adixen's Maglev Turbomolecular PumpsATH M Series

RANGE FROM 500 TO 3200 l/s MAGNETICALLYLEVITATED TURBOMOLECULAR PUMPS

MAINTENANCE-FREEBEARINGS,HIGH-PERFORMANCETURBO MOLECULARPUMPS-----------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------

• Automatic balancing systm for 5-axismagnetic bearing control

• Built-in 75°C heating system forcorrosive applications

• Pump protection with inert gaspurge system

• Maintenance free magneticallylevitated bearings

HIGH THROUGHPUTAPPLICATIONS-----------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------

• ATH and ATP maglev series aredesigned for high pressure and highthroughput pumping applications

• Optimized for Semicondcutorindustry for harsh processes

• High flow capacity for largesubstrate industry such as flat paneldisplay and photovoltaic panelmanufacturing industry

COMPACTAND PERFORMANT-----------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------

• On board controler and rackcontroler for all installation needs

• Adjustable rotational speed foroptimizing pumping parameters

• Very high MTBF

• Low cost of ownership

• Low noise and vibration levelsbattery free

ATH 500 M / ATH 1600 M / ATH 2300 M / ATH 2800 M / ATH 3200 M

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Technical data (measured specifications per PNEUROP standards)

adixen's Maglev Turbomolecular PumpATH M Series

Applications

• Semiconductor industry:- Harsh processes :metal / poly / oxide etch

- CVD / PVD- Ion implantation- Lithography

• Other Si industries- Photovoltaic industry- Flat panel display- Micro Machining system

ATH 500 M withHand Held Remote controller

Pump mounted controller OBC v4with ATH 2303 M

Characteristics Units

Rotational Speed

Inlet Flange

Pumping Speed with inlet screen

Compression ratio

Ultimate Pressure

Maximum continuous inlet pressure N2*

Maximum continuous exhaust pressure N2**

Maximum throughput N2 (M: cold, MT: 65°C)*

Maximum heating temperature

Vibration level (displacement)

Recommended cooling water flow rate

Mounting orientation

Start up time (maximum)

Pump weight

Rack Controller type

Controller power supply

Rack Controller weight

Start up (nominal) Power

Pump mounted controller (OBC) option

rpm

N2 l/s

He l/s

H2 l/s

N2

He

H2

mbar

mbar

mbar

sccm

°C

µm

l/hour

mn

kg/lbs

kg/lbs

Watt

50000 39000 31000 25000

DN100 / DN160 DN160 DN200 / DN250 DN200 / DN250 DN200 / DN250 DN250 DN320

300 / 500 500 1230 / 1270 1200 / 1220 1250 / 1850 2050 2600

270 / 340 340 960 / 960 960 / 960 1500 / 1600 2150 2400

170 / 190 190 580 / 580 550 / 550 1200 / 1200 1750 1800

2 x 107 6 x 107 > 1 x 108 > 1 x 108

1 x 104 8 x 103 > 3 x 104 > 3 x 104

2 x 102 3 x 102 > 1 x 103 > 2 x 103 > 2 x 103

< 1 x 10-8 < 6 x 10-9 < 6 x 10-9 < 6 x 10-9

1.0 / 1.2 0.02 0.6 0.01 0.3 0.01 0.26 0.01 0.26 0.01

1.7 / 1.8 1.7 2 1.8 2.5 2.8 1.8 1.8

3000 500 4000 1000 4000 1000 5000 1000 5000 1000

n/a 65 n/a 75 n/a 75 n/a 75 n/a 75

0.01

60 (15 to 40 ºC)

Any

< 2.5 6 8 10

17 (37) 18 (39) 34 (76) 60 (132) 85 (187)

n/a Magpower ACT 1300 M Magpower

48 VDC 200-240V 100-240V 200-240V - 50/60Hz - Single Phase

N/A 8.7 (19) 8 (18) 8.7 (19)

560 (100) 650 (300) 1000 (350) 1000 (400)

Integrated yes yes no

ATH 500 M ATH 500 MT ATH 1603 M ATH 1600 MT ATH 2303 M ATH 2300 MT ATH 2800 M ATH 2800 MT ATH 3200 M ATH 3200 MT

* Depends on external conditions of water temperature, water flow, environment temperature** Exhaust pressure limit without flow speed loss. Depends on certain external conditions.

• Coating industry- Glass coating- Thin film depositions- Hard disk manufacture

• Instrumentation

• Research and development