-Chemical Synthesis of Thin-Film Solar Cells 155R.P. Raffaelle, W. Junek, J. Gorse, T. Thompson, J.D. Harris,J. Cowen, D. Hehemann, G. Rybicki, and A.F. Hepp

Synthesis of High-K Titanium Oxide Thin Films Formed byMetalorganic Decomposition 163

Hisashi Fukuda, Yoshihiro Ishikawa, Seiogo Namioka, andShigeru Nomura

Sol-Gel Synthesis of BaTiO3 Based Films for Photonic Applications 169V. Fuflyigin, H. Jiang, F. Wang, P. Yip, P. Vakhutinsky, andJ. Zhao

Ferroelectric Composite of Bai_xSrxTiO3 With A12O3 and MgOSynthesized by Sol-Gel Method 175

Pramod K. Sharma, K.A. Jose, V.V. Varadan, and V.K. Varadan

•Invited Paper






Epitaxial Growth of Sro.3Bao.7Nb2C>6 Thin Films Preparedby Sol-Gel Process 181

Keishi Nishio, Jirawat Thongrueng, Yuichi Watanabe,and Toshio Tsuchiya

Deposition of Crack-Free BaTiO3 and Pb(Zr,Ti)O3 Films Over 1 imThick Via Single-Step Dip-Coating 187

H. Kozuka, M. Kajimura, K. Katayama, Y. Isota, and T. Hirano

Near-Stoichiometric Barium Titanate Synthesis by Low TemperatureHydrothermal Reaction 193

Kyoungja Woo, Guang J. Choi, and Young S. Cho

New Approaches to Chemical Bath Deposition of Chalcogenides 199Paul O'Brien, Markus R. Heinrich, David J. Otway, Odile Robbe,Alexander Bayer, and David S. Boyle

Direct Fabrication of LiCo02 Film Electrodes Using SoftSolution-Processing in LiOH Solution at 20-200°C 205

S. W. Song, K.S. Han, M. Yoshimura, Y. Sato, and A. Tatsuhiro

Effect of Precursor Sol Aging on Sol-Gel Derived RutheniumOxide Thin Films 211

S. Bhaskar, S.B. Majumder, P.S. Dobal, R.S. Katiyar,A.L.M. Cruz, and E.R. Fachini

Pentadionate: An Alternate Sol-Gel Method for the Synthesisof Ferroelectric Bai.xSrxTiO3 217

Pramod K. Sharma, K.A. Jose, V.V. Varadan, and V.K. Varadan

Growth and Studies of Li (Mn, Co) Oxides for Battery Electrodes 223S. Nieto-Ramos, M.S. Tomar, and R.S. Katiyar

Fabrication of Crack-Free Lao.2Sro.8Co03_x Membranes onAsymmetric and Porous Ceramic Supports—Effects of aMetallic Covering 229

Z-D. Cao, L. Hong, and X. Chen






ALTERNATIVE CHEMICAL PROCESSINGMETHODS AND CHARACTERIZATION

OF ELECTRONIC CERAMICS

Chemical Synthesis of Pure and Doped LaGa(>3 Powders of OxideFuel Cells by Amorphous Citrate/EG Method 237

A.C. Tas, H. Schluckwerder, P. Majewski, and F. Aldinger

Silicon Cleaning Methods Compared at Metal Concentrations Below1E10 atoms/cm? 245

Joseph Ilardi, Rajananda Saraswati, and George Schwartzkopf

(3-acetoxyethyl Silsesquioxanes: Chloride-Free Precursors forSiO2 Films Via Staged Hydrolysis 251

Karin A. Ezbiansky, Barry Arkles, Russell J. Composto,and Donald H. Berry

High Density Plasma Etching of Ta2O5-Selectivity to Si andEffect of UV Light Enhancement 257

K.P. Lee, H. Cho, R.K. Singh, S.J. Pearton, C. Hobbs, andP. Tobin

Study on ZrO2 Deposited Directly on Si as an Alternative GateDielectric Material 263

Wen-Jie Qi, Renee Nieh, Byoung Hun Lee, Youngjoo Jeon,Laegu Kang, Katsunori Onishi, and Jack C. Lee

A Study on Hysteresis Effect of Barium Strontium TitanateThin Films for Alternative Gate Dielectric Application 269

Wen-Jie Qi, Keith Zawadzki, Renee Nieh, Yongjoo Jeon,Byoung Hun Lee, Aaron Lucas, Laegu Kang, Jian-Hung Leeand Jack C. Lee

A Study of the Oxygen Surface Exchange Coefficient onLao.5Sr0.5Co03_8 Thin Films 275

X. Chen, S. Wang, Y.L. Yang, L. Smith, N.J. Wu, A.J. Jacobson,and A. Ignatiev

Crystallographic Orientation in Bulk Polycrystalline SiliconCarbide Produced by a Chemical Vapor Deposition (CVD) Process 281

James V. Marzik and William J. Croft

Structure-Property Relations in Sol-Coated PMN Ceramics:Microscopy, Dielectric and Electromechanical Response 287

A. Sehirlioglu and S.M. Pilgrim






The Control of Zn for ZST Microwave Ceramics With Low SinteringTemperature 293

Yong H. Park, Moo Y. Shin, Ji M. Ryu, and Kyung H. Ko

Stereochemical Structure for Sodium in Native and ThermalSilica Layers 299

A-M. Flank, F. Tenegal, P. Lagarde, C. Mazzara, andJ. Jupille

Author Index 305

Subject Index 307






PREFACE

This volume contains papers from Symposium NN, "Chemical Processing of Dielectrics,Insulators and Electronic Ceramics," held November 29-December 1 at the 1999 MRS FallMeeting in Boston, Massachusetts. This symposium continues the theme of a previoussymposium (Mater. Res. Soc. Symp. Proc. 495 (1998)) on the creative use of chemistry in thefabrication of advanced electronic ceramics. The symposium focused on the chemicalfabrication of a variety of oxide and non-oxide materials which are likely to play a crucial rolein the development of the next generation of microelectronics devices.

The symposium consisted of eight oral and four poster sessions with a total of 68 papersbeing presented, 44 of which are included in this volume. These clearly demonstrate themultidisciplinary nature of the field, involving inorganic precursor chemistry, gas-phase andsolid state chemistry, materials science, chemical physics, and chemical engineering.

A number of particularly "hot" areas of research were featured in the symposium, includingthe deposition of high-k dielectric gate oxides, ferroelectric oxide films for infrared andmemory applications, low-k dielectrics, TiN and TaN diffusion barriers, and new precursors forIII-V nitrides.

The emphasis throughout is on chemical methods for the controlled deposition of thinfilms, for which chemical vapor deposition (CVD) has proven to be a useful and versatiletechnique. A particularly noteworthy development is the use of liquid injection MOCVD forthe deposition of oxide multilayers and superlattices. Despite the increasing use of CVD,solution deposition techniques such as sol-gel, metalorganic decomposition (MOD),hydrothermal processing, and chemical bath techniques were also prominently featured.

These proceedings overlap to some extent with a number of other symposia in the 1999MRS Fall Meeting, including "Ferroelectric Thin Films VIII," "GaN and Related Alloys," and"Structure and Properties of Ultrathin Dielectric Thin Films on Silicon and Related Materials."It is intended that the current volume complements and forms a valuable supplement to theserelated symposia.

It is the sincere hope of the symposium organizers that this volume will prove to be auseful overview of current research trends in a dynamic and exciting area of solid statetechnology.

Anthony C. JonesJanice VeteranDonald MullinReid CooperSanjeev Kaushal

January 2000






ACKNOWLEDGMENTS

The success of the symposium is due to the efforts of many people to whom we are verygrateful. We are grateful to all of the speakers, poster presenters, and authors whosecontributions are represented in these proceedings. We thank the MRS staff and the MeetingChairs whose patience and efforts made our tasks much easier. We are also very grateful to theorganizations who provided generous financial support.

Invited Speakers and Session Chairs

William S. Rees Jr., Georgia Tech, Atlanta, GeorgiaYoshihide Senzaki, Schumacher Inc., Carlsbad, CaliforniaS.A. Campbell, University of Minnesota, Minneapolis, MinnesotaJean-Pierre Senateur, LMGP, ENS de Physique de Grenoble, FranceM. Yoshimura, Tokyo Institute of Technology, JapanR.P. Raffaelle, Rochester Institute of Technology, New York, New YorkRoy Gordon, Harvard University, Boston, MassachusettsPaul O'Brien, University of Manchester, UKJanice Veteran, Advanced Micro Devices, Austin, TexasAnthony C. Jones, Inorgtech Ltd. and Liverpool University, UK

Financial Support

MKS InstrumentsStrem Chemicals Inc.






MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS

Volume 557— Amorphous and Heterogeneous Silicon Thin Films: Fundamentals toDevices—1999, H.M. Branz, R.W. Collins, H. Okamoto, S. Guha, R. Schropp,1999, ISBN: 1-55899-464-5

Volume 558— Flat-Panel Displays and Sensors—Principles, Materials and Processes, F.R. Libsch,B. Chalamala, R. Friend, T. Jackson, H. Ohshima, 2000, ISBN: 1-55899-465-3

Volume 559— Liquid Crystal Materials and Devices, T.J. Bunning, S.H. Chen, L.C. Chien,T. Kajiyama, N. Koide, S-C.A. Lien, 1999, ISBM: 1-55899-466-1

Volume 560— Luminescent Materials, J. McKittrick, B. DiBartolo, K. Mishra, 1999,ISBN: 1-55899-467-X

Volume 561— Organic Nonlinear Optical Materials and Devices, B. Kippelen, H.S. Lackritz,R.O. Claus, 1999, ISBN: 1-55899-468-8

Volume 562— Polycrystalline Metal and Magnetic Thin Films, D.E. Laughlin, K.P. Rodbell,O. Thomas, B. Zhang, 1999, ISBN: 1-55899-469-6

Volume 563— Materials Reliability in Microelectronics IX, C.A. Volkert, A.H. Verbruggen,D.D. Brown, 1999, ISBN: 1-55899-470-X

Volume 564— Advanced Interconnects and Contacts, D.C. Edelstein, T. Kikkawa, M.C. Ozturk,K-N. Tu, E.J. Weitzman, 1999, ISBN: 1-55899-471-8

Volume 565— Low-Dielectric Constant Materials V, J. Hummel, K. Endo, W.W. Lee, M. Mills,S-Q. Wang, 1999, ISBN: 1-55899-472-6

Volume 566— Chemical-Mechanical Polishing—Fundamentals and Challenges, S.V. Babu,S. Danyluk, M. Krishnan, M. Tsujimura, 2000, ISBN: 1-55899-473-4

Volume 567— Ultrathin SiO2 and High-K Materials for ULSI Gate Dielectrics, H.R. Huff,C.A. Richter, M.L. Green, G. Lucovsky, T. Hattori, 1999, ISBN: 1-55899-474-2

Volume 568— Si Front-End Processing—Physics and Technology of Dopant-Defect Interactions,H-J.L. Gossmann, T.E. Haynes, M.E. Law, A.N. Larsen, S. Odanaka, 1999,ISBN: 1-55899-475-0

Volume 569— In Situ Process Diagnostics and Modelling, O. Auciello, A.R. Krauss, E.A. Irene,J.A. Schultz, 1999, ISBN: 1-55899-476-9

Volume 570— Epitaxial Growth, A-L. Barabasi, M. Krishnamurthy, F. Liu, T.P. Pearsall, 1999,ISBN: 1-55899-477-7

Volume 571— Semiconductor Quantum Dots, S.C. Moss, D. Ila, H.W.H. Lee, D.J. Norris, 2000,ISBN: 1-55899-478-5

Volume 572— Wide-Bandgap Semiconductors for High-Power, High-Frequency andHigh-Temperature Applications—1999, S.C. Binari, A.A. Burk, M.R. Melloch,C. Nguyen, 1999, ISBN: 1-55899-479-3

Volume 573— Compound Semiconductor Surface Passivation and Novel Device Processing,H. Hasegawa, M. Hong, Z.H. Lu, S.J. Pearton, 1999, ISBN: 1-55899-480-7

Volume 574— Multicomponent Oxide Films for Electronics, M.E. Hawley, D.H.A. Blank, C-B. Eom,D.G. Schlom, S.K. Streiffer, 1999, ISBN: 1-55899-481-5

Volume 575— New Materials for Batteries and Fuel Cells, D.H. Doughty, L.F. Nazar, M. Arakawa,H-P. Brack, K. Naoi, 2000, ISBN: 1-55899-482-3

Volume 576— Organic/Inorganic Hybrid Materials II, L.C. Klein, L.F. Francis, M.R. DeGuire,J.E. Mark, 1999, ISBN: 1-55899-483-1

Volume 577— Advanced Hard and Soft Magnetic Materials, M. Coey, L.H. Lewis, B-M. Ma,T. Schrefl, L. Schultz, J. Fidler, V.G. Harris, R. Hasegawa, A. Inoue, M.E. McHenry,1999, ISBN: 1-55899-485-8

Volume 578— Multiscale Phenomena in Materials—Experiments and Modeling, D.H. Lassila,I.M. Robertson, R. Phillips, B. Devincre, 2000, ISBN: 1-55899-486-6

Volume 579— The Optical Properties of Materials, J.R. Chelikowsky, S.G. Louie, G. Martinez,E.L. Shirley, 2000, ISBN: 1-55899-487-4

Volume 580— Nucleation and Growth Processes in Materials, A. Gonis, P.E.A. Turchi, A.J. Ardell,2000, ISBN: 1-55899-488-2

Volume 581— Nanophase and Nanocomposite Materials III, S. Komarneni, J.C. Parker, H. Hahn,2000, ISBN: 1-55899-489-0

Volume 582— Molecular Electronics, S.T. Pantelides, M.A. Reed, J. Murday, A. Aviram, 2000,ISBN: 1-55899-490-4






MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS

Volume 583— Self-Organized Processes in Semiconductor Alloys, A. Mascarenhas, B. Joyce,T. Suzuki, D. Follstaedt, 2000, ISBN: 1-55899-491-2

Volume 584— Materials Issues and Modeling for Device Nanofabrication, L. Merhari, L.T. Wille,K. Qonsalves, M.F. Qyure, S. Matsui, L.J. Whitman, 2000, ISBN: 1-55899-492-0

Volume 585— Fundamental Mechanisms of Low-Energy-Beam-Modified Surface Growth andProcessing, S. Moss, E.H. Chason, B.H. Cooper, T. Diaz de la Rubia, J.M.E. Harper,R. Murti, 2000, ISBN: 1-55899-493-9

Volume 586— Interfacial Engineering for Optimized Properties II, C.B. Carter, E.L. Hall,C.L. Briant, S. Nutt, 2000, ISBN: 1-55899-494-7

Volume 587— Substrate Engineering—Paving the Way to Epitaxy, D.P. Norton, D.Q. Schlom,N. Newman, D.H. Matthiesen, 2000, ISBN: 1-55899-495-5

Volume 588— Optical Microstructural Characterization of Semiconductors, J. Piqueras,T. Sekiguchi, M.S. Unlu, N.M. Kalkhoran, 2000, ISBN: 1-55899-496-3

Volume 589— Advances in Materials Problem Solving with the Electron Microscope, J. Bentley,U. Dahmen, C. Allen, I. Petrov, 2000, ISBN: 1-55899-497-1

Volume 590— Applications of Synchrotron Radiation Techniques to Materials Science V,S.R. Stock, D.L. Perry, S.M. Mini, 2000, ISBN: 1-55899-498-X

Volume 591— Nondestructive Methods for Materials Characterization, T. Matikas, N. Meyendorf,Q. Baaklini, R. Gilmore, 2000, ISBN: 1-55899-499-8

Volume 592— Structure and Electronic Properties of Ultrathin Dielectric Films on Silicon andRelated Structures, H.J. von Bardeleben, D.A. Buchanan, A.H. Edwards, T. Hattori,2000, ISBN: 1-55899-500-5

Volume 593— Amorphous and Nanostructured Carbon, J. Robertson, J.P. Sullivan, O. Zhou,T.B. Allen, B.F. Coll, 2000, ISBN: 1-55899-501-3

Volume 594— Thin Films—Stresses and Mechanical Properties VIII, R. Vinci, O. Kraft, N. Moody,P. Besser, E. Shaffer II, 2000, ISBN: 1-55899-502-1

Volume 595— GaN and Related Alloys—1999, R. Feenstra, T. Myers, M.S. Shur, H. Amano, 2000,ISBN: 1-55899-503-X

Volume 596— Ferroelectric Thin Films VIII, R.W. Schwartz, S.R. Summerfelt, P.C. Mclntyre,Y. Miyasaka, D. Wouters, 2000, ISBN: 1-55899-504-8

Volume 597— Thin Films for Optical Waveguide Devices and Materials for Optical Limiting,K. Nashimoto, B.W. Wessels, J. Shmulovich, A.K-Y. Jen, K. Lewis, R. Pachter,R. Sutherland, J. Perry, 2000, ISBN: 1-55899-505-6

Volume 598— Electrical, Optical, and Magnetic Properties of Organic Solid-StateMaterials V, S.P. Ermer, J.R Reynolds, J.W. Perry, A.K-Y. Jen, Z. Bao, 2000,ISBN: 1-55899-506-4

Volume 599— Mineralization in Natural and Synthetic Biomaterials, P. Li, P. Calvert, R.J. Levy,T. Kokubo, C.R. Scheid, 2000, ISBN: 1-55899-507-2

Volume 600— Electroactive Polymers, Q.M. Zhang, T. Furukawa, Y. Bar-Cohen, J. Scheinbeim,2000, ISBN: 1-55899-508-0

Volume 601— Superplasticity—Current Status and Future Potential, P.B. Berbon, M.Z. Berbon,T. Sakuma, T.G. Langdon, 2000, ISBN: 1-55899-509-9

Volume 602— Magnetoresistive Oxides and Related Materials, M. Rzchowski, M. Kawasaki,A.J. Millis, M. Rajeswari, S. von Molnar, 2000, ISBN: 1-55899-510-2

Volume 603— Materials Issues for Tunable RF and Microwave Devices, Q. Jia, F.A. Miranda,D.E. Oates, X. Xi, 2000, ISBN: 1-55899-511-0

Volume 604— Materials for Smart Systems HI, M. Wun-Fogle, K. Uchino, Y. Ito, R. Gotthardt,2000, ISBN: 1-55899-512-9

Volume 605— Materials Science of Microelectromechanical Systems (MEMS) Devices II,M.P. deBoer, A.H. Heuer, S.J. Jacobs, E. Peeters, 2000, ISBN: 1-55899-513-7

Volume 606— Chemical Processing of Dielectrics, Insulators and Electronic Ceramics, A.C. Jones,J. Veteran, S. Kaushal, D. Mullin, R. Cooper, 2000, ISBN: 1-55899-514-5

Volume 607— Infrared Applications of Semiconductors HI, B.J.H. Stadler, M.O. Manasreh,I. Ferguson, Y-H. Zhang, 2000, ISBN: 1-55899-515-3

Volume 608— Scientific Basis for Nuclear Waste Management XXIII, RW. Smith, D.W. Shoesmith,2000, ISBN: 1-55899-516-1

Prior Materials Research Society Symposium Proceedings available by contacting Materials Research Society






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